EP3112689B1 - Pompe à vide à debit partagé - Google Patents

Pompe à vide à debit partagé Download PDF

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Publication number
EP3112689B1
EP3112689B1 EP15174845.6A EP15174845A EP3112689B1 EP 3112689 B1 EP3112689 B1 EP 3112689B1 EP 15174845 A EP15174845 A EP 15174845A EP 3112689 B1 EP3112689 B1 EP 3112689B1
Authority
EP
European Patent Office
Prior art keywords
shaft
vacuum pump
rotor
sleeve
split flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15174845.6A
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German (de)
English (en)
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EP3112689A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15174845.6A priority Critical patent/EP3112689B1/fr
Priority to EP18201126.2A priority patent/EP3460249B1/fr
Priority to JP2016128672A priority patent/JP6438916B2/ja
Publication of EP3112689A1 publication Critical patent/EP3112689A1/fr
Application granted granted Critical
Publication of EP3112689B1 publication Critical patent/EP3112689B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a vacuum pump in the design of a split flow pump.
  • split-flow vacuum pumps are used in practice to simultaneously evacuate a plurality of chambers, for example a mass spectrometer system.
  • the split-flow vacuum pumps make it possible to dispense with a pump system consisting of several individual pumps and to carry out the evacuation of several chambers with a single pump.
  • Split-flow vacuum pumps have the advantage that they only have a small space requirement for the vacuum system.
  • the split-flow vacuum pumps are not only used in analytical instruments, but also, for example, in leak detectors whose analysis principle is also based on mass spectrometry.
  • a turbomolecular pump which has a plurality of suction ports, which is in each case connected to one of the vacuum chambers of a device, for example a mass spectrometer.
  • the suction ports deliver gas to various axially spaced locations of the rotor.
  • several so-called rotor-stator packages are arranged, each compressing gas.
  • a high vacuum side stator pack creates a pressure ratio between its inlet and outlet.
  • the inlet is connected to a first vacuum chamber.
  • the outlet is connected to the inlet of the next rotor-stator pack.
  • this area is connected between two rotor-stator packages with a second vacuum chamber.
  • each suction port is assigned a rotor-stator package. It turns out that compared to the diameter very long rotors are difficult to handle, since the rotors are operated at speeds in the range of some 10,000 revolutions per minute.
  • multiple vacuum chambers are arranged in series and interconnected by low conductance holes. From one to the other end of the row decreases the pressure prevailing within the vacuum chamber gas pressure.
  • the bores are designed so that a particle beam can pass through them and thus through the row of vacuum chambers.
  • the vacuum chamber with the lowest pressure often contains an analyzer, such as a mass spectrometer.
  • split-flow vacuum pumps which have three or four radial inlets and which have at least four pumping stages.
  • Pumping stages are usually turbomolecular pumping stages. These are often combined with other pumping stages, for example Holweckpump taskn or Gaedepumpsayn.
  • the length and rotor speed of the known from practice split-flow vacuum pumps is limited, inter alia, due to the natural oscillations of the rotors.
  • a rotor can not be operated permanently in the range of a natural vibration frequency.
  • the limiting element may on the one hand be the motor end, in which a cost due to a stiffener by larger shaft diameter, that is, larger drive magnets and motor stators, not target leader.
  • the modal behavior of the rotor and in particular the rotor shaft can be critical for very long lengths.
  • the prior art includes a vacuum pump system with a multi-stage gas inlet system.
  • the pump system consists of a turbomolecular pump and one or more downstream pump stages whose rotors are located on a shaft with the rotor of the turbomolecular pump.
  • This prior art turbomolecular pump can be further improved in terms of reducing the weight of the shaft.
  • the prior art ( DE 20 2013 010 209 U1 ) includes a vacuum pump shaft of an unspecified vacuum pump.
  • the shaft has a longitudinal bore within the shaft.
  • the prior art also includes a vacuum pump with a stator and a rotor, in which also a shaft is provided. Also, this vacuum pump can be further improved in terms of reducing the weight of the shaft.
  • the technical problem underlying the invention is to provide a split-flow vacuum pump in which the weight of the shaft is reduced while maintaining rigidity, in order to be able to form long split-flow vacuum pumps with long shafts.
  • a split-flow vacuum pump is to be specified, which has a rotor shaft with at least one shaft end, which has the desired stiffening cost.
  • the split-flow vacuum pump according to the invention with at least two radial inlets having stator disks and rotor disks arranged on a shaft, wherein at least one disk package is arranged on the shaft, is characterized in that at least two grooves and / or in the shaft in the radial direction or bores are arranged which are formed longer in the axial direction of the shaft than in the circumferential direction of the shaft or that the shaft has at least one constriction in the axial direction.
  • the modal behavior of the rotor, and rotor shaft in particular can be critical. Therefore, it must be attempted to reduce the mass and thus also the weight of the shaft while maintaining rigidity, especially in the radial direction.
  • the shaft has grooves and / or bores.
  • the grooves and / or bores are advantageously axial grooves, for example milling in the shaft.
  • the grooves and / or holes are provided in areas where no rotor disks are arranged.
