EP3260655B1 - Pompe à vide avec alimentation en gaz d'arrêt - Google Patents

Pompe à vide avec alimentation en gaz d'arrêt Download PDF

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Publication number
EP3260655B1
EP3260655B1 EP17020249.3A EP17020249A EP3260655B1 EP 3260655 B1 EP3260655 B1 EP 3260655B1 EP 17020249 A EP17020249 A EP 17020249A EP 3260655 B1 EP3260655 B1 EP 3260655B1
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EP
European Patent Office
Prior art keywords
vacuum pump
seal gas
drive
gas
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17020249.3A
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German (de)
English (en)
Other versions
EP3260655A1 (fr
Inventor
Jürgen Dirscherl
Gerhard Rüster
Markus Prasse
Frank Gitmans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vacuubrand GmbH and Co KG
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Vacuubrand GmbH and Co KG
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Publication of EP3260655A1 publication Critical patent/EP3260655A1/fr
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Publication of EP3260655B1 publication Critical patent/EP3260655B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F01C19/12—Sealing arrangements in rotary-piston machines or engines for other than working fluid
    • F01C19/125—Shaft sealings specially adapted for rotary or oscillating-piston machines or engines

Definitions

  • the invention relates to a vacuum pump with a sealing gas supply having the features of the preamble of claim 1.
  • sealing gas in the region of the shaft seal arrangement between the bearing section on the motor housing of the drive motor and the pump chamber in the pump chamber is a well-known method to achieve that the drive space in the motor housing including the bearing section does not come into contact with the gaseous media, the be promoted by the at least one gas conveying element in the pump chamber of the pump unit. This is particularly important for vacuum pumps in the laboratory operation of considerable importance, because there the media are sometimes chemically aggressive ( DE 102 07 929 A1 ).
  • known vacuum pump is a screw vacuum pump, in which two rotor shafts are rotatably mounted in the pump chamber of the pump unit, roll their helical rotors together.
  • the drive shafts of the two rotors extend into the drive space of the motor housing in which corresponding drive components are located.
  • the drive shafts of the two screw rotors are cantilevered. This means that the drive shafts are indeed rotatably mounted in the bearing section, but that no bearings are provided on the projecting into the pump chamber of the pump housing ends of the drive shafts. In this way, bearings are avoided in this area, so that shaft seal assemblies are avoided on the suction side of the rotor shafts.
  • the shaft seal assembly which is preferably in the form of a labyrinth seal, is supplied with sealing gas under pressure from an external purge gas source via a vent passage to prevent oil from entering the rotor section from the bearing portion.
  • this vacuum pump is not well suited in conjunction with an external barrier gas source.
  • the shaft seal assembly is preferably one that operates without abrasive seals, particularly with labyrinth seals.
  • vacuum pump is particularly well suited for use in the laboratory, since it does not rely on an external barrier gas source.
  • the US 4,993,930 A discloses a vacuum pump having two drive shafts, which are arranged horizontally next to each other and each carrying a designed as a screw rotor gas conveying element.
  • the WO 00/42322 A1 discloses a screw compressor whose rotors are held in associated bearing chambers.
  • the expander has two rotors having intermeshing gas delivery devices.
  • the DE 38 12 926 A1 discloses a centrifugal pump with a magnetic coupling.
  • a closed connection jacket is arranged between the drive motor and the centrifugal pump.
  • the teaching is based on the problem of making the supply of sealing gas to the shaft seal arrangement monitored, reproducible and controllable and to allow a compact design and a sufficiently high sealing gas pressure.
  • a barrier gas monitoring is provided by which a relevant parameter of the barrier gas can be detected.
  • Which parameter of the sealing gas is relevant in the specific application arises from the requirements of the specific application.
  • One parameter may be the volume flow of the sealing gas in the barrier gas line.
  • Another relevant parameter may be the pressure of the barrier gas at or in the course of the barrier gas line.
