EP1288502A3 - Pompe à vide turbo-moléculaire - Google Patents

Pompe à vide turbo-moléculaire Download PDF

Info

Publication number
EP1288502A3
EP1288502A3 EP02017820A EP02017820A EP1288502A3 EP 1288502 A3 EP1288502 A3 EP 1288502A3 EP 02017820 A EP02017820 A EP 02017820A EP 02017820 A EP02017820 A EP 02017820A EP 1288502 A3 EP1288502 A3 EP 1288502A3
Authority
EP
European Patent Office
Prior art keywords
molecular pump
turbo molecular
stator
discs
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02017820A
Other languages
German (de)
English (en)
Other versions
EP1288502B1 (fr
EP1288502A2 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1288502A2 publication Critical patent/EP1288502A2/fr
Publication of EP1288502A3 publication Critical patent/EP1288502A3/fr
Application granted granted Critical
Publication of EP1288502B1 publication Critical patent/EP1288502B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP02017820A 2001-08-30 2002-08-08 Pompe à vide turbo-moléculaire Expired - Lifetime EP1288502B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10142567A DE10142567A1 (de) 2001-08-30 2001-08-30 Turbomolekularpumpe
DE10142567 2001-08-30

Publications (3)

Publication Number Publication Date
EP1288502A2 EP1288502A2 (fr) 2003-03-05
EP1288502A3 true EP1288502A3 (fr) 2003-10-29
EP1288502B1 EP1288502B1 (fr) 2010-03-17

Family

ID=7697165

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02017820A Expired - Lifetime EP1288502B1 (fr) 2001-08-30 2002-08-08 Pompe à vide turbo-moléculaire

Country Status (4)

Country Link
US (1) US6824357B2 (fr)
EP (1) EP1288502B1 (fr)
JP (1) JP4262457B2 (fr)
DE (2) DE10142567A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013220879A1 (de) * 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN116591994A (zh) * 2023-07-05 2023-08-15 合肥昱驰真空技术有限公司 一种新型磁悬浮复合分子泵

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
WO1994007033A1 (fr) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Soufflante turbomoleculaire
EP0694699A1 (fr) * 1994-07-28 1996-01-31 Ebara Corporation Dispositif de pompe à vide
EP0855517A2 (fr) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Pompe à vide
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPS63266190A (ja) * 1987-04-24 1988-11-02 Hitachi Ltd タ−ボ真空ポンプ
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
JPH01167497A (ja) * 1987-12-23 1989-07-03 Hitachi Ltd 真空ポンプ
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JPH03124998A (ja) * 1989-10-06 1991-05-28 Hitachi Ltd ドライ真空ポンプ
JPH04112997A (ja) * 1990-09-03 1992-04-14 Matsushita Electric Ind Co Ltd 真空装置
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE19956015A1 (de) 1999-11-22 2001-05-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
WO1994007033A1 (fr) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Soufflante turbomoleculaire
EP0694699A1 (fr) * 1994-07-28 1996-01-31 Ebara Corporation Dispositif de pompe à vide
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
EP0855517A2 (fr) * 1997-01-24 1998-07-29 Pfeiffer Vacuum GmbH Pompe à vide
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Also Published As

Publication number Publication date
US20030044270A1 (en) 2003-03-06
DE50214282D1 (de) 2010-04-29
EP1288502B1 (fr) 2010-03-17
DE10142567A1 (de) 2003-03-20
JP4262457B2 (ja) 2009-05-13
US6824357B2 (en) 2004-11-30
JP2003083282A (ja) 2003-03-19
EP1288502A2 (fr) 2003-03-05

Similar Documents

Publication Publication Date Title
TWI263737B (en) Centrifugal fan
EP1662148A3 (fr) Roue ventilateur radial
WO2002068826A3 (fr) Regulateur de debit pour un fluide
EP1079074A3 (fr) Aube statorique et stator pour une turbomachine
EP1659293A3 (fr) Turbomachine
EP1111191A3 (fr) Distribution des aubes statoriques
AU2002328105A1 (en) Turbocharger comprising a variable nozzle device
EP1342657A3 (fr) Ensemble de jeu de pignons à chaîne pour bicyclette
CA2218342A1 (fr) Pompe cardiaque rotative
EP1039137A3 (fr) Pompe turbo-moléculair
CA2308062A1 (fr) Realisation de surfaces fluidiques appariees
EP1536146A3 (fr) Turbomachine et prélèvement de fluide
AP2005003360A0 (en) Centrifugal pump with configured volute.
EP1288502A3 (fr) Pompe à vide turbo-moléculaire
WO2004045633A3 (fr) Composition pharmaceutique comprenant des microparticules
EP1046786A3 (fr) Compresseur/turbine à écoulement hélicoidal avec moteur/générateur à aimants permanents
FR2712037B1 (fr) Turbomachine à compresseur dont le rotor a un étage amont amovible.
ITBO20030563A1 (it) Motore elettrico per elettroventilatore e metodo di assemblaggio dello stesso
EP1318308A3 (fr) Pompe à vide
EP1413764A3 (fr) Assemblage de roue de compresseur
EP1277965A3 (fr) Pompe centrifuge
EP1041249A3 (fr) Aubage verrouillé d'un stator d'un compresseur
EP1429032A3 (fr) Compresseur centrifuge avec des aubes de guidage pour l'entrée
PT864758E (pt) Turbina para bombas com pas de perfil optimizado
EP0902190A3 (fr) Pompes à vide

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

AKX Designation fees paid
REG Reference to a national code

Ref country code: DE

Ref legal event code: 8566

17P Request for examination filed

Effective date: 20040714

RBV Designated contracting states (corrected)

Designated state(s): CH DE FR GB IT LI NL

17Q First examination report despatched

Effective date: 20070327

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 50214282

Country of ref document: DE

Date of ref document: 20100429

Kind code of ref document: P

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20100317

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20100317

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20101220

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100831

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20120719

Year of fee payment: 11

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20140430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130902

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20200716

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20210526

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20210805

Year of fee payment: 20

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50214282

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220301

REG Reference to a national code

Ref country code: GB

Ref legal event code: PE20

Expiry date: 20220807

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 20220807