EP0478882B1 - Stator pour une pompe turbomoléculaire - Google Patents

Stator pour une pompe turbomoléculaire Download PDF

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Publication number
EP0478882B1
EP0478882B1 EP91105817A EP91105817A EP0478882B1 EP 0478882 B1 EP0478882 B1 EP 0478882B1 EP 91105817 A EP91105817 A EP 91105817A EP 91105817 A EP91105817 A EP 91105817A EP 0478882 B1 EP0478882 B1 EP 0478882B1
Authority
EP
European Patent Office
Prior art keywords
stator
distance rings
stator according
edges
another
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91105817A
Other languages
German (de)
English (en)
Other versions
EP0478882A1 (fr
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0478882A1 publication Critical patent/EP0478882A1/fr
Application granted granted Critical
Publication of EP0478882B1 publication Critical patent/EP0478882B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a stator for a turbomolecular vacuum pump with spacer rings and with partial ring disks carrying the stator blades, which are arranged with an outer edge between the spacer rings.
  • the structure of stators for turbomolecular vacuum pumps is described in DE OS 22 14 702.
  • the known stators include spacer rings and blade ring disks.
  • the blade ring disks have outer edge areas. Characterized in that the outer edge of a blade ring disk is clamped between two spacer rings, the ring disks and thus the stator blades in the pump are held securely.
  • the rotors of turbomolecular vacuum pumps are generally designed in one piece.
  • a turbomolecular vacuum pump with a one-piece rotor is assembled in such a way that the stator is built “around the rotor” by inserting the partial stator ring disks into the region of the rotor blades from the side.
  • stator disks Since the blades of the stator ring disks protrude into the space between the rotor blades, the stator disks must be designed as partial, preferably half ring disks. They are brought into position from the side.
  • the pump housing is pushed onto the fully assembled stator in such a way that it surrounds the stator.
  • the housing can be used to ensure that the stator core is centered. As a rule, however, are means (Centering edges, bolts, etc.) provided that cause the stator to self-center.
  • stator half-washers When installing stators of this type, it always happens that two stator half-washers are not placed exactly on the associated spacer ring, in such a way that the half-ring disks overlap in a joint area. The consequence of such an incorrect assembly is an inclined structure of the stator package.
  • the present invention has for its object to design the stator for a turbomolecular vacuum pump of the type mentioned in such a way that the risk of incorrect assembly of the type described no longer exists.
  • this object is achieved in that the outer edge of the stator partial ring disks is flanged and that the spacer rings are equipped with a corresponding, circumferential, receiving the flanged edge recess.
  • FIGS. 1 to 6 each show in cross section two spacer rings 1 and 2. They are designed in a manner known per se as profile rings and have mutually corresponding projections and recesses, which are not specified in detail and which cause self-centering of the assembled stator package. Between the spacer rings is the outer edge of a partial ring, preferably half ring disc 3, which carries stator blades directed inwards, not shown in detail.
  • FIG. 6 shows an enlarged section through the outer edge of the partial annular disk 3.
  • the outer edge of the ring washer 3 is flanged (flanged edge 4).
  • This edge 4 is assigned a circumferential groove or recess 5 in the associated spacer ring 2. In the assembled state of the stator, the flanged edge 4 is located therein.
  • the spacer rings 1, 2 have in the exemplary embodiments according to FIGS. 1 to 4 and inner axially directed surface areas 7, 8 and 9, 10 with different functions.
  • the outer surface areas 7 (downward axial surface area) and 8 (upward axial surface area) lie against one another and determine the distance between the inner axial surface areas 9, 10.
  • the system is indirectly ensured by the spacer ring 11.
  • the distance between the axial n surface areas 9, 10 is chosen so large that a space 6 is created which is sufficiently large for the reception of the outer edge of the annular disk 3. This ensures the contact of the outer surface areas 7, 8 - regardless of the thickness of the stator ring washers 3 - i.e. the stator structure is independent of the tolerance of the metal sheets used for the stator ring disks 3.
  • the partial ring disks 3 In order to avoid an excessively loose fit of the partial stator ring disks 3 between the spacer rings 1, 2, it can be expedient to provide the partial ring disks 3 with one or more elevations 12 (FIG. 6). If these elevations (or a surrounding bead) are embossed - for example, simultaneously with Punching the stator blades - produced, then there is a spring effect. This ensures that the partial washers 3 are clamped between the spacer rings 1, 2.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (8)

  1. Stator pour une pompe turbomoléculaire, comprenant des anneaux d'écartement (1, 2) et comprenant des disques semi-circulaires (3) qui portent les pales du stator, ces disques étant agencés avec une bordure extérieure entre les anneaux d'écartement, caractérisé en ce que la bordure extérieure des disques semi-circulaires (3) est rabattue, et en ce que les anneaux d'écartements (1, 2) sont équipés d'un évidement correspondant (5) qui reçoit la bordure rabattue (4).
  2. Stator selon la revendication 1, caractérisé en ce que les anneaux d'écartement (1, 2) présentent des surfaces intérieures (9, 10) et extérieures (8, 9) dirigées généralement axialement, qui ont une taille telle et sont associées les unes aux autres de telle manière que dans la condition assemblée de l'empilement de stator, les surfaces axiales extérieures (7, 8) sont en contact mutuel, et en ce que les surfaces axiales intérieures (9, 10) forment respectivement un espace (6) qui sert à la réception des bordures des disques semi-circulaires (3) du stator.
  3. Stator selon la revendication 2, caractérisé en ce que l'évidement (5) fait partie de l'espace (6).
  4. Stator selon l'une quelconque des revendications 1, 2 ou 3, caractérisé en ce que les bordures des disques semi-circulaires (3) du stator sont équipées de saillies (12) dirigées axialement et formant ressort.
  5. Stator selon l'une quelconque des revendications 2, 3 ou 4, caractérisé en ce que les zones de surface extérieures (7, 8) sont en contact mutuel indirectement par l'intermédiaire d'une bague d'espacement (11).
  6. Stator selon l'une quelconque des revendications précédentes, caractérisé en ce que les anneaux d'écartement (1, 2) présentent des saillies et des évidements qui se correspondent mutuellement dans le but de l'autocentrage de l'empilement de stator.
  7. Stator selon l'une quelconque des revendications 1 à 6, caractérisé en ce que les bordures (13, 14) des anneaux d'écartements (1, 2) dirigées vers l'intérieur sont chanfreinées.
  8. Stator selon la revendication 6, caractérisé en ce que le pied des pales de stator se trouve dans l'espace entre les bordures chanfreinées (13, 14).
EP91105817A 1990-09-29 1991-04-12 Stator pour une pompe turbomoléculaire Expired - Lifetime EP0478882B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9013671U DE9013671U1 (de) 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe
DE9013671U 1990-09-29

Publications (2)

Publication Number Publication Date
EP0478882A1 EP0478882A1 (fr) 1992-04-08
EP0478882B1 true EP0478882B1 (fr) 1994-05-25

Family

ID=6857953

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91105817A Expired - Lifetime EP0478882B1 (fr) 1990-09-29 1991-04-12 Stator pour une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP0478882B1 (fr)
DE (2) DE9013671U1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
US8709070B2 (en) 2011-05-10 2014-04-29 Abbott Cardiovascular Systems Inc. Bioabsorbable scaffold with particles providing delayed acceleration of degradation
DE202011109517U1 (de) * 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe

Also Published As

Publication number Publication date
EP0478882A1 (fr) 1992-04-08
DE59101715D1 (de) 1994-06-30
DE9013671U1 (de) 1992-01-30

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