EP1205667A3 - Gasreibungspumpe - Google Patents

Gasreibungspumpe Download PDF

Info

Publication number
EP1205667A3
EP1205667A3 EP01124630A EP01124630A EP1205667A3 EP 1205667 A3 EP1205667 A3 EP 1205667A3 EP 01124630 A EP01124630 A EP 01124630A EP 01124630 A EP01124630 A EP 01124630A EP 1205667 A3 EP1205667 A3 EP 1205667A3
Authority
EP
European Patent Office
Prior art keywords
gas friction
friction pump
gas
pump unit
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01124630A
Other languages
English (en)
French (fr)
Other versions
EP1205667A2 (de
EP1205667B1 (de
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1205667A2 publication Critical patent/EP1205667A2/de
Publication of EP1205667A3 publication Critical patent/EP1205667A3/de
Application granted granted Critical
Publication of EP1205667B1 publication Critical patent/EP1205667B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Rotary Pumps (AREA)

Abstract

Die Erfindung betrifft eine Gasreibungspumpe, welche auf der Seite der Ansaugöffnung (2) mit einer zusätzlichen Pumpeinheit (20) ausgerüstet ist. Diese Pumpeinheit befindet sich innerhalb des Gehäuses (1) und ist konkav ausgebildet. Sie ist derart gestaltet, dass eine Gasförderung auch in radialer Richtung stattfindet. Ein großer Teil der reflektierten Moleküle wird wieder eingefangen und somit dem Fördermechanismus wieder unterworfen.
EP01124630A 2000-11-13 2001-10-16 Gasreibungspumpe Expired - Lifetime EP1205667B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10056144A DE10056144A1 (de) 2000-11-13 2000-11-13 Gasreibungspumpe
DE10056144 2000-11-13

Publications (3)

Publication Number Publication Date
EP1205667A2 EP1205667A2 (de) 2002-05-15
EP1205667A3 true EP1205667A3 (de) 2002-11-20
EP1205667B1 EP1205667B1 (de) 2009-01-14

Family

ID=7663092

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01124630A Expired - Lifetime EP1205667B1 (de) 2000-11-13 2001-10-16 Gasreibungspumpe

Country Status (4)

Country Link
US (1) US6638010B2 (de)
EP (1) EP1205667B1 (de)
JP (1) JP4183409B2 (de)
DE (2) DE10056144A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023672A1 (de) * 1992-05-16 1993-11-25 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH0988875A (ja) * 1995-09-26 1997-03-31 Daikin Ind Ltd ターボ分子ポンプ
JPH0988872A (ja) * 1995-09-18 1997-03-31 Hitachi Ltd ターボ真空ポンプ
JPH10246197A (ja) * 1997-03-05 1998-09-14 Ebara Corp ターボ分子ポンプ
JPH10299688A (ja) * 1997-04-22 1998-11-10 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
EP1041287A2 (de) * 1999-03-31 2000-10-04 Seiko Seiki Kabushiki Kaisha Vakuumpumpe
EP1128069A2 (de) * 2000-02-24 2001-08-29 Pfeiffer Vacuum GmbH Gasreibungspumpe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023672A1 (de) * 1992-05-16 1993-11-25 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH0988872A (ja) * 1995-09-18 1997-03-31 Hitachi Ltd ターボ真空ポンプ
JPH0988875A (ja) * 1995-09-26 1997-03-31 Daikin Ind Ltd ターボ分子ポンプ
JPH10246197A (ja) * 1997-03-05 1998-09-14 Ebara Corp ターボ分子ポンプ
JPH10299688A (ja) * 1997-04-22 1998-11-10 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
EP1041287A2 (de) * 1999-03-31 2000-10-04 Seiko Seiki Kabushiki Kaisha Vakuumpumpe
EP1128069A2 (de) * 2000-02-24 2001-08-29 Pfeiffer Vacuum GmbH Gasreibungspumpe

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07 31 July 1997 (1997-07-31) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14 31 December 1998 (1998-12-31) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 02 26 February 1999 (1999-02-26) *

Also Published As

Publication number Publication date
DE50114655D1 (de) 2009-03-05
DE10056144A1 (de) 2002-05-23
JP4183409B2 (ja) 2008-11-19
EP1205667A2 (de) 2002-05-15
EP1205667B1 (de) 2009-01-14
US6638010B2 (en) 2003-10-28
US20020064451A1 (en) 2002-05-30
JP2002180989A (ja) 2002-06-26

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