EP1422423A1 - Appareil avec boítier pouvant être mis à vide - Google Patents

Appareil avec boítier pouvant être mis à vide Download PDF

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Publication number
EP1422423A1
EP1422423A1 EP03029746A EP03029746A EP1422423A1 EP 1422423 A1 EP1422423 A1 EP 1422423A1 EP 03029746 A EP03029746 A EP 03029746A EP 03029746 A EP03029746 A EP 03029746A EP 1422423 A1 EP1422423 A1 EP 1422423A1
Authority
EP
European Patent Office
Prior art keywords
pump
housing
vacuum
stator
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03029746A
Other languages
German (de)
English (en)
Other versions
EP1422423B2 (fr
EP1422423B1 (fr
Inventor
Ralf Adamietz
Christian Dr. Beyer
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7868823&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1422423(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Priority claimed from EP99917896.5A external-priority patent/EP1090231B2/fr
Publication of EP1422423A1 publication Critical patent/EP1422423A1/fr
Application granted granted Critical
Publication of EP1422423B1 publication Critical patent/EP1422423B1/fr
Publication of EP1422423B2 publication Critical patent/EP1422423B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a device with a Housing in which there is at least one evacuable Chamber is located, as well as with a housing Friction vacuum pump, which with the to be evacuated Chamber is connected.
  • the associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level.
  • Frictional vacuum pumps of this type are preferably used the evacuation of corpuscular beam devices (e.g. B. mass spectrometers) with by fading from each other separate chambers in which during the operation of the Corpuscular beam device generates different pressures and should be maintained.
  • corpuscular beam devices e.g. B. mass spectrometers
  • Such devices with the associated, to be evacuated chambers itself in an independent housing. With this housing are the connection openings of the friction vacuum pump a separate junction box with relatively long Connection lines (15, 26, 17) connected with the disadvantage relatively high conductance losses.
  • the present invention is based on the object an establishment of the type concerned here with an essential improved connection geometry between the chamber (s) to be evacuated and the friction vacuum pump to accomplish.
  • this object is achieved in that the housing of the device has a bore inside which is the friction vacuum pump.
  • a particular advantage of the invention is that a friction pump can be used where the initially described functions of the usual, one-piece housing divided into two components are.
  • An inner component ensures the assignment of Chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slide-in, the already many functional tests, e.g. B. that of balancing, can be subjected.
  • the outer case has the task of being functional even without an outer housing Friction vacuum pump to the application of the Adapt to customers. It is no longer necessary to have one Manufacture or keep ready a variety of friction pump types but just one or a few universal, compact and functional pump units (Slots, cartridges).
  • FIG. 1 shows a friction vacuum pump 1 with a stator 3, Rotor 4 and chassis 5 shown.
  • chassis 5 Located in chassis 5 the motor drive 6, 7, the armature 7 over supports the bearings 8 in the chassis 5. With the anchor 7 the shaft 9 led out of the chassis 5 is connected, which carries the rotor 4.
  • the axis of rotation of the rotor system is designated 11.
  • the friction vacuum pump 1 according to the figure 1 three pump stages 12, 13, 14, two of which (12, 13) as turbomolecular vacuum pump stages and one (14) as Molecular (Holweck) pump stage are formed. To the Molecular pump stage 14 closes the outlet of the Pump 17 on.
  • the pump 1 has two housings 18, 19 equipped.
  • the inner housing 18 is essentially cylindrical and surrounds the stator 3. On its high-vacuum side, it is with an inside equipped edge 20 of the stator 3rd rests and in this case the upper one Stator ring forms.
  • the housing 18 is on the fore-vacuum side attached to the chassis 5, using the flange 21. Flange 21 and chassis 5 are vacuum tight connected with each other. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 '.
  • the outer housing 19 has an inner bore 22 with an inward gradation 23, the height corresponds to the width of the edge 20 on the first housing 18.
  • a seal 24 which is expedient in the end face of the housing 18 is embedded. Also a radial one Sealing is possible.
  • Has fore-vacuum side also the housing 19 a device, e.g. the flange 25, with which it is attached to the chassis 5 or to the housing 18 is. After loosening this attachment, the of the inner housing 18 and the components therein unit formed as a whole from the bore 22 be taken out. It forms one of the second housing 19 independent insert 27.
  • the first pump stage 12 is located on the high vacuum side consisting of four pairs of rotor blade rows and stator blade rows. Your inlet, the effective gas passage area, is designated by 26. The edge 20 surrounds the gas passage surface 26 and forms a passage opening 28 for gases entering pump 1.
  • the second is connected to the first pump stage 12 Pump stage 13, which consists of three pairs of one stator blade row each and a row of rotor blades. Your entry is marked 29.
  • the second pump stage 13 is from the first pump stage 12 spaced.
  • the selected distance (height) a secures the free access to the gas molecules to be pumped Gas inlet 29.
  • the distance a is expediently greater than a quarter, preferably greater than a third, of Diameter of the rotor system 4.
