EP3112688A1 - Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé - Google Patents

Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé Download PDF

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Publication number
EP3112688A1
EP3112688A1 EP15174844.9A EP15174844A EP3112688A1 EP 3112688 A1 EP3112688 A1 EP 3112688A1 EP 15174844 A EP15174844 A EP 15174844A EP 3112688 A1 EP3112688 A1 EP 3112688A1
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EP
European Patent Office
Prior art keywords
shaft
vacuum pump
rotor
housing
disks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15174844.9A
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German (de)
English (en)
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EP3112688B1 (fr
EP3112688B2 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15174844.9A priority Critical patent/EP3112688B2/fr
Priority to JP2016128671A priority patent/JP6253719B2/ja
Publication of EP3112688A1 publication Critical patent/EP3112688A1/fr
Publication of EP3112688B1 publication Critical patent/EP3112688B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a vacuum pump in the design of a split flow pump.
  • split-flow vacuum pumps are used in practice to simultaneously evacuate a plurality of chambers, for example a mass spectrometer system.
  • the split-flow vacuum pumps make it possible to dispense with a pump system consisting of several individual pumps and to carry out the evacuation of several chambers with a single pump.
  • split-flow vacuum pumps have the advantage that they only have a small space requirement for the vacuum system.
  • the split-flow vacuum pumps are not only used in analytical instruments, but also, for example, in leak detectors whose analysis principle is also based on mass spectrometry.
  • a turbomolecular pump which has a plurality of suction ports, which is in each case connected to one of the vacuum chambers of a device, for example a mass spectrometer.
  • the suction ports deliver gas to various axially spaced locations of the rotor.
  • several so-called rotor-stator packages are arranged, each compressing gas.
  • a high vacuum side stator pack creates a pressure ratio between its inlet and outlet.
  • the inlet is connected to a first vacuum chamber.
  • the outlet is connected to the inlet of the next rotor-stator pack.
  • this area is connected between two rotor-stator packages with a second vacuum chamber.
  • each suction port is assigned a rotor-stator package. It turns out that compared to the diameter very long rotors are difficult to handle, since the rotors are operated at speeds in the range of some 10,000 revolutions per minute.
  • each vacuum pump to be provided with its own flange. At this then a suitable for the pressure range vacuum pump is connected. This approach is unpopular due to the high cost of the plurality of vacuum pumps. There is also a need for compact devices. However, these can not be realized with a large number of vacuum pumps.
  • multiple vacuum chambers are arranged in series and interconnected by low conductance holes. From one to the other end of the row decreases the pressure prevailing within the vacuum chamber gas pressure.
  • the bores are designed so that a particle beam can pass through them and thus through the row of vacuum chambers.
  • the vacuum chamber with the lowest pressure often contains an analyzer, such as a mass spectrometer.
  • split-flow vacuum pumps which have three or four radial inlets and which have at least four pumping stages.
  • Pumping stages are usually turbomolecular pumping stages. These are often combined with other pumping stages, for example Holweckpump taskn or Gaedepumpsayn.
  • the technical problem underlying the invention is to provide a split-flow vacuum pump in which the number of inlets is increased, without increasing the number of pump stages provided.
  • a split-flow vacuum pump is to be specified in which a plurality of rotor disk packages on the shaft is made possible with great manufacturing accuracy while reducing the prefabricated variants of rotor disks.
  • a split-flow vacuum pump is to be specified, with which it is possible to thermally decouple the two ends of the vacuum pump. This means that, for example, one end of the vacuum pump is baked and at the same time the opposite end, for example, with the arrangement of the bearings should not be overheated.
  • the split-flow vacuum pump according to the invention with at least three radial inlets and with at least four pump stages, wherein at least one pumping stage is designed as a turbomolecular pumping stage, wherein the at least three inlets are designed as main inlets, which are arranged in the axial direction between the pumping stages, characterized that in addition at least one radial Sub-inlet is provided, which is arranged in the region of at least one turbomolecular pumping stage.
  • the inventive design of the vacuum pump it is possible to provide at least one secondary inlet in addition to the main inlets.
  • the main inlets are located between the pumping stages as known in the art.
  • a novelty of the invention is to provide at least one further inlet, which is arranged in the region of at least one turbomolecular pumping stage. This means that a so-called tap, that is the inlet is not arranged between the turbomolecular pumping stages, but that the tap leads radially into a disk pack of the at least one turbomolecular pumping stage.
  • the rotor may be formed in one piece or in several pieces.
  • the at least one secondary inlet has a central axis and the central axis is arranged between a first and a last slice of the at least one turbomolecular pumping stage.
  • the secondary inlet leads between the disks of the disk package of the at least one turbomolecular pumping stage.
  • additional inlets created, so that a larger number of vacuum chambers can be evacuated.
  • the at least one secondary inlet is arranged between two stator disks and / or between two rotor disks and / or between a stator disk and a rotor disk of at least one turbomolecular pump stage, and / or that at least two secondary inlets with a radial offset are arranged to each other.