  • the at least two grooves and / or bores are arranged radially symmetrically in the shaft. This is provided so that the shaft remains rotationally symmetric and has no imbalances.
  • the at least two grooves and / or holes are arranged forming at least one ring in the shaft. This means that in a region in which no rotor disks or disk packages are arranged, the grooves and / or holes are arranged, distributed uniformly over the circumference of the shaft.
  • these areas can each be provided with the grooves and / or bores.
  • the grooves and / or bores have a rectangular and / or a conically tapering and / or a conically widening and / or a stepped stepped cross section.
  • a variety of cross-sections are conceivable.
  • the configuration of the shape of the cross sections depends on the particular application.
  • a further advantageous embodiment of the invention provides that the holes as through holes are formed.
  • the holes are formed as through holes.
  • the shaft which are formed as through holes, that is, that different holes in the surface of the shaft in the region of a core of the shaft are brought together.
  • Another embodiment of the invention provides a split-flow vacuum pump having at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on a shaft, wherein at least one disk package is arranged on the shaft, which is characterized in that at least one Sleeve is arranged.
  • the natural vibration frequencies of the rotor can be changed, so that the rotor does not have to be operated in the range of a natural vibration frequency. This also reduces the bearing forces.
  • the sleeve has a ring on at least one end.
  • the sleeve can be arranged for example on a tapered shaft end.
  • a sleeve is arranged on the shaft at least in the region of the grooves and / or holes and / or the at least one constriction.
  • the arrangement of the sleeve in the region of the grooves and / or holes and / or the at least one constriction increases the stability of the rotor shaft.
  • a constriction leads to a loss of rigidity of the shaft, which can be compensated by the sleeve.
  • a further advantageous embodiment of the invention provides that at least one sleeve is arranged on at least one shaft end in the region of a taper.
  • the shaft ends usually taper to be placed in bearings, such as ball bearings or magnetic bearings.
  • the sleeve contributes to increasing the rigidity of the shaft.
  • the at least one sleeve is mounted on one side on the shaft and on an opposite side on at least one support ring. If, for example, the shaft has a step-shaped longitudinal section, that is to say it tapers stepwise, the sleeve can be arranged in the region of two adjacent steps. At the stage with the larger diameter, the sleeve can rest directly on the shaft. At the stage with the smaller diameter, the sleeve rests on the at least one support ring.
  • a particularly preferred embodiment of the invention provides that at least one magnetic ring of a magnetic bearing is arranged between a region of the shaft carrying the sleeve and the at least one support ring. This makes it possible to stiffen the shaft at the shaft end and yet to provide magnetic rings, which are arranged on the smaller diameter of the shaft and thus less expensive.
  • Another advantageous embodiment of the invention provides that the at least one sleeve is arranged on a region of the shaft with solid material.
  • a modified advantageous embodiment of the invention provides that the at least one sleeve is arranged in a region without a rotor shaft between shaft elements.
  • the shaft is formed as a split shaft and the sleeve connects the shaft elements.
  • the weight of the rotor shaft is significantly reduced, which has an advantageous effect on the modal behavior of the shaft.
  • a further advantageous embodiment of the invention provides that at least one bore is arranged in the sleeve.
  • the bore is advantageously arranged in the region of the grooves and / or bores and / or constrictions. In the area of a vacuum pump, no gas-filled cavities should be present during the evacuation, since these gas-filled cavities degas during the evacuation process and thereby does not reach the actually achievable final pressure of the pump.
  • the at least one sleeve is advantageously made of metal.
  • metal aluminum, titanium or stainless steel can be selected.
  • the at least one sleeve may also consist of a composite material with carbon fiber, for example carbon fiber reinforced plastic. It is also possible to use a combination of the materials of metal and the composite material with carbon fibers.
  • the axial extent of the sleeve is greater than its outer diameter.
  • the sleeve contributes optimally to improving the rigidity of the shaft.
  • the at least one sleeve can be designed such that it is fastened in front of and behind the motor magnet on the rotor shaft. This makes it possible to design the magnetic rings with a small diameter and thus perform cost-effective.
  • the at least one sleeve can be applied to the rotor shaft and are connected in the direction of bearing end, for example by a ring with the shaft.
  • a sleeve according to the invention can likewise be provided here.
  • This sleeve can be arranged on the solid shaft.
  • the connection between the solid shaft and the sleeve can be made for example by shrinking, pressing and / or gluing or other types of fastening.
  • the sleeve in a region of the shaft with at least one constriction or at least one recess and / or grooves and / or holes. Due to the reduced mass, on the small Diameter of the rotor contributes little to the rigidity, can increase the natural frequency of the rotor through the sleeve. It is also positive that the support forces are reduced in this way and, for example, when using a permanent magnet bearing possibly ring magnet pairs can be saved to reduce costs.
  • the fit of fit of the rotor disks may be provided on a smaller outer diameter than the outer diameter of the sleeve. This is advantageous if otherwise the coil of the rotor disk, around which the rotor blades are arranged, would become too weak if the diameter of the adapter were too large, as a result of which the rotor disk would no longer be securely seated on the rotor during operation.
  • a pump structure is additionally applied to the sleeve on the outer lateral surface.
  • Pump structures may be, for example, a turbo structure, a cross channel structure, a thread structure or a Holweck structure or a combination of these structures.