  • the most general relevant parameter is the simple existence of sealing gas, so whether at the sealing gas line at all a sealing gas pressure is present.
  • a control signal is output from a control device connected to the purge gas monitoring and / or a control function for the vacuum pump is triggered.
  • a gas flow measuring device to be provided as barrier gas monitoring and arranged in or on the vacuum pump in such a way that the barrier gas flow in the barrier gas line by means of Gas flow measuring device is measurable.
  • a control signal is output by the control device and / or a control function is triggered when the barrier gas flow in the direction of the shaft seal arrangement falls below a certain value.
  • the sealing gas line is connected or connectable to a blocking gas blower from which sealing gas can be conveyed under pressure into the blocking gas line.
  • the sealing gas blower is an integral part of the pump unit and in the interior of the pump unit, in particular in the interior of the pump housing, namely arranged in the pump chamber.
  • the blocking gas blower therefore builds relatively small, the flow rate of the sealing gas blower is relatively limited.
  • the sealing gas blower is externally mounted on the motor housing, preferably on the side facing away from the pump housing, and is drive-coupled to the drive shaft.
  • this sealing gas blower the arrangement as a whole can be clearly significantly greater overall than in the case of the blocking gas blower realized in the prior art.
  • a sealing gas pressure of about 50 mbar can be achieved. This is significantly more than the integrated construction of the prior art.
  • Further preferred embodiments and further developments of the vacuum pump according to the invention are the subject of the dependent claims.
  • a non-preferred teaching of the invention may be provided cumulatively as a barrier gas monitoring a differential pressure measuring device. This will then be in or on the vacuum pump is arranged so that the pressure of the sealing gas at or in the course of the sealing gas line (the sealing gas pressure) and the pressure at or downstream of the outlet of the pump unit (the outlet pressure) can be detected.
  • the control device outputs a control signal and / or triggers a control function when the pressure difference between the sealing gas pressure and the outlet pressure falls below a certain value.
  • the differential pressure measuring device may for example consist of two different pressure measuring devices, one for the sealing gas pressure, the other for the outlet pressure. Their measured values can then be compared with one another in the differential pressure measuring device or in the superordinate control device and lead to the desired output signal. Furthermore, however, it is provided that the differential pressure measuring device is designed as a relative pressure sensor.
  • the sealing gas blower is designed as part of the vacuum pump. Most preferably, the sealing gas blower is then drivable by a drive shaft of the vacuum pump.
  • a valve arrangement is provided between the sealing gas fan and the sealing gas line, which, preferably, is connected to the control device.
  • a valve arrangement makes it possible to control the barrier gas flow or, preferably, to regulate it.
  • the valve arrangement is preferably connected to the control device.
  • control signal to be output by the control device this may be an audible warning signal, but it may alternatively or additionally be an optical warning signal, for example a light indicator.
  • optical warning signal for example a light indicator.
  • electronic warning signal which may alternatively or additionally be dispensed, for example via an interface to a computer monitoring system.
  • this may relate to a change in the barrier gas flow, in particular when a valve arrangement is provided on the barrier gas conduit. So you can, for example, provide a constant promotional blocking gas blower, but throttle the full power through the valve assembly and then when the barrier gas pressure drops, the valve assembly so control that the barrier gas flow is increased and thus increases the sealing gas pressure. Alternatively or additionally, it can be provided that the vacuum pump is switched off altogether when the sealing gas pressure becomes so low that the safe operation of the vacuum pump is no longer ensured under the present boundary conditions.
  • the sealing gas blower is not or not exclusively used.
  • the barrier gas line can be connected by disconnecting from the blocking gas blower and / or by means of the valve arrangement to an external blocking gas source.
