EP1852613B1 - Pompe à vide avec boîtier - Google Patents

Pompe à vide avec boîtier Download PDF

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Publication number
EP1852613B1
EP1852613B1 EP07008039.5A EP07008039A EP1852613B1 EP 1852613 B1 EP1852613 B1 EP 1852613B1 EP 07008039 A EP07008039 A EP 07008039A EP 1852613 B1 EP1852613 B1 EP 1852613B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
housing
pump
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP07008039.5A
Other languages
German (de)
English (en)
Other versions
EP1852613A3 (fr
EP1852613A2 (fr
Inventor
Bernd Hofmann
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1852613A2 publication Critical patent/EP1852613A2/fr
Publication of EP1852613A3 publication Critical patent/EP1852613A3/fr
Application granted granted Critical
Publication of EP1852613B1 publication Critical patent/EP1852613B1/fr
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Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump with a housing, with a rotor having a shaft and pump-active rotor structures, a pump-active stator structures having stator, with bearing means and drive means.
  • Vacuum pumps together with vacuum chambers form vacuum systems with which a variety of tasks can be performed. These tasks range from the production of solid-state coatings to the analysis of gases to the optics columns of high-resolution electron microscopes. The technical development places ever higher demands on vacuum tightness and compactness of the vacuum systems.
  • differential pumping in which a system of vacuum chambers communicate with each other, with the individual vacuum chambers maintained at different gas pressures.
  • the European patent EP 1 090 231 A1 presents a vacuum pump which has a double housing.
  • An inner housing holds the rotor / stator area and the drive / storage area of the pump together. This housing is then slid into an outer housing which is adapted to the application.
  • the double housing is expensive because it uses more components than a single housing. This brings both a very high cost in component manufacturing and component assembly with it.
  • the surfaces on which the housing touch must be machined with high precision.
  • the risk of virtual leaks increases with the number of components required for the housing. Seals must be provided between the individual casings, which increase the risk of leaks due to their high number.
  • additional space must be provided, therefore, the gas flow is correspondingly complex.
  • the object of the invention is to provide a vacuum pump which avoids the problems of a double housing, has a compact construction and has a low parts requirement.
  • a vacuum pump having the features of the first claim. Because the housing of the vacuum pump serving to hold the pump-active stator structures has at least one vacuum chamber, the number of components required is significantly reduced. Fewer flanges and other housing junctions are needed so that the vacuum tightness is increased and the component cost is also reduced. A total of creates a very compact unit. Since the flange connections between the vacuum chamber and the vacuum pump, as are necessary in the prior art, omitted, the vacuum tightness is significantly increased. This makes it possible to achieve lower ultimate pressures with the vacuum pump.
  • the claims 2 to 10 are advantageous developments of the vacuum pump.
  • a further reduction in the number of components is achieved when a subassembly assembly includes at least a portion of the bearing and drive means.
  • a further advantageous development is to form one of the bearing means as a permanent magnet bearing and thus to support a shaft end rotatable.
  • These bearings do not require any lubricants and are wear-free so that they can be used with advantages in a vacuum pump of high vacuum quality.
  • the development according to claim 7 provides to provide a closable by a lid opening. This allows easy access to a vacuum chamber, so that, for example, maintenance work is possible or arranged in the vacuum chamber components, such as an experiment, can be easily replaced. To preserve the vacuum tightness, two seals are provided, one of which is located between the opening and the second seal.
  • This arrangement can be improved by providing between at least two of the seals an annular channel in which negative pressure is generated.
  • the pressure drop between atmosphere and vacuum is gradually reduced via the seals and thus reduces the resulting forces on the seals. Since the leak rate of a leak is the pressure difference between the inside and outside and the stepwise pressure drop means a smaller pressure difference across the seal, smaller leaks play a smaller role. If the power consumption of the negative pressure pump is measured, leaks in the seals can be detected.
  • the development according to claim 9 uses either the vacuum pump itself or a connected to the gas outlet fore pump to generate the negative pressure in the annular channel.
  • the necessary connection line can be arranged in the housing itself, so that a very compact design is created.
  • the development according to claim 10 provides to arrange at least one of the vacuum chambers in a slot which is inserted into a bore in the housing of the vacuum pump and is supported therein. This makes it possible to replace the vacuum chamber system of an existing vacuum pump and to adapt to changing needs. It is also possible to have vacuum chambers and vacuum pumps manufactured by different manufacturers. This reduces the costs, since manufacturing steps can take place in parallel, and ensures the optimal use of the relevant expertise.
  • Vacuum pump 1 shown has a housing 2 and a lower part assembly 3.
  • a shaft 4 is rotatably supported by bearing means 8 disposed at a first end and a permanent magnet bearing 17 disposed at the other end of the shaft.
  • This permanent magnet bearing is located on the high vacuum side of the pumping system and is fixed by a support structure 16 in the housing.
  • the pumping system has arranged on the shaft pump-active rotor structures 5 and fixedly installed pump-active stator 6.
  • the pump-active rotor and stator structures are designed as blades carrying disks, so that a vacuum pump is formed according to the known construction principle of the turbomolecular pump.
  • the invention is not limited to this type but also a combination of different types can be realized, depending on the pressure range to be generated.
  • the exemplary stator In addition to the pump-active stator structures, the exemplary stator also has spacers 7 which define an axial spacing of the stator structures from one another.
  • the stator components are first summarized by the housing 2 of the vacuum pump and in position set and held. Without the housing 2, this definition is not given, the remaining pump part would not be operational in itself.
  • the drive means 9 are provided in addition to bearing means 8, for example, electric coils which cooperate with arranged on the shaft permanent magnets and enable the shaft in rapid rotation.
  • the bearing means 8 may be designed as ball bearings, magnetic bearings or gas bearings.
  • the subassembly also still has the gas outlet channel 30 leading to a gas outlet port. If the vacuum pump itself does not compress to the atmosphere, a backing pump is connected to this gas outlet.
  • first vacuum chamber 20 is connected directly to the first pumping stage 22 of the pumping system.
  • the second vacuum chamber 21 is connected to an intermediate inlet 18 via a suction channel 10. Gas can be introduced into the second pumping stage 23 via this intermediate inlet. Gas from the first vacuum chamber 20 is thus promoted and compressed by the first and the second pumping stage, gas from the second vacuum chamber 21 only from the second pumping stage.
  • This principle can be extended by providing additional vacuum chambers in the housing 2. These can be connected to other intermediate inlets of the pumping system.
  • First and second vacuum chamber 20, 21 are connected to each other via a connection 25.
  • This can be a bore in the housing 2 or a diaphragm.
  • the second vacuum chamber may have an opening 26, through which, for example, a gas to be analyzed or a particle flow can be admitted.
  • the housing 2 has an opening which can be closed by a lid 11 and connected to the first vacuum chamber.
  • This cover makes it possible to maintain assemblies which are arranged in the first vacuum chamber. Seals are disposed around this opening with the first seal 12 surrounding the opening and the second seal 13 surrounding the first seal. Between the seals an annular channel 14 is provided, is generated in the negative pressure.
  • a connecting line 15 is provided in the housing, which opens either in one of the pumping stages of the vacuum pump or on the gas outlet channel 30. If the connection line does not open before the first pumping stage but at another point in the pumping system, the negative pressure generated between the seals is between the pressure in the first vacuum chamber 20 and the surroundings of the vacuum pump. As a result, the load on the individual seals is significantly reduced, since the pressure drop across the seal is lower. By measuring the driving power of the pump or stage used to generate the negative pressure, it is possible to infer leaks and faulty seals.
  • This first embodiment already shows a further advantage that can be achieved by the invention: If all the vacuum lines between the chambers, the chambers and the pumping stages and the annular channel are integrated in the housing, only one Vorvakuumflansch is necessary. Elaborate additional lines, which must be subsequently installed outside omitted.
  • the second figure shows how the invention can be applied to a three-chamber system.
  • a first chamber 31 in which high vacuum is generated
  • a second chamber 32 in which there is a medium vacuum
  • a third chamber 33 are provided in the housing 2 of the vacuum pump.
  • This third chamber is maintained at a pre-vacuum pressure level.
  • Pre-vacuum inlet 37 connected to the gas outlet channel 30 of the vacuum pump.
  • the second chamber is connected via a central inlet 36 to the pumping system of the vacuum pump.
  • stator components in this case stator disks 6 and spacers 7, are fixed and held only by the housing 2 in their position. Without the housing 2, this definition is not given, the remaining pump part would not be operational in itself. In general, it is necessary to optimize the conductances between the chambers and the respective parts of the pumping system.
  • a parameter for obtaining the optimization is the angle between the rotor axis 40 and the chamber axis 41. This parameter can be between 0 deg. ie a parallel arrangement, and 90 deg. , ie a vertical arrangement, vary.
  • a third embodiment shows Figure 3 , The peculiarity of this example is compared to the examples shown above in the vacuum chambers.
  • At least one of the vacuum chambers, in the present case even the two chambers 32 and 33, are arranged in a slot 44. This insert is inserted and fixed in a provided in the housing 2 of the vacuum pump 1 hole. If maintenance work or replacement of the drawer is to be expected, this fixation can be made detachable, for example with screws.
  • Seals 45 provide a seal against the housing.
  • the vacuum chambers 32 and 33 are interconnected, as well as the vacuum chamber 32 and provided in the housing 2 vacuum chamber 31. It can all or, as shown in the figure, only a part of the vacuum chambers may be provided in the slot 44.
  • the vacuum chambers 32 and 33 are connected via suction channels 42 and 43 with different parts of the pumping system of the vacuum pump, so that different pressures are achieved in the vacuum chambers.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (10)