  • the at least one ring can be arranged on one side or on both sides preferably at the end of the sleeve.
  • the ring can be fixedly arranged on the sleeve. It is also possible, the at least one ring in one piece with the Form sleeve.
  • the ring is formed as an inner ring on the sleeve.
  • the sleeve serves to increase the stability.
  • a constriction that is, a region in which the shaft has a smaller diameter than the diameter
  • are arranged on the rotor disks and / or rotor packages may be provided to increase the stability of a sleeve.
  • bores may be provided to degas from the sleeve covered cavities in the shaft can.
  • the sleeve is advantageously made of a material which has a quotient of modulus of elasticity and density which is greater than the quotient of elastic modulus and density of the shaft.
  • An advantageous embodiment of the invention provides a split-flow vacuum pump with at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on a shaft, wherein on the shaft at least one disk package is arranged, which is characterized in that the shaft along one Having longitudinal axis disposed inner bore.
  • a shaft end, in which the inner bore is arranged is cup-shaped in cross-section without inner bearing journal. It is by omitting the inner journal possible to arrange the inner bore in said shaft end.
  • This advantageous embodiment of the vacuum pump it is possible to provide at least one secondary inlet in addition to the main inlets.
  • the main inlets are located between the pumping stages as known in the art.
  • at least one further inlet is provided which is arranged in the region of at least one turbomolecular pumping stage.
  • a so-called tap that is, the inlet is not between the turbomolecular pumping stages, but that the tap leads radially into a disk pack of the at least one turbomolecular pumping stage.
  • the at least one secondary inlet has a central axis and the central axis is between a first and a last disc of the at least one turbomolecular pumping stage arranged.
  • the secondary inlet actually leads between the disks of the disk package of the at least one turbomolecular pumping stage.
  • additional inlets are provided so that a larger number of vacuum chambers can be evacuated.
  • the at least one secondary inlet is arranged between two stator disks and / or between two rotor disks and / or between a stator disk and a rotor disk of at least one turbomolecular pumping stage.
  • the secondary inlet is arranged between the disks of a stator pack, while a main inlet is arranged between the stator packs.
  • the at least one secondary inlet is arranged between two adjacent stator disks and / or between adjacent rotor disks and / or between a stator disk and an adjacent rotor disk of at least one turbomolecular pumping stage.
  • the secondary inlets are chosen to be relatively small in diameter and arranged between the discs.
  • a pumping speed of the at least one secondary inlet is less than the suction capacity of a main inlet.
  • the secondary inlets serve to increase the number of taps of a multi-chamber system to be evacuated.
  • the main inlets can have a relatively large cross section.
  • the secondary inlets lead between disks of turbomolecular pumping stages and therefore have only a relatively small cross-section.
  • n-1 secondary inlets are provided in the case of n disks.
  • the number of secondary inlets is less than the number of slices. If a disk pack of the turbomolecular pumping stage is formed from two disks, a secondary inlet can be provided between these two disks.
  • turbomolecular pumping stage it is also possible to provide a plurality of radial secondary inlets in the region of a turbomolecular pumping stage. Likewise, it is also possible to provide one or more secondary inlets at multiple turbomolecular pumping stages in each of these turbomolecular pumping stages. Various turbomolecular pumping stages may be formed with and without secondary inlets.
  • At least one turbomolecular pumping stage at least one Holweck pumping stage and / or one Siegbahn pumping stage and / or one Gaedepumpprocess and / or a 9.kanalpumpprocess and / or a Gewindepumpch is provided.
  • Split-flow vacuum pumps usually consist of one or more turbomolecular pumping stages and at least one other of said pumping stages.
  • the pressure conditions in the chambers to be evacuated can be adjusted accordingly.
  • a main inlet between the pumping stages for example between two turbomolecular pumping stages, and for example additionally to arrange a Holweck pumping stage.
  • at least one further secondary inlet is additionally arranged in the region of the at least one turbomolecular pumping stage.
  • a turbomolecular pump stage is formed from one or more rotor disks and / or from one or more stator disks.
  • a pumping stage usually consists of at least one stator disk and at least one rotor disk. Often, a plurality of stator disks and a plurality of rotor disks, which engage alternately, are provided. According to the invention, it is advantageously provided that n-1 secondary inlets are provided for n disks. For example, if a stator disk and a rotor disk are provided which form a turbomolecular pump stage, the inlet is arranged between these disks.
  • a further advantageous embodiment of the invention provides that a stator disk and an adjacent rotor disk of a turbomolecular pumping stage define an axial length L, and that a distance between two turbomolecular pump stages at least as long as this length L.
  • At least one stator disk and / or one rotor disk form at least one turbomolecular pumping stage. If the distance between adjacent stator disks and / or adjacent rotor disks is so great that the length L is exceeded, a new turbomolecular pumping stage commences according to the invention. An inlet in this area between the turbomolecular pumping stages is considered to be the main inlet. An inlet in the area of the turbomolecular pumping stage itself is considered as a secondary inlet.
  • a turbomolecular pump stage is formed from at least one rotor disk.
  • the embodiment according to the invention with regard to the inlets can in principle also be used in a turbomolecular pump.
