GB2574649A - Twin shaft vacuum pumps, vacuum pump systems and a method of pumping - Google Patents

Twin shaft vacuum pumps, vacuum pump systems and a method of pumping Download PDF

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Publication number
GB2574649A
GB2574649A GB1809752.7A GB201809752A GB2574649A GB 2574649 A GB2574649 A GB 2574649A GB 201809752 A GB201809752 A GB 201809752A GB 2574649 A GB2574649 A GB 2574649A
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GB
United Kingdom
Prior art keywords
vacuum
pump
chamber
inlet
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1809752.7A
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GB201809752D0 (en
Inventor
Paul Schofield Nigel
Dowdeswell Stephen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to GB1809752.7A priority Critical patent/GB2574649A/en
Publication of GB201809752D0 publication Critical patent/GB201809752D0/en
Publication of GB2574649A publication Critical patent/GB2574649A/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A vacuum pump which has twin shafts and co-operating rotors, configured to pump fluids at different pressures, the rotors having parallel axes, at least 3 lobes and counter-rotating within a stator bore, where the stator bore has a first inlet port 16, an exhaust 20 and at least two further inlets 22,24 which are arranged such that the inlets feed into chambers created by the stator bore and the lobes of the rotors, where the rotor lobes isolate the further inlets from both the first inlet and exhaust, such that fluid entering the first inlet travels in two chambers past the further inlets where fluid at higher pressure may enter the chambers. The further inlets may connect to different vessels 36,38 outside the stator which contain fluids at different pressures. Also claimed is a vacuum system making use of the vacuum pump and a method of differentially pumping multiple chambers using a single pump.

