EP1205667A2 - Gas friction pump - Google Patents

Gas friction pump Download PDF

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Publication number
EP1205667A2
EP1205667A2 EP01124630A EP01124630A EP1205667A2 EP 1205667 A2 EP1205667 A2 EP 1205667A2 EP 01124630 A EP01124630 A EP 01124630A EP 01124630 A EP01124630 A EP 01124630A EP 1205667 A2 EP1205667 A2 EP 1205667A2
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EP
European Patent Office
Prior art keywords
gas
rotor
pump
components
gas friction
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01124630A
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German (de)
French (fr)
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EP1205667B1 (en
EP1205667A3 (en
Inventor
Armin Conrad
Heinrich Lotz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Publication of EP1205667A2 publication Critical patent/EP1205667A2/en
Publication of EP1205667A3 publication Critical patent/EP1205667A3/en
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Publication of EP1205667B1 publication Critical patent/EP1205667B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a gas friction pump according to the preamble of the first claim.
  • Gas friction pumps of various types are known for the conveyance of gases. Their mode of operation is based on the transmission of impulses from moving Walls on the gas particles. In this way a gas flow is made into the desired one Direction generated.
  • Gas friction pumps operating in a pressure range work in which the mean free path of the gas molecules is large compared to the geometric dimensions of the pump, i.e. in the molecular flow area, are called molecular pumps.
  • the first gas friction pump of this type was presented by Gaede [1], others technical modifications while maintaining the basic principle are constructions by Siegbahn [2], Holweck [3] and Becker [4].
  • the latter is a turbomolecular pump known and has become involved in wide areas of technology and science proven great success. It is therefore used to describe the present invention used as an example.
  • the pumping speed of a turbomolecular pump is essentially dependent on Inlet cross-section of the intake flange, from the average peripheral speed of the rotor blade ring facing the space to be pumped out and its geometric structure, moreover from the internal structure of the pump, through the gradation of pressure ratio and pumping speed between the one individual stages is determined, and not least by that part of the pump or the pump combination, which emits against atmospheric pressure.
  • These conditions can be optimally designed and the speed can be The scope of technical possibilities will be increased so much that the majority of the molecules which are based on the above-mentioned Hit the rotor blade ring and be pumped out can. Not all molecules are recorded that refer to the input cross section of the intake flange.
  • Rotor face which has no gas-promoting structure, formed. Even if the rotor blade ring is further enlarged at the expense of the rotor face, remains the pumping speed is limited by the cross-section of the intake flange. It can no more molecules are pumped out than on the gas producing structure of the Meet entrance level. But a large part of these also bounce off the surface and is therefore not covered by the funding mechanism.
  • the invention has for its object to present a gas friction pump, which compared to conventional constructions with the same cross-section of the intake flange has a significantly higher pumping speed.
  • an additional pump unit is made one or more levels, designed so that most of the Molecules that bounce off the gas-producing structure on another area this structure is reflected and thus subjected to the funding mechanism again is.
  • This effect is due to the essentially concave design of the gas-producing Structure causes.
  • Such a design allows a radial promotion Direction. This allows reflected molecules to be captured again and further be promoted. This means a significant increase in pumping speed with the same intake cross section.
  • the design according to the invention has another great advantage.
  • the concave suction space offers space for components that come from the recipient can protrude into it and thus an extremely effective pumping effect are subject.
  • FIGS. 1-3 the invention is intended to take a turbomolecular pump as an example are explained in more detail. They each show the arrangement according to the invention in Pot-shaped, conical and dome-shaped shape.
  • Fig. 1 shows a gas friction pump with housing 1, which with an intake opening 2 and a gas outlet opening 3 is provided.
  • the rotor shaft 4 is in bearings 5 and 6 fixed and is driven by the motor 7.
  • On the rotor shaft 4 the rotor disks 12 of a turbomolecular pump are attached. These are with one provided gas-producing structure and effect with the stator disks 14, the are also provided with such a structure, the pump effect.
  • the rotor components 21 and the stator components 22 exist each of a cylindrical part 25, 26 and a disc-shaped bottom part 23, 24 and are provided with gas-producing structures.
  • FIG. 2 are a conical design of the additional pump unit 30 with rotor part 31 and stator part 32 and in Fig. 3 a dome-shaped design of the additional Pump unit 40 with rotor part 41 and stator part 42 shown.
  • Molecules e.g. B. coming from A, are partly from the gas-producing structure of the Rotor components recorded and further promoted and partly reflected at B. A large At C, some of the reflected molecules meet a gas-producing structure and can therefore be pumped on or reflected again. As a result a substantial proportion of the molecules that are reflected by the surface, fed back to the conveyor mechanism.
  • suction space 16 created by the concave construction can be used for evacuation and / or degassing components are dipped from the recipient. They are here largely surrounded by pump-active structures and are therefore subject to one extremely effective pumping process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Rotary Pumps (AREA)