  • a pumping stage consists of at least one rotor disk and at least one stator disk.
  • the secondary inlet is arranged between the rotor disk and the stator disk.
  • Another advantageous embodiment of the split-flow vacuum pump according to the invention with at least two radial inlets wherein the vacuum pump has stator disks and rotor disks arranged on a shaft, wherein at least two disk packages are arranged on the shaft, wherein the shaft has at least two different outer diameters and the disk packages to the Have outer diameter adapted inner diameter, provides that the shaft in addition to a region with a largest diameter in the axial direction on both sides each have at least two regions with smaller diameters.
  • the embodiment of the invention allows a large number of individual disc packs on the shaft. According to this embodiment, it is possible to arrange four or more disk packs on the rotor.
  • each case in each case at least one disc package can be arranged in these areas.
  • On the adjoining areas again with a slightly smaller diameter, at least one further disc pack can be arranged in each case.
  • the larger diameter areas each serve as a stop for the disk packs mounted on the areas of slightly smaller diameters.
  • stator disc packs at a distance from each other are arranged and thus the rotor disk packages are arranged at a distance from each other, it makes sense to work on the shaft with stops. The more stops are present, the less tolerances are required for the discs and the gaps between the stator and rotor discs can be made smaller.
  • the rotor disks have to be manufactured with sufficient precision, which means a high manufacturing outlay, or the distance between the rotor and stator disks must be selected to be large enough so that the manufacturing tolerance does not lead to a collision between the stator and rotor disks.
  • the at least one disk package is advantageously mounted against a stop when the stop is not formed by a sleeve.
  • the areas with the smaller diameters on both sides of the area with the largest diameter in each case in pairs have the same diameter. This makes it possible, on the first smaller diameters on both sides of the area with the largest diameter same disc packs, that is to assemble disc packs with the same diameter. The same applies to the areas adjacent to these areas with a further reduced diameter. As a result, it is possible to mount four disc packages, which must have only two diameters from the manufacturing forth. As a result, many identical parts can be pre-assembled, which significantly reduces the manufacturing costs.
  • transitions between the regions with different diameters are designed as a stop for the disk packs. These stops ensure that the disk packages of the rotor disks are positioned exactly between the stator disks and that manufacturing tolerances of the individual disk packages do not add up over the entire length of the shaft.
  • the shaft provides a pyramidal symmetrical structure.
  • both sides of the shaft can each be equipped with the same disc packs.
  • the at least two housing areas are connected by a housing section with a wall thickness reduced in relation to the wall thickness of the two housing areas.
  • a wall area between the two housing areas has a thinner cross-section than the rest of the housing.
  • the housing has a constriction for this purpose.
  • a reinforcement made of a material having a lower thermal conductivity than the thermal conductivity of the housing is arranged in the region of the housing portion.
  • a reinforcement made of a material having a lower thermal conductivity than the thermal conductivity of the housing is arranged in the region of the housing portion.
  • a further advantageous embodiment of the invention provides that the at least two housing areas are formed from two separate housing components and that between the housing components at least one thermal Seal is arranged.
  • the seal advantageously has a lower thermal conductivity than the housing.
  • the seal may be formed of glass and / or ceramic and / or plastic. This seal ensures that there is no heat transfer from the heated part of the housing to the cooled part of the housing.
  • At least one bore and / or at least one groove is arranged, in which heating elements and / or coils for heating the housing and / or cooling elements are arranged.
  • a vacuum system with at least one vacuum pump and at least one recipient in which a releasable connection is provided between the vacuum pump and the recipient, wherein at least one elastomeric seal is sealing the connection to the atmosphere side and at least one is towards the vacuum side a gap seal are provided, wherein it is provided that at least one suction channel and / or at least one suction opening is / are provided between the elastomer seal and the gap seal.
  • This embodiment has the advantage that an elastomeric seal is used at the sealing points on the atmosphere side. This is advantageously designed as an O-ring. At least one gap seal is used as the second sealing element between the elastomer seal and the, for example, ultra-high vacuum connection. The Areas of the recipient (chamber) and a surface of the pump housing are pressed together.
  • the vacuum pump according to the invention can have grooves and / or bores and / or constrictions in the rotor shaft.
  • At least one sleeve may be arranged on at least one end of the rotor shaft. It is also possible to arrange at least one sleeve in front of or between the rotor disk packages and / or the rotor disks.
  • the at least one sleeve can be arranged in the region of solid material of the rotor shaft.
  • the at least one sleeve may be formed covering at least one constriction and / or the grooves and / or the holes.
  • the sleeve can also be arranged in a rotor shaft-free area.
  • the rotor shaft is formed as a split shaft and the at least one sleeve supports and covers the rotor shaft free area.
  • the shaft may also be formed as a shaft with an internal bore along the longitudinal axis of the shaft.
  • Fig. 1 shows a vacuum pump 1, which is designed as a so-called split-flow vacuum pump.
  • the vacuum pump 1 is connected to a multi-chamber vacuum system 2.
  • the multi-vacuum system 2 has four chambers 3, 4, 5, 6, which are to be evacuated by the vacuum pump 1.
