EP1205667A3 - Gas friction pump - Google Patents
Gas friction pump Download PDFInfo
- Publication number
- EP1205667A3 EP1205667A3 EP01124630A EP01124630A EP1205667A3 EP 1205667 A3 EP1205667 A3 EP 1205667A3 EP 01124630 A EP01124630 A EP 01124630A EP 01124630 A EP01124630 A EP 01124630A EP 1205667 A3 EP1205667 A3 EP 1205667A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas friction
- friction pump
- gas
- pump unit
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Rotary Pumps (AREA)
Abstract
Die Erfindung betrifft eine Gasreibungspumpe, welche auf der Seite der Ansaugöffnung (2) mit einer zusätzlichen Pumpeinheit (20) ausgerüstet ist. Diese Pumpeinheit befindet sich innerhalb des Gehäuses (1) und ist konkav ausgebildet. Sie ist derart gestaltet, dass eine Gasförderung auch in radialer Richtung stattfindet. Ein großer Teil der reflektierten Moleküle wird wieder eingefangen und somit dem Fördermechanismus wieder unterworfen. The invention relates to a gas friction pump which is equipped with an additional pump unit (20) on the side of the suction opening (2). This pump unit is located inside the housing (1) and is concave. It is designed in such a way that gas is also extracted in the radial direction. A large part of the reflected molecules is captured again and thus subjected to the delivery mechanism again.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10056144 | 2000-11-13 | ||
DE10056144A DE10056144A1 (en) | 2000-11-13 | 2000-11-13 | Gas friction pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1205667A2 EP1205667A2 (en) | 2002-05-15 |
EP1205667A3 true EP1205667A3 (en) | 2002-11-20 |
EP1205667B1 EP1205667B1 (en) | 2009-01-14 |
Family
ID=7663092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01124630A Expired - Lifetime EP1205667B1 (en) | 2000-11-13 | 2001-10-16 | Gas friction pump |
Country Status (4)
Country | Link |
---|---|
US (1) | US6638010B2 (en) |
EP (1) | EP1205667B1 (en) |
JP (1) | JP4183409B2 (en) |
DE (2) | DE10056144A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10142567A1 (en) * | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbo molecular pump |
GB0229355D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
KR100610012B1 (en) * | 2004-08-16 | 2006-08-09 | 삼성전자주식회사 | turbo pump |
US7927066B2 (en) * | 2005-03-02 | 2011-04-19 | Tokyo Electron Limited | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component |
DE102006020710A1 (en) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vacuum pump with housing |
US20100266426A1 (en) * | 2009-04-16 | 2010-10-21 | Marsbed Hablanian | Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps |
JP7108377B2 (en) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods |
DE102018119747B3 (en) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | TURBOMOLECULAR PUMP FOR MASS SPECTROMETERS |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993023672A1 (en) * | 1992-05-16 | 1993-11-25 | Leybold Aktiengesellschaft | Gas friction vacuum pump |
JPH0988875A (en) * | 1995-09-26 | 1997-03-31 | Daikin Ind Ltd | Turbo molecular pump |
JPH0988872A (en) * | 1995-09-18 | 1997-03-31 | Hitachi Ltd | Turbo vacuum pump |
JPH10246197A (en) * | 1997-03-05 | 1998-09-14 | Ebara Corp | Turbo-molecular pump |
JPH10299688A (en) * | 1997-04-22 | 1998-11-10 | Mitsubishi Heavy Ind Ltd | Turbo molecular drag pump |
EP1041287A2 (en) * | 1999-03-31 | 2000-10-04 | Seiko Seiki Kabushiki Kaisha | Vacuum pump |
EP1128069A2 (en) * | 2000-02-24 | 2001-08-29 | Pfeiffer Vacuum GmbH | Drag vacuum pump |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
GB8507010D0 (en) * | 1985-03-19 | 1985-04-24 | Framo Dev Ltd | Compressor unit |
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
FR2641582B1 (en) * | 1989-01-09 | 1991-03-22 | Cit Alcatel | GAEDE CHANNEL TYPE VACUUM PUMP |
JPH05195957A (en) * | 1992-01-23 | 1993-08-06 | Matsushita Electric Ind Co Ltd | Vacuum pump |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
JPH0886298A (en) * | 1994-09-19 | 1996-04-02 | Hitachi Ltd | Dry turbo vacuum pump |
JP3486000B2 (en) * | 1995-03-31 | 2004-01-13 | 日本原子力研究所 | Screw groove vacuum pump |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
-
2000
- 2000-11-13 DE DE10056144A patent/DE10056144A1/en not_active Withdrawn
-
2001
- 2001-10-16 EP EP01124630A patent/EP1205667B1/en not_active Expired - Lifetime
- 2001-10-16 DE DE50114655T patent/DE50114655D1/en not_active Expired - Lifetime
- 2001-10-23 JP JP2001324973A patent/JP4183409B2/en not_active Expired - Fee Related
- 2001-11-13 US US10/054,154 patent/US6638010B2/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993023672A1 (en) * | 1992-05-16 | 1993-11-25 | Leybold Aktiengesellschaft | Gas friction vacuum pump |
JPH0988872A (en) * | 1995-09-18 | 1997-03-31 | Hitachi Ltd | Turbo vacuum pump |
JPH0988875A (en) * | 1995-09-26 | 1997-03-31 | Daikin Ind Ltd | Turbo molecular pump |
JPH10246197A (en) * | 1997-03-05 | 1998-09-14 | Ebara Corp | Turbo-molecular pump |
JPH10299688A (en) * | 1997-04-22 | 1998-11-10 | Mitsubishi Heavy Ind Ltd | Turbo molecular drag pump |
EP1041287A2 (en) * | 1999-03-31 | 2000-10-04 | Seiko Seiki Kabushiki Kaisha | Vacuum pump |
EP1128069A2 (en) * | 2000-02-24 | 2001-08-29 | Pfeiffer Vacuum GmbH | Drag vacuum pump |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07 31 July 1997 (1997-07-31) * |
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14 31 December 1998 (1998-12-31) * |
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 02 26 February 1999 (1999-02-26) * |
Also Published As
Publication number | Publication date |
---|---|
DE50114655D1 (en) | 2009-03-05 |
JP2002180989A (en) | 2002-06-26 |
EP1205667A2 (en) | 2002-05-15 |
US6638010B2 (en) | 2003-10-28 |
EP1205667B1 (en) | 2009-01-14 |
JP4183409B2 (en) | 2008-11-19 |
US20020064451A1 (en) | 2002-05-30 |
DE10056144A1 (en) | 2002-05-23 |
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