EP2148094B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2148094B1
EP2148094B1 EP09008726.3A EP09008726A EP2148094B1 EP 2148094 B1 EP2148094 B1 EP 2148094B1 EP 09008726 A EP09008726 A EP 09008726A EP 2148094 B1 EP2148094 B1 EP 2148094B1
Authority
EP
European Patent Office
Prior art keywords
pump
gas
vacuum pump
bearing
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09008726.3A
Other languages
German (de)
English (en)
Other versions
EP2148094A3 (fr
EP2148094A2 (fr
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2148094A2 publication Critical patent/EP2148094A2/fr
Publication of EP2148094A3 publication Critical patent/EP2148094A3/fr
Application granted granted Critical
Publication of EP2148094B1 publication Critical patent/EP2148094B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • the invention is therefore based on the object to present a vacuum pump, which bridges the entire pressure range from atmosphere to high vacuum of 10 -4 mbar and smaller. It should be as compact as possible and have a simple construction.
  • gas bearings require no organic lubricant, so that a lubricant circuit with lubricant pump is eliminated. In addition, there can be no contamination of the recipient and the pumped gas.
  • the gas bearings are wear-resistant, so that one long life with very little maintenance is achieved.
  • a vacuum pump with gas bearings according to the preamble of claim 1 is known from the document US 3,150,822 known, wherein always a sealing means between the pumping system and the gas bearings is arranged.
  • the construction according to the invention is also simplified by a favorable gas flow.
  • the gas guide is favorable, since the pumping system has pumping sections which respectively pump in the direction of the gas bearing. On further sealing means between gas bearing and pumping system is omitted according to the invention.
  • Another advantage of the gas guide is that compensate for the axial forces that arise in each pump section by the pressure difference between the respective gas inlet and gas outlet. Therefore, the pumping system does not cause any axial forces on the shaft. Overall, results from waiving components and the favorable gas flow a very compact vacuum pump.
  • the gas guide is improved in a development by a portion of the gas flowing out of the gas bearing operating gas and the expelled gas from the pumping section are combined and then fed to the pump outlet. This gas guide contributes to the goal of a compact vacuum pump.
  • At least one of the pump sections comprises a Holweckpump process.
  • Holweckpumptreatmentn have spiral channels. These can be produced in one production step together with the structures required for the gas bearings.
  • a Holweckpumpcut requires only a few components, namely the channels on the shaft and a smooth cylindrical surface opposite this, so that the vacuum pump is not only inexpensive, but also compact.
  • these sections have in addition to the channels on the shaft still opposite channels on the stator. These increase the pumping speed, especially in the pressure range near the atmosphere. It is therefore less space for more pumping necessary, the vacuum pump is even more compact.
  • the pumping speed can be increased in another development that the vacuum pump has a further pumping system.
  • This advantageously has a Holweckpumpcut. This is designed as a hub connected to the shaft and a cylinder arranged on this hub.
  • emergency bearings at the ends of the shaft. These can include plain bearings.
  • the emergency bearings create a robust vacuum pump that can withstand axial forces acting on the shaft.
  • the majority component of the shaft is silicon carbide. This material combines suitability for the gas bearing with resistance in the applications of the vacuum pump.
  • FIG. 1 shows a vacuum pump with a housing 1. This has a gas inlet 7 and a gas outlet 8. Inside the housing is a cylinder 5 arranged in which a shaft 2 is rotatably mounted. The storage takes place by two gas bearings.
  • the first gas bearing 30 includes a gas supply 31, a shaft-side bearing structure 32 and a bearing gas outlet 34.
  • the shaft-side bearing structure forms an axially extending bearing portion 33.
  • the second gas bearing 40 includes a gas supply 41, a shaft-side bearing structure 42 and a bearing gas outlet 44.
  • the shaft-side bearing structure forms an axially extending bearing portion 43.
  • the shaft-side bearing structures 32 and 42 include recesses formed in the shaft surface.
  • Each of the Lagergasauslässe 34 and 44 is provided in the example shown with two openings, one of which is located at one end of each bearing portion.
  • a respective gas supply 31 and 41 usually a plurality of such feeds is distributed in each of the gas bearings over the shaft circumference.
  • the cylinder 5 forms the stator of both gas bearings, so that in each case between the bearing-side bearing structures 32 and 42 and the cylinder forms a gas film through which the shaft is supported.
  • the necessary storage gas can be generated by a compressor 11, or - if the storage load allows it - can be taken directly from the atmosphere. In the latter case, the gas feeds 31 and 41 are directly connected to the atmosphere.
  • compressed air can be used from a compressed air line present at the place of installation.
  • the shaft has at its end a shaft journal 29, on which permanent magnets 9 are mounted. These permanent magnets form the motor rotor and cooperate with electric coils 10 to a fast Rotation of the shaft around its longitudinal axis to produce.
  • the electric coils form the motor stator.
  • Motor and motor stator are designed so that they stabilize the shaft in the direction of its longitudinal axis. This is achieved for example by the attractions of the stator iron package on the permanent magnets.
  • At the end of the shaft emergency camps are planned. In the example shown, these are designed as slide bearings 14, which comprise a spherical surface on the shaft side and a tribologically suitable counter surface on the housing side. If large axial forces are to be expected, permanent magnet rings can be provided for additional stabilization in this direction, specifically a shaft-side bearing ring 26 and stator-side bearing ring 27. Both together form an axial permanent magnet bearing 25.
  • the electronics 20 is housed. This energizes the electric coils. Should a compressor 11 be used to generate the storage gas, it is connected to and controlled by the electronics 20 by a compressor control line 22, in particular its parameters of switch on, switch off, pressure level and delivery rate.
  • the pumping system 6 On the shaft between the bearing portions 33 and 43, the pumping system 6 is arranged. It has a double-flow design and therefore has a first pump section 61 and a second pump section 62. Each of the pumping sections begins in the region of the gas inlet 7 and compresses gas in the direction of the adjacent gas bearing; this is represented by the straight arrows. From the bearing sections, at least part of the storage gas exits in the direction of the pumping system. This is combined at the point 13 between the first gas bearing and the first pump section 61 or 13 'between the second gas bearing and the second pump section 62 and together fed to the pump outlet. As a result, a very compact structure is achieved by a simple gas guide.
  • Both pump sections achieve the same pressure ratio between their inlet and outlet. It is advantageous to create Holweck Modellen in the pump sections.
  • channels 63 which encircle the shaft in a spiral manner are introduced into the shaft surface, which interact with the inner surface of the cylinder 5 acting as a pump stator. If this inner surface is smooth, a pump with the working principle according to Holweck is created. This is not only vacuum technology favorable for the printing area, but can be advantageously produced in one operation with the shaft side bearing structures.
  • channels 64 are provided on the inside of the cylinder. These extend over a part of the axial length of the pump sections 33 and 43, preferably in the respective part adjacent to the gas bearing. The channels are designed in opposite directions to the channels 63 of the rotor. Through these stator-side channels, the pumping speed is increased.
  • the shaft 2 is designed in one piece, at least in the region of the bearing sections 33 and 43 and pump sections 61 and 62.
  • the cylinder extends at least in one piece over the aforementioned sections 33, 43, 61 and 62.
  • a safety valve 12 is advantageous. This is preferably arranged in the gas inlet of the vacuum pump and communicates with the electronics 20 via a valve control line 23 in connection. This then switches the opening state of the safety valve.
  • FIG. 2 shows the in FIG. 1 with the box K designated part of the vacuum pump in a development.
  • the pumping system 6 was preceded by a further pumping system 100.
  • a Holweckstator 103 is provided in the housing 1 of the vacuum pump. This wiest a thread-like on its cylindrical inner surface encircling channel whose passages are separated by a bridge 105. With this channel, a smooth cylinder 102 cooperates pump active, which is connected to a hub 101.
  • the cylinder is made of a lightweight material, in particular of fiber-reinforced carbon.
  • the hub is attached to one end of the shaft so that hub and cylinder take on the speed of the shaft.
  • the safety valve 12 is also advantageous in this development.
  • Gas enters the further pumping system 100 through the gas inlet along the first arrow and is compressed there by the cooperating parts of the Holweck stator and cylinder. Subsequently, the gas enters the first pumping system (see further arrow) and is further compressed there.
  • the first pumping system is only partially visible in the form of the pumping section 62. Also visible is the shaft-side bearing structure 42 of the second gas bearing. From this occurs in the direction of hub bearing gas with atmospheric pressure. This must not pass along the inside of the cylinder 102 to the entrance of the first pumping system. Therefore, a sealing portion 106 is provided between the bearing structure 42 and the hub.
  • the pump-active structures of the sealing portion are designed such that the pressure ratio between the side facing the bearing structure 42 side and the hub 101 side corresponds to the pressure ratio that the pump portion 62 generates.
  • the suction capacity may be much smaller, since less storage gas is obtained as entering through the gas inlet 7.
  • the further pumping system 100 can be configured in two columns.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (9)