  • the secondary inlet is arranged between the disks of a stator pack, while a main inlet is arranged between the stator packs.
  • втори ⁇ н ⁇ е ⁇ о ⁇ оловки can also be arranged radially offset from one another at the same axial height of the rotor.
  • the secondary inlets are arranged in this case in a disk package between two rotor disks and distributed radially on the circumference. However, they can also be on one level.
  • the at least one secondary inlet is arranged between two adjacent stator disks and / or between adjacent rotor disks and / or between a stator disk and an adjacent rotor disk of at least one turbomolecular pumping stage.
  • the secondary inlets are chosen to be relatively small in diameter and arranged between the discs.
  • a pumping speed of the at least one secondary inlet is less than the suction capacity of a main inlet.
  • the secondary inlets serve to increase the number of taps of a multi-chamber system to be evacuated.
  • the main inlets can have a relatively large cross section.
  • the secondary inlets lead between disks of turbomolecular pumping stages and therefore have only a relatively small cross-section.
  • n-1 secondary inlets are provided in the case of n disks.
  • the number of secondary inlets is less than the number of slices. If a disk pack of the turbomolecular pumping stage is formed from two disks, a secondary inlet can be provided between these two disks.
  • turbomolecular pumping stage it is also possible to provide a plurality of radial secondary inlets in the region of a turbomolecular pumping stage. Likewise, it is also possible to provide one or more secondary inlets at multiple turbomolecular pumping stages in each of these turbomolecular pumping stages. Various turbomolecular pumping stages may be formed with and without secondary inlets.
  • At least one turbomolecular pumping stage at least one Holweck pumping stage and / or one Siegbahn pumping stage and / or one Gaedepumpprocess and / or a 9.kanalpumpprocess and / or a Gewindepumpch is provided.
  • Split-flow pumps usually consist of one or more turbomolecular pumping stages and at least one other of said pumping stages.
  • the pressure conditions in the chambers to be evacuated can be adjusted accordingly.
  • a main inlet between the pumping stages for example between two turbomolecular pumping stages, and for example additionally to arrange a Holweck pumping stage.
  • at least one further secondary inlet is additionally arranged in the region of the at least one turbomolecular pumping stage.
  • a turbomolecular pump stage is formed from one or more rotor disks and / or from one or more stator disks.
  • a pumping stage usually consists of at least one stator disk and at least one rotor disk. Often, a plurality of stator disks and a plurality of rotor disks, which engage alternately, are provided. According to the invention, it is advantageously provided that n-1 secondary inlets are provided for n disks. For example, if a stator disk and a rotor disk are provided which form a turbomolecular pump stage, the inlet is arranged between these disks.
  • a further advantageous embodiment of the invention provides that a stator disk and an adjacent rotor disk of a turbomolecular pumping stage define an axial length L, and that a distance between two turbomolecular pump stages at least as long as this length L.
  • At least one stator disk and / or one rotor disk form at least one turbomolecular pumping stage. If the distance between adjacent stator disks and / or adjacent rotor disks is so great that the length L is exceeded, a new turbomolecular pumping stage commences according to the invention. An inlet in this area between the turbomolecular pumping stages is considered to be the main inlet. An inlet in the area of the turbomolecular pumping stage itself is considered as a secondary inlet.
  • a turbomolecular pump stage is formed from at least one rotor disk.
  • the embodiment according to the invention with regard to the inlets can in principle also be used in a turbomolecular pump.
  • a pumping stage consists of at least one rotor disk and at least one stator disk.
  • the secondary inlet is arranged between the rotor disk and the stator disk.
  • FIG. 1 Another embodiment of a split-flow vacuum pump according to the invention with at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on a shaft, wherein at least two disk packages are arranged on the shaft, wherein the shaft has at least two different outer diameters and the disk packages to the outer diameters have adapted inner diameter characterized by in that, in addition to a region with a largest diameter in the axial direction, the shaft has at least two regions with smaller diameters on both sides.
  • the embodiment of the invention allows a large number of individual disc packs on the shaft. According to the invention, it is possible to arrange four or more disk packs on the rotor.
  • each case in each case at least one disc package can be arranged in these areas.
  • On the adjoining areas again with a slightly smaller diameter, at least one further disc pack can be arranged in each case.
  • the larger diameter areas each serve as a stop for the disk packs mounted on the areas of slightly smaller diameters.
  • stator disc packs at a distance from each other are arranged and thus the rotor disk packages are arranged at a distance from each other, it makes sense to work on the shaft with stops. The more stops are present, the less tolerances are required for the discs and the gaps between the stator and rotor discs can be made smaller.
  • the rotor disks have to be manufactured with sufficient precision, which means a high manufacturing outlay, or the distance between the rotor and stator disks must be selected to be large enough so that the manufacturing tolerance does not lead to a collision between the stator and rotor disks.
  • Each disc package is advantageously mounted against a stop. By this measure, the accuracy of the position of the assembled disc packages is significantly increased.
