EP1706645A1 - Pompe à vide à frottement à plusieurs étages - Google Patents

Pompe à vide à frottement à plusieurs étages

Info

Publication number
EP1706645A1
EP1706645A1 EP04790966A EP04790966A EP1706645A1 EP 1706645 A1 EP1706645 A1 EP 1706645A1 EP 04790966 A EP04790966 A EP 04790966A EP 04790966 A EP04790966 A EP 04790966A EP 1706645 A1 EP1706645 A1 EP 1706645A1
Authority
EP
European Patent Office
Prior art keywords
stage
rotor
vacuum pump
compressor
circular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04790966A
Other languages
German (de)
English (en)
Other versions
EP1706645B1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1706645A1 publication Critical patent/EP1706645A1/fr
Application granted granted Critical
Publication of EP1706645B1 publication Critical patent/EP1706645B1/fr
Anticipated expiration legal-status Critical
Not-in-force legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbocompressor stage, which has a rotor rotating about its axis with rotor disks protruding between fixed stator disks.
  • Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers.
  • a multi-stage friction vacuum pump which is described in DE 100 04 271 AI (Leybold Vacuum GmbH), has one or more turbocompressor stages, each consisting of a rotor with radially projecting rotor disks and a stator there are radially protruding stator disks. The rotor disks and stator disks mesh with one another at a short distance. They cause a molecular flow axially to the rotor axis.
  • a circular compressor stage which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths.
  • Rotor blades and stator blades alternate with one another and produce a molecular flow which, depending on the direction of rotation of the rotor and the angle of attack of the blades, is either directed radially inwards or radially outwards.
  • the invention has for its object to provide a multi-stage friction vacuum pump with at least one turbocompressor stage, in which the stages are arranged in series in the flow path and which is intended to provide increased compression.
  • the multi-stage friction vacuum pump has the features of claim 1.
  • the vacuum pump contains a turbocompressor stage and a circular compressor stage downstream in the flow path. While the turbocompressor stage is suitable for generating a high vacuum, the downstream circular compressor stage serves to increase the pressure. Consequently, the circular compressor stage can have small dimensions because of the gas volume reduced by the compression.
  • the circular compressor stage has a small axial extent because the flow is mainly in the radial direction.
  • the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased compared to single-stage friction vacuum pumps.
  • the combination according to the invention of an upstream turbocompressor stage and a downstream circular compressor stage offers the advantage of a small space requirement with high compression performance.
  • the turbocompressor stage and the circular compressor stage are integrated in a common combination of rotor and stator.
  • the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages likewise consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
  • the friction vacuum pump according to the invention is preferably designed as a multiple inlet pump. It has at least two axially spaced, in series compressing turbocompression stages, between which there is an intermediate inlet.
  • a circular compressor stage is arranged on the compressor side of the first turbocompressor stage and / or the second turbocompressor stage.
  • Such a pump is particularly suitable for use in connection with mass spectrometers. Due to the increased gas flow at the intermediate inlet, to which the analysis device of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative influence on the pressure at the high vacuum inlet. The increase in gas flow at the intermediate inlet means an increase in sensitivity for the mass spectrometer.
  • FIG. 1 shows a longitudinal section through a friction vacuum pump according to the invention
  • FIGS. 1 A first figure.
  • the friction vacuum pump shown in FIG. 1 has a housing 10 which is essentially cylindrical and has a high vacuum connection HV at one end. There is an intermediate inlet ZE1 in the housing wall, which is open on the side. The intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts to one another.
  • first turbocompressor stage 11 comprising a stator 12 and a rotor 13.
  • the stator 12 has a plurality of stator disks 15 directed radially inwards from a peripheral wall 14.
  • the rotor 13 has a plurality of rotor disks 16 projecting between the stator disks 15 and projecting radially outwards.
  • the rotor 13 is driven by a drive 17, which contains a high-speed electric motor, at a speed of 30,000 to 60,000 rpm. driven.
  • a second turbocompressor stage 21 is arranged on the compressor side of the first turbocompressor stage 11 and is connected on the inlet side to the intermediate inlet ZE1.
  • the turbocompressor stage 21 consists of a stator 22 and a rotor 23.
  • the stator 22 has a plurality of stator disks 25 directed radially inwards from a peripheral wall 22.
  • the rotor 23 has a plurality of projecting radially outwardly projecting between the stator disks 25 Rotor disks 26 on.
  • the rotors 13 and 23 are firmly connected to one another and are driven jointly by the drive 17.
  • a second compressor stage 30 is connected to the second turbocompressor stage 21 in the housing 10 and is additionally connected to an intermediate inlet ZE2.
  • the compressor stage 30 is, for example, a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, English or side channel pump.
  • a circular compressor stage 33 is provided after the first turbocompressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbocompressor stage 11, and a stator disk 32, which is part of the stator 12.
  • the rotor disk 34 has rotor blades 35 which are arranged on concentric circles and the stator disk 32 has stator blades 36 which are likewise arranged on concentric circles and engage in the gaps between the rotor circles, as shown in FIG. 2.
  • the stator blades and rotor blades have opposite inclinations with respect to the radial direction.
  • the circular compressor stage 33 conveys either radially outwards or radially inwards.
  • the direction of conveyance is indicated by the arrow 37 in the present exemplary embodiment.
  • the gas transport goes from the high vacuum inlet HV through the turbocompressor stage 11 and from its circumference radially inward through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1.
  • the turbocompressor stage 21 conveys the gas from the intermediate inlet ZE1 to the compressor stage 30.
  • the second intermediate inlet ZE2 also opens into the compressor stage 30.
  • the compressor stage 30 delivers to an outlet (not shown).
  • One of the rotor disks 16 of the turbocompressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33.
  • the stator disk of the The circular compressor stage also forms the end wall for the pressure-side end of the turbocompressor stage 11.
  • a particular advantage is that the circular compressor stage 33 is, as it were, integrated into the turbocompressor stage 11.
  • the only additional effort required is the rotor and stator blades 35, 36, which are additionally provided on the rotor and stator of the turbocompressor stage.
  • a circular compressor stage 33 can also be provided behind the second turbocompressor stage 21.
  • the gas flow on the pressure side is increased by the circular compressor stage provided on the pressure side by the respective turbocompressor stage and integrated in the turbocompressor stage. For a connected mass spectrometer, this means an increase in sensitivity.
  • FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from the outside inwards.
  • the blade surface of the rotor disk 34 is conical.
  • the rotor blades 35 have an axial length that decreases as the radius of the circular path becomes smaller.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à frottement à plusieurs étages comprenant au moins un étage turbocompresseur (11), un compresseur circulaire (33) étant monté côté refoulement de l'étage turbocompresseur. De faibles dimensions axiales, cette pompe permet d'accroître la compression sans augmenter son encombrement de manière notable.
EP04790966A 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages Not-in-force EP1706645B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe
PCT/EP2004/012196 WO2005047707A1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages

Publications (2)

Publication Number Publication Date
EP1706645A1 true EP1706645A1 (fr) 2006-10-04
EP1706645B1 EP1706645B1 (fr) 2008-12-17

Family

ID=34559626

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04790966A Not-in-force EP1706645B1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages

Country Status (7)

Country Link
US (1) US20070081889A1 (fr)
EP (1) EP1706645B1 (fr)
JP (1) JP2007510853A (fr)
CN (1) CN100453817C (fr)
CA (1) CA2545566A1 (fr)
DE (2) DE10353034A1 (fr)
WO (1) WO2005047707A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN101392749B (zh) * 2008-10-31 2012-05-23 东北大学 旋涡式真空泵
GB0901872D0 (en) 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (de) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
US9217439B2 (en) 2010-07-02 2015-12-22 Edwards Japan Limited Vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (fr) 2012-01-27 2019-03-13 Edwards Limited Pompe à vide de transfert gazeux
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
NL2013493A (en) * 2013-10-16 2015-04-20 Asml Netherlands Bv Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method.
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (zh) * 2017-12-29 2020-03-24 东北大学 一种多级复合高真空干泵
CA3159329A1 (fr) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Pompe a turbine tesla et procedes associes
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005047707A1 *

Also Published As

Publication number Publication date
EP1706645B1 (fr) 2008-12-17
DE502004008709D1 (de) 2009-01-29
WO2005047707A1 (fr) 2005-05-26
CN1878962A (zh) 2006-12-13
CA2545566A1 (fr) 2005-05-26
CN100453817C (zh) 2009-01-21
DE10353034A1 (de) 2005-06-09
US20070081889A1 (en) 2007-04-12
JP2007510853A (ja) 2007-04-26

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