EP1498612A2 - Turbomolekularpumpe - Google Patents
Turbomolekularpumpe Download PDFInfo
- Publication number
- EP1498612A2 EP1498612A2 EP20040014174 EP04014174A EP1498612A2 EP 1498612 A2 EP1498612 A2 EP 1498612A2 EP 20040014174 EP20040014174 EP 20040014174 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 A2 EP1498612 A2 EP 1498612A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- spacer rings
- turbomolecular pump
- stator
- pump according
- stator discs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Definitions
- the invention relates to a turbomolecular pump according to the preamble of first protection claim.
- the active pumping elements of a turbomolecular pump consist of Shovels provided rotor and stator, which alternately behind are arranged one another.
- the rotor and stator discs generally have each having an inner support ring on the outside with the Shovels are stocked.
- the blades of the rotor discs which with high Rotate speed, resulting in cooperation with the stator blades the pumping effect.
- spacer rings which at the outer circumference lie between the stator disks, they are kept at a distance, that the rotor disks can rotate without contact between them.
- stator and spacer rings together form the stator. This one is going through the inner wall of the pump housing centered.
- turbomolecular pumps has the disadvantage that they Due to the many components, it is quite complicated. It also represents a fairly rigid structure, whereby an adaptation to different Use cases is difficult.
- DE PS 37 22 164 is such Structure with stator discs, spacers and housing described.
- This construction has however, the disadvantage that additional elements for fixing and holding together the stator components must be present. This will make the assembly complicated and requires a lot of space.
- the invention has for its object to develop a turbomolecular pump, at the number of components compared to conventional designs is reduced. At reduced production costs should be a simple installation to be possible. The integration into application systems should be facilitated and thus a variable and application-oriented use can be achieved.
- the inventive arrangement is compared with the number of components reduced to conventional designs. At reduced production costs is a simple installation possible.
- the spacer rings are connected to each other, that they are the essential tasks of a housing, namely the Fixation and centering of the stator discs, meet.
- the remaining function of the housing is taken over by parts of the recipient to be evacuated.
- an optimal adjustment of pump and recipient is achieved.
- This also makes it possible that the pump-active components in the immediate Close to the evacuating sphere can be brought.
- the spacer rings in their entirety have the function of a pump housing take over, this is unnecessary.
- the housing 1 of the turbomolecular pump which according to the invention largely is formed from spacers 18, with a suction port 2 and a gas outlet opening 4 is provided.
- the rotor shaft 6 is in bearings 8 and 9 fixed and is driven by the motor 11.
- On the rotor shaft are the Rotor disks 14 attached.
- the spacer rings 18 are joined together and connected, that they take over the function of the housing of the pump. They serve as well as for fixing and centering the stator discs.
- FIG. 2 two spacer rings 18a and 19a are shown, which is a stator 16 fix.
- the two spacers are at the point 20 by thread firmly connected with each other.
- FIG. 3 shows two spacers 18 b and 19 b with stator 16, wherein the Spacers by a clip closure, consisting of a web 22 and a groove 23 are firmly connected to each other.
- Fig. 4 shows two spacers 18c and 19c with stator 16. The spacers are connected by pins 24 fixed to each other.
- FIG. 5 shows two spacer rings 18d and 19d with the stator disk 16.
- the spacers are here via a fit at the point 26 by pressing firmly connected with each other.
- a seal between the individual spacers and between Spacers and other components is not shown here. She can through known arrangements, as described for example in DE-OS 199 51 954 are shown done.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims (6)
- Turbomolekularpumpe mit Rotor (14) und Statorscheiben (16), welche abwechselnd hinter einander angeordnet sind und ihr Zusammenwirken einen Pumpeffekt erzeugt, wobei die Statorscheiben (16) durch Distanzringe (18, 19) auf Abstand gehalten werden, dadurch gekennzeichnet, dass die Distanzringe (18, 19, 18a, 19a, 18b, 19b, 18c, 19c, 18d, 19d) so gestaltet sind, dass sie eine feste Verbindung mit dem jeweiligen Nachbarring eingehen, so dass sie in ihrer Gesamtheit die Fixierung und Zentrierung der Statorscheiben übernehmen.
- Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18a, 19a) durch Verschraubung über ein Gewinde (20) hergestellt wird.
- Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18b, 19b) durch einen Clipverschluss, bestehend aus einem Steg (22) und einer Nut (23) hergestellt wird.
- Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18c, 19c) durch Verstiftung (24) in radialer Richtung hergestellt wird.
- Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die feste Verbindung zwischen den Distanzringen (18d, 19d) über eine Passung (26) durch Verpressen kraftschlüssig hergestellt wird.