  1. Pompe à vide (1) comportant un boîtier (2) qui comprend au moins une chambre à vide (20, 21, 31, 32, 33), un rotor qui présente un arbre (4) et des structures de rotor (5) actives en pompage, un stator qui présente des structures de stator (6) actives en pompage et des éléments écarteurs (7) qui déterminent une distance axiale des structures de stator (6) les unes par rapport aux autres, et comportant des moyens formant palier (8, 17) et des moyens d'entraînement (9),
    caractérisée en ce que
    les structures de stator (6) actives en pompage et les éléments écarteurs (7) ne sont immobilisés et retenus dans leur position que par le boîtier (2) de la pompe à vide (1).
  2. Pompe à vide (1) selon la revendication 1,
    caractérisée en ce que
    elle comprend un sous-ensemble (3) qui contient une partie au moins des moyens formant palier (8, 17) et des moyens d'entraînement (9).
  3. Pompe à vide (1) selon la revendication 1 ou 2,
    caractérisée en ce que
    la pompe à vide comprend deux étages de pompage (22, 23) ou plus, et il est prévu deux chambres (20, 21, 31, 32, 33) ou plus dans le boîtier (2), qui sont reliées entre elles et chacune à un étage de pompage (22, 23).
  4. Pompe à vide (1) selon la revendication 3,
    caractérisée en ce que
    la pression de gaz est inégale dans au moins deux des chambres (20, 21).
  5. Pompe à vide (1) selon l'une des revendications précédentes,
    caractérisée en ce que
    les moyens formant palier (8, 17) comprennent un palier à aimant permanant (17) qui est agencé dans le boîtier (2) et qui soutient en rotation une extrémité d'arbre.
  6. Pompe à vide (1) selon l'une des revendications 2 à 5,
    caractérisée en ce que
    les structures de rotor (5) actives en pompage et les structures de stator (6) actives en pompage d'au moins un étage de pompage (22, 23) sont formées par des aubes.
  7. Pompe à vide (1) selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins une chambre (20, 21) présente un orifice refermable par un couvercle amovible (11) et étanché par au moins deux joints d'étanchéité (12, 13).
  8. Pompe à vide (1) selon la revendication 7,
    caractérisée en ce que
    une dépression est générée dans un canal annulaire (14) agencé entre les deux joints d'étanchéité (12, 13).
  9. Pompe à vide (1) selon la revendication 8,
    caractérisée en ce que
    une conduite de liaison (15) intégrée dans le boîtier est prévue entre le canal annulaire (14) et un étage de pompage (22, 23) ou un canal de sortie de gaz (30).
  10. Pompe à vide (1) selon l'une des revendications précédentes,
    caractérisée en ce que
    l'une au moins des chambres à vide (20, 21, 31, 32, 33) est agencée dans un insert (44) qui est retenu dans le boîtier (2).
EP07008039.5A 2006-05-04 2007-04-20 Pompe à vide avec boîtier Active EP1852613B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020710A DE102006020710A1 (de) 2006-05-04 2006-05-04 Vakuumpumpe mit Gehäuse

