EP1243796A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP1243796A3
EP1243796A3 EP02005166A EP02005166A EP1243796A3 EP 1243796 A3 EP1243796 A3 EP 1243796A3 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 A3 EP1243796 A3 EP 1243796A3
Authority
EP
European Patent Office
Prior art keywords
pump
double
flow
gas friction
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02005166A
Other languages
German (de)
French (fr)
Other versions
EP1243796A2 (en
EP1243796B1 (en
Inventor
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1243796A2 publication Critical patent/EP1243796A2/en
Publication of EP1243796A3 publication Critical patent/EP1243796A3/en
Application granted granted Critical
Publication of EP1243796B1 publication Critical patent/EP1243796B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts

Abstract

Die Erfindung beschreibt eine Vakuumpumpe, welche aus einer zweiflutigen Gasreibungspumpe (6) und (7) und aus einer nachgeschalteten Pumpe (9) besteht. Die Gasströme der zweiflutigen Gasreibungspumpe werden innerhalb der Pumpe durch Verbindungselemente (26) zusammengeführt und durch die nachfolgende Pumpe (9) auf Atmosphärendruck verdichtet. Die Gasreibungspumpe ist vorteilhafterweise als zweiflutige Holweckpumpe und die nachgeschaltete Pumpe als Seitenkanalpumpe ausgebildet. Die kompakte Bauweise der Pumpe wird noch ergänzt durch die Tatsache, dass die Statorelemente (15) der Seitenkanalpumpe aus ungeteilten Scheiben bestehen. Diese Bauweise wird ermöglicht durch Rotorscheiben (13), welche durch Klemmringe (14) auf dem Rotor (4) befestigt sind.

Figure 00000001
The invention describes a vacuum pump which consists of a double-flow gas friction pump (6) and (7) and a downstream pump (9). The gas flows of the double-flow gas friction pump are brought together within the pump by connecting elements (26) and compressed to atmospheric pressure by the following pump (9). The gas friction pump is advantageously designed as a double-flow Holweck pump and the downstream pump as a side channel pump. The compact design of the pump is supplemented by the fact that the stator elements (15) of the side channel pump consist of undivided disks. This design is made possible by rotor disks (13) which are fastened to the rotor (4) by means of clamping rings (14).
Figure 00000001
EP02005166A 2001-03-24 2002-03-08 Vacuum pump Expired - Lifetime EP1243796B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10114585A DE10114585A1 (en) 2001-03-24 2001-03-24 vacuum pump
DE10114585 2001-03-24

Publications (3)

Publication Number Publication Date
EP1243796A2 EP1243796A2 (en) 2002-09-25
EP1243796A3 true EP1243796A3 (en) 2003-08-27
EP1243796B1 EP1243796B1 (en) 2006-11-08

Family

ID=7678927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02005166A Expired - Lifetime EP1243796B1 (en) 2001-03-24 2002-03-08 Vacuum pump

Country Status (4)

Country Link
US (1) US6676384B2 (en)
EP (1) EP1243796B1 (en)
JP (1) JP2002310092A (en)
DE (2) DE10114585A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102009056218A1 (en) * 2009-11-28 2011-06-01 Robert Bosch Gmbh Screw pump with integrated pressure relief valve
WO2014125238A1 (en) * 2013-02-15 2014-08-21 Edwards Limited Vacuum pump
DE102013114290A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
GB2592030B (en) * 2020-02-12 2022-03-09 Edwards Ltd Multiple stage vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
US4183719A (en) * 1976-05-13 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) Composite impeller wheel with improved centering of one component on the other
DE3442843A1 (en) * 1983-11-30 1985-06-05 Hitachi, Ltd., Tokio/Tokyo Vacuum pump
US5040949A (en) * 1989-06-05 1991-08-20 Alcatel Cit Two stage dry primary pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (en) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gas friction pump
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DE19930952A1 (en) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
DE19942410A1 (en) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
US4183719A (en) * 1976-05-13 1980-01-15 Maschinenfabrik Augsburg-Nurnberg Aktiengesellschaft (MAN) Composite impeller wheel with improved centering of one component on the other
DE3442843A1 (en) * 1983-11-30 1985-06-05 Hitachi, Ltd., Tokio/Tokyo Vacuum pump
US5040949A (en) * 1989-06-05 1991-08-20 Alcatel Cit Two stage dry primary pump

Also Published As

Publication number Publication date
EP1243796A2 (en) 2002-09-25
US6676384B2 (en) 2004-01-13
US20020136643A1 (en) 2002-09-26
DE10114585A1 (en) 2002-09-26
JP2002310092A (en) 2002-10-23
DE50208630D1 (en) 2006-12-21
EP1243796B1 (en) 2006-11-08

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