EP1128069A3 - Gasreibungspumpe - Google Patents

Gasreibungspumpe Download PDF

Info

Publication number
EP1128069A3
EP1128069A3 EP01102552A EP01102552A EP1128069A3 EP 1128069 A3 EP1128069 A3 EP 1128069A3 EP 01102552 A EP01102552 A EP 01102552A EP 01102552 A EP01102552 A EP 01102552A EP 1128069 A3 EP1128069 A3 EP 1128069A3
Authority
EP
European Patent Office
Prior art keywords
gas
pump
gas friction
friction pump
rotor components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01102552A
Other languages
English (en)
French (fr)
Other versions
EP1128069B1 (de
EP1128069A2 (de
Inventor
Armin Conrad
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1128069A2 publication Critical patent/EP1128069A2/de
Publication of EP1128069A3 publication Critical patent/EP1128069A3/de
Application granted granted Critical
Publication of EP1128069B1 publication Critical patent/EP1128069B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Gasreibungspumpe, welche auf der Seite der Ansaugöffnung (2) mit einer zusätzlichen Pumpstufe (20) ausgerüstet ist. Diese Pumpstufe weist eine gasfördernde Struktur auf, die derart gestaltet ist, dass eine Gasförderung in radialer Richtung stattfindet. Auch eine Gasförderung in axialer und in radialer Richtung ist möglich. Die Rotorbauteile (21) dieser Pumpeinheit und die Rotorbauteile (12) der übrigen Gasreibungspumpe befinden sich auf derselben Rotorwelle (4).
EP01102552.5A 2000-02-24 2001-02-06 Gasreibungspumpe Expired - Lifetime EP1128069B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10008691 2000-02-24
DE10008691.8A DE10008691B4 (de) 2000-02-24 2000-02-24 Gasreibungspumpe

Publications (3)

Publication Number Publication Date
EP1128069A2 EP1128069A2 (de) 2001-08-29
EP1128069A3 true EP1128069A3 (de) 2002-11-06
EP1128069B1 EP1128069B1 (de) 2016-03-30

Family

ID=7632258

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01102552.5A Expired - Lifetime EP1128069B1 (de) 2000-02-24 2001-02-06 Gasreibungspumpe

Country Status (4)

Country Link
US (1) US6524060B2 (de)
EP (1) EP1128069B1 (de)
JP (1) JP4907774B2 (de)
DE (1) DE10008691B4 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
US20100266426A1 (en) * 2009-04-16 2010-10-21 Marsbed Hablanian Increased volumetric capacity of axial flow compressors used in turbomolecular vacuum pumps
DE102009035812A1 (de) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpenrotor
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US3734640A (en) * 1971-06-23 1973-05-22 W Daniel Airfoil vacuum pump with tapered rotor
US4668160A (en) * 1985-04-26 1987-05-26 Hitachi, Ltd. Vacuum pump
US4978276A (en) * 1988-10-10 1990-12-18 Leybold Aktiengesellschaft Pump stage for a high-vacuum pump
US5553998A (en) * 1992-05-16 1996-09-10 Leybold Ag Gas friction vacuum pump having at least three differently configured pump stages releasably connected together
US5927940A (en) * 1996-08-23 1999-07-27 Pfeiffer Vacuum Gmbh Double-flow gas friction pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
JPH0313495A (ja) * 1989-06-12 1991-01-22 Natl House Ind Co Ltd 吊上げ金具
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE29516599U1 (de) 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810083A (en) * 1927-11-30 1931-06-16 Norinder Ernst Harald High vacuum molecular pump
US3734640A (en) * 1971-06-23 1973-05-22 W Daniel Airfoil vacuum pump with tapered rotor
US4668160A (en) * 1985-04-26 1987-05-26 Hitachi, Ltd. Vacuum pump
US4978276A (en) * 1988-10-10 1990-12-18 Leybold Aktiengesellschaft Pump stage for a high-vacuum pump
US5553998A (en) * 1992-05-16 1996-09-10 Leybold Ag Gas friction vacuum pump having at least three differently configured pump stages releasably connected together
US5927940A (en) * 1996-08-23 1999-07-27 Pfeiffer Vacuum Gmbh Double-flow gas friction pump

Also Published As

Publication number Publication date
JP4907774B2 (ja) 2012-04-04
EP1128069B1 (de) 2016-03-30
US6524060B2 (en) 2003-02-25
US20010018018A1 (en) 2001-08-30
DE10008691B4 (de) 2017-10-26
EP1128069A2 (de) 2001-08-29
DE10008691A1 (de) 2001-08-30
JP2001280289A (ja) 2001-10-10

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