EP1600639A2 - Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire - Google Patents

Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire Download PDF

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Publication number
EP1600639A2
EP1600639A2 EP05103382A EP05103382A EP1600639A2 EP 1600639 A2 EP1600639 A2 EP 1600639A2 EP 05103382 A EP05103382 A EP 05103382A EP 05103382 A EP05103382 A EP 05103382A EP 1600639 A2 EP1600639 A2 EP 1600639A2
Authority
EP
European Patent Office
Prior art keywords
stator
inner ring
outer ring
ring
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05103382A
Other languages
German (de)
English (en)
Other versions
EP1600639A3 (fr
Inventor
Heinrich Engländer
Gerhard Wilhelm Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1600639A2 publication Critical patent/EP1600639A2/fr
Publication of EP1600639A3 publication Critical patent/EP1600639A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a method for manufacturing a stator stage for a turbomolecular pump, on a Turbomolecular pump stator stage and on one Turbo-molecular pump.
  • a stator stage for a turbomolecular pump consists of an outer ring and an inner ring, being between the two Ringing several stator blades are attached.
  • one stator stage will become essentially two Method applied. In the machining process, the entire stator stage including the stator blades, off Milled out of a solid metal body. When not cutting Method is the stator stage of a Punched out and stamped metal sheet.
  • the production of Stator stage by milling from a metal body is very expensive and expensive.
  • the axial length of the inner ring and the outer ring is always equal to the sheet thickness. To the complaint of several rotor stages therefore, between the outer rings still need each other Spacers are attached. Due to the small axial length the inner rings deteriorates the efficiency of Turbo-molecular pump.
  • the object of the invention is therefore to provide a method for Production of a turbomolecular pump stator stage or a To create a stator stage that is a cheap manufacture, a Easy installation and good efficiency allows.
  • the production process according to the invention thus consists of a machining step and two non-cutting Process steps.
  • the cutting Process step By the cutting Process step, the axial length of the outer ring, the Inner rings :; and the axial thickness of the annular disc or the From this formed stator blades freely determined and the be adapted to constructive requirements.
  • the Machining is done preferably by turning a Disc blanks for the formation of the outer ring, the Inner ring and the ring surface.
  • the annular disc is processed by non-cutting Edit, namely by punching, embossing and / or cutting machined to from the annular disc to the stator blades to shape.
  • Non-machining to molding and Angling the stator blades can be in one or in two automated and fast 1 feasible Implement work steps.
  • the inventive method consists of an intelligent Combination of a machining process for the formation of the Outer ring of the annular disc and the inner ring and a fast non-cutting process step to Formation and shaping of the stator blades.
  • stator stages which the required for easy installation and construction different axial lengths of the outer ring and the Inner ring have, and the sehnelle and inexpensive Manufacturability of the stator blades by a not offer machining process.
  • each stator blade is not over their entire width in the circumferential direction of the inner ring or attached to the outer ring, but via a retaining bar, in Circumferential direction has a smaller width than the Stator blade.
  • the Gap which in this case between the stator blade and the Inner ring or the outer ring possibly occurs, practical irrelevant for the pumping power.
  • the education of a Garsteges leaves a relatively strong angling the Stator blades in relation to the radial plane to.
  • the cutting takes place the annular disc such that the holding web width in Circumferential direction each less than 0.5 times the Stator blade width in the circumferential direction.
  • the Stator vane is only on the inner ring as on the outer ring over a maximum of 0.5 times its outer or inner circumference attached directly to the outer ring or inner ring.
  • Of the unattached section of the stator blade can in Angled relative to the radial plane. The lower the Holding web width in the circumferential direction, the larger the Stator blade surface, which is angled, d. H. be inclined can.
  • the disc blank is so machined machined that the axial length of the outer ring is greater than that of the inner ring is, so that the outer ring one Has spacer ring.
  • the disc blank is so machined machined that the axial thickness of the annular disc is less than the axial length of the inner ring is. Because of that Inner ring has a certain axial length, a smaller axial annular gap between the stator and the realized adjacent rotor stages in the region of the inner ring become. As a result, the efficiency of the relevant Stator and rotor stages improved.
  • the machining of the Disc blanks such that the outer ring, the annular disc and the inner ring together in cross-section U-, N- or H-shaped are.
  • the stator blades are preferably so angled that they are not substantially axially above the Protrude inner ring.
  • the stator stages are exclusively in one direction angled, while with N- and H-shaped stator stages Cross section of the stator blades or areas of Stator blades are angled in both axial directions can.
  • the annular disc is cut in such a way that between the holding webs of a stator blade a neutral Strip is formed at an angle ⁇ of at least 3 ° to the radial runs. Due to the non-radial arrangement of neutral strip, this is at least slightly longer as the radial distance of the inner ring from the outer ring. When or after the angling of the stator blades can This caused slight truncation of the neutral Strip offset by a reduction of the angle ⁇ be so that the neutral strip in the radial direction remains almost free of tension.