  • the gas pressure in the chambers 3, 4, 5, 6 is increasing in this order.
  • the chambers 3, 4, 5, 6 are separated by partitions 7, 8, 9, wherein holes 9, 10, 11 establish a connection.
  • These bores 9, 10, 11 are, for example, arranged and dimensioned such that a particle beam can pass through all the chambers 3, 4, 5, 6.
  • first partition 7 separates the first chamber 3 and the second chamber 4
  • second partition 8 separates the second chamber 4 from the third chamber 5
  • third partition 9 separates the third chamber 5 from the fourth chamber 6.
  • the dashed arrows in the Fig. 1 illustrate the gas flow.
  • the vacuum pump 1 has a shaft 13 which carries rotor disks 14 to 19.
  • the rotor disks 14 to 19 are in engagement with stator disks 20.
  • the rotor disks 14, 15, 16 form a first disk package 21 and the rotor disks 17 to 19 form a second disk package 22.
  • the disk package 22 forms a high-vacuum-side rotor stator package with the stators 20.
  • the disk package 21 forms with the stator 20 a septvakuum discoveredes rotor stator.
  • the blades in both packages are, as known in the art, both stator and rotor side attached to support rings or integrally formed with this.
  • a first gas inlet 23 is located in front of the high-vacuum-side rotor stator packet, and a second gas inlet 24 is located in front of the forward-vacuum-side rotor stator packet.
  • a first main inlet 23 leads into the vacuum pump 1.
  • a second main inlet 24 leads into the vacuum pump 1.
  • a further main inlet 25 leads into the vacuum pump 1 and from the vacuum chamber 6, a further main inlet 26 in the vacuum pump. 1
  • the main inlets 23, 24, 25, 26 are arranged between the turbomolecular pumping stages 21, 22.
  • a first secondary inlet is arranged which leads from the vacuum chamber 5 into the vacuum pump 1.
  • a further secondary inlet 28 leads from the vacuum chamber 6 in the region of the turbomolecular pumping stage 21 into the vacuum pump 1.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pumping stages 21, 22.
  • the rotor shaft 13 has areas with different diameters.
  • a first region 29 is a region with the largest diameter. On both sides of the shaft 13, two areas 30, 31 with smaller diameters join. This is in turn followed by regions 32, 33 with an even smaller diameter of the shaft 13. In the region 29 of the largest diameter of the shaft 13, no rotor disks are arranged. In the area 30, the rotor disk 16 is arranged, which is determined by a stop 34, which formed by the step-shaped shoulder between the region 29 and the region 30, locally unique.
  • Another advantage of the invention is that the rotor disks 14 to 19 are placed exactly on the shaft, whereby very small gaps can be formed. This increases the pumping power of the vacuum pump 1. By using many identical parts, the pump is inexpensive to manufacture.
  • on the two sides of the area 29 of the Shaft 13 is arranged with the largest diameter two rotor disk packages each having the same inner diameter.
  • a further advantageous embodiment of the invention is an embodiment in which in the region of the largest diameter 29 grooves 39, 40 are arranged, which reduce the mass of the shaft. Since the split-flow vacuum pumps have a very long length, the modal behavior of the rotor and in particular of the rotor shaft is critical. For this reason, according to the invention, the mass and thus the weight of the shaft is reduced while maintaining rigidity.
  • the vacuum pump 1 has a housing 41.
  • the housing 41 In order to reduce thermal transitions between the high-vacuum side and the fore-vacuum side in the housing 41, the housing 41 has a constriction 42. This constriction reduces the thermal conductivity. It is possible to additionally provide a reinforcement, not shown, in the region of the constriction 42.
  • the housing may also be designed to be divided in the region of the constriction 42, and a thermal seal may be arranged between the two parts of the housing.
  • the shaft 13 is supported by a magnetic bearing 43 on one side.
  • a magnetic bearing 43 on one side.
  • abutment 43 b are arranged.
  • the bearing is not shown.
  • it may be an oil-lubricated ball bearing.
  • turbomolecular pumping stages it is also possible, in addition to the turbomolecular pumping stages, to provide a Holweck pumping stage and / or a Siegbahn pumping stage and / or a Gaedepump stage and / or a side channel pumping stage and / or a threaded pumping stage.
  • the rotor disk 15 and the stator disk 20 have an axial length L as viewed in the axial direction.
  • the distance between the turbomolecular pump stages 21, 22 is greater than the length L.
  • Fig. 2 and in Fig. 3 show a rotor shaft 13 on which rotor disk packages 21, 22, 44 are arranged.
  • the rotor shaft 13 is stepped, so that the rotor disk packs 21, 22, 44 respectively abut against a step and are thus accurately positioned.
  • a sleeve 59 is arranged, which is supported with one end 105 on the shaft 13 and with its other end 106 on a support ring 103.
  • the support ring 103 is in turn supported on the rotor shaft 13 from.
  • the sleeve is thus mounted in front of and behind a motor magnet 101 on the rotor shaft 13.
  • the rigidity of the rotor, in particular at the strongly tapered end 104 is significantly increased.
  • the motor magnets 101 that is, the magnetic rings can be made with the usual, relatively small diameter, which has a cost effect.
