EP1067290A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1067290A2
EP1067290A2 EP00112483A EP00112483A EP1067290A2 EP 1067290 A2 EP1067290 A2 EP 1067290A2 EP 00112483 A EP00112483 A EP 00112483A EP 00112483 A EP00112483 A EP 00112483A EP 1067290 A2 EP1067290 A2 EP 1067290A2
Authority
EP
European Patent Office
Prior art keywords
pump
gas
vacuum pump
stage
gas friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112483A
Other languages
German (de)
English (en)
Other versions
EP1067290B1 (fr
EP1067290A3 (fr
Inventor
Armin Blecker
Wolfgang Eberl
Heinrich Lotz
Heinz Reichhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1067290A2 publication Critical patent/EP1067290A2/fr
Publication of EP1067290A3 publication Critical patent/EP1067290A3/fr
Application granted granted Critical
Publication of EP1067290B1 publication Critical patent/EP1067290B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.
  • At least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station.
  • pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which works against atmospheric pressure ejects.
  • Pumping stations consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.
  • the invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less.
  • the pump should consist of one piece and have a compact structure, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
  • a reliable and safe mode of operation is one of the basic requirements.
  • Another goal is lubricant-free operation on the high vacuum side.
  • a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be.
  • This combination along with the feature that the two Gas flows of the gas friction pump merged within this and the intake space the subsequent stage, enables the compact Construction and significantly reduces the size and design effort.
  • the present arrangement enables the shaft bearings at both ends attaching the rotor results in a stable bearing, with the bearing with little Diameter can be used, which ensures problem-free operation allow at high speeds.
  • the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the High vacuum side can be viewed as lubricant-free.
  • the structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.
  • a side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure.
  • a great advantage for the side channel pump is that its stator elements are made of undivided washers, as mentioned in claim 5.
  • This crucial one The disadvantage of side channel pumps is one-piece by the inventive Stator disks avoided.
  • the use of undivided stator elements is only possible, however, if the rotor elements, as described in claim 6, with Clamping rings are attached to the rotor, because only in this way can rotor and stator elements assembled one after the other and optimal axial clearances are observed.
  • the pump housing 1 with intake flange 2 and gas discharge flange 3 are the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 housed.
  • the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is in the centered two bearings 9a and 9b.
  • the bearing 9a is in the area of Atmospheric pressure and the bearing 9b in the area of the fore-vacuum pressure.
  • the drive arrangement 5 is also located in the area.
  • the rotor elements of the double-flow Holweck pump consist of a support ring 10, on which cylindrical Components 11a and 11b for the two parallel pump stages are housed. Together with the stator elements 12a and 12b, which are designed as spiral grooves surround the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweck pumps.
  • the side channel pump consists of the one-piece rotor disks 13, which with Clamping rings 14 are attached to the rotor 4.
  • the stator components are located in between 15 with the delivery channels 16.
  • the gas is pumped according to the arrows in the illustration.
  • the gas is pumped from the suction area 22 through the parallel Holweck stages 6 and 7, each consisting of two pump stages connected in series 11a / 12a and 11b / 12b exist in the discharge areas 23 and 24 promoted.
  • Gas flows brought together in the discharge space 25 of the gas friction pump.
  • Connecting elements 28 the gas flow passes from the discharge space 25 into the suction space 27 of the side channel pump.
  • the gas is pumped in several stages, which are connected to one another via channels 20, compressed to atmospheric pressure and supplied to the gas discharge flange 3 via the discharge chamber 29.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)
EP00112483A 1999-07-05 2000-06-13 Pompe à vide Expired - Lifetime EP1067290B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19930952A DE19930952A1 (de) 1999-07-05 1999-07-05 Vakuumpumpe
DE19930952 1999-07-05

Publications (3)

Publication Number Publication Date
EP1067290A2 true EP1067290A2 (fr) 2001-01-10
EP1067290A3 EP1067290A3 (fr) 2001-04-11
EP1067290B1 EP1067290B1 (fr) 2003-07-30

Family

ID=7913691

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112483A Expired - Lifetime EP1067290B1 (fr) 1999-07-05 2000-06-13 Pompe à vide

Country Status (5)

Country Link
US (1) US6409477B1 (fr)
EP (1) EP1067290B1 (fr)
JP (1) JP4584420B2 (fr)
AT (1) ATE246315T1 (fr)
DE (2) DE19930952A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1243796A2 (fr) * 2001-03-24 2002-09-25 Pfeiffer Vacuum GmbH Pompe à vide
EP2565464A3 (fr) * 2011-09-05 2015-04-15 Pfeiffer Vacuum GmbH Pompe à vide

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
DE10130426B4 (de) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
KR20030000735A (ko) * 2001-06-26 2003-01-06 김덕겸 개선된 시일구조를 가지는 진공펌프 장치
JP2005042709A (ja) 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
EP2589814B3 (fr) * 2010-07-02 2024-01-24 Edwards Japan Limited Pompe à vide
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
MX2017001909A (es) * 2015-06-12 2017-08-08 Tti (Macao Commercial Offshore) Ltd Ventilador axial.

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
NL7010108A (fr) * 1969-09-30 1971-04-01
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
EP0344345B1 (fr) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1243796A2 (fr) * 2001-03-24 2002-09-25 Pfeiffer Vacuum GmbH Pompe à vide
US6676384B2 (en) * 2001-03-24 2004-01-13 Pfeiffer Vacuum Gmbh Gas friction pump
EP1243796B1 (fr) * 2001-03-24 2006-11-08 Pfeiffer Vacuum GmbH Pompe à vide
EP2565464A3 (fr) * 2011-09-05 2015-04-15 Pfeiffer Vacuum GmbH Pompe à vide
DE102011112689B4 (de) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
DE19930952A1 (de) 2001-01-11
EP1067290B1 (fr) 2003-07-30
EP1067290A3 (fr) 2001-04-11
JP4584420B2 (ja) 2010-11-24
JP2001027195A (ja) 2001-01-30
ATE246315T1 (de) 2003-08-15
US6409477B1 (en) 2002-06-25
DE50003075D1 (de) 2003-09-04

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