  • the Turbomolecular pump stator stage an inner ring and a Outer ring on, whose axial length is greater than that of the Inner ring is. Furthermore, between the outer ring and the Inner ring provided a plurality of stator blades, wherein the Inner ring, the stator blades and the outer ring in one piece are formed with each other.
  • Each stator blade is each with a radial retaining web with the inner ring and the Outer ring connected, wherein the retaining web width in Circumferential direction each less than 0.5 times the Stator blade width in the circumferential direction is.
  • the Stator blades are not over their entire circumferential length with connected to the inner and / or outer ring, but only with a part of its outer or inner circumference. This will be the Formation of the stator blades by a dirematerialabrioldes Procedure allows. As experiments shown have, despite the inevitable gap between the Stator blades and the inner and outer ring of. efficiency the stator stage does not deteriorate.
  • the outer ring integrated an axial spacer ring, so that the axial Length of the outer ring is greater than that of the inner ring. This is when mounting the stator to a stator the installation of a separate spacer ring dispensable, so that the assembly is simplified.
  • each stator blade is between the two Retaining a neutral connecting the holding webs Strip on at an angle of at least 3 ° to the Radial runs. Due to the not exactly radial arrangement of the two retaining webs connecting neutral strip is avoided that during and after the angling of the Stator blades due to the inevitable shortening of the Neutral strip a voltage increase in radial Direction within the stator blades occurs.
  • the axial thickness of the stator blades is smaller as the axial length of the inner ring. This will allows the angled stator blades not or only slightly protrude axially beyond the inner ring.
  • the ring disc and the inner ring point in Cross-section together a U-, N- or II-shaped cross-section on.
  • FIG. 1 a plurality of stages of a turbomolecular pump 10 in Longitudinal section shown.
  • the turbomolecular pump 10 is made essentially of a stator 12 and a rotor 14.
  • the Stator 12 is composed of several in the axial direction Stator stages 16 together, between which each rotor stages 18 are arranged.
  • Each rotor stage 18 becomes substantially formed by a rotor inner ring 20 and attached thereto Rotor blades 22.
  • Each stator 16 consists essentially of a circumferential outer ring 26, a likewise rotating Inner ring 28 and between the outer ring 26 and the inner ring 28 of stator blades 30, which consists of an annular disc 30 ' be formed.
  • the cross section of FIGS. 1 and 2 Stator stage 16 shown is approximately U-shaped, wherein the axial length D of the inner ring 28 is less than the axial Length C of the outer ring 26 and the axial thickness E of Stator blades .30 and the annular disc 30 'substantially is less than the axial length of the inner ring 28th
  • FIGS. 3 and 4 are two alternative cross-sectional shapes a stator 40,50 shown.
  • FIGS Stator stage blanks 16 ', 40', 50 ' shown, wherein the Ring disks 30 ', 46', 56 'but not yet as stator blades 30,46,56 are formed.
  • the stator 40 of Fig. 3 has an approximately H-shaped Cross-section. Between the outer ring 42 and the inner ring 44th is at the stator stage blank 40 'one in a radial plane lying annular disc 46 'is arranged.
  • the stator step blank 40 ' was by a machining method, namely by Turning made from a disc blank.
  • the ring disk 46 ' is approximately in the middle of the axial length of Inner ring 44 is arranged.
  • stator stage blank 50 'shown in FIG. 4 are from the annular disc 56 'Statorschaufeln 56 stamped out.
  • One Outer ring 52, an inner ring 54 and the annular disc 56 ', are arranged approximately N-shaped to each other.
  • stator stage blank 50 ' is shown in FIG. 4 produced stator 50 in plan view shown. From the annular disc 56 'of Statorstuten blank 50 'of Fig. 4 are by cutting, embossing and / or bending Stator vanes 56 have been formed, which in Fig. 6 are shown in more detail.
  • the stator blade 56 is at its two radial end sides each of a holding web 60.62 on the inner ring 54 and dem Outer ring 52 held.
  • the holding web width A, B of the two Holding webs 60,62 is less than 0.5 times, in particular as the 0.3 times the stator blade width A ', B' in Circumferential direction.
  • a neutral Strip 66 formed, which does not or not strong in one of the is inclined in both axial directions.
  • On both sides of the neutral stripe 66 is approximately triangular Blade part 68, 10 is formed, wherein a blade part 68 in a Bent in the axial direction and the other blade portion 70 in the other axial direction of the neutral strip 66 kinked is.
  • the stator 50 is cut into two halves 50 1 , 50 2 .
  • the bipartition of the stator 50 is required for easy mounting of the stator 50 from the outside around the corresponding rotor stages around.
  • stator stage 50 The production of a stator stage sci the example of in the Figures 4-6 illustrated stator stage 50 explains: First is made of a metal disc blank by machining Turning an inner ring 54, an outer ring 52 and one between them Ring disc 56 'formed out, which together the stator stage blank 50 'form. Subsequently, the stator stage blank 50 'by one or more non-cutting Process steps deformed: The annular disc 56 'is through Cutting, punching and / or embossing machined such that form out of the annular disc 56 'stator blades 56, the holding webs 60,62 on the inner ring 54 and the Outer ring 52 are held. For small angles of attack the Stator blades 56, the stator blades on their entire width connected to the inner and / or outer ring be so that no (narrower) jetty is formed.
  • the machining steps can desired gradation of the inner ring, the outer ring as well the annular disc, and on the other hand the formation of Stator blades are done quickly and inexpensively.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP05103382A 2004-05-14 2005-04-26 Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire Withdrawn EP1600639A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200410023961 DE102004023961A1 (de) 2004-05-14 2004-05-14 Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
DE102004023961 2004-05-14