- Turbomolekularpumpe nach einem der vorangehenden Ansprüche,
dadurch gekennzeichnet, dass die Distanzringe in ihrer Gesamtheit die Funktion des Pumpengehäuses übernehmen und dieses somit überflüssig machen.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10331932 | 2003-07-15 | ||
DE10331932.8A DE10331932B4 (de) | 2003-07-15 | 2003-07-15 | Turbomolekularpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1498612A2 true EP1498612A2 (de) | 2005-01-19 |
EP1498612A3 EP1498612A3 (de) | 2011-09-14 |
EP1498612B1 EP1498612B1 (de) | 2015-07-29 |
Family
ID=33461927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04014174.9A Expired - Lifetime EP1498612B1 (de) | 2003-07-15 | 2004-06-17 | Turbomolekularpumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US7278822B2 (de) |
EP (1) | EP1498612B1 (de) |
JP (1) | JP2005036798A (de) |
DE (1) | DE10331932B4 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007048703A1 (de) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Mehrstufiger Turbomolekularpumpen-Pumpenrotor |
WO2009089958A1 (de) | 2008-01-15 | 2009-07-23 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
EP1918588A3 (de) * | 2006-10-26 | 2015-05-20 | Pfeiffer Vacuum Gmbh | Statorscheibe für eine Turbomolekularpumpe |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005045283B4 (de) * | 2005-09-22 | 2014-05-15 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
US8591204B2 (en) * | 2008-03-31 | 2013-11-26 | Shimadzu Corporation | Turbo-molecular pump |
EP2143953B1 (de) * | 2008-07-10 | 2011-06-15 | Grundfos Management A/S | Pumpenaggregat |
DE102008056352A1 (de) * | 2008-11-07 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpenrotor |
DE102008058149A1 (de) * | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
US8221098B2 (en) * | 2009-03-09 | 2012-07-17 | Honeywell International Inc. | Radial turbomolecular pump with electrostatically levitated rotor |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
CN114593075B (zh) * | 2022-03-15 | 2023-03-24 | 北京中科科仪股份有限公司 | 一种分子泵 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2523390B1 (de) | 1975-05-27 | 1976-05-13 | Pfeiffer Vakuumtechnik | Statorhalterung f]r turbo-molekularpumpen |
DE3722164A1 (de) | 1987-07-04 | 1989-01-12 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
JPH04330397A (ja) | 1991-04-30 | 1992-11-18 | Fujitsu Ltd | ターボ分子ポンプ |
DE19951954A1 (de) | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US20010016160A1 (en) | 1997-06-27 | 2001-08-23 | Ebara Corporation | Turbo-molecular pump |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1288360A (en) * | 1916-11-06 | 1918-12-17 | Ludwig W Zaar | Turbine. |
US2610786A (en) * | 1946-06-25 | 1952-09-16 | Gen Electric | Axial flow compressor |
US3032260A (en) * | 1955-07-12 | 1962-05-01 | Latham Manufactruing Co | Rotary apparatus and method of making the same |
JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
DE3402549A1 (de) * | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molekularvakuumpumpe |
US5052887A (en) * | 1988-02-26 | 1991-10-01 | Novikov Nikolai M | Turbomolecular vacuum pump |
JPH02131089U (de) * | 1989-03-31 | 1990-10-30 | ||
JP3469055B2 (ja) * | 1997-08-20 | 2003-11-25 | 三菱重工業株式会社 | ターボ分子ポンプ |
DE29717764U1 (de) * | 1997-10-06 | 1997-11-20 | Leybold Vakuum GmbH, 50968 Köln | Stator für eine Turbomolekularvakuumpumpe |
JP3748323B2 (ja) * | 1998-01-09 | 2006-02-22 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE10010371A1 (de) * | 2000-03-02 | 2001-09-06 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
-
2003
- 2003-07-15 DE DE10331932.8A patent/DE10331932B4/de not_active Expired - Fee Related
-
2004
- 2004-06-02 JP JP2004164365A patent/JP2005036798A/ja active Pending
- 2004-06-17 EP EP04014174.9A patent/EP1498612B1/de not_active Expired - Lifetime
- 2004-07-14 US US10/890,730 patent/US7278822B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2523390B1 (de) | 1975-05-27 | 1976-05-13 | Pfeiffer Vakuumtechnik | Statorhalterung f]r turbo-molekularpumpen |
DE3722164A1 (de) | 1987-07-04 | 1989-01-12 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
JPH04330397A (ja) | 1991-04-30 | 1992-11-18 | Fujitsu Ltd | ターボ分子ポンプ |
US20010016160A1 (en) | 1997-06-27 | 2001-08-23 | Ebara Corporation | Turbo-molecular pump |
DE19951954A1 (de) | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1918588A3 (de) * | 2006-10-26 | 2015-05-20 | Pfeiffer Vacuum Gmbh | Statorscheibe für eine Turbomolekularpumpe |
DE102007048703A1 (de) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Mehrstufiger Turbomolekularpumpen-Pumpenrotor |
US8562293B2 (en) | 2007-10-11 | 2013-10-22 | Oerlikon Leybold Vacuum Gmbh | Multi-stage pump rotor for a turbomolecular pump |
WO2009089958A1 (de) | 2008-01-15 | 2009-07-23 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
Also Published As
Publication number | Publication date |
---|---|
EP1498612B1 (de) | 2015-07-29 |
US7278822B2 (en) | 2007-10-09 |
EP1498612A3 (de) | 2011-09-14 |
US20050013710A1 (en) | 2005-01-20 |
DE10331932B4 (de) | 2017-08-24 |
DE10331932A1 (de) | 2005-02-03 |
JP2005036798A (ja) | 2005-02-10 |
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