Abstract

The gas friction pump comprises a housing (1) with a suction aperture (2) and a gas outlet aperture (3), with rotor (12) and stator (14) components in the housing for feed of gases and the production of a pressure state. On the side of the suction aperture within the housing, a sngle or multi-stage concave pump unit (20) is fitted, which has a gas-conveying structure. The gas-conveying structure is so formed that a gas delivery occurs in a radial direction. The rotor parts (21) of this pump unit and those (12) of the gas friction pump are located on the same rotor shaft (4).

Description

Die Erfindung betrifft eine Gasreibungspumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a gas friction pump according to the preamble of the first claim.

Zur Förderung von Gasen sind Gasreibungspumpen der verschiedensten Bauart bekannt. Ihre Arbeitsweise beruht auf der Übertragung von Impulsen von bewegten Wänden auf die Gasteilchen. Auf diese Weise wird eine Gasströmung in die gewünschte Richtung erzeugt. Gasreibungspumpen, welche in einem Druckbereich arbeiten, in dem die mittlere freie Weglänge der Gasmoleküle groß ist gegenüber den geometrischen Abmessungen der Pumpe, also im molekularen Strömungsgebiet, werden Molekularpumpen genannt.Gas friction pumps of various types are known for the conveyance of gases. Their mode of operation is based on the transmission of impulses from moving Walls on the gas particles. In this way a gas flow is made into the desired one Direction generated. Gas friction pumps operating in a pressure range work in which the mean free path of the gas molecules is large compared to the geometric dimensions of the pump, i.e. in the molecular flow area, are called molecular pumps.

Die erste Gasreibungspumpe dieser Art wurde von Gaede [1] vorgestellt, weitere technische Abwandlungen unter Beibehaltung des Grundprinzips sind Konstruktionen von Siegbahn [2], Holweck [3] und Becker [4]. Letztere ist als Turbomolekularpumpe bekannt und hat sich in weiten Bereichen der Technik und Wissenschaft mit großem Erfolg bewährt. Sie wird daher für die Beschreibung der vorliegenden Erfindung als Beispiel herangezogen.The first gas friction pump of this type was presented by Gaede [1], others technical modifications while maintaining the basic principle are constructions by Siegbahn [2], Holweck [3] and Becker [4]. The latter is a turbomolecular pump known and has become involved in wide areas of technology and science proven great success. It is therefore used to describe the present invention used as an example.

Die im Folgenden beschriebenen Nachteile der bisher bekannten Pumpen und die Beseitigung der Nachteile im Rahmen der Erfindung treffen genau so gut für andere Gasreibungspumpen zu.The disadvantages of the previously known pumps and the disadvantages described below Eliminating the drawbacks within the scope of the invention is just as good for others Gas friction pumps too.