Description

- 1 TWIN SHAFT VACUUM PUMPS, VACUUM PUMP SYSTEMS AND A METHOD OF PUMPING
FIELD OF THE INVENTION
The invention relates to twin shaft vacuum pumps, methods of pumping and a vacuum pump system.
BACKGROUND
Twin shaft pumps such as Roots pumps operate on a cooperating rotor principle, where two rotors rotate in opposite directions and pumping chambers formed between the rotors and stator bore are moved between a gas inlet and gas outlet. The inlet and outlet are generally configured such that the pumping chamber is sealed from the inlet before it is opened to the outlet.
In some vacuum systems such as in mass spectrometry arrangements multiple chambers maintained at different pressures are required. The chamber with the highest vacuum is often evacuated by a turbomolecular pump backed by another pump such as a Roots pump. The lower vacuum chamber(s) require a different vacuum level and may be evacuated using one or more other pumps. The requirement for multiple pumps increases the expense and space required for such a pumping system.
It would be desirable to provide pumping resources to provide different vacuum levels in a hardware and cost efficient manner.
SUMMARY
A first aspect provides a multiple inlet twin shaft vacuum pump configured to pump fluids at different pressures, said vacuum pump comprising: two cooperating rotors configured to rotate in opposite directions about parallel axes of rotation; a stator comprising a stator bore in which said two rotors are mounted to rotate; said stator bore comprising a first inlet port and an exhaust; each of said rotors comprising at least three lobes, pumping chambers being formed
-2between said lobes and said stator bore; wherein said stator bore comprises at least two further inlets arranged such that said lobes isolate each of said inlets and said exhaust from each other and on rotation of said rotors gas entering said first inlet port is moved by said pumping chambers formed by each of said rotors past said further inlets where gas at a higher pressure enters said pumping chambers and is moved by said pumping chambers to said exhaust.
The inventors of the present invention recognised that as the rotors of a pump rotate the pumping chamber formed by the rotors and stator moves the gas confined within the pumping chamber from the inlet to the exhaust, the volume of the pumping chamber remains constant during the rotation. If the pump is pumping a chamber at a high vacuum then the pressure of the gas in the pumping chamber will be at a low pressure. If one or more additional inlets were to be provided at a point in the rotation of each rotor where the chamber is sealed from both inlet and exhaust then were gas at such an inlet to be at a higher pressure than the gas in the pumping chamber it would be sucked into the pumping chamber and the pump could be used to pump both gas from the first inlet at a lower pressure and gas from the intermediate inlet(s) at a higher pressure.
In effect providing a further inlet at a point where the chamber is sealed from the first inlet and from the exhaust, allows additional gas to enter the pumping chamber provided that that gas is at a higher pressure than the gas within the pumping chamber. This allows a single pump with multiple inlets to pump gases at different pressures. In effect additional pumping resource is supplied from a single pump.
In such a pump, each rotor will have multiple lobes. The minimum number of lobes is three but in some embodiments the rotors each comprise four lobes.
The more lobes there are on a rotor then the more possibilities there are to have further inlets arranged around the stator each inlet being sealed from
-3neighbouring inlets by lobes of the rotor. However an increased number of lobes on the rotor reduces the volume of the pumping chambers and therefore the capacity of the pump. Four lobes provide some flexibility in the possible position and size of the multiple inlets and the exhaust while still providing pumping chambers of a significant size.
In some embodiments, said first inlet is arranged at a position where said two rotors come out of mesh, such that gas entering said first inlet port is moved by pumping chambers formed by each rotor.
The first inlet may be positioned at the point where the rotors come out of mesh, as the rotors rotate pumping chambers are formed by each rotor moving in opposite directions. The pumping chambers maintain their size until they reach the exhaust where the rotors mesh again and the gas is exhausted.
In some embodiments, said two further inlets are each arranged such that each provides access to a pumping chamber formed by a different one of said two rotors.
The pump may be arranged symmetrically with a further inlet on either side providing access to pumping chambers formed by different ones of the two rotors.
In some embodiments, said two further inlets are both connected to a single further inlet port.
Providing a symmetrical pump with the inlets arranged in the same position at opposite sides of the stator means that the pressure at each inlet will be similar and thus, in some embodiments the two inlets are connected and form a single inlet port which can be connected to a chamber to provide a pressure within the chamber that is higher than the pressure within the chamber pumped by the first inlet.
-4ln other embodiments, said two further inlets are each connected to a different further inlet port.
Inlets may be connected to different ports and these may be used to pump different chambers which may be maintained at slightly different pressures. This provides additional differential pumping from a single pump.
In some embodiments, said vacuum pump comprises a multiple stage Roots pump, said inlet ports being located in a first stage of said Roots pump and said exhaust being configured to connect to an inlet on a subsequent stage of said Roots pump.
Multiple stage Roots pumps are used in many applications. In embodiments the pump is a multiple stage Root pump with the inlet ports located on the first stage. The first stage of a multiple stage Root pump is the largest stage and therefore pumping chambers formed by this stage will be larger and an increased pumping capacity is achieved if the inlet to the pump is formed in this stage. Locating the inlets on later stages would reduce the capacity of the pump and thus a larger pump would be required to provide the same pumping capacity.
A second aspect of the present invention provides a vacuum system comprising a first chamber and a second chamber, said vacuum system comprising a vacuum pump according to a first aspect, said first inlet port of said vacuum pump being connected to said first chamber and being configured to pump said first chamber to a first higher vacuum and said at least one further inlet port of said vacuum pump being connected to said second chamber and being configured to pump said second chamber to a second lower vacuum.
As noted previously, providing additional inlets in a vacuum pump allow differential pumping by a single vacuum pump. Thus, a vacuum system can be
-5provided with two chambers which can be pumped by this pump to different pressures.
