EP1626179A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP1626179A3
EP1626179A3 EP05016491A EP05016491A EP1626179A3 EP 1626179 A3 EP1626179 A3 EP 1626179A3 EP 05016491 A EP05016491 A EP 05016491A EP 05016491 A EP05016491 A EP 05016491A EP 1626179 A3 EP1626179 A3 EP 1626179A3
Authority
EP
European Patent Office
Prior art keywords
flange
vacuum pump
pump
active components
inlet openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05016491A
Other languages
English (en)
French (fr)
Other versions
EP1626179B1 (de
EP1626179A2 (de
Inventor
Jürgen JUNG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1626179A2 publication Critical patent/EP1626179A2/de
Publication of EP1626179A3 publication Critical patent/EP1626179A3/de
Application granted granted Critical
Publication of EP1626179B1 publication Critical patent/EP1626179B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Flansch (2), mindestens zwei Gaseintrittsöffnungen (4), mindestens einer Gasaustrittsöffnung (5), mindestens zwei Rotorwellen (6), die jeweils rotierende pumpaktive Bauteile (7) tragen, welche jeweils stehenden pumpaktiven Bauteilen (8) gegenüberstehen, mit mindestens einem unteren Gehäuseteil (9), einem den Flansch tragenden Gehäuseoberteil (10), mit Antriebsmitteln (11), welche die Rotorwellen (6) in Rotation versetzen. Es befinden sich alle Gaseintrittsöffnungen (4) innerhalb des Flansches (2) und dass der Flansch (2) ist an einem gemeinsamen Gehäuseoberteil (10) angeordnet.
EP05016491.2A 2004-08-10 2005-07-29 Vakuumpumpe Active EP1626179B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004038677.3A DE102004038677B4 (de) 2004-08-10 2004-08-10 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1626179A2 EP1626179A2 (de) 2006-02-15
EP1626179A3 true EP1626179A3 (de) 2012-04-18
EP1626179B1 EP1626179B1 (de) 2013-10-23

Family

ID=35266964

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05016491.2A Active EP1626179B1 (de) 2004-08-10 2005-07-29 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP1626179B1 (de)
JP (1) JP5189729B2 (de)
DE (1) DE102004038677B4 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147222B2 (en) 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
GB2469015B (en) 2009-01-30 2011-09-28 Compair Uk Ltd Improvements in multi-stage centrifugal compressors
FR2984972A1 (fr) 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3713534A1 (de) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp Turbo-molekularpumpe
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JP3118382B2 (ja) * 1994-11-11 2000-12-18 三洋電機株式会社 空気調和機
JP3000356B1 (ja) * 1998-07-07 2000-01-17 セイコー精機株式会社 真空ポンプ及び真空装置
JP3510850B2 (ja) * 2000-10-17 2004-03-29 株式会社相互ポンプ製作所 ダブルポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3713534A1 (de) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp Turbo-molekularpumpe
US5352097A (en) * 1992-01-23 1994-10-04 Matsushita Electric Industrial Co., Ltd. Vacuum pump

Also Published As

Publication number Publication date
DE102004038677A1 (de) 2006-02-23
JP5189729B2 (ja) 2013-04-24
EP1626179B1 (de) 2013-10-23
DE102004038677B4 (de) 2016-11-24
JP2006052728A (ja) 2006-02-23
EP1626179A2 (de) 2006-02-15

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