EP0478882A1 - Stator pour une pompe turbomoléculaire - Google Patents

Stator pour une pompe turbomoléculaire Download PDF

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Publication number
EP0478882A1
EP0478882A1 EP91105817A EP91105817A EP0478882A1 EP 0478882 A1 EP0478882 A1 EP 0478882A1 EP 91105817 A EP91105817 A EP 91105817A EP 91105817 A EP91105817 A EP 91105817A EP 0478882 A1 EP0478882 A1 EP 0478882A1
Authority
EP
European Patent Office
Prior art keywords
stator
spacer rings
ring
stator according
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91105817A
Other languages
German (de)
English (en)
Other versions
EP0478882B1 (fr
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0478882A1 publication Critical patent/EP0478882A1/fr
Application granted granted Critical
Publication of EP0478882B1 publication Critical patent/EP0478882B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a stator for a turbomolecular vacuum pump with spacer rings and with partial ring disks carrying the stator blades, which are arranged with an outer edge between the spacer rings.
  • the structure of stators for turbomolecular vacuum pumps is described in DE OS 22 14 702.
  • the known stators include spacer rings and blade ring disks.
  • the blade ring disks have outer edge areas. Characterized in that the outer edge of a blade ring disk is clamped between two spacer rings, the ring disks and thus the stator blades are securely held in the pump.
  • the rotors of turbomolecular vacuum pumps are generally designed in one piece.
  • a turbomolecular vacuum pump with a one-piece rotor is assembled in such a way that the stator is built “around the rotor” by inserting the partial stator ring disks into the region of the rotor blades from the side.
  • stator disks Since the blades of the stator ring disks protrude into the space between the rotor blades, the stator disks must be designed as partial, preferably half ring disks. They are brought into position from the side.
  • the pump housing is pushed onto the fully assembled stator in such a way that it surrounds the stator.
  • the housing can be used to ensure that the stator core is centered. As a rule, however, means (centering edges, bolts, etc.) are provided which cause the stator to self-center.
  • stator half-washers When installing stators of this type, it always happens that two stator half-washers are not placed exactly on the associated spacer ring, in such a way that the half-ring discs overlap in a joint area. The consequence of such incorrect assembly is an oblique structure of the stator package.
  • the object of the present invention is to design the stator for a turbomolecular vacuum pump of the type mentioned at the outset in such a way that there is no longer any risk of incorrect assembly of the type described.
  • this object is achieved in that the outer edge of the partial stator ring washers is flanged and that the spacer rings are equipped with a corresponding, circumferential, receiving the flanged edge recess. If two partial ring washers are placed on a spacer ring in such a way that they overlap in a joint area during the assembly of a stator of this type, the step which is formed as a result is relatively high because of the flanged edge and is therefore immediately noticeable to the fitter. He is thus able to correct an incorrect placement of the ring washers immediately. There is no longer any danger of the stator being built up at an angle.
  • Figures 1 to 5 each show in cross section two spacer rings 1 and 2. They are designed in a manner known per se as profile rings and have mutually corresponding projections and recesses, which are not described in detail, and which bring about self-centering of the assembled stator package. Between the spacer rings is the outer edge of a partial ring, preferably semi-annular disc 3, which carries inwardly directed stator blades, not shown in detail.
  • FIG. 6 shows an enlarged section through the outer edge of the partial ring disk 3.
  • the outer edge of the ring washer 3 is flanged (flanged edge 4).
  • a peripheral groove or recess 5 is assigned to this edge 4 in the respectively associated spacer ring 2. In the assembled state of the stator, the flanged edge 4 is located therein.
  • the spacer rings 1, 2 have in the exemplary embodiments according to FIGS. 1 to 4 and inner axially directed surface areas 7, 8 and 9, 10 with different functions.
  • the outer surface areas 7 (downward axial surface area) and 8 (upward axial surface area) lie against one another and determine the distance between the inner axial surface areas 9, 10.
  • the system is indirectly ensured by the spacer ring 11.
  • the distance between the axial n surface areas 9, 10 is chosen so large that a space 6 is created which is sufficiently large to accommodate the outer edge of the annular disk 3. This ensures that the outer surface areas 7, 8 - regardless of the thickness of the partial stator washers 3 - are assured, i.e. the stator structure becomes independent of the tolerance of the metal sheets used for the stator washers 3.
  • the ring washers 3 may be appropriate to provide the ring washers 3 with one or more elevations 12 (Fig. 6). If these elevations (or a circumferential bead) are produced by embossing - for example at the same time as the stator blades are punched - a spring effect is created. This ensures that the partial ring disks 3 are clamped between the spacer rings 1, 2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP91105817A 1990-09-29 1991-04-12 Stator pour une pompe turbomoléculaire Expired - Lifetime EP0478882B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9013671U 1990-09-29
DE9013671U DE9013671U1 (de) 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe

Publications (2)

Publication Number Publication Date
EP0478882A1 true EP0478882A1 (fr) 1992-04-08
EP0478882B1 EP0478882B1 (fr) 1994-05-25

Family

ID=6857953

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91105817A Expired - Lifetime EP0478882B1 (fr) 1990-09-29 1991-04-12 Stator pour une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP0478882B1 (fr)
DE (2) DE9013671U1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) * 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire
WO2001011242A1 (fr) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Anneau de stator pour pompe a vide turbomoleculaire
EP1130269A3 (fr) * 2000-03-02 2002-10-30 Pfeiffer Vacuum GmbH Pompe turbo-moléculaire
EP2607706A3 (fr) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Pompe à vide
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2523390B1 (de) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
GB2206648A (en) * 1987-07-04 1989-01-11 Pfeiffer Vakuumtechnik Turbo-molecular pumps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2523390B1 (de) * 1975-05-27 1976-05-13 Pfeiffer Vakuumtechnik Statorhalterung f]r turbo-molekularpumpen
GB2206648A (en) * 1987-07-04 1989-01-11 Pfeiffer Vakuumtechnik Turbo-molecular pumps

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 8, no. 201 (M-325)(1638) 14. September 1984 & JP-A-59 090 796 ( SHIMAZU ) 25. Mai 1984 *
PATENT ABSTRACTS OF JAPAN vol. 9, no. 198 (M-404)(1921) 15. August 1985 & JP-A-60 062 692 ( HITACHI ) 10. April 1985 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997015760A1 (fr) * 1995-10-20 1997-05-01 Leybold Vakuum Gmbh Pompe a vide a friction a admission intermediaire
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet
WO2001011242A1 (fr) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Anneau de stator pour pompe a vide turbomoleculaire
EP1130269A3 (fr) * 2000-03-02 2002-10-30 Pfeiffer Vacuum GmbH Pompe turbo-moléculaire
EP1918588A3 (fr) * 2006-10-26 2015-05-20 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe turbomoléculaire
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
EP2607706A3 (fr) * 2011-12-23 2014-04-09 Oerlikon Leybold Vacuum GmbH Pompe à vide

Also Published As

Publication number Publication date
DE59101715D1 (de) 1994-06-30
EP0478882B1 (fr) 1994-05-25
DE9013671U1 (de) 1992-01-30

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