Das Saugvermögen einer Turbomolekularpumpe ist im wesentlichen abhängig vom Eingangsquerschnitt des Ansaugflansches, von der mittleren Umfangsgeschwindigkeit des dem auszupumpenden Raum zugewandten Rotorschaufelkranzes und dessen geometrischer Struktur, darüber hinaus von der inneren Struktur der Pumpe, durch die die Abstufung von Druckverhältnis und Saugvermögen zwischen den ein zelnen Stufen bestimmt wird, und nicht zuletzt auch von demjenigen Teil der Pumpe oder der Pumpenkombination, welcher gegen Atmosphärendruck ausstößt. Diese Verhältnisse können so optimal gestaltet werden und die Drehzahl kann im Rahmen der technischen Möglichkeiten so weit erhöht werden, dass der größte Teil der Moleküle, welche auf den o. g. Rotorschaufelkranz treffen, abgepumpt werden können. Hierbei werden nicht alle Moleküle erfasst, welche auf den Eingangsquerschnitt des Ansaugflansches treffen. Ein großer Bereich dieser Fläche wird durch die Rotorstirnfläche, welche keine gasfördernde Struktur aufweist, gebildet. Selbst wenn der Rotorschaufelkranz auf Kosten der Rotorstirnfläche weiter vergrößert wird, bleibt das Saugvermögen durch den Querschnitt des Ansaugflansches begrenzt. Es können nicht mehr Moleküle abgepumpt werden als auf die gasfördernde Struktur der Eingangsstufe treffen. Aber auch von diesen prallt ein großer Teil an der Oberfläche ab und wird somit von dem Fördermechanismus nicht erfasst.The pumping speed of a turbomolecular pump is essentially dependent on Inlet cross-section of the intake flange, from the average peripheral speed of the rotor blade ring facing the space to be pumped out and its geometric structure, moreover from the internal structure of the pump, through the gradation of pressure ratio and pumping speed between the one individual stages is determined, and not least by that part of the pump or the pump combination, which emits against atmospheric pressure. These conditions can be optimally designed and the speed can be The scope of technical possibilities will be increased so much that the majority of the molecules which are based on the above-mentioned Hit the rotor blade ring and be pumped out can. Not all molecules are recorded that refer to the input cross section of the intake flange. A large area of this area is covered by the Rotor face, which has no gas-promoting structure, formed. Even if the rotor blade ring is further enlarged at the expense of the rotor face, remains the pumping speed is limited by the cross-section of the intake flange. It can no more molecules are pumped out than on the gas producing structure of the Meet entrance level. But a large part of these also bounce off the surface and is therefore not covered by the funding mechanism.

Der Erfindung liegt die Aufgabe zugrunde, eine Gasreibungspumpe vorzustellen, welche gegenüber den herkömmlichen Konstruktionen bei gleichbleibendem Querschnitt des Ansaugflansches ein deutlich höheres Saugvermögen aufweist.The invention has for its object to present a gas friction pump, which compared to conventional constructions with the same cross-section of the intake flange has a significantly higher pumping speed.

Die Aufgabe wird durch die kennzeichnenden Merkmale des ersten Patentanspruches gelöst. Die Ansprüche 2 - 5 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is achieved by the characterizing features of the first claim solved. Claims 2-5 represent further embodiments of the invention represents.

Bei der erfindungsgemäßen Anordnung ist eine zusätzliche Pumpeinheit, die aus einer oder mehreren Stufen bestehen kann, so gestaltet, dass der größte Teil der Moleküle, welche an der gasfördernden Struktur abprallen, auf einen anderen Bereich dieser Struktur reflektiert wird und so dem Fördermechanismus wieder unterworfen ist. Dieser Effekt wird durch die im wesentlichen konkave Bauweise der gasfördernden Struktur bewirkt. Eine solche Bauweise ermöglicht eine Förderung in radialer Richtung. Dadurch können reflektierte Moleküle wieder eingefangen und weiter gefördert werden. Dies bedeutet eine beträchtliche Erhöhung des Saugvermögens bei gleichem Ansaugquerschnitt. In the arrangement according to the invention, an additional pump unit is made one or more levels, designed so that most of the Molecules that bounce off the gas-producing structure on another area this structure is reflected and thus subjected to the funding mechanism again is. This effect is due to the essentially concave design of the gas-producing Structure causes. Such a design allows a radial promotion Direction. This allows reflected molecules to be captured again and further be promoted. This means a significant increase in pumping speed with the same intake cross section.

Die erfindungsgemäße Bauweise bringt einen weiteren großen Vorteil mit sich. Der konkav ausgebildete Ansaugraum bietet Platz für Bauteile, welche aus dem Rezipienten dort hinein ragen können und somit einem äußerst effektiven Pumpeffekt unterworfen sind.The design according to the invention has another great advantage. The concave suction space offers space for components that come from the recipient can protrude into it and thus an extremely effective pumping effect are subject.

Anhand der Figuren 1 - 3 soll die Erfindung am Beispiel einer Turbomolekularpumpe näher erläutert werden. Sie zeigen die erfindungsgemäße Anordnung jeweils in topfförmiger, kegelförmiger und kalottenförmiger Gestalt.With the aid of FIGS. 1-3, the invention is intended to take a turbomolecular pump as an example are explained in more detail. They each show the arrangement according to the invention in Pot-shaped, conical and dome-shaped shape.