  • the shaft 13 is improved by a shaft end 104 of larger diameter in terms of stiffness, the motor magnets would also have to be built larger, which would adversely affect the cost.
  • Fig. 4 shows a modified embodiment.
  • the rotor shaft 13 is stiffened by a sleeve 59 between the disk packs 21, 22.
  • the sleeve 59 is arranged on the solid shaft 13. It may be secured to the shaft 13 by shrinking, pressing or gluing.
  • the sleeve 59 fills the gap between the disc packs 21, 22 completely or almost completely. If it completely fills the distance between the disk packs 21, 22, it simultaneously performs the function of a spacer sleeve like the sleeves 38 in FIG Fig. 1 ,
  • Fig. 5 shows a modified embodiment in which the sleeve 59 is disposed on the rotor shaft 13 between the disk packs 21, 22.
  • the sleeve 59 is arranged at a distance from the disk pack 21.
  • the sleeve 59 is mounted on the shaft 13 of solid material and stiffened the rotor shaft thirteenth
  • Fig. 6 shows the rotor shaft 13 having a constriction 102.
  • the sleeve 59 is arranged in the region of the constriction 102.
  • the sleeve 59 has bores 83, through which the constriction 102 can be degassed. If a recipient is evacuated by the vacuum pump, cavities in the area of the vacuum pump, such as constriction 102, must be evacuated at the same time, otherwise the cavities 102 degas during the evacuation process and thus the final pressure of the vacuum pump can not be achieved.
  • Fig. 7 shows the rotor shaft 13, which is formed as a divided rotor shaft with shaft elements 107, 108.
  • the shaft members 107, 108 are interconnected by the sleeve 59.
  • the sleeve 59 in turn has bores 83, through which a cavity 109 between the shaft elements 107, 108 can be evacuated.
  • Fig. 8 shows various ways in which the grooves 39, 40 may be formed.
  • FIG. 8 13 different embodiments of grooves are shown in the shaft.
  • the grooves can be arranged with the same cross sections rotationally symmetrical in the shaft 13.
  • Illustrated embodiments are exemplary only. In practice, an embodiment is selected and arranged rotationally symmetrical in the shaft.
  • a groove 53 is shown which has a rectangular cross-section.
  • a groove 54 is tapered in the direction of the central axis M according to a second embodiment.
  • Holes 55 are formed such that they form through holes 13 in the shaft.
  • the holes 55 converge at a point 56.
  • a groove 57 has a stepped cross-section.
  • a groove 58 is formed widening conically in the direction of the central axis.
  • a sleeve 59 may be provided.
  • the sleeve 59 should be formed of a rigid material but have a low mass.
  • the sleeve 59 advantageously has bores 83 in the region of the grooves. These holes serve to allow the grooves 53, 54, 57, 58 and / or bores 55 to be evacuated so that they do not degas during the evacuation of the recipient.
  • Fig. 9 shows the shaft 13 with grooves 39, 40.
  • the grooves 39, 40 are arranged in the axial direction at a height, that is, they form a ring in the shaft 13.
  • further grooves 63, 64 are provided, which are also arranged in the axial direction corresponding to each other and form a second ring of grooves.
  • two sleeves 59 which cover the grooves 39, 40, 63, 64.
  • the sleeves 59 have holes 83 in order to evacuate the grooves 39, 40, 63, 64 can.
  • Fig. 10 shows a shaft end 110 of the rotor shaft 13.
  • the shaft 13 is supported by a magnetic bearing 111.
  • the magnetic rings 112 of the magnetic bearing 111 are arranged on the shaft 13.
  • Magnetic rings 113 of the magnetic bearing 111 are arranged on a housing 114a.
  • a ball bearing 114 is provided, which is designed as an emergency.
  • the ball bearing 114 is biased by a spring 115.
  • an inner bore 116 is arranged in the shaft 13.
  • Fig. 11 shows the shaft 13 with rotor disk packages 44, 45, 46 which form turbomolecular pumping stages 44, 45, 46 with stator disk packages (not shown).
  • the gas flow is shown by an arrow 47.
  • Arrows 48 represent the gas flow which is supplied from two main inlets 24, 25 to the turbomolecular pumping stages 45, 46.
  • the arrows 49 indicate the gas flow which is supplied from two secondary inlets 27, 28 in the region of the turbomolecular pumping stages 44, 45 to the pumping system.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pumping stages 44, 45, while the main inlets 24, 25 have their supply between the turbomolecular pumping stages 44, 45 and 46.
  • Fig. 12 shows vacuum pump 1 with the once again clarified, the turbomolecular pumping stages 44, 45, 46, 49 has.
  • the turbomolecular pump stages 44, 45, 46, 49 consist of rotor disks and stator disks, which are arranged intermeshing.
  • main inlets 23, 24, 25, 26 are provided, which are arranged in front of the pumping stage 44 or between the pumping stages 44, 45, 46, 49.
  • the shaft 13 is supported by means of a magnetic bearing 43 and a ball bearing 50.
  • the ball bearing 50 is an oil lubricated ball bearing.
  • the shaft 13 is driven by a motor 51.
  • a secondary inlet 27 is provided in the area of the turbomolecular pumping stage 44.