In some embodiments, the vacuum system further comprises a turbomolecular pump, said first inlet of said vacuum pump being connected to said first higher vacuum chamber via said turbomolecular pump, an inlet of said turbomolecular pump being connected to said first higher vacuum chamber and an exhaust of said turbomolecular pump being connected to said first inlet of said vacuum pump, such that said vacuum pump acts as a backing pump to said turbomolecular pump.
Although the first inlet of the vacuum pump can be connected to the first chamber directly, in some embodiments it is connected to it via a turbomolecular pump. This allows the first chamber to be pumped to a high vacuum with the turbomolecular pump being backed by the first inlet of the vacuum pump. A second chamber pumped to a lower vacuum may be pumped by the further inlet port of the vacuum pump.
In some embodiments, the vacuum system comprises a further chamber which is pumped to a lower vacuum with a first further inlet port being connected to the second vacuum chamber and a second further inlet port being connected to the further vacuum chamber.
In some embodiments, said vacuum system comprises a mass spectrometer.
Differentially pumped chambers are used in mass spectrometers and thus, embodiments may provide a vacuum system with a pump according to a first aspect and a mass spectrometer.
A third aspect provides a method of differentially pumping two pumping chambers using a vacuum pump according to a first aspect, comprising connecting said first inlet port of said vacuum pump to a first chamber; connecting one of said at least
-6one further inlets port to a second chamber; rotating said rotors of said pump such that said pump pumps gas through first inlet port from said first chamber to provide a first vacuum, and said pump pumps gas through said at least one further inlet from said second chamber to provide a second vacuum, said first vacuum being higher than said second vacuum.
In some embodiments, said first inlet port is connected to said first chamber via a turbomolecular pump, said vacuum pump providing a backing pump for said turbomolecular pump.
In some embodiments, the method comprises a further inlet port connected to a further chamber, such that on rotation of said rotor said pump pumps gas through said further inlet port from said further chamber to provide a further vacuum, said further vacuum being lower than said second vacuum.
Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate, and in combinations other than those explicitly set out in the claims.
Where an apparatus feature is described as being operable to provide a function, it will be appreciated that this includes an apparatus feature which provides that function or which is adapted or configured to provide that function.
BRIEF DESCRIPTION OF THE DRAWINGS
Embodiments of the present invention will now be described further, with reference to the accompanying drawings, in which:
Figure 1 illustrate a pump according to an embodiment;
Figure 2 shows a two chamber vacuum system according to an embodiment; and Figure 3 shows a three chamber vacuum system according to an embodiment;
DESCRIPTION OF THE EMBODIMENTS
-7Before discussing the embodiments in any more detail, first an overview will be provided.
Embodiments provide 2 or 3 inlets at the first stage of a multi stage roots pump. The first inlet connects to the volume formed by the roots lobes as they come out of mesh. This give the lowest pressure.
Rotation of the rotor traps and moves these volumes away from the inlet. Alternate volumes follow each rotor, moving either clockwise or anti clockwise from the first inlet. After a volume is separated from the inlet by a rotor lobe it is opened to a side inlet. The first side inlet connects with the first rotor and the second side inlet connects with the second rotor. The side inlets see a trapped volume at approximately the pressure of the first inlet. Due to the higher pressure of the side inlets, gas flows from the side inlets into the respective volume, increasing its pressure. The continuing rotation of the rotor then moves the volumes away from the side inlets and connects them alternately to the exhaust connection.
The side inlets may be connected together to give a single pump inlet port. Alternatively the side inlets maybe used separately to pump different parts of a system at slightly different pressures.
To achieve separation of the central first inlet and the 2 side inlets and the exhaust, the rotor requires at least 3 and preferably 4 lobes.
The exhaust from this stage is then ported round to the next stage of the multi stage roots pump in a conventional way.
For a mass spectrometer the turbo pump can be connected to the first inlet at a pressure of typically 1 to 4mbar and the inlet chamber of the mass spectrometer typically 10 to 20mbar can be connected to both of the side inlets in parallel.
-8A further option is to connect the two side inlets separately to different parts of the mass spectrometer system at slightly different pressures, say 10 mbar and 20mbar.
Figure 1 shows the first stage of a multiple stage Roots machine having a stator 10 and two rotors 12 and 14 configured to rotate in opposite directions. The stator 10 comprises a first inlet 16 and an exhaust 20. Gas admitted through the first inlet is captured by the rotating rotors. Pumping chambers formed between each rotor 12, 14 and the stator 10 move the captured gas in either direction past two side inlets 22 and 24. These are connected within pump housing to an inlet port (not shown). Gas at the inlet port that is at a higher pressure than the pressure in the pumping chambers is admitted into the pumping chambers and is swept on by the rotating rotors 12, 14 to the exhaust 20. In this way, the pump pumps gas at a first lower pressure at the first inlet 16 and gas at a higher pressure at each of the side inlets 22, 24.
Figure 2 schematically shows how the two side inlets 22, 24 are connected conduits within the pump housing to an inlet port 30. This port is in turn connected via a conduit to a first chamber 36. First inlet 16 is connected to a higher vacuum chamber 38. Although in this embodiment, first inlet 16 is directly connected to higher vacuum chamber 38, in some embodiments it may be connected via a turbomolecular pump.
Figure 3 shows an alternative three chamber embodiment. In this embodiment first inlet 16 is connected to the exhaust of a turbomolecular pump whose inlet is connected to the high vacuum chamber 38. An intermediate vacuum chamber 36 is evacuated via one side inlet 22, while lower vacuum chamber 34 is evacuated via the other side inlet 24.
Higher vacuum chamber 38 is in this embodiment the sample chamber of a mass spectrometer. The sample is admitted through the lower vacuum chamber 34 and travels via the intermediate vacuum chamber 36 into the high vacuum chamber where analysis is performed.
-9Although illustrative embodiments of the invention have been disclosed in detail herein, with reference to the accompanying drawings, it is understood that the invention is not limited to the precise embodiment and that various changes and 5 modifications can be effected therein by one skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.
- 10REFERENCE SIGNS stator
12, 14 rotors first inlet
20 exhaust
22, 24 side inlets inlet port low vacuum chamber intermediate vacuum chamber io 38 high vacuum chamber turbomolecular pump

