JP5189729B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP5189729B2
JP5189729B2 JP2005211535A JP2005211535A JP5189729B2 JP 5189729 B2 JP5189729 B2 JP 5189729B2 JP 2005211535 A JP2005211535 A JP 2005211535A JP 2005211535 A JP2005211535 A JP 2005211535A JP 5189729 B2 JP5189729 B2 JP 5189729B2
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JP
Japan
Prior art keywords
vacuum pump
pump according
flange
vacuum
rotor
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JP2005211535A
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English (en)
Japanese (ja)
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JP2006052728A (ja
Inventor
ユルゲン・ユング
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2006052728A publication Critical patent/JP2006052728A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2005211535A 2004-08-10 2005-07-21 真空ポンプ Active JP5189729B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004038677.3A DE102004038677B4 (de) 2004-08-10 2004-08-10 Vakuumpumpe
DE102004038677.3 2004-08-10

Publications (2)

Publication Number Publication Date
JP2006052728A JP2006052728A (ja) 2006-02-23
JP5189729B2 true JP5189729B2 (ja) 2013-04-24

Family

ID=35266964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005211535A Active JP5189729B2 (ja) 2004-08-10 2005-07-21 真空ポンプ

Country Status (3)

Country Link
EP (1) EP1626179B1 (de)
JP (1) JP5189729B2 (de)
DE (1) DE102004038677B4 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147222B2 (en) 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
GB2469015B (en) * 2009-01-30 2011-09-28 Compair Uk Ltd Improvements in multi-stage centrifugal compressors
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JP3118382B2 (ja) * 1994-11-11 2000-12-18 三洋電機株式会社 空気調和機
JP3000356B1 (ja) * 1998-07-07 2000-01-17 セイコー精機株式会社 真空ポンプ及び真空装置
JP3510850B2 (ja) * 2000-10-17 2004-03-29 株式会社相互ポンプ製作所 ダブルポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang

Also Published As

Publication number Publication date
JP2006052728A (ja) 2006-02-23
EP1626179A3 (de) 2012-04-18
EP1626179B1 (de) 2013-10-23
EP1626179A2 (de) 2006-02-15
DE102004038677A1 (de) 2006-02-23
DE102004038677B4 (de) 2016-11-24

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