  • the subsequent Holweck pump includes one rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 face each other.
  • Another opening formed by the inner housing 18 is arranged laterally and designated 35. she is used for the passage of gases that directly Inlet 29 of the second pump stage 13 are supplied.
  • the outer housing 19 has the task of pump 1 or two pump stages (12, 13) of this pump with the device to connect the customer.
  • the housing 19 is formed in the embodiment of Figure 1 such that the levels of all the connection openings 36, 37 are located on the side. This is special the distance of the opening 37 to the associated gas inlet 29 very small, so the pumping speed of the pump stage 13 impairing conductance losses negligible are. This would also apply to any other intermediate connection apply to the downstream of the intermediate connection 37/29. Otherwise the diameter exceeds the connection opening 37 the height a by about Double. This measure also serves the reduction the conductance losses between inlet 29 and connection opening 37.
  • the side connection openings can be equipped with one flange each. In the embodiment according to Figure 1 is a common one Flange 39 provided.
  • the pump 1 shown or its pump-effective elements are expediently designed such that a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and in the area of the connection opening 36 A pressure of approximately 10 -2 to 10 -4 mbar is generated in the area of the connection opening 37.
  • the second pumping stage is intended to generate a high pumping speed (eg 200 l / s).
  • the subsequent two-stage Holweck pump stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pump stage is usually independent of the fore-vacuum pressure.
  • FIG. 2 shows a single-flow friction vacuum pump 1, their pump-active surfaces exclusively from stator blades 41 and rotor blades 42 are formed (Turbomolecular vacuum pump).
  • the second, outer casing 19 carries on the face the flange 43, which is the face arranged connection opening 44 surrounds.
  • FIG 3 shows a device 51 according to the invention with chambers 52, 53, 54 to be evacuated and an insert-shaped one Unit 27, as described for Figure 1 has been.
  • the housing of the device - e.g. a corpuscular beam device - is essentially in one piece trained and designated 55.
  • Close of the chambers 53, 54 to be evacuated is the housing equipped with the bore 22 in which the insert 27 is located.
  • Via the passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37 are the chambers 53, 54 with the respective Inlets 26, 29 in connection.
  • connection means are omitted.
  • the distances between the chambers to be evacuated 53, 54 and Inlets 26, 29 are optimally small.
  • the two components are made of two concentric ones Housings formed, of which the interior of the centering, Assignment and mounting of chassis 5, stator 3 and rotor 4, which thereby serves the already operational, form a rack that is independent of the outer housing.
  • the outer housing 19, 55 seals the vacuum pump towards the outside and serves to connect with those to be evacuated Chambers, be it via connecting flanges or in that it is already part of the facility with the chambers to be evacuated.
  • the inner slide-in replace the inner housing with a tie rod system.
  • This enables a more compact design of the interior Slot.
  • the tie rod system Components are easier to manufacture.
  • the tie rods take over the centering of stator rings, so that these themselves no longer with Centering devices must be equipped.
  • FIGS. 4 and 5 show exemplary embodiments (FIG 4: longitudinal section through an insert 27; Figure 5: Cross section through an insert 27 at the level of the opening 35) for an inner insert 27 with a tie rod system 61.
  • This comprises three to six (or more) tie rods 62 as well as holes and threads in the components (chassis 5, stator 3), which from the tie rod system 61 to a Unit to be assembled.
  • Figures 4 and 5 show that the opening 35 extends over the entire circumference of the insert 27 and is only interrupted by the tie rods 62. Access of the gas molecules to the inlet 29 of the pump stage 13 (shown in plan view in FIG. 5) is thereby almost freely.
  • Figure 4 leaves the structure of a particularly advantageous design Recognize tie rods 62. They are formed in two parts.
  • the fore-vacuum tie rod sections 63 with their heads 64 penetrate the stator rings of the pump stage 13 and the outer stator element 33 of the pump stage 14. Their threaded ends are in the Flange 21 of the chassis 5 screwed in.
  • the length of the Heads 64 determine the axial extent of opening 35.
  • High vacuum side Heads 64 each have an internal thread, in the respective high-vacuum-side tie rod sections 65 are screwable.
  • Their heads 66 are on top Stator ring of pump stage 13. Assert in the rest they cause the stator rings of the pump stage 12 and thereby not only a connection when screwed in High vacuum level 12 with the other levels 13 and 14 but also a centering of the stator rings.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03029746.9A 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide Expired - Lifetime EP1422423B2 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19823270 1998-05-26
DE19823270 1998-05-26
DE19901340 1999-01-15
DE19901340.3A DE19901340B4 (de) 1998-05-26 1999-01-15 Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
EP99917896.5A EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
EP99917896.5 Division 1999-03-27
EP99917896.5A Division EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
EP99917896.5A Division-Into EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type

