EP1918588A3 - Disque de stator pour une pompe turbomoléculaire - Google Patents

Disque de stator pour une pompe turbomoléculaire Download PDF

Info

Publication number
EP1918588A3
EP1918588A3 EP20070019878 EP07019878A EP1918588A3 EP 1918588 A3 EP1918588 A3 EP 1918588A3 EP 20070019878 EP20070019878 EP 20070019878 EP 07019878 A EP07019878 A EP 07019878A EP 1918588 A3 EP1918588 A3 EP 1918588A3
Authority
EP
European Patent Office
Prior art keywords
molecular pump
turbo molecular
stator disc
lug
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20070019878
Other languages
German (de)
English (en)
Other versions
EP1918588A2 (fr
EP1918588B1 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1918588A2 publication Critical patent/EP1918588A2/fr
Publication of EP1918588A3 publication Critical patent/EP1918588A3/fr
Application granted granted Critical
Publication of EP1918588B1 publication Critical patent/EP1918588B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP07019878.3A 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire Not-in-force EP1918588B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006050565A DE102006050565A1 (de) 2006-10-26 2006-10-26 Statorscheibe für eine Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1918588A2 EP1918588A2 (fr) 2008-05-07
EP1918588A3 true EP1918588A3 (fr) 2015-05-20
EP1918588B1 EP1918588B1 (fr) 2017-07-19

Family

ID=39102159

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07019878.3A Not-in-force EP1918588B1 (fr) 2006-10-26 2007-10-11 Disque de stator pour une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP1918588B1 (fr)
DE (1) DE102006050565A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102014100207B4 (de) * 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014102681A1 (de) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Statorscheibe
EP3051140B1 (fr) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
EP4325061A1 (fr) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204750A1 (de) * 1982-02-11 1983-08-25 Pfeiffer Vakuumtechnik Magnetisch gelagerte turbomolekularpumpe
EP0478882A1 (fr) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator pour une pompe turbomoléculaire
DE69101455T2 (de) * 1990-02-16 1994-07-14 Varian Spa Stator für eine Turbomolekularpumpe.
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
EP1498612A2 (fr) * 2003-07-15 2005-01-19 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204750A1 (de) * 1982-02-11 1983-08-25 Pfeiffer Vakuumtechnik Magnetisch gelagerte turbomolekularpumpe
DE69101455T2 (de) * 1990-02-16 1994-07-14 Varian Spa Stator für eine Turbomolekularpumpe.
EP0478882A1 (fr) * 1990-09-29 1992-04-08 Leybold Aktiengesellschaft Stator pour une pompe turbomoléculaire
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
EP1498612A2 (fr) * 2003-07-15 2005-01-19 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Also Published As

Publication number Publication date
DE102006050565A1 (de) 2008-04-30
EP1918588A2 (fr) 2008-05-07
EP1918588B1 (fr) 2017-07-19

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