EP0541989B1 - Système de pompe à vide multi-étage - Google Patents
Système de pompe à vide multi-étage Download PDFInfo
- Publication number
- EP0541989B1 EP0541989B1 EP92117784A EP92117784A EP0541989B1 EP 0541989 B1 EP0541989 B1 EP 0541989B1 EP 92117784 A EP92117784 A EP 92117784A EP 92117784 A EP92117784 A EP 92117784A EP 0541989 B1 EP0541989 B1 EP 0541989B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- stage
- vacuum
- pump stage
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Definitions
- the invention relates to a multi-stage vacuum pump system with intermediate suction between the individual stages.
- Vacuum pumps which correspond to such pump systems, are used, for example, in gas analyzers, which can only work under vacuum due to their functional principle.
- the vacuum system of such gas analyzers is to be illustrated using the example of a mass spectrometer which is equipped, inter alia, with a two-stage rotary vane pump.
- a high vacuum system consisting of a two-stage rotary vane pump and a high vacuum pump, which can be, for example, a turbomolecular or diffusion pump, is used to maintain the vacuum in the analysis chamber.
- Two-stage rotary vane pumps are expedient here because they generate a final vacuum, which serves as an optimal forevacuum for the high-vacuum pump connected to it.
- the gas to be examined which is generally available under atmospheric pressure, must be fed to the gas analysis system under reduced pressure.
- the pressure reduction stage is often formed by a further rotary vane pump in connection with a capillary stage at the gas inlet. Since the demands on the final vacuum are lower in this case than with the high vacuum pump, a single-stage rotary vane pump is sufficient.
- a second rotary vane pump for the high vacuum system with an intermediate suction connection between the two stages is used.
- the pressure reduction stage is evacuated via this intermediate suction connection using the second stage of the rotary vane pump.
- the rotary vane pump thus serves simultaneously as a two-stage pump for generating the forevacuum for the high vacuum pump and as a one-stage pump for evacuating the pressure reduction stage.
- the object of the invention is to develop a pump system which can be used universally for the abovementioned fields of application.
- the aim is to ensure that the occurrence of larger or variable amounts of gas at the intermediate suction connection of a multi-stage pump system, its mode of operation and the mode of operation of a subsequent high-vacuum pump are not impaired.
- Claims 2 to 5 represent further design options of the invention.
- the additional valve between the intermediate suction connection and the first pump stage facing the high vacuum side achieves a decisive improvement in the pump system. If there is little or no gas at the intermediate suction connection, the valve remains open, and in the example given here there is a two-stage rotary vane pump with its full function. When there is a large amount of gas, the valve closes, and the two pump stages work like two single-stage pumps, the second stage facing the higher pressure pumping out the large amount of gas against the atmosphere, without the pressure in the first stage facing the high vacuum being increased significantly . This prevents the high-vacuum pump from working.
- the additional valve can be preloaded mechanically, for example by springs. This makes it possible to specify the time of closing and opening depending on the pressure.
- the pump system consists of the pump stage 1, which faces the high vacuum pump 3 and the following pump stage 2, which is connected to the atmosphere via the valve 4.
- the analysis chamber 5 is evacuated via the high vacuum pump 3.
- the pump stage 2 and the capillary stage 7 together form the pressure reduction stage for the gas to be examined.
- the two pump stages 1 and 2 are connected to one another via the bypass line 9.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Claims (5)
- Système de pompe à vide à plusieurs étages comprenant au moins un raccord d'aspiration intermédiaire (6) entre les étages de pompe individuels, caractérisé en ce qu'une vanne additionnelle (8) est montée entre un raccord d'aspiration intermédiaire (6) et l'étage (1) de pompe respectivement dirigé vers le côté de vide élevé.
- Système de pompe à vide à plusieurs étages selon la revendication 1, caractérisé en ce que la vanne additionnelle (8) est une vanne de pression à charge préalable variable.
