EP1597556A1 - Detecteur de fuites de gaz traceur - Google Patents

Detecteur de fuites de gaz traceur

Info

Publication number
EP1597556A1
EP1597556A1 EP03789352A EP03789352A EP1597556A1 EP 1597556 A1 EP1597556 A1 EP 1597556A1 EP 03789352 A EP03789352 A EP 03789352A EP 03789352 A EP03789352 A EP 03789352A EP 1597556 A1 EP1597556 A1 EP 1597556A1
Authority
EP
European Patent Office
Prior art keywords
leak detector
housing
vacuum pump
detector according
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP03789352A
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Hermann Boy
Rainer Hölzer
Günter Holstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1597556A1 publication Critical patent/EP1597556A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Definitions

  • the invention relates to a test gas leak detector with the features of the preamble of claim 1.
  • a leak detector with these features is known from DE 31 24 205 AI. It comprises a high-vacuum pump, which is designed as a turbomolecular pump and to the inlet of which a test gas detector is connected, and a forevacuum pump.
  • the high vacuum pump is also equipped with an intermediate inlet and an outlet.
  • a line system is connected to these connections which, in addition to the lines, has valves and connections for a test specimen and for the backing pump.
  • the components mentioned are arranged in such a way that the test object is connected to the intermediate inlet of the high vacuum pump via a first valve.
  • the device under test is also connected to the inlet of the backing pump via a second valve.
  • the outlet of the high vacuum pump is connected to the inlet of the fore vacuum pump via a third valve.
  • test gas leak detector is complex because it consists of a large number of individual components.
  • Another disadvantage is the adaptation of the properties of the test gas leak detector to different leak detection methods or test objects.
  • the high vacuum pump is to be replaced by another one that is adapted to the changed circumstances. This assumes that the line valve system and the test gas detector have to be disconnected from the connections of the high vacuum pump and then connected to the connections of the new high vacuum pump in a vacuum-tight manner. The more intermediate connections the high vacuum pump has, the greater the effort. From DE 195 23 430 AI it is known to equip the high vacuum pump with several intermediate connections. Designs of this type have been used more and more recently.
  • the present invention has for its object to simplify the structure of a test gas leak detector of the type mentioned and to reduce the assembly effort that is necessary when adapting the leak detector to different leak detection methods or test objects.
  • the international publication WO 99/61799 shows how the insert must be constructed.
  • the envelope structure essentially only has the function of ensuring the mutual assignment of the individual components of the high vacuum pump (stator, motor, shaft, rotor).
  • the housing of the leak detector takes on the function of the otherwise usual housing of the high-vacuum pump, namely sealing the pump-active components to the outside and contributing to the connection of the pump to the test gas detector (support of a connecting flange, connection to intermediate inlets).
  • the insert consists of two or three sections; However, it expediently consists of a uniform, stable structure which can be assembled and disassembled as a whole.
  • the suction capacity of the test gas leak detector can be adapted to changed circumstances. It is advantageous here that the removal or the change of the insert has no influence whatsoever on the position of the valves, that is, it is not associated with an undesired opening of connecting channels.
  • the simple separation of the housing of the leak detector from the insertion of the high vacuum pump has the advantage that a cast, high vacuum block with integrated channels and components and with the receptacle provided therein can be used as the housing of the leak detection device.
  • Figure 1 is a vacuum scheme for a leak detector of the type according to the invention.
  • FIG. 2 shows a section through an exemplary embodiment for a leak detector according to the invention.
  • Essential components of the leak detector 1 shown in FIGS. 1 and 2 are a high-vacuum pump 2 with several stages, a test gas detector 5 connected to the inlet 3 of the high-vacuum pump - expediently via a valve 4 (only in FIG. 1) (when using helium as the test gas) usually a mass spectrometer) and a backing pump 6 (only in FIG. 1).
  • the high vacuum pump is designed as a compound friction pump. It has a turbomolecular pump stage 7 on the suction side and a molecular pump stage 8 on the pressure side, e.g. B. a thread step.
  • the housing of the leak detector is designated 9.
  • the rotor 11 with its rotor blades 12 and the stator 13 with its stator blades 14 are components of the turbomolecular pump stage.
  • the stator blades 14 are held between spacer rings 15.
  • Components of the molecular pump stage 8 are a rotating cylinder 21, on the outside of which a stator 25 equipped with a thread 22 is assigned.
  • the inlet of the leak detector 1 is designated 27. In a known manner, it serves to exclude a test specimen to be examined for leaks, a leak detection chamber or a sniffer.
  • Line 28 connects to inlet 27, via which gases are sucked in which contain test gas in the event of a defective test specimen.
  • the test gas line 28 is connected via the line sections 31, 32, each equipped with a valve 33 or 34, to the stages 7, 8 of the high vacuum pump 2. Furthermore, the line 28 is connected via the line section 35 with the valve 36 to the inlet of the fore-vacuum pump 6.
  • the line extending between the outlet of the high vacuum pump 2 and the inlet of the fore vacuum pump 6 is denoted by 37. It is equipped with the valve 38.
  • a leak detection process takes place as follows: First, the test object or the leak detection chamber with the valve 36 open - all other valves are closed - is evacuated with the help of the fore-vacuum pump 6. The gross leak detection then begins by opening valve 38. Then after closing the valve 36 and Opening the valve 34, the fine leak detection and finally, after opening the valve 33, the highly sensitive leak detection can be carried out.
  • the schematic solution according to FIG. 1 also shows a flushing gas connection which leads via line 41 with valve 42 into line 37 and via which the leak detector can be flooded for the purpose of quickly removing troublesome test gas residues.
  • the leak detector 1 is equipped with a second inlet 43. It is located on the side - not on the face like inlet 27 - and can be used optionally.
  • the dashed line 45 in FIG. 1 indicates the housing 9 of the leak detector 1, as is shown in FIG. 2. It can be seen that the high-vacuum pump 2, the lines 28, 31, 32, 35, 37 and the valves 33, 34, 36, 38 are integrated in the housing 9.
  • the dash-dotted lines 46, 47 in FIG. 1 are intended to indicate that the backing pump 6 and / or the purge gas valve 42 can also be integrated in the housing 9.
  • the design of the high-vacuum pump 2 is essential. It comprises the insert 51, which is in the ready-to-use state in the associated opening 52 in the housing 9.
  • the insert itself comprises essential components of the high-vacuum pump (stator, motor, shaft, rotor) designed as a turbomolecular pump, which are held together by a casing structure 53.
  • the outer shape of the envelope structure 53 is adapted to the shape of the receiving opening 52 in the housing 9. In the embodiment shown in Figure 2, it is in essentially cylindrical.
  • Outer steps 54, 55 ensure • a defined position in the operational state.
  • Sealing rings 56 are provided for sealing the gap between the casing structure 53 and the housing 9 or opening 52.
  • the casing structure 53 and also the stators 13, 25 of the high vacuum pump stages 7, 8 are equipped with openings 58, 59 and 61, 62, respectively.
  • the cross-section of these openings which can extend for example over almost the entire circumference of the pump, and the design of the pump-active surfaces at the level of these openings determine the pump properties of the high-vacuum pump. If these are changed, it is only necessary at the leak detector according to the invention, the insert 51 trainees change '.
  • valves 33, 34, 36, 38 Components of the leak detector according to the invention are the valves 33, 34, 36, 38, the closure components of which are integrated in the housing 9. It is expedient if the drives 63, 64, 66, 68 of these valves are also integrated in the housing 9. To accommodate these drives, the housing 9 has cavities 71 to 74. The housing 9 is expediently divisible in a plane that intersects these cavities, so that the valves — be it the closure components alone or these together with their drive — can be assembled in a simple manner. In addition, there must be holes for control lines if the valves are not operated wirelessly.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

L'invention concerne un détecteur de fuites de gaz traceur (1) comportant un raccordement (27) pour un échantillon, un renifleur ou une cavité de détection de fuites, une pompe à vide poussé (2), à laquelle est raccordé un détecteur de gaz traceur (5) côté aspiration, ainsi qu'une conduite de gaz traceur (28) s'accouplant au raccordement (27) du détecteur de fuites, cette conduite étant reliée par des segments de ligne (31, 32, 35) et des vannes (33, 34, 36) à au moins un niveau intermédiaire de la pompe à vide poussé (2) et à la zone de prévide de ladite pompe (2). L'invention vise à simplifier la conception et à diminuer les travaux de montage en cas d'adaptations à effectuer. A cet effet, le détecteur de fuites de gaz (1) est doté d'un boîtier (9) dans lequel sont intégrés au moins une partie des conduites et des vannes ainsi que la pompe à vide poussé (2), pourvue d'un insert démontable (51). Cet insert, qui comprend une enveloppe extérieure (53) à évidements (58, 61), se trouve dans un orifice de logement (52) disposé dans le boîtier (9) lorsque le détecteur de fuites de gaz (1) est en état de marche.
EP03789352A 2003-02-27 2003-12-19 Detecteur de fuites de gaz traceur Ceased EP1597556A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2003108420 DE10308420A1 (de) 2003-02-27 2003-02-27 Testgaslecksuchgerät
DE10308420 2003-02-27
PCT/EP2003/014589 WO2004077005A1 (fr) 2003-02-27 2003-12-19 Detecteur de fuites de gaz traceur

Publications (1)

Publication Number Publication Date
EP1597556A1 true EP1597556A1 (fr) 2005-11-23

Family

ID=32841948

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03789352A Ceased EP1597556A1 (fr) 2003-02-27 2003-12-19 Detecteur de fuites de gaz traceur

Country Status (6)

Country Link
US (1) US7240536B2 (fr)
EP (1) EP1597556A1 (fr)
JP (1) JP4457018B2 (fr)
AU (1) AU2003293948A1 (fr)
DE (1) DE10308420A1 (fr)
WO (1) WO2004077005A1 (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
DE602005007593D1 (de) * 2005-06-30 2008-07-31 Varian Spa Vakuumpumpe
DE102005043494A1 (de) * 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102005054638B4 (de) * 2005-11-16 2013-09-26 Oerlikon Leybold Vacuum Gmbh Mobiles Lecksuchegerät
DE102006047856A1 (de) * 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102007043382A1 (de) * 2007-09-12 2009-03-19 Inficon Gmbh Schnüffellecksucher
GB2462804B (en) * 2008-08-04 2013-01-23 Edwards Ltd Vacuum pump
US8230722B1 (en) 2010-03-16 2012-07-31 Sandia Corporation Residual gas analysis device
FR2974412B1 (fr) * 2011-04-21 2013-06-07 Adixen Vacuum Products Procede de controle d'un detecteur de fuites et detecteur de fuites
DE102011107334B4 (de) * 2011-07-14 2023-03-16 Leybold Gmbh Lecksucheinrichtung sowie Verfahren zum Überprüfen von Gegenständen auf Dichtigkeit mittels einer Lecksucheinrichtung
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102014101257A1 (de) * 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102016210701A1 (de) * 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
JP6533341B2 (ja) * 2016-06-30 2019-06-19 株式会社キッツ バルブ用耐圧検査装置とその検査方法並びに水素ガス検出ユニット
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
DE102020132896A1 (de) 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
CN115219112A (zh) * 2022-06-16 2022-10-21 北京中科科仪股份有限公司 分子泵与质谱检漏仪

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3124205A1 (de) 1981-06-19 1982-12-30 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Lecksuchanordnung
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
US5733104A (en) 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0603694A1 (fr) 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
JP2655315B2 (ja) * 1994-06-29 1997-09-17 日本真空技術株式会社 複合分子ポンプを使用した漏洩探知装置
US5634778A (en) * 1994-11-30 1997-06-03 Hein-Werner Corporation Remote control pump
DE59912629D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Gerät mit evakuierbarer Kammer
FR2784184B1 (fr) * 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
DE29916531U1 (de) * 1999-09-20 2001-02-08 Volkmann, Thilo, 59514 Welver Ejektorpumpe
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2004077005A1 *

Also Published As

Publication number Publication date
AU2003293948A1 (en) 2004-09-17
US20060169028A1 (en) 2006-08-03
JP2006514288A (ja) 2006-04-27
DE10308420A1 (de) 2004-09-09
US7240536B2 (en) 2007-07-10
JP4457018B2 (ja) 2010-04-28
WO2004077005A1 (fr) 2004-09-10

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