Die Fig. 1 zeigt eine Gasreibungspumpe mit Gehäuse 1, welches mit einer Ansaugöffnung 2 und einer Gasaustrittsöffnung 3 versehen ist. Die Rotorwelle 4 ist in Lagerungen 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle 4 sind die Rotorscheiben 12 einer Turbomolekularpumpe befestigt. Diese sind mit einer gasfördernden Struktur versehen und bewirken mit den Statorscheiben 14, die ebenfalls mit einer solchen Struktur versehen sind, den Pumpeffekt.Fig. 1 shows a gas friction pump with housing 1, which with an intake opening 2 and a gas outlet opening 3 is provided. The rotor shaft 4 is in bearings 5 and 6 fixed and is driven by the motor 7. On the rotor shaft 4 the rotor disks 12 of a turbomolecular pump are attached. These are with one provided gas-producing structure and effect with the stator disks 14, the are also provided with such a structure, the pump effect.

Auf der Seite der Ansaugöffnung 2 ist erfindungsgemäß eine zusätzliche Pumpeinheit 20 angebracht. Diese ist im vorliegenden Beispiel einstufig ausgeführt und weist eine topfförmige Gestalt auf. Die Rotorbauteile 21 und die Statorbauteile 22 bestehen jeweils aus einem zylindrischen Teil 25, 26 und aus einem scheibenförmigen Bodenteil 23, 24 und sind mit gasfördernden Strukturen versehen.According to the invention, there is an additional pump unit on the side of the suction opening 2 20 attached. In the present example, this is carried out in one step and points a pot-shaped shape. The rotor components 21 and the stator components 22 exist each of a cylindrical part 25, 26 and a disc-shaped bottom part 23, 24 and are provided with gas-producing structures.

Entsprechend sind in Fig. 2 eine kegelförmige Bauart der zusätzlichen Pumpeinheit 30 mit Rotorteil 31 und Statorteil 32 und in Fig. 3 eine kalottenförmige Bauart der zusätzlichen Pumpeinheit 40 mit Rotorteil 41 und Statorteil 42 dargestellt.2 are a conical design of the additional pump unit 30 with rotor part 31 and stator part 32 and in Fig. 3 a dome-shaped design of the additional Pump unit 40 with rotor part 41 and stator part 42 shown.

Moleküle, z. B. von A kommend, werden zum Teil von der gasfördernden Struktur der Rotorbauteile erfasst und weiter gefördert und zum Teil bei B reflektiert. Ein großer Teil der reflektierten Moleküle trifft wiederum bei C auf eine gasfördernde Struktur und kann somit weiter gepumpt oder auch wieder reflektiert werden. Als Resultat wird ein wesentlicher Anteil der Moleküle, welche von der Oberfläche reflektiert werden, dem Fördermechanismus wieder zugeführt. Molecules, e.g. B. coming from A, are partly from the gas-producing structure of the Rotor components recorded and further promoted and partly reflected at B. A large At C, some of the reflected molecules meet a gas-producing structure and can therefore be pumped on or reflected again. As a result a substantial proportion of the molecules that are reflected by the surface, fed back to the conveyor mechanism.

In den durch die konkave Bauweise entstehenden Ansaugraum 16 können zum Evakuieren und/oder Entgasen Bauteile aus dem Rezipienten getaucht werden. Sie sind hier weitgehend von pumpaktiven Strukturen umgeben und unterliegen somit einem äußerst effektiven Pumpprozess.In the suction space 16 created by the concave construction can be used for evacuation and / or degassing components are dipped from the recipient. they are here largely surrounded by pump-active structures and are therefore subject to one extremely effective pumping process.

Literatur

  • [1] W. Gaede, Ann. Phys. 41 (1913) 337 ff.
  • [2] M. Siegbahn, Arch. Math. Astr. Fys. 30 B (1943)
  • [3] F. Holweck, Comptes redus Acad. Science 177 (1923) 43 ff.
  • [4] W. Becker, Vakuum Technik 9/10 (1966)
    • literature
  • [1] W. Gaede, Ann. Phys. 41 (1913) 337 ff.
  • [2] M. Siegbahn, Arch. Math. Astr. Fys. 30 B (1943)
  • [3] F. Holweck, Comptes redus Acad. Science 177 (1923) 43 ff.
  • [4] W. Becker, vacuum technology 9/10 (1966)

    • Claims (5)

