WO2006061317A1 - Installation sous vide dotée d'une pompe à vide à vis comportant une entrée intermédiaire - Google Patents

Installation sous vide dotée d'une pompe à vide à vis comportant une entrée intermédiaire Download PDF

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Publication number
WO2006061317A1
WO2006061317A1 PCT/EP2005/056043 EP2005056043W WO2006061317A1 WO 2006061317 A1 WO2006061317 A1 WO 2006061317A1 EP 2005056043 W EP2005056043 W EP 2005056043W WO 2006061317 A1 WO2006061317 A1 WO 2006061317A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
inlet
vacuum system
working pressure
screw pump
Prior art date
Application number
PCT/EP2005/056043
Other languages
German (de)
English (en)
Inventor
Thomas Dreifert
Wolfgang Giebmanns
Bernhard Kliem
Lothar Ostrowsky
Original Assignee
Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vacuum Gmbh filed Critical Leybold Vacuum Gmbh
Priority to DE202005021169U priority Critical patent/DE202005021169U1/de
Publication of WO2006061317A1 publication Critical patent/WO2006061317A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/101—Geometry of the inlet or outlet of the inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122—Arrangements for supercharging the working space

Definitions

  • the second working pressure of the second container of the vacuum system is a vacuum working pressure, ie is also the second working pressure below atmospheric pressure.
  • the second working pressure can also be above the atmospheric pressure, so that, for example, compressed air is made available for the second container.
  • FIG. 1 shows a vacuum system 10 according to the invention, which essentially consists of a first container 12, a second container 14 and a vacuum screw pump 16.
  • the screw pump 16 has a gas outlet 18, a gas main inlet 20, and a gas intermediate inlet 22.
  • the gas outlet 18 opens to the atmosphere.
  • the main inlet 20 is connected via a line 24 to the first container 12.
  • the intermediate inlet 22 is connected via a line 26 to the second container 14.
  • a check valve 28 is provided between the two containers 12, 14, a line 30 is also provided, which can be blocked by a check valve 32.
  • FIG. 4 shows another embodiment of a screw pump 16 ', in which the intermediate inlet 22' is not arranged in the intersection of the two screw rotors 34, 36, but in the region of the housing of a single rotor 36 of the two rotors 34, 36.
  • the intermediate inlet 22 ' is open only to the working chambers, which are formed by a single rotor 36.
  • the suction volume of the intermediate inlet 22 ' is correspondingly reduced, i. almost halved, compared to the suction volume of the screw pump 16 shown in FIG.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une installation sous vide (10) comprenant un premier réservoir (12) à une première pression de travail sous vide et un deuxième réservoir (14) à une deuxième pression de travail sous vide, supérieure à la première. Dans les installations sous vide (10) classiques, au moins deux pompes à vide sont utilisées pour créer les deux pressions de travail différentes. L'invention vise à diminuer les investissements pour générer les différentes pressions de travail dans une installation sous vide (10). A cet effet, une pompe à vide à vis (16) est équipée d'une entrée de gaz intermédiaire (22) disposée entre l'entrée principale (20) et la sortie (18) de la pompe à vide à vis (16), laquelle peut ainsi générer deux pressions de travail différentes.
PCT/EP2005/056043 2004-12-10 2005-11-17 Installation sous vide dotée d'une pompe à vide à vis comportant une entrée intermédiaire WO2006061317A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE202005021169U DE202005021169U1 (de) 2004-12-10 2005-11-17 Vakuum-Anlage

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004059486.4 2004-12-10
DE200410059486 DE102004059486A1 (de) 2004-12-10 2004-12-10 Vakuum-Anlage

Publications (1)

Publication Number Publication Date
WO2006061317A1 true WO2006061317A1 (fr) 2006-06-15

Family

ID=35695638

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/056043 WO2006061317A1 (fr) 2004-12-10 2005-11-17 Installation sous vide dotée d'une pompe à vide à vis comportant une entrée intermédiaire

Country Status (2)

Country Link
DE (1) DE102004059486A1 (fr)
WO (1) WO2006061317A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2574649A (en) * 2018-06-14 2019-12-18 Edwards Ltd Twin shaft vacuum pumps, vacuum pump systems and a method of pumping
WO2021022352A1 (fr) * 2019-08-02 2021-02-11 Rt Hamilton And Associates Limited Pompe à vis à vide sèche refroidie

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB616609A (en) * 1942-05-21 1949-01-25 George Alexander Van Der Graaf Improvements in vacuum or gas pump, comprising two or more screws engaging one with the other
JPS6285190A (ja) * 1985-10-09 1987-04-18 Kobe Steel Ltd スクリユ式真空ポンプ
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH0666281A (ja) * 1992-08-18 1994-03-08 Hitachi Ltd 真空ポンプ用軸封装置
US6021663A (en) * 1996-09-20 2000-02-08 Leybold Vakuum Gmbh Process and leak detector for inspecting a plurality of similar test bodies for leaks
US6776588B1 (en) * 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB616609A (en) * 1942-05-21 1949-01-25 George Alexander Van Der Graaf Improvements in vacuum or gas pump, comprising two or more screws engaging one with the other
JPS6285190A (ja) * 1985-10-09 1987-04-18 Kobe Steel Ltd スクリユ式真空ポンプ
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH0666281A (ja) * 1992-08-18 1994-03-08 Hitachi Ltd 真空ポンプ用軸封装置
US6021663A (en) * 1996-09-20 2000-02-08 Leybold Vakuum Gmbh Process and leak detector for inspecting a plurality of similar test bodies for leaks
US6776588B1 (en) * 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 295 (M - 626) 24 September 1987 (1987-09-24) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 051 (M - 1548) 26 January 1994 (1994-01-26) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 314 (M - 1621) 15 June 1994 (1994-06-15) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2574649A (en) * 2018-06-14 2019-12-18 Edwards Ltd Twin shaft vacuum pumps, vacuum pump systems and a method of pumping
WO2021022352A1 (fr) * 2019-08-02 2021-02-11 Rt Hamilton And Associates Limited Pompe à vis à vide sèche refroidie
US11708832B2 (en) 2019-08-02 2023-07-25 Fruvac Ltd. Cooled dry vacuum screw pump

Also Published As

Publication number Publication date
DE102004059486A1 (de) 2006-06-22

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