  1. Pompe à vide comportant un arbre (2), un premier et un second palier radial et un système de pompage (6), les paliers radiaux comprenant des paliers à gaz dynamiques (30, 40) et le système de pompage (6) étant agencé entre les paliers à gaz (30, 40) et comprenant deux portions de pompage (61, 62) conçues de manière à convoyer chacune en direction de l'un des paliers à gaz,
    caractérisée en ce que
    aucun moyen d'étanchéité n'est prévu respectivement entre le système de pompage (6) et les paliers à gaz (30, 40).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    respectivement une portion de pompage (61, 62) et un palier à gaz (30, 40) sont agencés de telle sorte qu'une partie au moins du gaz de fonctionnement du palier à gaz et le gaz expulsé par la portion de pompage sont réunis à un emplacement (13, 13') et amenés à une sortie de pompe (8).
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    l'une au moins des portions de pompage (61, 62) comprend un étage de pompage de Holweck.
  4. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    le rotor et le stator de l'étage de Holweck comprennent au moins localement des canaux (63, 64) de sens contraires.
  5. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    elle comprend un autre système de pompage (100).
  6. Pompe à vide selon la revendication 5,
    caractérisée en ce que
    l'autre système de pompage comprend un moyeu (101) relié à l'une des extrémités d'arbre et un cylindre (102) relié à ce moyeu.
  7. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    un palier de secours est agencé à une extrémité d'arbre.
  8. Pompe à vide selon la revendication 7,
    caractérisée en ce que
    le palier de secours comprend un palier lisse (14).
  9. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    le matériau de l'arbre (2) est majoritairement en carbure de silicium.
EP09008726.3A 2008-07-26 2009-07-03 Pompe à vide Active EP2148094B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008034948A DE102008034948A1 (de) 2008-07-26 2008-07-26 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2148094A2 EP2148094A2 (fr) 2010-01-27
EP2148094A3 EP2148094A3 (fr) 2016-04-13
EP2148094B1 true EP2148094B1 (fr) 2018-09-19