Publications (3)

Publication Number Publication Date
EP1422423A1 true EP1422423A1 (fr) 2004-05-26
EP1422423B1 EP1422423B1 (fr) 2005-10-05
EP1422423B2 EP1422423B2 (fr) 2016-01-20

Family

ID=7868823

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03029746.9A Expired - Lifetime EP1422423B2 (fr) 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide

Country Status (4)

Country Link
EP (1) EP1422423B2 (fr)
JP (1) JP5069264B2 (fr)
KR (1) KR100613957B1 (fr)
DE (1) DE19901340B4 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
US7811065B2 (en) 2004-06-25 2010-10-12 Edwards Limited Vacuum pump for differential pumping multiple chambers

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3564538B1 (fr) 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide
KR102669882B1 (ko) * 2022-02-08 2024-05-28 (주)엘오티베큠 터보 분자 펌프

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229725A1 (de) * 1972-06-19 1974-01-17 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
CH674785A5 (en) * 1988-03-07 1990-07-13 Dino Systems Limited Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5733104A (en) † 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
FR2736103B1 (fr) † 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229725A1 (de) * 1972-06-19 1974-01-17 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
CH674785A5 (en) * 1988-03-07 1990-07-13 Dino Systems Limited Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7811065B2 (en) 2004-06-25 2010-10-12 Edwards Limited Vacuum pump for differential pumping multiple chambers
US8757987B2 (en) 2004-06-25 2014-06-24 Edwards Limited Vacuum pump for differentially pumping multiple chambers
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE202008017530U1 (de) 2007-02-28 2009-12-17 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe

Also Published As

Publication number Publication date
EP1422423B2 (fr) 2016-01-20
KR100613957B1 (ko) 2006-08-18
DE19901340B4 (de) 2016-03-24
JP2009121491A (ja) 2009-06-04
JP5069264B2 (ja) 2012-11-07
DE19901340A1 (de) 1999-12-09
EP1422423B1 (fr) 2005-10-05
KR20010043815A (ko) 2001-05-25

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