  • the areas with the smaller diameters on both sides of the area with the largest diameter in each case in pairs have the same diameter. This makes it possible, on the first smaller diameters on both sides of the area with the largest diameter same disc packs, that is to assemble disc packs with the same diameter. The same applies to the areas adjacent to these areas with a further reduced diameter. By this measure, it is possible to mount four disc packs, which must, however, have only two diameters from the manufacturing ago. As a result, many identical parts can be pre-assembled, which significantly reduces the manufacturing costs.
  • transitions between the regions with different diameters are designed as a stop for the disk packs. These stops ensure that the disk packages of the rotor disks are positioned exactly between the stator disks and that manufacturing tolerances of the individual disk packages do not add up over the entire length of the shaft.
  • the shaft provides a pyramidal symmetrical structure.
  • both sides of the shaft can each be equipped with the same disc packs.
  • FIG. 1 Another embodiment of the split-flow vacuum pump according to the invention with a housing, a shaft rotatably disposed in the housing, are arranged on the rotor disks and arranged on the housing stator, characterized in that the housing has at least two housing portions which are thermally decoupled or between which a reduced thermal coupling is formed.
  • vacuum pumps it is often desirable to heat one side of the pump to achieve a better evacuation of the recipient.
  • the opposite side of the pump which is in most cases the side in which the bearings are arranged, should as far as possible not be heated, respectively If possible, this side is even cooled in order to achieve a trouble-free shaft bearing.
  • the at least two housing areas are connected by a housing section with a wall thickness reduced in relation to the wall thickness of the two housing areas.
  • a wall area between the two housing areas has a thinner cross-section than the rest of the housing.
  • the housing has a constriction for this purpose.
  • a reinforcement made of a material having a lower thermal conductivity than the thermal conductivity of the housing is arranged in the region of the housing portion.
  • a reinforcement made of a material having a lower thermal conductivity than the thermal conductivity of the housing is arranged in the region of the housing portion.
  • a further advantageous embodiment of the invention provides that the at least two housing areas are formed from two separate housing components and that between the housing components at least one thermal Seal is arranged.
  • the seal advantageously has a lower thermal conductivity than the housing.
  • the seal may be formed of glass and / or ceramic and / or plastic. This seal ensures that there is no heat transfer from the heated part of the housing to the cooled part of the housing.
  • At least one bore and / or at least one groove is arranged, in which heating elements and / or coils for heating the housing and / or cooling elements are arranged.
  • a vacuum system is provided with at least one vacuum pump and at least one recipient, in which between the vacuum pump and the recipient a detachable Connection is provided, wherein for sealing the connection to the atmosphere side at least one elastomeric seal and in the direction of vacuum side at least one gap seal are provided, which is characterized in that between the elastomeric seal and the gap seal at least one suction channel and / or at least one suction opening is / is provided ,
  • This embodiment has the advantage that an elastomeric seal is used at the sealing points on the atmosphere side. This is advantageously designed as an O-ring. At least one gap seal is used as the second sealing element between the elastomer seal and the, for example, ultra-high vacuum connection. The surfaces of the recipient (chamber) and a surface of the pump housing are pressed against each other.
  • An advantageous embodiment of the split-flow vacuum pump according to the invention with at least two radial inlets the vacuum pump having stator disks and rotor disks arranged on a shaft, wherein at least one disk package is arranged on the shaft, provides for at least two grooves in the shaft in the radial direction / or bores are arranged which are formed longer in the axial direction of the shaft than in the circumferential direction of the shaft or that the shaft has at least one constriction in the axial direction.
  • the modal behavior of the rotor, and rotor shaft in particular can be critical. Therefore, it must be attempted to reduce the mass and thus also the weight of the shaft while maintaining rigidity, especially in the radial direction.
  • the shaft has grooves and / or holes.
  • the grooves and / or bores are preferably axial recesses, for example millings in the shaft.
  • the grooves and / or holes are provided in areas where no rotor disks are arranged.
  • the at least two grooves and / or bores are arranged radially symmetrically in the shaft. This is provided so that the shaft remains rotationally symmetric and has no imbalances.
  • the at least two grooves and / or holes are arranged forming at least one ring in the shaft. This means that in a region in which no rotor disks or disk packages are arranged, the grooves and / or holes are arranged, distributed uniformly over the circumference of the shaft.
  • these areas can each be provided with the grooves and / or bores.
  • the grooves and / or bores have a rectangular and / or a conically tapering and / or a conically widening and / or a stepped stepped cross section.
  • a variety of cross-sections are conceivable.
  • the configuration of the shape of the cross sections depends on the particular application.
  • a further advantageous embodiment of the invention provides that the holes are formed as through holes.
  • the holes are formed as through holes.
  • the shaft which are formed as through holes, that is, that different holes in the surface of the shaft in the region of a core of the shaft are brought together.
  • a sleeve is arranged on the shaft at least in the region of the grooves or the at least one constriction.