  • the prior art has already addressed the preferred embodiment of vacuum pumps of the type in question as screw vacuum pumps. All variants of vacuum pumps discussed in the prior art are also covered by the present invention. However, the embodiment of the vacuum pump is preferred as a screw vacuum pump.
  • Flush mounted drive shafts are particularly useful, to which the detailed explanation in the prior art from the DE 102 07 929 A1 may be referenced.
  • Fig. 1 shows in a perspective view, front left, the sealing gas blower partially cut, the basic construction of a vacuum pump according to the invention.
  • the vacuum pump initially points to a pump unit 1, the in Fig. 1 right back with the ribbing 2 is shown.
  • the pump unit 1 has a Pump housing 3.
  • Connected to the pump unit 1 is a drive motor 4 with a motor housing 5.
  • the motor housing 5 of the drive motor 4 can be seen in Fig. 1 in the middle.
  • At the bottom of the motor housing 5 of the drive motor 4 can be seen in Fig. 1 Support feet 6.
  • Fig. 3 shows a partial section with detail view. It can be seen here in the pump housing 3, a pump chamber 7 with an inlet 8 and an outlet 9. In the pump chamber 7 at least one gas conveying element 10 is arranged on a drive shaft 11.
  • a drive chamber 12 is formed in the motor housing 5, in which are located corresponding drive components of the drive motor 4, in particular a part of the drive shaft eleventh
  • two drive shafts 11 are actually provided, which are arranged horizontally next to one another and each carry a designed as a screw rotor gas conveying element 10 so that it is shown here in total in the illustrated Embodiment is a screw rotor vacuum pump.
  • a screw rotor vacuum pump This is not to be understood as limiting, the alternatives which are represented in the prior art as mentioned above apply.
  • FIG. 3 illustrated embodiment shows that the at least one drive shaft 11 extends from the drive chamber 12 in the pump chamber 7 and is rotatably mounted in the motor housing 5 at the transition to the pump housing 3 in a bearing section 13.
  • the bearing section 13 is here in a frontal End shield 13 'of the motor housing 5 is formed.
  • the drive shafts 11 are cantilevered. The remarks in the general part of the description will be noted here.
  • the drive chamber 12 is sealed off from the pump chamber 7 against the passage of gas from the pump chamber 7 into the drive chamber 12. This makes the bearing section 13 receiving bearing plate 13 '.
  • a shaft seal assembly 14 is provided which seals the at least one drive shaft 11. This is located between the bearing section 13, the in Fig. 3 right to the drive chamber 12 can be seen, and the left-lying pump chamber 7th
  • the shaft seal assembly 14 is connected to a sealing gas line 15 which extends in the illustrated and preferred embodiment in the body of the bearing plate 13 'radially outward and over which a sealing gas under pressure of the shaft seal assembly 13 can be fed.
  • a vacuum pump is shown in the drawing, in which a sealing gas monitoring 17; 20 is provided. Through this a relevant parameter of the barrier gas can be detected. Also provided is a control device 18, to which the sealing gas monitoring 17; 20 is connected. Then, when the relevant parameter of the sealing gas exceeds or falls below a certain value, the control device 18 can output a control signal and / or trigger a control function for the vacuum pump.
  • the sealing gas monitoring 17 according to the invention; 20 also works with a purge gas supplied from an external purge gas source.
  • the supply of sealing gas from an external barrier gas source is in the drawing only in Fig. 4 and shown there only in a relatively close relationship.
  • the present embodiments are primarily concerned with, but are not limited to, an internal purge gas source.
  • the sealing gas line 15 with a sealing gas blower 16, located in Fig. 3 right on the local shield of the drive motor 4 is connected.
  • the barrier gas line 15 is here connected via a sealing gas outer line 15 'with the sealing gas fan 16 fluidly.
  • the blocking gas outer line 15 ' can be optionally dissolved to possibly the sealing gas line 15 in the bearing plate 13' with an external gas barrier source, the in Fig. 1 and 3 not shown, connect.
  • the barrier gas line 15 is, as in Fig. 1 and 3 shown, by means of the sealing gas outer line 15 'connected to the sealing gas blower 16, so can be conveyed from the sealing gas blower 16 of sealing gas under pressure into the sealing gas line 15.
  • the blocking gas blower 16 is preferably, as shown here, designed as a part of the vacuum pump as a whole and is driven by a drive shaft 11 of the drive motor 4 from.
