EP1498612A2 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP1498612A2
EP1498612A2 EP20040014174 EP04014174A EP1498612A2 EP 1498612 A2 EP1498612 A2 EP 1498612A2 EP 20040014174 EP20040014174 EP 20040014174 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 A2 EP1498612 A2 EP 1498612A2
Authority
EP
European Patent Office
Prior art keywords
spacer rings
turbomolecular pump
stator
pump according
stator discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20040014174
Other languages
English (en)
French (fr)
Other versions
EP1498612B1 (de
EP1498612A3 (de
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1498612A2 publication Critical patent/EP1498612A2/de
Publication of EP1498612A3 publication Critical patent/EP1498612A3/de
Application granted granted Critical
Publication of EP1498612B1 publication Critical patent/EP1498612B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of first protection claim.
  • the active pumping elements of a turbomolecular pump consist of Shovels provided rotor and stator, which alternately behind are arranged one another.
  • the rotor and stator discs generally have each having an inner support ring on the outside with the Shovels are stocked.
  • the blades of the rotor discs which with high Rotate speed, resulting in cooperation with the stator blades the pumping effect.
  • spacer rings which at the outer circumference lie between the stator disks, they are kept at a distance, that the rotor disks can rotate without contact between them.
  • stator and spacer rings together form the stator. This one is going through the inner wall of the pump housing centered.
  • turbomolecular pumps has the disadvantage that they Due to the many components, it is quite complicated. It also represents a fairly rigid structure, whereby an adaptation to different Use cases is difficult.
  • DE PS 37 22 164 is such Structure with stator discs, spacers and housing described.
  • This construction has however, the disadvantage that additional elements for fixing and holding together the stator components must be present. This will make the assembly complicated and requires a lot of space.
  • the invention has for its object to develop a turbomolecular pump, at the number of components compared to conventional designs is reduced. At reduced production costs should be a simple installation to be possible. The integration into application systems should be facilitated and thus a variable and application-oriented use can be achieved.
  • the inventive arrangement is compared with the number of components reduced to conventional designs. At reduced production costs is a simple installation possible.
  • the spacer rings are connected to each other, that they are the essential tasks of a housing, namely the Fixation and centering of the stator discs, meet.
  • the remaining function of the housing is taken over by parts of the recipient to be evacuated.
  • an optimal adjustment of pump and recipient is achieved.
  • This also makes it possible that the pump-active components in the immediate Close to the evacuating sphere can be brought.
  • the spacer rings in their entirety have the function of a pump housing take over, this is unnecessary.
  • the housing 1 of the turbomolecular pump which according to the invention largely is formed from spacers 18, with a suction port 2 and a gas outlet opening 4 is provided.
  • the rotor shaft 6 is in bearings 8 and 9 fixed and is driven by the motor 11.
  • On the rotor shaft are the Rotor disks 14 attached.
  • the spacer rings 18 are joined together and connected, that they take over the function of the housing of the pump. They serve as well as for fixing and centering the stator discs.
  • FIG. 2 two spacer rings 18a and 19a are shown, which is a stator 16 fix.
  • the two spacers are at the point 20 by thread firmly connected with each other.
  • FIG. 3 shows two spacers 18 b and 19 b with stator 16, wherein the Spacers by a clip closure, consisting of a web 22 and a groove 23 are firmly connected to each other.
  • Fig. 4 shows two spacers 18c and 19c with stator 16. The spacers are connected by pins 24 fixed to each other.
  • FIG. 5 shows two spacer rings 18d and 19d with the stator disk 16.
  • the spacers are here via a fit at the point 26 by pressing firmly connected with each other.
  • a seal between the individual spacers and between Spacers and other components is not shown here. She can through known arrangements, as described for example in DE-OS 199 51 954 are shown done.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe mit Rotor- (14) und Statorscheiben (16), wobei die Statorscheiben durch Distanzringe (18, 19) auf Abstand gehalten werden. Die Distanzringe sind so gestaltet, dass sie eine feste Verbindung mit dem jeweiligen Nachbarring eingehen, so dass sie in ihrer Gesamtheit die Fixierung und Zentrierung der Statorscheiben übernehmen.