  • An advantageous embodiment of the invention provides a split-flow vacuum pump with at least two radial inlets, wherein the vacuum pump has stator disks and rotor disks arranged on a shaft, wherein at least one disk package is arranged on the shaft, which is characterized in that at least one Sleeve is arranged.
  • the natural vibration frequencies of the rotor can be changed, so that the rotor does not have to be operated in the range of a natural vibration frequency. It can also reduce the contact forces by the lighter rotor at the same or higher bending natural frequency.
  • the sleeve has a ring on at least one end.
  • the sleeve can be arranged for example on a tapered shaft end.
  • a sleeve is arranged on the shaft at least in the region of the grooves and / or holes and / or the at least one constriction.
  • the arrangement of the sleeve in the region of the grooves and / or holes and / or the at least one constriction increases the stability of the rotor shaft.
  • a constriction leads to a loss of rigidity of the shaft, which can be compensated by the sleeve.
  • a further advantageous embodiment of the invention provides that at least one sleeve is arranged on at least one shaft end in the region of a taper.
  • the shaft ends usually taper to be placed in bearings, such as ball bearings or magnetic bearings.
  • the sleeve contributes to increasing the rigidity of the shaft.
  • the at least one sleeve is mounted on one side on the shaft and on an opposite side on at least one support ring.
  • the shaft has a step-shaped longitudinal section, the means that it tapers stepwise, the sleeve can be arranged in the region of two adjacent stages. At the stage with the larger diameter, the sleeve can rest directly on the shaft. At the stage with the smaller diameter, the sleeve rests on the at least one support ring.
  • a particularly preferred embodiment of the invention provides that at least one magnetic ring of a magnetic bearing is arranged between a region of the shaft carrying the sleeve and the at least one support ring. This makes it possible to stiffen the shaft at the shaft end and yet to provide magnetic rings, which are arranged on the smaller diameter of the shaft and thus less expensive.
  • Another advantageous embodiment of the invention provides that the at least one sleeve is arranged on a region of the shaft with solid material.
  • a modified advantageous embodiment of the invention provides that the at least one sleeve is arranged in a region without a rotor shaft between shaft elements.
  • the shaft is formed as a split shaft and the sleeve connects the shaft elements.
  • the weight of the rotor shaft is significantly reduced, which has an advantageous effect on the modal behavior of the shaft.
  • a further advantageous embodiment of the invention provides that at least one bore is arranged in the sleeve.
  • the bore is advantageous in the area of Grooves and / or holes and / or constrictions arranged. In the area of a vacuum pump, no gas-filled cavities should be present during the evacuation, since these gas-filled cavities degas during the evacuation process and thereby does not reach the actually achievable final pressure of the pump.
  • the at least one sleeve is advantageously made of metal.
  • metal aluminum, titanium or stainless steel can be selected.
  • the at least one sleeve may also consist of a composite material with carbon fiber, for example carbon fiber reinforced plastic. It is also possible to use a combination of the materials of metal and the composite material with carbon fibers.
  • the axial extent of the sleeve is greater than its outer diameter.
  • the sleeve contributes optimally to improving the rigidity of the shaft.
  • the at least one sleeve can be designed such that it is fastened in front of and behind the motor magnet on the rotor shaft. This makes it possible to design the magnetic rings with a small diameter and thus perform cost-effective.
  • the at least one sleeve can be applied to the rotor shaft and are connected in the direction of bearing end, for example by a ring with the shaft.
  • a sleeve according to the invention can likewise be provided here.
  • This sleeve can be arranged on the solid shaft.
  • the connection between the solid shaft and the sleeve for example, by shrinking, pressing and / or gluing or other types of fastening.
  • the sleeve in a region of the shaft with at least one constriction or at least one recess and / or grooves and / or holes. Due to the reduced mass, which contributes little to the stiffness on the small diameter of the rotor, the natural frequency of the rotor through the sleeve can be increased. It is also positive that the support forces are reduced in this way and, for example, when using a permanent magnet bearing possibly ring magnet pairs can be saved to reduce costs.
  • the fit of fit of the rotor disks may be provided on a smaller outer diameter than the outer diameter of the sleeve. This is advantageous if otherwise the coil of the rotor disk, around which the rotor blades are arranged, would become too weak if the diameter of the adapter were too large, as a result of which the rotor disk would no longer be securely seated on the rotor during operation.
  • a pump structure is additionally applied to the sleeve on the outer lateral surface.
  • Pump structures may be, for example, a turbo structure, a cross channel structure, a thread structure or a Holweck structure or a combination of these structures.
  • the at least one ring can be arranged on one side or on both sides preferably at the end of the sleeve.
  • the ring can be fixedly arranged on the sleeve. It is also possible to form the at least one ring in one piece with the sleeve.
  • the ring is formed as an inner ring on the sleeve.
  • the sleeve serves to increase the stability.
  • a constriction that is, a region in which the shaft has a smaller diameter than the diameter
  • are arranged on the rotor disks and / or rotor packages may be provided to increase the stability of a sleeve.
  • bores may be provided to degas from the sleeve covered cavities in the shaft can.