  • a secondary inlet 28 is provided in the region of the turbomolecular pumping stage 45, and a secondary inlet 52 is provided in the region of the turbomolecular pumping stage 46.
  • the number of inlets from the four main inlets 23, 24, 25, 26 to a total of seven inlets, namely plus the three side inlets 27, 28, 52 increases.
  • Fig. 13 shows a partial section through the shaft 13.
  • the shaft 13 has the in Fig. 1 shown areas 29 having the largest diameter, the adjoining areas 30, 31 with a smaller diameter and in turn adjoining areas 32, 33 with a further reduced diameter.
  • the rotor disks 16, 17 are arranged.
  • the rotor disks 15, 18, 19 are arranged.
  • the rotor disks 15, 18, 19 all have the same inner diameter.
  • the rotor disks 16, 17 also have the same inner diameter. This makes it possible to build a low-cost pump by a large number of identical parts.
  • the difference in diameter between the areas 29, 30 forms the stop 34. Between the areas 29, 31 of the stopper 36 is provided. Between the areas 30, 32 of the stop 35 is arranged and between the areas 31, 33 of the stop 37 is provided.
  • the mounting direction of the discs 15, 16 is indicated by the arrow A.
  • the mounting direction of the rotor disks 17, 18, 19 is indicated by the arrow B.
  • M denotes a central axis of the shaft 13.
  • the shaft 13 and the rotor disks 15, 16, 17, 18, 19 are constructed rotationally symmetrically about the center axis M.
  • Fig. 14 shows the shaft 13 with turbomolecular pumping stages 21, 22.
  • the shaft 13 has grooves 39, 40 in one Area in which no rotor disks 14, 15, 16, 17, 18, 19 are arranged.
  • Fig. 15 shows a shaft 13 with two turbomolecular pumping stages 21, 22, which are arranged in a housing 41 of a split flow pump.
  • the housing 41 has an inlet 24.
  • This prior art embodiment shows that a customer housing 60 has an inlet 61 formed radially offset from the inlet 24.
  • the axial length of the pump and the customer chamber 60 do not match.
  • the housing 41 has a web 62 in the region of the inlet 24. Due to the design of the web on which the stator disks (not shown) can be attached, one obtains a larger cross section and thus a higher conductance in the region of the inlet 24.
  • Fig. 17 shows a vacuum pump 1 with vacuum ports 72, 73, 75.
  • the vacuum port 72 has an elastomeric seal 76 and a gap seal 77 on. Between the elastomeric seal 76 and the gap seal 77, a suction channel 78 is arranged, are arranged in the bacteriaabsaugungen 79. In the vacuum port 75, a suction opening 80 is arranged. The insectsaugungen 79 lead into a feedthrough bore 81, which led to the intermediate stage 73 is.
  • a connection channel 82 is provided, so that the vacuum connection 75 is also evacuated via the suction opening 80 via the feed-through bore 82.
  • Fig. 18 shows the sleeve 59, which has a carrier 117 which is formed as a substantially cylinder jacket-shaped base portion.
  • a structuring with a plurality of structural elements 118 is provided, which are formed in the present illustrative embodiment as in the direction of the longitudinal axis of the sleeve 59 elongated straight webs.
  • the structural elements 118 may be designed as Holweck or Kreuzkanalpumptreatment.
  • the structural elements 118 may also have other pumping stage structures.
  • Fig. 19 shows the shaft 13, on which the sleeve 59 is arranged.
  • the sleeve 59 carries a turbomolecular pumping structure consisting of discs 119, 120. Adjacent to the sleeve 59, the rotor disk 14 is provided.
  • Stator disks 121, 122, 123 engage in the turbomolecular pumping structure of the sleeve 59, formed by the disks 119, 120.
  • the discs 14, 119 to 120 are shown only schematically.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (16)

  1. Pompe à vide à débit partagé (1) comprenant au moins deux entrées radiales (26, 27, 28), la pompe à vide (1) présentant un arbre (13), des disques de stator (20) et des disques de rotor (14, 15, 16, 17, 18, 19) disposés sur l'arbre (13), au moins un paquet de disques (21, 22) étant disposés sur l'arbre (13), caractérisée en ce qu'au moins deux rainures (39, 40, 53, 54, 57, 58) et/ou alésages (55, 56) sont réalisé(e)s dans l'arbre (13) dans la direction radiale, lesquels sont réalisés dans la direction axiale de l'arbre de manière plus longue que dans la direction périphérique de l'arbre (13).
  2. Pompe à vide à débit partagé (1) selon la revendication 1, caractérisée en ce que les au moins deux rainures (39, 40, 53, 54, 57, 58) et/ou alésages (55, 56) sont disposé (e) s avec une symétrie radiale dans l'arbre (13).
  3. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 1 ou 2, caractérisée en ce que les au moins deux rainures (39, 40, 53, 54, 57, 58) et/ou alésages (55, 56) sont disposé (e) s dans l'arbre (13) en formant au moins une bague.
  4. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications précédentes, caractérisée en ce que les rainures (39, 40, 53, 54, 57, 58) et/ou les alésages (55, 56) présentent une section transversale rectangulaire et/ou se rétrécissant coniquement et/ou s'élargissant coniquement et/ou échelonnée sous forme étagée.