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des ersten Schutzanspruches.
Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hinter einander angeordnet sind. Die Rotor- und Statorscheiben weisen im Allgemeinen jeweils einen inneren Tragring auf, der auf der Außenseite mit den Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Statorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator. Dieser wird durch die Innenwand des Pumpengehäuses zentriert. Diese herkömmliche Art einer Konstruktion von Turbomolekularpumpen hat jedoch den Nachteil, dass sie, bedingt durch die vielen Bauteile, recht kompliziert ist. Außerdem stellt sie einen ziemlich starren Aufbau dar, wodurch eine Anpassung an unterschiedliche Anwendungsfälle erschwert wird. In der DE PS 37 22 164 ist ein solcher Aufbau mit Statorscheiben, Distanzringen und Gehäuse beschrieben.
Eine Turbomolekularpumpe, bei der die Anzahl der Bauteile reduziert ist, indem jeweils eine Statorscheibe, ein Distanzring und ein Teil des Gehäuses einstückig ausgebildet sind, zeigt die DE OS 199 51 954. Diese Konstruktion hat jedoch den Nachteil, dass zusätzliche Elemente zum Fixieren und Zusammenhalten der Statorbauteile vorhanden sein müssen. Dadurch wird der Zusammenbau kompliziert und benötigt viel Platz.
Der Erfindung liegt die Aufgabe zugrunde, eine Turbomolekularpumpe zu entwickeln, bei der die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen reduziert ist. Bei verminderten Herstellkosten soll eine einfache Montage möglich sein. Die Integration in Anwendungssysteme soll erleichtert und somit ein variabler und anwendungsorientierter Einsatz erreicht werden.
Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Schutzanspruches gelöst. Die Ansprüche 2 - 5 stellen weitere Ausgestaltungsformen der Erfindung dar.
Durch die erfindungsgemäße Anordnung wird die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen reduziert. Bei verminderten Herstellkosten ist eine einfache Montage möglich. Die Distanzringe sind so mit einander verbunden, dass sie die wesentlichen Aufgaben eines Gehäuses, nämlich die Fixierung und Zentrierung der Statorscheiben, erfüllen. Die restliche Funktion des Gehäuses wird von Teilen des auszupumpenden Rezipienten übernommen. Somit wird eine optimale Anpassung von Pumpe und Rezipient erreicht. Dadurch wird es auch möglich, dass die pumpaktiven Bauelemente in unmittelbarer Nähe der evakuierenden Sphäre gebracht werden können. Durch die Tatsache, dass die Distanzringe in ihrer Gesamtheit die Funktion eines Pumpengehäuses übernehmen, wird dieses entbehrlich.
Anhand der Figuren 1 - 5 soll die Erfindung näher erläutert werden.
  • Fig. 1 zeigt eine Turbomolekularpumpe der erfindungsgemäßen Gattung.
  • Fig. 2 - 5 zeigen jeweils in Ausschnitten aus Fig. 1 verschiedene Möglichkeiten der Verbindung von Distanzringen untereinander.
    • Das Gehäuse 1 der Turbomolekularpumpe, welches erfindungsgemäß weitgehend aus Distanzringen 18 gebildet wird, ist mit einer Ansaugöffnung 2 und einer Gasaustrittsöffnung 4 versehen. Die Rotorwelle 6 ist in Lagern 8 und 9 fixiert und wird durch den Motor 11 angetrieben. Auf der Rotorwelle sind die Rotorscheiben 14 befestigt. Die Statorscheiben 16, welche durch Distanzringe 18 auf Abstand gehalten werden, sind zwischen den Rotorscheiben angebracht. Rotorscheiben und Statorscheiben sind jeweils mit pumpaktiven Strukturen versehen und erzeugen durch ihr Zusammenwirken den Pumpeffekt.
    Erfindungsgemäß werden die Distanzringe 18 so zusammengefügt und verbunden, dass sie die Funktion des Gehäuses der Pumpe übernehmen. Sie dienen so auch zur Fixierung und Zentrierung der Statorscheiben.
    In Fig. 2 sind zwei Distanzringe 18a und 19a gezeigt, welche eine Statorscheibe 16 fixieren. Die beiden Distanzringe sind an der Stelle 20 durch Gewinde fest mit einander verbunden.
    Fig. 3 zeigt zwei Distanzringe 18b und 19b mit Statorscheibe 16, wobei die Distanzringe durch einen Clipverschluss, bestehend aus einem Steg 22 und einer Nut 23 fest mit einander verbunden sind.
    Fig. 4 zeigt zwei Distanzringe 18c und 19c mit Statorscheibe 16. Die Distanzringe sind durch Stifte 24 fest mit einander verbunden.
    In Fig. 5 sind zwei Distanzringe 18d und 19d mit der Statorscheibe 16 dargestellt. Die Distanzringe sind hier über eine Passung an der Stelle 26 durch Verpressen kraftschlüssig fest mit einander verbunden.
    Eine Abdichtung zwischen den einzelnen Distanzringen und zwischen Distanzringen und anderen Bauteilen ist hier nicht dargestellt. Sie kann durch an sich bekannte Anordnungen, wie sie zum Beispiel in der DE-OS 199 51 954 dargestellt sind, erfolgen.