  • the sleeve is advantageously made of a material which has a quotient of modulus of elasticity and density which is greater than the quotient of elastic modulus and density of the shaft.
  • Another advantageous embodiment of the invention provides a split-flow vacuum pump with at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on a shaft, wherein at least one disk package is arranged on the shaft, provides that the shaft is one along a longitudinal axis having arranged inner bore.
  • a shaft end, in which the inner bore is arranged is cup-shaped in cross-section without inner bearing journal. By omitting the inner journal, it is possible to arrange the inner bore in said shaft end.
  • the pump with the features according to claims 1 to 10 may contain the features of claims 11 to 20 individually or in combination.
  • the pump with the features according to claims 11 to 13 may contain the features of claims 1 to 10 and 14 to 20 individually or in combination.
  • the pump with the features according to claims 14 to 19 may contain the features of claims 1 to 13 individually or in combination.
  • Fig. 1 shows a vacuum pump 1, which is designed as a so-called split-flow vacuum pump.
  • the vacuum pump 1 is connected to a multi-chamber vacuum system 2.
  • the multi-vacuum system 2 has four chambers 3, 4, 5, 6, which are to be evacuated by the vacuum pump 1.
  • the gas pressure in the chambers 3, 4, 5, 6 is increasing in this order.
  • the chambers 3, 4, 5, 6 are separated by partitions 7, 8, 9, wherein holes 9, 10, 11 establish a connection.
  • These bores 9, 10, 11 are arranged and dimensioned, for example, such that a particle beam passes through all the chambers 3, 4, 5, 6 can.
  • first partition 7 separates the first chamber 3 and the second chamber 4
  • second partition 8 separates the second chamber 4 from the third chamber 5
  • third partition 9 separates the third chamber 5 from the fourth chamber 6.
  • the dashed arrows in the Fig. 1 illustrate the gas flow.
  • the vacuum pump 1 has a shaft 13 which carries rotor disks 14 to 19.
  • the rotor disks 14 to 19 are in engagement with stator disks 20.
  • the rotor disks 14, 15, 16 form a first disk package 21 and the rotor disks 17 to 19 form a second disk package 22.
  • the disk package 22 forms a high-vacuum-side rotor stator package with the stators 20.
  • the disk package 21 forms with the stator 20 a septvakuum discoveredes rotor stator.
  • the blades in both packages are, as known in the art, both stator and rotor side attached to support rings or integrally formed with this.
  • a first gas inlet 23 is located in front of the high-vacuum-side rotor stator packet, and a second gas inlet 24 is located in front of the forward-vacuum-side rotor stator packet.
  • a first main inlet 23 leads into the vacuum pump 1.
  • a second main inlet 24 leads into the vacuum pump 1.
  • a further main inlet 25 leads into the vacuum pump 1 and from the vacuum chamber 6, a further main inlet 26 in the vacuum pump. 1
  • the main inlets 23, 24, 25, 26 are arranged between the turbomolecular pumping stages 21, 22.
  • a first secondary inlet 27 is arranged, which is separated from the vacuum chamber 5 leads into the vacuum pump 1.
  • a further secondary inlet 28 leads from the vacuum chamber 6 in the region of the turbomolecular pumping stage 21 into the vacuum pump 1.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pumping stages 21, 22.
  • the rotor shaft 13 has areas with different diameters.
  • a first region 29 is a region with the largest diameter. On both sides of the shaft 13, two areas 30, 31 with smaller diameters join. This is in turn followed by regions 32, 33 with an even smaller diameter of the shaft 13. In the region 29 of the largest diameter of the shaft 13, no rotor disks are arranged. In the area 30, the rotor disk 16 is arranged, which is determined by a stop 34, which formed by the step-shaped shoulder between the region 29 and the region 30, locally unique.
  • Another advantage of the invention is that the rotor disks 14 to 19 are placed exactly on the shaft, whereby very small gaps can be formed. This increases the pumping power of the vacuum pump 1. By using many identical parts, the pump is inexpensive to manufacture. In the present embodiment, in each case two rotor disk packs each having the same inner diameter are arranged on the two sides of the region 29 of the shaft 13 with the largest diameter.
  • a further advantageous embodiment of the invention is an embodiment in which in the region of the largest diameter 29 grooves 39, 40 are arranged, which reduce the mass of the shaft. Since the split-flow vacuum pumps have a very long length, the modal behavior of the rotor and in particular of the rotor shaft is critical. For this reason, according to the invention, the mass and thus the weight of the shaft is reduced while maintaining rigidity.
  • the vacuum pump 1 has a housing 41.
  • the housing 41 In order to reduce thermal transitions between the high-vacuum side and the fore-vacuum side in the housing 41, the housing 41 has a constriction 42. This constriction reduces the thermal conductivity. It is possible to additionally provide a reinforcement, not shown, in the region of the constriction 42.
  • the housing may also be designed to be divided in the region of the constriction 42, and a thermal seal may be arranged between the two parts of the housing.
