EP1288502A3 - Pompe à vide turbo-moléculaire - Google Patents
Pompe à vide turbo-moléculaire Download PDFInfo
- Publication number
- EP1288502A3 EP1288502A3 EP02017820A EP02017820A EP1288502A3 EP 1288502 A3 EP1288502 A3 EP 1288502A3 EP 02017820 A EP02017820 A EP 02017820A EP 02017820 A EP02017820 A EP 02017820A EP 1288502 A3 EP1288502 A3 EP 1288502A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- molecular pump
- turbo molecular
- stator
- discs
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10142567A DE10142567A1 (de) | 2001-08-30 | 2001-08-30 | Turbomolekularpumpe |
DE10142567 | 2001-08-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1288502A2 EP1288502A2 (fr) | 2003-03-05 |
EP1288502A3 true EP1288502A3 (fr) | 2003-10-29 |
EP1288502B1 EP1288502B1 (fr) | 2010-03-17 |
Family
ID=7697165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02017820A Expired - Lifetime EP1288502B1 (fr) | 2001-08-30 | 2002-08-08 | Pompe à vide turbo-moléculaire |
Country Status (4)
Country | Link |
---|---|
US (1) | US6824357B2 (fr) |
EP (1) | EP1288502B1 (fr) |
JP (1) | JP4262457B2 (fr) |
DE (2) | DE10142567A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
US8221098B2 (en) * | 2009-03-09 | 2012-07-17 | Honeywell International Inc. | Radial turbomolecular pump with electrostatically levitated rotor |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
US9279417B2 (en) | 2013-04-26 | 2016-03-08 | Sol-Electrica, Llc | Solar power system |
JP6735058B2 (ja) * | 2013-07-31 | 2020-08-05 | エドワーズ株式会社 | 真空ポンプ |
DE102013220879A1 (de) * | 2013-10-15 | 2015-04-16 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
CN116591994A (zh) * | 2023-07-05 | 2023-08-15 | 合肥昱驰真空技术有限公司 | 一种新型磁悬浮复合分子泵 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4140441A (en) * | 1977-04-11 | 1979-02-20 | Patterson Williams G | Turbomolecular pump lubrication system |
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
WO1994007033A1 (fr) * | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Soufflante turbomoleculaire |
EP0694699A1 (fr) * | 1994-07-28 | 1996-01-31 | Ebara Corporation | Dispositif de pompe à vide |
EP0855517A2 (fr) * | 1997-01-24 | 1998-07-29 | Pfeiffer Vacuum GmbH | Pompe à vide |
US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0689756B2 (ja) * | 1986-05-02 | 1994-11-14 | 株式会社日立製作所 | ドライ真空ポンプ |
JPS63109299A (ja) * | 1986-10-27 | 1988-05-13 | Hitachi Ltd | タ−ボ真空ポンプ |
JPS63266190A (ja) * | 1987-04-24 | 1988-11-02 | Hitachi Ltd | タ−ボ真空ポンプ |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
JPH01167497A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
JP2741863B2 (ja) * | 1988-04-15 | 1998-04-22 | 株式会社日立製作所 | ターボ真空ポンプ |
FR2634829B1 (fr) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | Pompe a vide |
FR2647853A1 (fr) * | 1989-06-05 | 1990-12-07 | Cit Alcatel | Pompe primaire seche a deux etages |
JPH03124998A (ja) * | 1989-10-06 | 1991-05-28 | Hitachi Ltd | ドライ真空ポンプ |
JPH04112997A (ja) * | 1990-09-03 | 1992-04-14 | Matsushita Electric Ind Co Ltd | 真空装置 |
WO1994000694A1 (fr) * | 1992-06-19 | 1994-01-06 | Leybold Aktiengesellschaft | Pompe a vide a gaz et a friction |
JP3160504B2 (ja) * | 1995-09-05 | 2001-04-25 | 三菱重工業株式会社 | ターボ分子ポンプ |
JP3452468B2 (ja) * | 1997-08-15 | 2003-09-29 | 株式会社荏原製作所 | ターボ分子ポンプ |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
DE19951954A1 (de) * | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE19956015A1 (de) | 1999-11-22 | 2001-05-23 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10056144A1 (de) * | 2000-11-13 | 2002-05-23 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JP2002155891A (ja) * | 2000-11-22 | 2002-05-31 | Seiko Instruments Inc | 真空ポンプ |
DE10107341A1 (de) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2001
- 2001-08-30 DE DE10142567A patent/DE10142567A1/de not_active Withdrawn
-
2002
- 2002-08-08 DE DE50214282T patent/DE50214282D1/de not_active Expired - Lifetime
- 2002-08-08 EP EP02017820A patent/EP1288502B1/fr not_active Expired - Lifetime
- 2002-08-19 JP JP2002238025A patent/JP4262457B2/ja not_active Expired - Fee Related
- 2002-08-27 US US10/229,679 patent/US6824357B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4140441A (en) * | 1977-04-11 | 1979-02-20 | Patterson Williams G | Turbomolecular pump lubrication system |
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
WO1994007033A1 (fr) * | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Soufflante turbomoleculaire |
EP0694699A1 (fr) * | 1994-07-28 | 1996-01-31 | Ebara Corporation | Dispositif de pompe à vide |
US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
EP0855517A2 (fr) * | 1997-01-24 | 1998-07-29 | Pfeiffer Vacuum GmbH | Pompe à vide |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
Also Published As
Publication number | Publication date |
---|---|
US20030044270A1 (en) | 2003-03-06 |
DE50214282D1 (de) | 2010-04-29 |
EP1288502B1 (fr) | 2010-03-17 |
DE10142567A1 (de) | 2003-03-20 |
JP4262457B2 (ja) | 2009-05-13 |
US6824357B2 (en) | 2004-11-30 |
JP2003083282A (ja) | 2003-03-19 |
EP1288502A2 (fr) | 2003-03-05 |
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