    Gasreibungspumpe, bestehend aus einem Gehäuse (1) mit Ansaugöffnung (2) und Gasaustrittsöffnung (3), wobei sich in dem Gehäuse Rotor- (12) und Statorbauteile (14) zur Förderung von Gasen und zur Erzeugung eines Druckverhältnisses befinden, dadurch gekennzeichnet, dass auf der Seite der Ansaugöffnung (2) innerhalb des Gehäuses (1) eine ein- oder mehrstufige, konkav ausgebildete Pumpeinheit (20, 30, 40) angebracht ist, welche eine gasfördernde Struktur aufweist, die derart gestaltet ist, dass eine Gasförderung in radialer Richtung stattfindet und dass die Rotorbauteile (21, 31, 41) dieser Pumpeinheit und die Rotorbauteile (12) der übrigen Gasreibungspumpe sich auf derselben Rotorwelle (4) befinden.Gas friction pump, consisting of a housing (1) with suction opening (2) and gas outlet opening (3), the housing containing rotor (12) and stator components (14) for conveying gases and for generating a pressure ratio, characterized in that On the side of the suction opening (2) within the housing (1), a single-stage or multi-stage, concave pump unit (20, 30, 40) is attached, which has a gas-conveying structure that is designed in such a way that gas is conveyed in the radial direction takes place and that the rotor components (21, 31, 41) of this pump unit and the rotor components (12) of the rest of the gas friction pump are located on the same rotor shaft (4). Gasreibungspumpe nach Anspruch 1, dadurch gekennzeichnet, dass durch die Pumpeinheit (20, 30, 40) eine Gasförderung in axialer und in radialer Richtung stattfindet.Gas friction pump according to claim 1, characterized in that the pumping unit (20, 30, 40) delivers gas in the axial and radial directions. Gasreibungspumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Rotorbauteile (21) und die Statorbauteile (22) der Pumpeinheit (20) jeweils eine topfförmige Gestalt aufweisen.Gas friction pump according to claim 1 or 2, characterized in that the rotor components (21) and the stator components (22) of the pump unit (20) each have a cup-shaped shape. Gasreibungspumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Rotorbauteile (31) und die Statorbauteile (32) der Pumpeinheit (30) jeweils eine kegelförmige Gestalt aufweisen.Gas friction pump according to claim 1 or 2, characterized in that the rotor components (31) and the stator components (32) of the pump unit (30) each have a conical shape. Gasreibungspumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Rotorbauteile (41) und die Statorbauteile (42) der Pumpeinheit (40) eine kalottenförmige Gestalt aufweisen.Gas friction pump according to claim 1 or 2, characterized in that the rotor components (41) and the stator components (42) of the pump unit (40) have a spherical shape.
    EP01124630A 2000-11-13 2001-10-16 Gas friction pump Expired - Lifetime EP1205667B1 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE10056144 2000-11-13
    DE10056144A DE10056144A1 (en) 2000-11-13 2000-11-13 Gas friction pump

    Publications (3)

    Publication Number Publication Date
    EP1205667A2 true EP1205667A2 (en) 2002-05-15
    EP1205667A3 EP1205667A3 (en) 2002-11-20
    EP1205667B1 EP1205667B1 (en) 2009-01-14

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    EP01124630A Expired - Lifetime EP1205667B1 (en) 2000-11-13 2001-10-16 Gas friction pump

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    US (1) US6638010B2 (en)
    EP (1) EP1205667B1 (en)
    JP (1) JP4183409B2 (en)
    DE (2) DE10056144A1 (en)

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    US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
    JP7108377B2 (en) * 2017-02-08 2022-07-28 エドワーズ株式会社 Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods
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    PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07, 31. Juli 1997 (1997-07-31) & JP 09 088872 A (HITACHI LTD), 31. März 1997 (1997-03-31) *
    PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07, 31. Juli 1997 (1997-07-31) & JP 09 088875 A (DAIKIN IND LTD), 31. März 1997 (1997-03-31) *
    PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14, 31. Dezember 1998 (1998-12-31) & JP 10 246197 A (EBARA CORP), 14. September 1998 (1998-09-14) *
    PATENT ABSTRACTS OF JAPAN vol. 1999, no. 02, 26. Februar 1999 (1999-02-26) & JP 10 299688 A (MITSUBISHI HEAVY IND LTD;TOKYO ELECTRON LTD), 10. November 1998 (1998-11-10) *

    Cited By (1)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    EP1852613A3 (en) * 2006-05-04 2014-04-02 Pfeiffer Vacuum Gmbh Vacuum pump with casing

    Also Published As

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    DE50114655D1 (en) 2009-03-05
    JP2002180989A (en) 2002-06-26
    US6638010B2 (en) 2003-10-28
    EP1205667B1 (en) 2009-01-14
    JP4183409B2 (en) 2008-11-19
    US20020064451A1 (en) 2002-05-30
    DE10056144A1 (en) 2002-05-23
    EP1205667A3 (en) 2002-11-20

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