  • the shaft 13 is supported by a magnetic bearing 43 on one side.
  • abutment 43 b are arranged.
  • the camp is not shown.
  • it may be an oil-lubricated ball bearing.
  • turbomolecular pumping stages it is also possible, in addition to the turbomolecular pumping stages, to provide a Holweck pumping stage and / or a Siegbahn pumping stage and / or a Gaedepump stage and / or a side channel pumping stage and / or a threaded pumping stage.
  • the rotor disk 15 and the stator disk 20 have an axial length L as viewed in the axial direction.
  • the distance between the turbomolecular pump stages 21, 22 is greater than the length L.
  • Fig. 2 shows the shaft 13 with rotor disk packages 44, 45, 46 which form turbomolecular pumping stages 44, 45, 46 with stator disk packages (not shown).
  • the gas flow is shown by an arrow 47.
  • Arrows 48 represent the gas flow which is supplied from two main inlets 24, 25 to the turbomolecular pumping stages 45, 46.
  • the arrows 49 indicate the gas flow which is supplied from two secondary inlets 27, 28 in the region of the turbomolecular pumping stages 44, 45 to the pumping system.
  • the secondary inlets 27, 28 are arranged in the region of the turbomolecular pumping stages 44, 45, while the main inlets 24, 25 have their supply between the turbomolecular pumping stages 44, 45 and 46.
  • Fig. 3 shows vacuum pump 1 with the once again clarified, the turbomolecular pumping stages 44, 45, 46, 49 has.
  • the turbomolecular pump stages 44, 45, 46, 49 consist of rotor disks and stator disks, which are arranged intermeshing.
  • main inlets 23, 24, 25, 26 are provided, which are arranged in front of the pumping stage 44 or between the pumping stages 44, 45, 46, 49.
  • the shaft 13 is supported by means of a magnetic bearing 43 and a ball bearing 50.
  • the ball bearing 50 is an oil lubricated ball bearing.
  • the shaft 13 is driven by a motor 51.
  • a secondary inlet 27 is provided in the area of the turbomolecular pumping stage 44.
  • a secondary inlet 28 is provided in the region of the turbomolecular pumping stage 45, and a secondary inlet 52 is provided in the region of the turbomolecular pumping stage 46.
  • the number of inlets from the four main inlets 23, 24, 25, 26 to a total of seven inlets, namely plus the three side inlets 27, 28, 52 increases.
  • Fig. 4 shows a partial section through the shaft 13.
  • the shaft 13 has the in Fig. 1 shown areas 29 having the largest diameter, the adjoining areas 30, 31 with a smaller diameter and in turn adjoining areas 32, 33 with a further reduced diameter.
  • the rotor disks 16, 17 are arranged.
  • the rotor disks 15, 18, 19 are arranged.
  • the rotor disks 15, 18, 19 have the same inner diameter.
  • the rotor disks 16, 17 have the same inner diameter on. This makes it possible to build a low-cost pump by a large number of identical parts.
  • the difference in diameter between the areas 29, 30 forms the stop 34. Between the areas 29, 31 of the stopper 36 is provided. Between the areas 30, 32 of the stop 35 is arranged and between the areas 31, 33 of the stop 37 is provided.
  • the mounting direction of the discs 15, 16 is indicated by the arrow A.
  • the mounting direction of the rotor disks 17, 18, 19 is indicated by the arrow B.
  • M denotes a central axis of the shaft 13.
  • the shaft 13 and the rotor disks 15, 16, 17, 18, 19 are constructed rotationally symmetrically about the center axis M.
  • Fig. 5 shows the shaft 13 with turbomolecular pumping stages 21, 22.
  • the shaft 13 has grooves 39, 40 in a region in which no rotor disks 14, 15, 16, 17, 18, 19 are arranged.
  • Fig. 6 shows various ways in which the grooves 39, 40 may be formed.
  • FIG. 6 13 different embodiments of grooves are shown in the shaft.
  • the grooves can be arranged with the same cross sections rotationally symmetrical in the shaft 13.
  • Illustrated embodiments are exemplary only. In practice, respectively an embodiment selected and arranged rotationally symmetrical in the shaft.
  • a groove 53 is shown which has a rectangular cross-section.
  • a groove 54 is tapered in the direction of the central axis M according to a second embodiment.
  • Holes 55 are formed such that they form through holes 13 in the shaft.
  • the holes 55 converge at a point 56.
  • a groove 57 has a stepped cross-section.
  • a groove 58 is formed widening conically in the direction of the central axis.
  • a sleeve 59 may be provided.
  • the sleeve 59 should be formed of a rigid material but have a low mass.
  • the shaft 13 may also have constrictions (not shown).
  • constrictions not shown.
  • the sleeve 59 advantageously has bores 83 in the region of the grooves. These holes serve to allow the grooves 53, 54, 57, 58 and / or bores 55 to be evacuated so that they do not degas during the evacuation of the recipient.
  • Fig. 7 shows a shaft 13 with two turbomolecular pumping stages 21, 22, which are arranged in a housing 41 of a split flow pump.