  • a gas flow measuring device 17 is provided as a barrier gas monitoring. This is here arranged on the vacuum pump so that the barrier gas flow in the barrier gas line 15 by means of the gas flow measuring device 17 can be measured.
  • the gas flow measuring device 17 is an arrangement in which the gas flow rate is thermally measured.
  • a flow sensor 17 'located in the gas flow measuring device 17 which is connected to a control device 18 via a connecting line 17 ".
  • a control device 18 is provided, to which the gas flow-measuring device 17, specifically here via the connection line 17 ", is connected
  • Control device 18 is when the barrier gas flow in the direction of the shaft seal assembly 14 falls below a certain value, a control signal can be issued and / or a control function can be triggered. What this is about in detail will be explained later.
  • the limit value for the volume flow of the sealing gas can be statically predetermined, but it can also be dynamically preset by the control device 18 so that it is able to adapt to the actual operating state of the vacuum pump during operation.
  • the control device 18 may be part of the vacuum pump itself, but it may also be arranged elsewhere, as in the illustrated embodiment.
  • a muffler 19 is arranged at the outlet 9 of the pump chamber 7 of the pump unit 1.
  • Fig. 4 shows one Fig. 3 corresponding sectional view, in which also the sealing gas blower 16 in the same place as at Fig. 3 located, including the sealing gas outer line 15 ', which is also in Fig. 4 sees.
  • a differential pressure measuring device 20 is provided as sealing gas monitoring. This is arranged here in or on the vacuum pump so that the pressure of the sealing gas at or in the course of the sealing gas line 15 (sealing gas pressure) and the pressure at or downstream of the outlet 9 of the pump unit 1 (the outlet pressure) can be detected by means of this device.
  • the differential pressure measuring device 20 via connection lines 20 'to the in Fig. 4 indicated control device 18 connected.
  • the control device 18 when the pressure difference between the sealing gas pressure and the outlet pressure falls below a certain value, a control signal can be emitted and / or a control function can be triggered.
  • the differential pressure measuring device 20 is designed as a relative pressure sensor, which via a first line 21 to the inlet the sealing gas line 15 is connected, and is connected via a second line 22 to the muffler 19 and thus ultimately to the outlet 9 (the discharge port) of the pump housing 3.
  • connection (first line 21) of the differential pressure measuring device 20 facing the outlet 9 (the discharge connection) of the pumping unit 1 is compatible with the media to be conveyed by the pumping unit 1 as well as their temperatures.
  • the barrier gas line 15 facing port, so the second line 22, the differential pressure measuring device 20 must be compatible with substantially the sealing gas.
  • Fig. 4 is only hinted at a variant in which it is provided that between the sealing gas fan 16 and the sealing gas line 15, a valve assembly 23 is provided, which, preferably, is connected to the control device 18.
  • control signal is an acoustic and / or an optical and / or an electronic warning signal and / or that the control function involves changing the blocking gas flow or switching off the drive motor 4 is.
  • Fig. 2 differs from Fig. 1 in that in Fig. 2 it is provided that the barrier gas line 15 can be connected by disconnecting from the blocking gas blower 16 (and / or with the aid of the valve arrangement 23) to an external blocking gas source. You can see in Fig. 2 in that there the barrier gas outer line 15 'does not lead to the blocking gas blower 16, this is ineffective because not connected.
  • the sealing gas outer line 15 'rather leads vertically upwards and is broken off there. So you can go to an external, in Fig. 2 lead not shown sealing gas source.
  • Fig. 1 to 4 In common is that it is provided in the illustrated embodiment that the sealing gas blower 16 is externally mounted on the motor housing 5 on the side facing away from the pump housing 3 side and drivingly coupled to the drive shaft 11. With this arrangement of the sealing gas blower 16 one comes to much higher flow rates of the sealing gas blower 16, so that the requirements of the sealing gas pressure at the appropriate points can be met well.
  • the drive components of the drive motor 4 include a magnetic transmission without transmission oil. In this case, no oil seal in the region of the bearing plate 13 'is required, a barrier gas flow in the direction of the drive chamber 12 is unnecessary.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (10)

