EP1498612A2 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number
EP1498612A2
EP1498612A2 EP20040014174 EP04014174A EP1498612A2 EP 1498612 A2 EP1498612 A2 EP 1498612A2 EP 20040014174 EP20040014174 EP 20040014174 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 A2 EP1498612 A2 EP 1498612A2
Authority
EP
European Patent Office
Prior art keywords
spacer rings
turbomolecular pump
stator
pump according
stator discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20040014174
Other languages
German (de)
English (en)
Other versions
EP1498612A3 (fr
EP1498612B1 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1498612A2 publication Critical patent/EP1498612A2/fr
Publication of EP1498612A3 publication Critical patent/EP1498612A3/fr
Application granted granted Critical
Publication of EP1498612B1 publication Critical patent/EP1498612B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of first protection claim.
  • the active pumping elements of a turbomolecular pump consist of Shovels provided rotor and stator, which alternately behind are arranged one another.
  • the rotor and stator discs generally have each having an inner support ring on the outside with the Shovels are stocked.
  • the blades of the rotor discs which with high Rotate speed, resulting in cooperation with the stator blades the pumping effect.
  • spacer rings which at the outer circumference lie between the stator disks, they are kept at a distance, that the rotor disks can rotate without contact between them.
  • stator and spacer rings together form the stator. This one is going through the inner wall of the pump housing centered.
  • turbomolecular pumps has the disadvantage that they Due to the many components, it is quite complicated. It also represents a fairly rigid structure, whereby an adaptation to different Use cases is difficult.
  • DE PS 37 22 164 is such Structure with stator discs, spacers and housing described.
  • This construction has however, the disadvantage that additional elements for fixing and holding together the stator components must be present. This will make the assembly complicated and requires a lot of space.
  • the invention has for its object to develop a turbomolecular pump, at the number of components compared to conventional designs is reduced. At reduced production costs should be a simple installation to be possible. The integration into application systems should be facilitated and thus a variable and application-oriented use can be achieved.
  • the inventive arrangement is compared with the number of components reduced to conventional designs. At reduced production costs is a simple installation possible.
  • the spacer rings are connected to each other, that they are the essential tasks of a housing, namely the Fixation and centering of the stator discs, meet.
  • the remaining function of the housing is taken over by parts of the recipient to be evacuated.
  • an optimal adjustment of pump and recipient is achieved.
  • This also makes it possible that the pump-active components in the immediate Close to the evacuating sphere can be brought.
  • the spacer rings in their entirety have the function of a pump housing take over, this is unnecessary.
  • the housing 1 of the turbomolecular pump which according to the invention largely is formed from spacers 18, with a suction port 2 and a gas outlet opening 4 is provided.
  • the rotor shaft 6 is in bearings 8 and 9 fixed and is driven by the motor 11.
  • On the rotor shaft are the Rotor disks 14 attached.
  • the spacer rings 18 are joined together and connected, that they take over the function of the housing of the pump. They serve as well as for fixing and centering the stator discs.
  • FIG. 2 two spacer rings 18a and 19a are shown, which is a stator 16 fix.
  • the two spacers are at the point 20 by thread firmly connected with each other.
  • FIG. 3 shows two spacers 18 b and 19 b with stator 16, wherein the Spacers by a clip closure, consisting of a web 22 and a groove 23 are firmly connected to each other.
  • Fig. 4 shows two spacers 18c and 19c with stator 16. The spacers are connected by pins 24 fixed to each other.
  • FIG. 5 shows two spacer rings 18d and 19d with the stator disk 16.
  • the spacers are here via a fit at the point 26 by pressing firmly connected with each other.
  • a seal between the individual spacers and between Spacers and other components is not shown here. She can through known arrangements, as described for example in DE-OS 199 51 954 are shown done.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP04014174.9A 2003-07-15 2004-06-17 Pompe turbomoléculaire Expired - Lifetime EP1498612B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10331932 2003-07-15
DE10331932.8A DE10331932B4 (de) 2003-07-15 2003-07-15 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1498612A2 true EP1498612A2 (fr) 2005-01-19
EP1498612A3 EP1498612A3 (fr) 2011-09-14
EP1498612B1 EP1498612B1 (fr) 2015-07-29

Family

ID=33461927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04014174.9A Expired - Lifetime EP1498612B1 (fr) 2003-07-15 2004-06-17 Pompe turbomoléculaire

Country Status (4)

Country Link
US (1) US7278822B2 (fr)
EP (1) EP1498612B1 (fr)
JP (1) JP2005036798A (fr)
DE (1) DE10331932B4 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
WO2009089958A1 (fr) 2008-01-15 2009-07-23 Oerlikon Leybold Vacuum Gmbh Pompe turbomoléculaire
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045283B4 (de) 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
CN101981321B (zh) * 2008-03-31 2014-05-28 株式会社岛津制作所 涡轮式分子泵
ATE513132T1 (de) * 2008-07-10 2011-07-15 Grundfos Management As Pumpenaggregat
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (de) 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
DE3722164A1 (de) 1987-07-04 1989-01-12 Pfeiffer Vakuumtechnik Turbomolekularpumpe
JPH04330397A (ja) 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US20010016160A1 (en) 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1288360A (en) * 1916-11-06 1918-12-17 Ludwig W Zaar Turbine.
US2610786A (en) * 1946-06-25 1952-09-16 Gen Electric Axial flow compressor
US3032260A (en) * 1955-07-12 1962-05-01 Latham Manufactruing Co Rotary apparatus and method of making the same
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
DE3891263T1 (de) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
JPH02131089U (fr) * 1989-03-31 1990-10-30
JP3469055B2 (ja) * 1997-08-20 2003-11-25 三菱重工業株式会社 ターボ分子ポンプ
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
JP3748323B2 (ja) * 1998-01-09 2006-02-22 株式会社荏原製作所 ターボ分子ポンプ
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523390B1 (de) 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
DE3722164A1 (de) 1987-07-04 1989-01-12 Pfeiffer Vakuumtechnik Turbomolekularpumpe
JPH04330397A (ja) 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
US20010016160A1 (en) 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump
DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
US8562293B2 (en) 2007-10-11 2013-10-22 Oerlikon Leybold Vacuum Gmbh Multi-stage pump rotor for a turbomolecular pump
WO2009089958A1 (fr) 2008-01-15 2009-07-23 Oerlikon Leybold Vacuum Gmbh Pompe turbomoléculaire

Also Published As

Publication number Publication date
EP1498612A3 (fr) 2011-09-14
US20050013710A1 (en) 2005-01-20
EP1498612B1 (fr) 2015-07-29
JP2005036798A (ja) 2005-02-10
US7278822B2 (en) 2007-10-09
DE10331932B4 (de) 2017-08-24
DE10331932A1 (de) 2005-02-03

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