DE10353034A1 - Mehrstufige Reibungsvakuumpumpe - Google Patents

Mehrstufige Reibungsvakuumpumpe Download PDF

Info

Publication number
DE10353034A1
DE10353034A1 DE10353034A DE10353034A DE10353034A1 DE 10353034 A1 DE10353034 A1 DE 10353034A1 DE 10353034 A DE10353034 A DE 10353034A DE 10353034 A DE10353034 A DE 10353034A DE 10353034 A1 DE10353034 A1 DE 10353034A1
Authority
DE
Germany
Prior art keywords
compressor stage
turbo
circular
rotor
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10353034A
Other languages
German (de)
English (en)
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE10353034A priority Critical patent/DE10353034A1/de
Priority to JP2006538704A priority patent/JP2007510853A/ja
Priority to EP04790966A priority patent/EP1706645B1/fr
Priority to DE502004008709T priority patent/DE502004008709D1/de
Priority to CA002545566A priority patent/CA2545566A1/fr
Priority to CNB2004800334295A priority patent/CN100453817C/zh
Priority to PCT/EP2004/012196 priority patent/WO2005047707A1/fr
Priority to US10/578,989 priority patent/US20070081889A1/en
Publication of DE10353034A1 publication Critical patent/DE10353034A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE10353034A 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe Withdrawn DE10353034A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe
JP2006538704A JP2007510853A (ja) 2003-11-13 2004-10-28 多段式の摩擦真空ポンプ
EP04790966A EP1706645B1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages
DE502004008709T DE502004008709D1 (de) 2003-11-13 2004-10-28 Mehrstufige reibungsvakuumpumpe
CA002545566A CA2545566A1 (fr) 2003-11-13 2004-10-28 Pompe a vide a frottement a plusieurs etages
CNB2004800334295A CN100453817C (zh) 2003-11-13 2004-10-28 多级摩擦真空泵
PCT/EP2004/012196 WO2005047707A1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages
US10/578,989 US20070081889A1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
DE10353034A1 true DE10353034A1 (de) 2005-06-09

Family

ID=34559626

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10353034A Withdrawn DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe
DE502004008709T Active DE502004008709D1 (de) 2003-11-13 2004-10-28 Mehrstufige reibungsvakuumpumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502004008709T Active DE502004008709D1 (de) 2003-11-13 2004-10-28 Mehrstufige reibungsvakuumpumpe

Country Status (7)

Country Link
US (1) US20070081889A1 (fr)
EP (1) EP1706645B1 (fr)
JP (1) JP2007510853A (fr)
CN (1) CN100453817C (fr)
CA (1) CA2545566A1 (fr)
DE (2) DE10353034A1 (fr)
WO (1) WO2005047707A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN101392749B (zh) * 2008-10-31 2012-05-23 东北大学 旋涡式真空泵
GB0901872D0 (en) 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (de) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP2589814B3 (fr) 2010-07-02 2024-01-24 Edwards Japan Limited Pompe à vide
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (fr) 2012-01-27 2019-03-13 Edwards Limited Pompe à vide de transfert gazeux
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
NL2013493A (en) 2013-10-16 2015-04-20 Asml Netherlands Bv Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method.
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (zh) * 2017-12-29 2020-03-24 东北大学 一种多级复合高真空干泵
WO2021102583A1 (fr) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Pompe à turbine tesla et procédés associés
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2412624A1 (de) * 1973-03-30 1974-10-17 Cit Alcatel Molekularvakuumpumpe
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2412624A1 (de) * 1973-03-30 1974-10-17 Cit Alcatel Molekularvakuumpumpe
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
US20070081889A1 (en) 2007-04-12
EP1706645B1 (fr) 2008-12-17
CN100453817C (zh) 2009-01-21
CA2545566A1 (fr) 2005-05-26
WO2005047707A1 (fr) 2005-05-26
JP2007510853A (ja) 2007-04-26
CN1878962A (zh) 2006-12-13
DE502004008709D1 (de) 2009-01-29
EP1706645A1 (fr) 2006-10-04

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8139 Disposal/non-payment of the annual fee