  5. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications précédentes, caractérisée en ce que les alésages (55, 56) sont réalisés sous forme d'alésages traversants.
  6. Pompe à vide à débit partagé (1) selon la revendication 1, caractérisée en ce que l'arbre (13) est porté par un palier magnétique (111), en ce que des bagues magnétiques (112) du palier magnétique (111) sont disposées sur l'arbre (13), et des bagues magnétiques (113) du palier magnétique (111) sont disposées sur un boîtier, en ce qu'un roulement à billes (114) est en outre prévu, lequel est réalisé sous forme de palier de secours, le roulement à billes (114) étant précontraint par un ressort (115) et en ce que l'arbre (13) présente un alésage intérieur (116) disposé le long d'un axe longitudinal.
  7. Pompe à vide à débit partagé (1) selon la revendication 6, caractérisée en ce qu'une extrémité d'arbre (110), dans laquelle est disposé l'alésage intérieur (116), est réalisée en section transversale en forme de pot sans tourillon de palier interne.
  8. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications précédentes, caractérisée en ce qu'au moins un manchon (59) est disposé sur l'arbre (13).
  9. Pompe à vide à débit partagé (1) selon la revendication 8, caractérisée en ce que le manchon (59) présente une bague (103) au niveau d'au moins une extrémité (106).
  10. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 8 ou 9, caractérisée en ce que le manchon (59) est disposé sur l'arbre (13) au moins dans la région des rainures (39, 40, 53, 54, 57, 58, 63, 64) et/ou des alésages.
  11. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 8 à 10, caractérisée en ce que l'au moins un manchon (59) est disposé au niveau d'au moins une extrémité d'arbre (104) dans la région d'un rétrécissement.
  12. Pompe à vide à débit partagé (1) selon la revendication 11, caractérisée en ce que l'au moins un manchon (59) est supporté d'un côté (105) sur l'arbre (13) et sur un côté opposé (106) sur au moins une bague de support (103).
  13. Pompe à vide à débit partagé (1) selon la revendication 12, caractérisée en ce qu'entre une région de l'arbre (13) portant le manchon (59) et l'au moins une bague de support (103) est disposée au moins une bague magnétique (101) d'un palier magnétique.
  14. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 8 à 13, caractérisée en ce que l'au moins un manchon (59) est disposé sur une région de l'arbre (13) avec du matériau massif.
  15. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 8 à 13, caractérisée en ce que l'arbre (13) est réalisé sous forme d'arbre de rotor divisé avec deux éléments d'arbre (107, 108), et les éléments d'arbre (107, 108) sont connectés l'un à l'autre par l'au moins un manchon (59), de telle sorte qu'une cavité (109) soit produite entre les éléments d'arbre.
  16. Pompe à vide à débit partagé (1) selon l'une quelconque des revendications 8 à 15, caractérisée en ce qu'au moins un perçage (83) est disposé dans le manchon (59).
EP15174845.6A 2015-07-01 2015-07-01 Pompe à vide à debit partagé Active EP3112689B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP15174845.6A EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP18201126.2A EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
JP2016128672A JP6438916B2 (ja) 2015-07-01 2016-06-29 スプリットフロー真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15174845.6A EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP18201126.2A Division EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP18201126.2A Division-Into EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Publications (2)

Publication Number Publication Date
EP3112689A1 EP3112689A1 (fr) 2017-01-04
EP3112689B1 true EP3112689B1 (fr) 2018-12-05

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EP18201126.2A Active EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP15174845.6A Active EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

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JP (1) JP6438916B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7196763B2 (ja) * 2018-10-25 2022-12-27 株式会社島津製作所 ターボ分子ポンプおよび質量分析装置
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly
EP4239200A3 (fr) * 2022-02-09 2023-10-25 Shimadzu Corporation Pompe à vide avec palier magnétique ajustable dans la direction axiale

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Publication number Priority date Publication date Assignee Title
JPH02142860A (ja) * 1988-11-22 1990-05-31 Dai Ichi High Frequency Co Ltd 角部を有する部材への樹脂ライニング方法
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
WO1999061799A1 (fr) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
JP2002213214A (ja) * 2000-11-16 2002-07-31 Honda Motor Co Ltd Ｏｈｖ型四サイクル内燃機関の動弁装置
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
JP4933921B2 (ja) * 2007-03-08 2012-05-16 京セラミタ株式会社 シート給紙装置及びこのシート給紙装置を備えた画像形成装置
JP2011126639A (ja) * 2009-12-16 2011-06-30 Murata Machinery Ltd 糸巻取機
DE102010045716A1 (de) * 2010-09-16 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2012189004A (ja) * 2011-03-10 2012-10-04 Mitsubishi Heavy Ind Ltd スクロール流体機械
DE202013010209U1 (de) * 2013-11-12 2015-02-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Welle

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Also Published As

Publication number Publication date
JP2017061922A (ja) 2017-03-30
EP3460249A1 (fr) 2019-03-27
JP6438916B2 (ja) 2018-12-19
EP3112689A1 (fr) 2017-01-04
EP3460249B1 (fr) 2021-03-24

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