  1. Pompe à vide
    avec un ensemble de pompe (1) avec un corps de pompe (3) et
    avec un moteur d'entraînement (4) avec un boîtier de moteur (5), relié à l'ensemble de pompe (1),
    dans laquelle une chambre d'aspiration (7) avec une entrée (8) et une sortie (9) est formée dans le corps de pompe (3), dans laquelle au moins un élément de transport de gaz (10) est disposé sur un arbre d'entraînement (11), dans laquelle une chambre d'entraînement (12) est formée dans le boîtier de moteur (5), dans laquelle il se trouve des composants d'entraînement correspondants du moteur d'entraînement (4), en particulier une partie dudit au moins un arbre d'entraînement (11),
    dans laquelle ledit au moins un arbre d'entraînement (11) s'étend hors de la chambre d'entraînement (12) dans la chambre d'aspiration (7) et est monté de façon rotative dans une partie de palier (13) dans le boîtier de moteur (5) à la transition vers le corps de pompe (3),
    dans laquelle la chambre d'entraînement (12) est rendue étanche par rapport à la chambre d'aspiration (7) contre le passage de gaz de la chambre d'aspiration (7) dans la chambre d'entraînement (12) et ledit au moins un arbre d'entraînement (11) est à cet effet rendu étanche au moyen d'un système de joint d'arbre (14) entre la partie de palier (13) et la chambre d'aspiration (7),
    dans laquelle le système de joint d'arbre (14) est relié à une conduite de gaz d'arrêt (15), par laquelle un gaz d'arrêt peut être envoyé sous pression au système de joint d'arbre (14),
    dans laquelle il est prévu une surveillance de gaz d'arrêt, par laquelle un paramètre pertinent du gaz d'arrêt peut être détecté,
    dans laquelle il est prévu un dispositif de commande (18), auquel la surveillance de gaz d'arrêt est raccordée, et
    dans laquelle un signal de commande peut être émis et/ou une fonction de commande pour la pompe à vide peut être déclenchée par le dispositif de commande (18), lorsque le paramètre détecté par la surveillance de gaz d'arrêt devient supérieur ou inférieur à une valeur limite, caractérisée en ce que
    la conduite de gaz d'arrêt (15) est ou peut être raccordée à une soufflante de gaz d'arrêt (16), à partir de laquelle du gaz d'arrêt peut être envoyé sous pression dans la conduite de gaz d'arrêt (15),
    la soufflante de gaz d'arrêt (16) est installée à l'extérieur sur le boîtier de moteur (5) et est couplée en entraînement à l'arbre d'entraînement (11) et
    il est prévu comme surveillance de gaz d'arrêt un dispositif de mesure de débit de gaz (17), qui est disposé dans ou sur la pompe à vide, de telle manière que le flux de gaz d'arrêt puisse être mesuré au moyen du dispositif de mesure de débit de gaz (17).
  2. Pompe à vide selon la revendication 1, caractérisée en ce que la soufflante d'arrêt (16) est installée sur le côté situé à l'opposé du corps de pompe (3).
  3. Pompe à vide selon une revendication 1 ou 2, caractérisée en ce que la soufflante de gaz d'arrêt (16) est réalisée comme une partie de la pompe à vide et peut être entraînée par un arbre d'entraînement (11) de la pompe à vide.
  4. Pompe à vide selon l'une quelconque des revendications 1 à 3, caractérisée en ce qu'il est prévu entre la soufflante de gaz d'arrêt (16) et la conduite de gaz d'arrêt (15) un agencement de soupape (23), qui est relié au dispositif de commande (18).
  5. Pompe à vide selon l'une quelconque des revendications 1 à 4, caractérisée en ce que la conduite de gaz d'arrêt (15) peut être raccordée à une source extérieure de gaz d'arrêt par séparation de la soufflante de gaz d'arrêt (16) et/ou à l'aide d'un agencement de soupape.
  6. Pompe à vide selon l'une quelconque des revendications 1 à 5, caractérisée en ce que le signal de commande est un signal d'avertissement acoustique et/ou optique et/ou électronique.
  7. Pompe à vide selon l'une quelconque des revendications 1 à 6, caractérisée en ce que la fonction de commande est un changement du flux de gaz d'arrêt ou une coupure du moteur d'entraînement (4).
  8. Pompe à vide selon l'une quelconque des revendications 1 à 7, caractérisée en ce que l'ensemble de pompe (1) est formé par un ensemble de pompe à rotor hélicoïdal, dans lequel ledit au moins un élément de transport de gaz (10) est formé par un rotor hélicoïdal.
  9. Pompe à vide selon l'une quelconque des revendications 1 à 8, caractérisée en ce que ledit au moins un arbre d'entraînement (11) est monté en porte-à-faux.
  10. Pompe à vide selon l'une quelconque des revendications 1 à 9, caractérisée en ce que les composants d'entraînement du moteur d'entraînement (4) comprennent un engrenage magnétique sans huile à engrenages.
EP17020249.3A 2016-06-24 2017-06-12 Pompe à vide avec alimentation en gaz d'arrêt Active EP3260655B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE202016003924.6U DE202016003924U1 (de) 2016-06-24 2016-06-24 Vakuumpumpe mit Sperrgaszufuhr