Claims (15)

1. A multiple inlet twin shaft vacuum pump configured to pump fluids at different pressures, said vacuum pump comprising:
two cooperating rotors configured to rotate in opposite directions about parallel axes of rotation;
a stator comprising a stator bore in which said two rotors are mounted to rotate;
said stator bore comprising a first inlet port and an exhaust;
each of said rotors comprising at least three lobes, pumping chambers being formed between said lobes and said stator bore; wherein said stator bore comprises at least two further inlets arranged such that said lobes isolate each of said inlets and said exhaust from each other and on rotation of said rotors gas entering said first inlet port is moved by said pumping chambers formed by each of said rotors past said further inlets where gas at a higher pressure enters said pumping chambers and is moved by said pumping chambers to said exhaust.
2. A vacuum pump according to claim 1, each of said rotors comprising four lobes.
3. A vacuum pump according to any preceding claim, wherein said first inlet is arranged at a position where said two rotors come out of mesh, such that gas entering said first inlet port is moved by pumping chambers formed by each rotor.
4. A vacuum pump according to any preceding claim, wherein said two further inlets are each arranged such that each provides access to a pumping chamber formed by a different one of said two rotors.
5. A vacuum pump according to any preceding claim, wherein said two further inlets are both connected to a single further inlet port.
6. A vacuum pump according to any one of claims 1 to 4, wherein said two further inlets are each connected to a different further inlet port.
7. A vacuum pump according to claim 6, wherein said two further inlet ports are configured to pump gases at different pressures.
8. A vacuum pump according to any preceding claim, wherein said vacuum pump comprises a multiple stage Roots pump, said inlet ports being located on a first stage of said Roots pump and said exhaust being configured to connect to an inlet on a subsequent stage of said Roots pump.
9. A vacuum system, comprising a first chamber and a second chamber, said vacuum system comprising:
a vacuum pump according to any preceding claim, said first inlet port of said vacuum pump being connected to said first chamber and configured to pump said first chamber to a first higher vacuum and said at least one further inlet port of said vacuum pump being connected to said second chamber and being configured to pump said second chamber to a second lower vacuum.
10. A vacuum system according to claim 9, further comprising a turbomolecular pump, said first inlet of said vacuum pump being connected to said first higher vacuum chamber via said turbomolecular pump, an inlet of said turbomolecular pump being connected to said first higher vacuum chamber and an exhaust of said turbomolecular pump being connected to said first inlet of said vacuum pump, such that said vacuum pump acts as a backing pump to said turbomolecular pump.
11. A vacuum system according to claim 9 or 10, comprising a further chamber wherein said vacuum pump comprises a vacuum pump according to claim 7, or claim 8 when dependent on claim 7, wherein a first further inlet port of said vacuum pump is connected to said second
- 13chamber and a second further inlet port of said vacuum pump is connected to said further vacuum chamber, said vacuum pump being configured to pump said second chamber to a first lower vacuum and said further vacuum chamber to a further even lower vacuum.
12. A vacuum system according to any one of claims 9 to 11, wherein said vacuum system comprises a mass spectrometer.
13. A method of differentially pumping two pumping chambers using a vacuum pump according to any one of claims 1 to 8, comprising:
connecting said first inlet port of said vacuum pump to a first chamber; connecting one of said at least one further inlet ports to a second chamber;
rotating said rotors of said pump such that said pump pumps gas through first inlet port from said first chamber to provide a first vacuum, and said pump pumps gas through said at least one further inlet from said second chamber to provide a second vacuum, said first vacuum being higher than said second vacuum.
14. A method according to claim 13, wherein said first inlet port is connected to said first chamber via a turbomolecular pump, said vacuum pump providing a backing pump for said turbomolecular pump.
15. A method according to claim 13 or 14, comprising connecting a further one of said at least one further inlet port to a further chamber, such that on rotation of said rotor said pump pumps gas through said further one of said at least one further inlet port from said further chamber to provide a further vacuum, said further vacuum being lower than said second vacuum.
GB1809752.7A 2018-06-14 2018-06-14 Twin shaft vacuum pumps, vacuum pump systems and a method of pumping Withdrawn GB2574649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1809752.7A GB2574649A (en) 2018-06-14 2018-06-14 Twin shaft vacuum pumps, vacuum pump systems and a method of pumping

