DE29717764U1 - Stator for a turbomolecular vacuum pump - Google Patents

Stator for a turbomolecular vacuum pump

Info

Publication number
DE29717764U1
DE29717764U1 DE29717764U DE29717764U DE29717764U1 DE 29717764 U1 DE29717764 U1 DE 29717764U1 DE 29717764 U DE29717764 U DE 29717764U DE 29717764 U DE29717764 U DE 29717764U DE 29717764 U1 DE29717764 U1 DE 29717764U1
Authority
DE
Germany
Prior art keywords
stator
vacuum pump
turbomolecular vacuum
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29717764U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE29717764U priority Critical patent/DE29717764U1/en
Publication of DE29717764U1 publication Critical patent/DE29717764U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
DE29717764U 1997-10-06 1997-10-06 Stator for a turbomolecular vacuum pump Expired - Lifetime DE29717764U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29717764U DE29717764U1 (en) 1997-10-06 1997-10-06 Stator for a turbomolecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29717764U DE29717764U1 (en) 1997-10-06 1997-10-06 Stator for a turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
DE29717764U1 true DE29717764U1 (en) 1997-11-20

Family

ID=8046878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29717764U Expired - Lifetime DE29717764U1 (en) 1997-10-06 1997-10-06 Stator for a turbomolecular vacuum pump

Country Status (1)

Country Link
DE (1) DE29717764U1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1443214A1 (en) * 2003-02-03 2004-08-04 Alcatel Turbomolecular pump stator
DE10331932A1 (en) * 2003-07-15 2005-02-03 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10357547A1 (en) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Turbomolecular pump has stator discs configured at outer edge to form greatest possible contact surface with distance rings which space out discs
EP2894348A1 (en) * 2014-01-09 2015-07-15 Pfeiffer Vacuum Gmbh Stator disc
EP3032107A3 (en) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Turbomolecular pump
CN107208649A (en) * 2015-01-30 2017-09-26 埃地沃兹日本有限公司 Vavuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH677009A5 (en) * 1987-07-04 1991-03-28 Pfeiffer Vakuumtechnik
DE9013671U1 (en) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
DE9013672U1 (en) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
EP0775829A1 (en) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolecular vacuum pumps

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH677009A5 (en) * 1987-07-04 1991-03-28 Pfeiffer Vakuumtechnik
DE9013671U1 (en) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
DE9013672U1 (en) * 1990-09-29 1992-01-30 Leybold Ag, 6450 Hanau, De
EP0775829A1 (en) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolecular vacuum pumps

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7588417B2 (en) 2003-02-03 2009-09-15 Alcatel Turbomolecular pump having multistage stator spacers
FR2850714A1 (en) * 2003-02-03 2004-08-06 Cit Alcatel STATOR MULTI-STAGE TURBOMOLECULAR PUMP
EP1443214A1 (en) * 2003-02-03 2004-08-04 Alcatel Turbomolecular pump stator
DE10331932B4 (en) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10331932A1 (en) * 2003-07-15 2005-02-03 Pfeiffer Vacuum Gmbh Turbo molecular pump
US7278822B2 (en) 2003-07-15 2007-10-09 Pfieffer Vacuum Gmbh Turbomolecular pump
DE10357547B4 (en) 2003-12-10 2020-04-23 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE10357547A1 (en) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Turbomolecular pump has stator discs configured at outer edge to form greatest possible contact surface with distance rings which space out discs
EP2894348A1 (en) * 2014-01-09 2015-07-15 Pfeiffer Vacuum Gmbh Stator disc
DE102014100207B4 (en) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh STATOR DISC
EP3032107A3 (en) * 2014-12-08 2016-08-31 Pfeiffer Vacuum Gmbh Turbomolecular pump
KR20170110075A (en) * 2015-01-30 2017-10-10 에드워즈 가부시키가이샤 Vacuum pump
EP3252314A4 (en) * 2015-01-30 2018-08-22 Edwards Japan Limited Vacuum pump
US10480523B2 (en) 2015-01-30 2019-11-19 Edwards Japan Limited Vacuum pump
US20170363101A1 (en) * 2015-01-30 2017-12-21 Edwards Japan Limited Vacuum pump
CN107208649A (en) * 2015-01-30 2017-09-26 埃地沃兹日本有限公司 Vavuum pump
KR102492461B1 (en) * 2015-01-30 2023-01-27 에드워즈 가부시키가이샤 Vacuum pump

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19980108

R163 Identified publications notified

Effective date: 19971202

R156 Lapse of ip right after 3 years

Effective date: 20010703