DE59101715D1 - Stator for a turbomolecular vacuum pump. - Google Patents

Stator for a turbomolecular vacuum pump.

Info

Publication number
DE59101715D1
DE59101715D1 DE59101715T DE59101715T DE59101715D1 DE 59101715 D1 DE59101715 D1 DE 59101715D1 DE 59101715 T DE59101715 T DE 59101715T DE 59101715 T DE59101715 T DE 59101715T DE 59101715 D1 DE59101715 D1 DE 59101715D1
Authority
DE
Germany
Prior art keywords
stator
vacuum pump
turbomolecular vacuum
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59101715T
Other languages
German (de)
Inventor
Rainer Hoelzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59101715D1 publication Critical patent/DE59101715D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE59101715T 1990-09-29 1991-04-12 Stator for a turbomolecular vacuum pump. Expired - Fee Related DE59101715D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9013671U DE9013671U1 (en) 1990-09-29 1990-09-29

Publications (1)

Publication Number Publication Date
DE59101715D1 true DE59101715D1 (en) 1994-06-30

Family

ID=6857953

Family Applications (2)

Application Number Title Priority Date Filing Date
DE9013671U Expired - Lifetime DE9013671U1 (en) 1990-09-29 1990-09-29
DE59101715T Expired - Fee Related DE59101715D1 (en) 1990-09-29 1991-04-12 Stator for a turbomolecular vacuum pump.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE9013671U Expired - Lifetime DE9013671U1 (en) 1990-09-29 1990-09-29

Country Status (2)

Country Link
EP (1) EP0478882B1 (en)
DE (2) DE9013671U1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold Ag Friction vacuum pump with intermediate inlet
DE29717764U1 (en) * 1997-10-06 1997-11-20 Leybold Vakuum Gmbh Stator for a turbomolecular vacuum pump
DE19937393A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Stator ring for a turbomolecular vacuum pump
DE10010371A1 (en) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE102006050565A1 (en) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Stator disk for turbo-molecular pump, has plate at outer ring side, so that plate fulfills spacer ring function, and support ring connected with plate, where plate is turned away from plane, and side is turned outwards in radial direction
DE202008011489U1 (en) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
DE202011109517U1 (en) * 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (en) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
DE3722164C2 (en) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolecular pump

Also Published As

Publication number Publication date
EP0478882A1 (en) 1992-04-08
DE9013671U1 (en) 1992-01-30
EP0478882B1 (en) 1994-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee