EP0541989A1 - Système de pompe à vide multi-étage - Google Patents

Système de pompe à vide multi-étage Download PDF

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Publication number
EP0541989A1
EP0541989A1 EP92117784A EP92117784A EP0541989A1 EP 0541989 A1 EP0541989 A1 EP 0541989A1 EP 92117784 A EP92117784 A EP 92117784A EP 92117784 A EP92117784 A EP 92117784A EP 0541989 A1 EP0541989 A1 EP 0541989A1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
vacuum
high vacuum
facing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92117784A
Other languages
German (de)
English (en)
Other versions
EP0541989B1 (fr
Inventor
Gion Caduff
Roland Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH, Balzers Pfeiffer GmbH filed Critical Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Publication of EP0541989A1 publication Critical patent/EP0541989A1/fr
Application granted granted Critical
Publication of EP0541989B1 publication Critical patent/EP0541989B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Definitions

  • the invention relates to a multi-stage vacuum pump system with intermediate suction between the individual stages.
  • Vacuum pumps which correspond to such pump systems, are used, for example, in gas analyzers, whose functional principle can only work under vacuum.
  • the vacuum system of such gas analyzers is to be illustrated using the example of a mass spectrometer which is equipped, inter alia, with a two-stage rotary vane pump.
  • a high vacuum system consisting of a two-stage rotary vane pump and a high vacuum pump, which can be, for example, a turbomolecular or diffusion pump, is used to maintain the vacuum in the analysis chamber.
  • Two-stage rotary vane pumps are useful here because they generate a final vacuum, which serves as an optimal forevacuum for the associated high vacuum pump.
  • the gas to be examined which is generally available under atmospheric pressure, must be fed to the gas analysis system under reduced pressure.
  • the pressure reduction stage is often formed by a further rotary vane pump in connection with a capillary stage at the gas inlet. Since the demands on the final vacuum are lower in this case than with the high vacuum pump, a single-stage rotary vane pump is sufficient.
  • a second rotary vane pump for the high vacuum system with an intermediate suction connection between the two stages is used.
  • the pressure reduction stage is evacuated via this intermediate suction connection using the second stage of the rotary vane pump.
  • the rotary vane pump thus serves simultaneously as a two-stage pump for generating the forevacuum for the high vacuum pump and as a one-stage pump for evacuating the pressure reduction stage.
  • the object of the invention is to develop a pump system which can be used universally for the abovementioned areas of application.
  • the aim is to ensure that the occurrence of larger or variable gas quantities at the intermediate suction connection of a multi-stage pump system, its mode of operation and the mode of operation of a subsequent high-vacuum pump are not impaired.
  • Claims 2 to 5 represent further design options of the invention.
  • the additional valve between the intermediate suction connection and the first pump stage facing the high vacuum side achieves a decisive improvement in the pump system. If there is little or no gas at the intermediate suction connection, the valve remains open, and in the example given here there is a two-stage rotary vane pump with its full function. When there is a large amount of gas, the valve closes, and the two pump stages work like two single-stage pumps, the second stage facing the higher pressure pumping off the large amount of gas against the atmosphere without the pressure in the first stage facing the high vacuum being increased significantly . This prevents the high vacuum pump from working.
  • the additional valve can be preloaded mechanically, for example by springs. This makes it possible to specify the time of closing and opening depending on the pressure.
  • the pump system consists of the pump stage 1, which faces the high vacuum pump 3 and the following pump stage 2, which is connected to the atmosphere via the valve 4.
  • the analysis chamber 5 is evacuated via the high vacuum pump 3.
  • the pump stage 2 and the capillary stage 7 together form the pressure reduction stage for the gas to be examined.
  • the two pump stages 1 and 2 are connected to one another via the bypass line 9.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP92117784A 1991-11-11 1992-10-17 Système de pompe à vide multi-étage Expired - Lifetime EP0541989B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4136950A DE4136950A1 (de) 1991-11-11 1991-11-11 Mehrstufiges vakuumpumpsystem
DE4136950 1991-11-11

Publications (2)

Publication Number Publication Date
EP0541989A1 true EP0541989A1 (fr) 1993-05-19
EP0541989B1 EP0541989B1 (fr) 1995-06-28

Family

ID=6444465

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92117784A Expired - Lifetime EP0541989B1 (fr) 1991-11-11 1992-10-17 Système de pompe à vide multi-étage

Country Status (3)

Country Link
EP (1) EP0541989B1 (fr)
JP (1) JPH05248383A (fr)
DE (2) DE4136950A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
EP0723080A1 (fr) * 1995-01-13 1996-07-24 SGI-PROZESS-TECHNIK GmbH Système de pompage à vide
EP0730093A1 (fr) 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages
EP0752531A1 (fr) * 1995-07-06 1997-01-08 Leybold Aktiengesellschaft Appareil pour l'obtention rapide du vide dans une chambre à vide
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
WO2020109790A1 (fr) * 2018-11-28 2020-06-04 Edwards Limited Système d'évacuation sous vide de multiples chambres

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19630264A1 (de) * 1996-07-26 1998-01-29 Klein Schanzlin & Becker Ag Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem
DE202013000913U1 (de) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe insbesondere Wälzkolbenpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
EP0343914A1 (fr) * 1988-05-24 1989-11-29 The Boc Group, Inc. Appareil et Méthode de production de vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US4361418A (en) * 1980-05-06 1982-11-30 Risdon Corporation High vacuum processing system having improved recycle draw-down capability under high humidity ambient atmospheric conditions
JP2607572B2 (ja) * 1987-12-23 1997-05-07 株式会社日立製作所 荷電粒子を用いる分析装置および方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
EP0343914A1 (fr) * 1988-05-24 1989-11-29 The Boc Group, Inc. Appareil et Méthode de production de vide

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
US5595477A (en) * 1995-01-13 1997-01-21 Sgi-Prozesstechnik Gmbh Vacuum pumping stand
EP0723080A1 (fr) * 1995-01-13 1996-07-24 SGI-PROZESS-TECHNIK GmbH Système de pompage à vide
EP0730093A1 (fr) 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages
EP1101943A2 (fr) 1995-02-28 2001-05-23 Anest Iwata Corporation Système de contrôle d'une pompe à vide à deux étages
EP0752531A1 (fr) * 1995-07-06 1997-01-08 Leybold Aktiengesellschaft Appareil pour l'obtention rapide du vide dans une chambre à vide
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
EP0972938A3 (fr) * 1998-07-11 2000-06-28 Pfeiffer Vacuum GmbH Dispositif de ballast de gaz pour une pompe volumétrique à plusieurs étages
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
WO2020109790A1 (fr) * 2018-11-28 2020-06-04 Edwards Limited Système d'évacuation sous vide de multiples chambres
US11933284B2 (en) 2018-11-28 2024-03-19 Edwards Limited Multiple chamber vacuum exhaust system

Also Published As

Publication number Publication date
JPH05248383A (ja) 1993-09-24
DE59202713D1 (de) 1995-08-03
EP0541989B1 (fr) 1995-06-28
DE4136950A1 (de) 1993-05-13

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