  • the housing 41 has an inlet 24.
  • This prior art embodiment shows that a customer housing 60 has an inlet 61 formed radially offset from the inlet 24.
  • the axial length of the pump and the customer chamber 60 do not match.
  • the housing 41 has a web 62 in the region of the inlet 24. Due to the design of the web on which the stator disks (not shown) can be attached, one obtains a larger cross section and thus a higher conductance in the region of the inlet 24.
  • Fig. 9 shows a vacuum pump 1 with vacuum ports 72, 73, 75.
  • the vacuum port 72 has an elastomeric seal 76 and a gap seal 77 on. Between the elastomeric seal 76 and the gap seal 77, a suction channel 78 is arranged, are arranged in the bacteriaabsaugungen 79. In the vacuum port 75, a suction opening 80 is arranged. The insectsaugungen 79 lead into a feedthrough bore 81, which is guided to the intermediate stage 73.
  • a connection channel 82 is provided, so that the vacuum connection 75 is also evacuated via the suction opening 80 via the feed-through bore 82.
  • Fig. 10 shows the shaft 13 with grooves 39, 40.
  • the grooves 39, 40 are arranged in the axial direction at a height, that is, they form a ring in the shaft thirteenth
  • further grooves 63, 64 are provided, which are likewise arranged in the axial direction corresponding to each other and form a second ring of grooves.
  • two sleeves 59 are provided, which cover the grooves 39, 40, 63, 64.
  • the sleeves 59 have holes 83 in order to evacuate the grooves 39, 40, 63, 64 can.
  • Fig. 11 and in Fig. 12 show a rotor shaft 13 on which rotor disk packages 21, 22, 44 are arranged.
  • the rotor shaft 13 is stepped, so that the rotor disk packs 21, 22, 44 respectively abut against a step and are thus accurately positioned.
  • a sleeve 59 is arranged, which is supported with one end 105 on the shaft 13 and with its other end 106 on a support ring 103.
  • the support ring 103 is in turn supported on the rotor shaft 13 from.
  • the sleeve is thus mounted in front of and behind a motor magnet 101 on the rotor shaft 13.
  • the rigidity of the rotor, in particular at the strongly tapered end 104 is significantly increased.
  • the motor magnets 101 that is, the magnetic rings can be made with the usual, relatively small diameter, which has a cost effect.
  • the shaft 13 is improved by a shaft end 104 of larger diameter in terms of stiffness, the motor magnets would also have to be built larger, which would adversely affect the cost.
  • Fig. 13 shows a modified embodiment.
  • Fig. 13 is the rotor shaft 13 through a sleeve 59 between the disc packets 21, 22 stiffened.
  • the sleeve 59 is arranged on the solid shaft 13. It may be secured to the shaft 13 by shrinking, pressing or gluing.
  • the sleeve 59 fills the gap between the disc packs 21, 22 completely or almost completely. If it completely fills the distance between the disk packs 21, 22, it simultaneously performs the function of a spacer sleeve like the sleeves 38 in FIG Fig. 1 ,
  • Fig. 14 shows a modified embodiment in which the sleeve 59 is disposed on the rotor shaft 13 between the disk packs 21, 22.
  • the sleeve 59 is arranged at a distance from the disk pack 21.
  • the sleeve 59 is mounted on the shaft 13 of solid material and stiffened the rotor shaft thirteenth
  • Fig. 15 shows the rotor shaft 13 having a constriction 102.
  • the sleeve 59 is arranged in the region of the constriction 102.
  • the sleeve 59 has bores 83, through which the constriction 102 can be degassed. If a recipient is evacuated by the vacuum pump, cavities in the area of the vacuum pump, such as the constriction 102, must be simultaneously evacuated, since otherwise the cavities 102 degas during the evacuation process and thus the final pressure of the vacuum pump can not be achieved.
  • Fig. 16 shows the rotor shaft 13, which is formed as a divided rotor shaft with shaft elements 107, 108.
  • the shaft members 107, 108 are interconnected by the sleeve 59.
  • the sleeve 59 in turn has holes 83 through which a Cavity 109 between the shaft elements 107, 108 can be evacuated.
  • Fig. 17 shows a shaft end 110 of the rotor shaft 13.
  • the shaft 13 is supported by a magnetic bearing 111.
  • the magnetic rings 112 of the magnetic bearing 111 are arranged on the shaft 13.
  • Magnetic rings 113 of the magnetic bearing 111 are arranged on a housing 114.
  • a ball bearing 114 is provided, which is designed as an emergency.
  • the ball bearing 114 is biased by a spring 115.
  • an inner bore 116 is arranged in the shaft 13.
  • Fig. 18 shows the sleeve 59, which has a carrier 117 which is formed as a substantially cylinder jacket-shaped base portion.
  • a structuring with a plurality of structural elements 118 is provided, which are formed in the present illustrative embodiment as in the direction of the longitudinal axis of the sleeve 59 elongated straight webs.