Publications (2)

Publication Number Publication Date
EP1600639A2 true EP1600639A2 (fr) 2005-11-30
EP1600639A3 EP1600639A3 (fr) 2009-12-30

Family

ID=34939514

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05103382A Withdrawn EP1600639A3 (fr) 2004-05-14 2005-04-26 Procédé de fabrication d'un étage statorique d'une pompe turbomoléculaire

Country Status (2)

Country Link
EP (1) EP1600639A3 (fr)
DE (1) DE102004023961A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011074903A (ja) * 2009-10-02 2011-04-14 Shimadzu Corp ターボ分子ポンプ
EP3051140A1 (fr) * 2015-01-29 2016-08-03 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP2004076623A (ja) * 2002-08-13 2004-03-11 Osaka Vacuum Ltd ターボ分子ポンプの静翼段の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP2004076623A (ja) * 2002-08-13 2004-03-11 Osaka Vacuum Ltd ターボ分子ポンプの静翼段の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011074903A (ja) * 2009-10-02 2011-04-14 Shimadzu Corp ターボ分子ポンプ
EP3051140A1 (fr) * 2015-01-29 2016-08-03 Pfeiffer Vacuum Gmbh Disque de stator pour une pompe à vide
JP2016142268A (ja) * 2015-01-29 2016-08-08 プファイファー・ヴァキューム・ゲーエムベーハー ステーターディスク
CN105840525A (zh) * 2015-01-29 2016-08-10 普发真空有限公司 定子盘
CN105840525B (zh) * 2015-01-29 2019-06-21 普发真空有限公司 定子盘

Also Published As

Publication number Publication date
EP1600639A3 (fr) 2009-12-30
DE102004023961A1 (de) 2005-12-01

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