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Application Number Priority Date Filing Date Title
GB1809752.7A GB2574649A (en) 2018-06-14 2018-06-14 Twin shaft vacuum pumps, vacuum pump systems and a method of pumping

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GB201809752D0 GB201809752D0 (en) 2018-08-01
GB2574649A true GB2574649A (en) 2019-12-18

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285190A (en) * 1985-10-09 1987-04-18 Kobe Steel Ltd Screw type vacuum pump
US6203297B1 (en) * 1999-09-29 2001-03-20 Dresser Equipment Group, Inc. Fluid flow device with improved cooling system and method for cooling a vacuum pump
WO2006061317A1 (en) * 2004-12-10 2006-06-15 Leybold Vacuum Gmbh Vacuum system comprising a rotary pump with an intermediate inlet
JP2007092733A (en) * 2005-09-30 2007-04-12 Shin Meiwa Ind Co Ltd Suction vehicle and suction unit
JP2016148282A (en) * 2015-02-12 2016-08-18 オリオン機械株式会社 Biaxial rotary pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285190A (en) * 1985-10-09 1987-04-18 Kobe Steel Ltd Screw type vacuum pump
US6203297B1 (en) * 1999-09-29 2001-03-20 Dresser Equipment Group, Inc. Fluid flow device with improved cooling system and method for cooling a vacuum pump
WO2006061317A1 (en) * 2004-12-10 2006-06-15 Leybold Vacuum Gmbh Vacuum system comprising a rotary pump with an intermediate inlet
JP2007092733A (en) * 2005-09-30 2007-04-12 Shin Meiwa Ind Co Ltd Suction vehicle and suction unit
JP2016148282A (en) * 2015-02-12 2016-08-18 オリオン機械株式会社 Biaxial rotary pump

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