  • the structural elements 118 may be designed as Holweck or Kreuzkanalpumptreatment.
  • the structural elements 118 may also have other pumping stage structures.
  • Fig. 19 shows the shaft 13, on which the sleeve 59 is arranged.
  • the sleeve 59 carries a turbomolecular pumping structure consisting of discs 119, 120. Adjacent to the sleeve 59, the rotor disk 14 is provided.
  • Stator disks 121, 122, 123 engage in the turbomolecular pumping structure of the sleeve 59, formed by the disks 119, 120.
  • the discs 14, 119 to 120 are shown only schematically.
  • Fig. 20 shows a rotor 126, which is shown only schematically with rotor disks 14, 15, 16, 17. Between the rotor disks 16, 17, two secondary inlets 27, 28 are arranged. The secondary inlets 27, 28 are radially spaced apart and both lead between the rotor disks 16, 17th
  • Fig. 21 shows a housing 60 of a vacuum pump with the vacuum ports 72, 73. There are two secondary inlets 27, 28 are provided, which are arranged in a plane.
  • Fig. 22 shows the rotor shaft 126, on which rotor disks 14, 15 are arranged. Between the rotor disks 14, 15, a stator 20 is schematically arranged. The rotor disks 14, 15 each have a collar 127. The collar 127 replaces the spacer sleeve 38, which in Fig. 1 is shown.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15174844.9A 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé Active EP3112688B2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15174844.9A EP3112688B2 (fr) 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
JP2016128671A JP6253719B2 (ja) 2015-07-01 2016-06-29 スプリットフロー真空ポンプ及びスプリットフロー真空ポンプを有する真空システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15174844.9A EP3112688B2 (fr) 2015-07-01 2015-07-01 Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé

Publications (3)

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EP3112688A1 true EP3112688A1 (fr) 2017-01-04
EP3112688B1 EP3112688B1 (fr) 2019-06-12
EP3112688B2 EP3112688B2 (fr) 2022-05-11

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106678058A (zh) * 2017-02-22 2017-05-17 上海优耐特斯压缩机有限公司 高速电机直驱透平机械的超高速转子结构
EP3441617A1 (fr) * 2017-08-09 2019-02-13 Pfeiffer Vacuum Gmbh Procédé de chauffage d'un rotor d'une pompe à vide
EP3767109A1 (fr) * 2019-07-15 2021-01-20 Pfeiffer Vacuum Gmbh Système à vide
US11037773B2 (en) 2018-08-14 2021-06-15 Bruker Daltonik Gmbh Turbo molecular pump for mass spectrometer
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
EP2039941A2 (fr) * 2007-09-20 2009-03-25 Pfeiffer Vacuum Gmbh Pompe à vide
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2378129A2 (fr) * 2003-09-30 2011-10-19 Edwards Limited Pompe à vide
US8481923B1 (en) * 2012-06-29 2013-07-09 Agilent Technologies, Inc. Atmospheric pressure plasma mass spectrometer
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
EP1807627B1 (fr) * 2004-11-01 2014-09-03 Edwards Limited Ensemble pompe
EP2789889A1 (fr) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Système à vide
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide
US20150086328A1 (en) * 2013-09-24 2015-03-26 Shimadzu Corporation Turbo-molecular pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JP2002303293A (ja) * 2001-04-06 2002-10-18 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4916655B2 (ja) * 2004-11-17 2012-04-18 株式会社島津製作所 真空ポンプ
DE102007010068A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
GB201314841D0 (en) † 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
EP2378129A2 (fr) * 2003-09-30 2011-10-19 Edwards Limited Pompe à vide
EP1807627B1 (fr) * 2004-11-01 2014-09-03 Edwards Limited Ensemble pompe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
EP2039941A2 (fr) * 2007-09-20 2009-03-25 Pfeiffer Vacuum Gmbh Pompe à vide
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
US8481923B1 (en) * 2012-06-29 2013-07-09 Agilent Technologies, Inc. Atmospheric pressure plasma mass spectrometer
EP2789889A1 (fr) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Système à vide
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide
US20150086328A1 (en) * 2013-09-24 2015-03-26 Shimadzu Corporation Turbo-molecular pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106678058A (zh) * 2017-02-22 2017-05-17 上海优耐特斯压缩机有限公司 高速电机直驱透平机械的超高速转子结构
EP3441617A1 (fr) * 2017-08-09 2019-02-13 Pfeiffer Vacuum Gmbh Procédé de chauffage d'un rotor d'une pompe à vide
US11037773B2 (en) 2018-08-14 2021-06-15 Bruker Daltonik Gmbh Turbo molecular pump for mass spectrometer
EP3767109A1 (fr) * 2019-07-15 2021-01-20 Pfeiffer Vacuum Gmbh Système à vide
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly

Also Published As

Publication number Publication date
JP6253719B2 (ja) 2017-12-27
EP3112688B1 (fr) 2019-06-12
EP3112688B2 (fr) 2022-05-11
JP2017020502A (ja) 2017-01-26

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