    Claims (6)

    1. Turbomolekularpumpe mit Rotor (14) und Statorscheiben (16), welche abwechselnd hinter einander angeordnet sind und ihr Zusammenwirken einen Pumpeffekt erzeugt, wobei die Statorscheiben (16) durch Distanzringe (18, 19) auf Abstand gehalten werden, dadurch gekennzeichnet, dass die Distanzringe (18, 19, 18a, 19a, 18b, 19b, 18c, 19c, 18d, 19d) so gestaltet sind, dass sie eine feste Verbindung mit dem jeweiligen Nachbarring eingehen, so dass sie in ihrer Gesamtheit die Fixierung und Zentrierung der Statorscheiben übernehmen.
    2. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18a, 19a) durch Verschraubung über ein Gewinde (20) hergestellt wird.
    3. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18b, 19b) durch einen Clipverschluss, bestehend aus einem Steg (22) und einer Nut (23) hergestellt wird.
    4. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18c, 19c) durch Verstiftung (24) in radialer Richtung hergestellt wird.
    5. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18d, 19d) über eine Passung (26) durch Verpressen kraftschlüssig hergestellt wird.
    6. Turbomolekularpumpe nach einem der vorangehenden Ansprüche,
      dadurch gekennzeichnet, dass die Distanzringe in ihrer Gesamtheit die Funktion des Pumpengehäuses übernehmen und dieses somit überflüssig machen.
    EP04014174.9A 2003-07-15 2004-06-17 Turbomolekularpumpe Expired - Lifetime EP1498612B1 (de)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE10331932 2003-07-15
    DE10331932.8A DE10331932B4 (de) 2003-07-15 2003-07-15 Turbomolekularpumpe

    Publications (3)

    Publication Number Publication Date
    EP1498612A2 true EP1498612A2 (de) 2005-01-19
    EP1498612A3 EP1498612A3 (de) 2011-09-14
    EP1498612B1 EP1498612B1 (de) 2015-07-29

    Family

    ID=33461927

    Family Applications (1)

    Application Number Title Priority Date Filing Date
    EP04014174.9A Expired - Lifetime EP1498612B1 (de) 2003-07-15 2004-06-17 Turbomolekularpumpe

    Country Status (4)

    Country Link
    US (1) US7278822B2 (de)
    EP (1) EP1498612B1 (de)
    JP (1) JP2005036798A (de)
    DE (1) DE10331932B4 (de)

    Cited By (3)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
    WO2009089958A1 (de) 2008-01-15 2009-07-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
    EP1918588A3 (de) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe

    Families Citing this family (8)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    DE102005045283B4 (de) 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
    CN101981321B (zh) * 2008-03-31 2014-05-28 株式会社岛津制作所 涡轮式分子泵
    ATE513132T1 (de) * 2008-07-10 2011-07-15 Grundfos Management As Pumpenaggregat
    DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor
    DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
    US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
    GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
    CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

    Citations (5)

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    Publication number Priority date Publication date Assignee Title
    DE2523390B1 (de) 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
    DE3722164A1 (de) 1987-07-04 1989-01-12 Pfeiffer Vakuumtechnik Turbomolekularpumpe
    JPH04330397A (ja) 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
    DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
    US20010016160A1 (en) 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump

    Family Cites Families (12)

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    US1288360A (en) * 1916-11-06 1918-12-17 Ludwig W Zaar Turbine.
    US2610786A (en) * 1946-06-25 1952-09-16 Gen Electric Axial flow compressor
    US3032260A (en) * 1955-07-12 1962-05-01 Latham Manufactruing Co Rotary apparatus and method of making the same
    JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
    DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
    WO1989008192A1 (en) * 1988-02-26 1989-09-08 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
    JPH02131089U (de) * 1989-03-31 1990-10-30
    JP3469055B2 (ja) * 1997-08-20 2003-11-25 三菱重工業株式会社 ターボ分子ポンプ
    DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
    JP3748323B2 (ja) * 1998-01-09 2006-02-22 株式会社荏原製作所 ターボ分子ポンプ
    DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
    US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity

    Patent Citations (5)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    DE2523390B1 (de) 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
    DE3722164A1 (de) 1987-07-04 1989-01-12 Pfeiffer Vakuumtechnik Turbomolekularpumpe
    JPH04330397A (ja) 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
    US20010016160A1 (en) 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump
    DE19951954A1 (de) 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

    Cited By (4)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    EP1918588A3 (de) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
    DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
    US8562293B2 (en) 2007-10-11 2013-10-22 Oerlikon Leybold Vacuum Gmbh Multi-stage pump rotor for a turbomolecular pump
    WO2009089958A1 (de) 2008-01-15 2009-07-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

    Also Published As

    Publication number Publication date
    JP2005036798A (ja) 2005-02-10
    DE10331932B4 (de) 2017-08-24
    DE10331932A1 (de) 2005-02-03
    EP1498612B1 (de) 2015-07-29
    US7278822B2 (en) 2007-10-09
    EP1498612A3 (de) 2011-09-14
    US20050013710A1 (en) 2005-01-20

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