Publications (2)

Publication Number Publication Date
EP3260655A1 EP3260655A1 (fr) 2017-12-27
EP3260655B1 true EP3260655B1 (fr) 2019-07-31

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EP17020249.3A Active EP3260655B1 (fr) 2016-06-24 2017-06-12 Pompe à vide avec alimentation en gaz d'arrêt

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EP (1) EP3260655B1 (fr)
DE (1) DE202016003924U1 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010055798A1 (de) * 2010-08-26 2012-03-01 Vacuubrand Gmbh + Co Kg Vakuumpumpe

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JPS6429690A (en) * 1987-07-22 1989-01-31 Hitachi Ltd Shaft sealing device for screw vacuum pump
DE3812926A1 (de) * 1988-04-18 1989-10-26 Dickow Pumpen Kg Kreiselpumpe mit magnetkupplung
US5228298A (en) * 1992-04-16 1993-07-20 Praxair Technology, Inc. Cryogenic rectification system with helical dry screw expander
DE19544994A1 (de) 1995-12-02 1997-06-05 Balzers Pfeiffer Gmbh Mehrwellenvakuumpumpe
BE1010915A3 (nl) * 1997-02-12 1999-03-02 Atlas Copco Airpower Nv Inrichting voor het afdichten van een rotoras en schroefcompressor voorzien van dergelijke inrichting.
KR20010108082A (ko) * 1999-01-11 2001-12-07 메리 이. 보울러 스크루 압축기
DE10207929A1 (de) 2002-02-23 2003-09-04 Leybold Vakuum Gmbh Vakuumpumpe
DE102005015212A1 (de) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Wellendichtung
JP5698039B2 (ja) * 2011-03-11 2015-04-08 株式会社神戸製鋼所 水噴射式スクリュ圧縮機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010055798A1 (de) * 2010-08-26 2012-03-01 Vacuubrand Gmbh + Co Kg Vakuumpumpe

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DE202016003924U1 (de) 2017-09-27
EP3260655A1 (fr) 2017-12-27

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