Publications (3)

Publication Number Publication Date
EP1852613A2 EP1852613A2 (fr) 2007-11-07
EP1852613A3 EP1852613A3 (fr) 2014-04-02
EP1852613B1 true EP1852613B1 (fr) 2019-02-27

Family

ID=38051882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008039.5A Active EP1852613B1 (fr) 2006-05-04 2007-04-20 Pompe à vide avec boîtier

Country Status (3)

Country Link
US (1) US20070258836A1 (fr)
EP (1) EP1852613B1 (fr)
DE (1) DE102006020710A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2473839B (en) * 2009-09-24 2016-06-01 Edwards Ltd Mass spectrometer
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement
DE102013103650A1 (de) * 2013-04-11 2014-10-16 Pfeiffer Vacuum Gmbh Vakuumsystem
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem
EP3026303B1 (fr) * 2014-11-28 2021-01-06 Pfeiffer Vacuum Gmbh Pompe à vide, accessoire et joint d'étanchéité
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
JP6705169B2 (ja) * 2015-12-28 2020-06-03 株式会社島津製作所 監視装置および監視プログラム
JP6664269B2 (ja) * 2016-04-14 2020-03-13 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ
EP3296571B1 (fr) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Pompe à vide
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
GB202108988D0 (en) * 2021-06-23 2021-08-04 Micromass Ltd Mass and/or mobility spectrometer vacuum pumping line
EP4108932A1 (fr) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Reciate et pompe à vide élevé

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
WO1999061799A1 (fr) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
FR2784184B1 (fr) * 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
DE10052489A1 (de) * 2000-10-23 2002-05-02 Hermania Dr Schirm Gmbh Feste Glyphosat-Formulierung und Verfahren zur Herstellung
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump

Non-Patent Citations (1)

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Title
None *

Also Published As

Publication number Publication date
DE102006020710A1 (de) 2007-11-08
EP1852613A3 (fr) 2014-04-02
US20070258836A1 (en) 2007-11-08
EP1852613A2 (fr) 2007-11-07

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