Family

ID=41221612

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09008726.3A Active EP2148094B1 (fr) 2008-07-26 2009-07-03 Pompe à vide

Country Status (4)

Country Link
US (1) US20100021324A1 (fr)
EP (1) EP2148094B1 (fr)
JP (1) JP5566636B2 (fr)
DE (1) DE102008034948A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9222478B2 (en) * 2012-02-22 2015-12-29 Asia Vital Components Co., Ltd. Bladeless fan structure
KR101454083B1 (ko) * 2012-12-28 2014-10-21 삼성전기주식회사 전동 송풍기
US20150377239A1 (en) * 2013-02-15 2015-12-31 Edwards Limited Vacuum pump
CN104019043A (zh) * 2014-06-20 2014-09-03 李晨 鼠笼螺杆式复合分子泵

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3150822A (en) * 1961-02-09 1964-09-29 Commissariat Energie Atomique Sealing and centering device for rotary shaft
JPS6255498A (ja) * 1985-09-05 1987-03-11 Asahi Glass Co Ltd セラミツクス製翼車
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
JPS63255592A (ja) * 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPH0198316U (fr) * 1987-12-21 1989-06-30
JPH0216396A (ja) * 1988-06-30 1990-01-19 Shimadzu Corp ターボ分子ポンプ
US5017022A (en) * 1988-11-09 1991-05-21 Allied-Signal, Inc. High temperature bearing
US5273368A (en) * 1990-11-13 1993-12-28 Matsushita Electric Industrial Co., Ltd. Hydrodynamic gas bearing
JPH0510289A (ja) * 1991-07-05 1993-01-19 Hitachi Koki Co Ltd 複合形ドライ真空ポンプ
US5793561A (en) * 1994-10-14 1998-08-11 Canon Kabushiki Kaisha Rotary drum assembly having dynamic-pressure generating mechanism between rotary shaft and bearing
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
JP3252792B2 (ja) * 1998-04-27 2002-02-04 株式会社島津製作所 ターボ形真空排気装置
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000249093A (ja) * 1999-02-26 2000-09-12 Daikin Ind Ltd 軸流式真空ポンプ
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102008034948A1 (de) 2010-01-28
JP2010031857A (ja) 2010-02-12
JP5566636B2 (ja) 2014-08-06
US20100021324A1 (en) 2010-01-28
EP2148094A3 (fr) 2016-04-13
EP2148094A2 (fr) 2010-01-27

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