- Système de pompe à vide à plusieurs étages selon la revendication 2, caractérisé en ce que la charge préalable de la vanne additionnelle (8) est inférieure ou égale à la charge préalable de la vanne de débit (4).
- Système de pompe à vide à plusieurs étages selon l'une des revendications 1 à 3, caractérisé en ce que le côté de débit de l'étage respectif (1) de pompe tourné vers le côté de vide élevé est relié au côté d'aspiration de l'étage suivant (2) de pompe par une ligne de dérivation (9) en parallèle à la vanne additionnelle (8), dont la section transversale est dimensionnée d'une manière telle que la quantité de vapeur qui se dégage encore à la pression de travail de l'étage (1) de pompe est aspirée par l'étage suivant (2) de pompe et en ce que le dégagement gazeux dans cet étage de pompe n'est renvoyé dans l'étage (1) de pompe tourné vers le vide élevé que dans une mesure suffisamment faible pour que le vide élevé ne soit pas sensiblement influencé.
- Système de pompe à vide à plusieurs étages selon la revendication 4, caractérisé en ce que la section transversale de la conduite de dérivation (9) est réalisée de manière à pouvoir varier.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4136950A DE4136950A1 (de) | 1991-11-11 | 1991-11-11 | Mehrstufiges vakuumpumpsystem |
DE4136950 | 1991-11-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0541989A1 EP0541989A1 (fr) | 1993-05-19 |
EP0541989B1 true EP0541989B1 (fr) | 1995-06-28 |
Family
ID=6444465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92117784A Expired - Lifetime EP0541989B1 (fr) | 1991-11-11 | 1992-10-17 | Système de pompe à vide multi-étage |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0541989B1 (fr) |
JP (1) | JPH05248383A (fr) |
DE (2) | DE4136950A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
DE19500823A1 (de) * | 1995-01-13 | 1996-07-18 | Sgi Prozess Technik Gmbh | Vakuum-Pumpstand |
DE69623516T2 (de) | 1995-02-28 | 2003-05-15 | Anest Iwata Corp | Kontrollsystem für zweistufige Vakuumpumpe |
DE19524609A1 (de) * | 1995-07-06 | 1997-01-09 | Leybold Ag | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
DE19630264A1 (de) * | 1996-07-26 | 1998-01-29 | Klein Schanzlin & Becker Ag | Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem |
DE19831123A1 (de) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gasballasteinrichtung für mehrstufige Verdrängerpumpen |
DE19962445A1 (de) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung |
DE202013000913U1 (de) * | 2013-01-30 | 2014-05-05 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe insbesondere Wälzkolbenpumpe |
GB2579360A (en) | 2018-11-28 | 2020-06-24 | Edwards Ltd | Multiple chamber vacuum exhaust system |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH470589A (de) * | 1968-10-11 | 1969-03-31 | Balzers Patent Beteilig Ag | Anordnung zur Evakuierung von Rezipienten |
US4505647A (en) * | 1978-01-26 | 1985-03-19 | Grumman Allied Industries, Inc. | Vacuum pumping system |
US4361418A (en) * | 1980-05-06 | 1982-11-30 | Risdon Corporation | High vacuum processing system having improved recycle draw-down capability under high humidity ambient atmospheric conditions |
JP2607572B2 (ja) * | 1987-12-23 | 1997-05-07 | 株式会社日立製作所 | 荷電粒子を用いる分析装置および方法 |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
-
1991
- 1991-11-11 DE DE4136950A patent/DE4136950A1/de not_active Withdrawn
-
1992
- 1992-10-17 EP EP92117784A patent/EP0541989B1/fr not_active Expired - Lifetime
- 1992-10-17 DE DE59202713T patent/DE59202713D1/de not_active Expired - Fee Related
- 1992-11-11 JP JP4300999A patent/JPH05248383A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0541989A1 (fr) | 1993-05-19 |
DE4136950A1 (de) | 1993-05-13 |
JPH05248383A (ja) | 1993-09-24 |
DE59202713D1 (de) | 1995-08-03 |
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