CH499019A - Scheibe für eine Turbomolekular-Vakuumpumpe - Google Patents

Scheibe für eine Turbomolekular-Vakuumpumpe

Info

Publication number
CH499019A
CH499019A CH540470A CH540470A CH499019A CH 499019 A CH499019 A CH 499019A CH 540470 A CH540470 A CH 540470A CH 540470 A CH540470 A CH 540470A CH 499019 A CH499019 A CH 499019A
Authority
CH
Switzerland
Prior art keywords
turbo
disc
vacuum pump
molecular vacuum
molecular
Prior art date
Application number
CH540470A
Other languages
English (en)
Inventor
Otto Dr Winkler
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH540470A priority Critical patent/CH499019A/de
Priority to NL707010096A priority patent/NL141612B/xx
Priority to DE2050555A priority patent/DE2050555C3/de
Publication of CH499019A publication Critical patent/CH499019A/de
Priority to FR7047199A priority patent/FR2074450A5/fr
Priority to GB2434/71A priority patent/GB1275386A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH540470A 1970-04-10 1970-04-10 Scheibe für eine Turbomolekular-Vakuumpumpe CH499019A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH540470A CH499019A (de) 1970-04-10 1970-04-10 Scheibe für eine Turbomolekular-Vakuumpumpe
NL707010096A NL141612B (nl) 1970-04-10 1970-07-08 Schijf voor een turbo-moleculair-pomp.
DE2050555A DE2050555C3 (de) 1970-04-10 1970-10-15 Scheibe für eine Turbomolekularvakuumpumpe
FR7047199A FR2074450A5 (de) 1970-04-10 1970-12-30
GB2434/71A GB1275386A (en) 1970-04-10 1971-01-18 Disc for a molecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH540470A CH499019A (de) 1970-04-10 1970-04-10 Scheibe für eine Turbomolekular-Vakuumpumpe

Publications (1)

Publication Number Publication Date
CH499019A true CH499019A (de) 1970-11-15

Family

ID=4293012

Family Applications (1)

Application Number Title Priority Date Filing Date
CH540470A CH499019A (de) 1970-04-10 1970-04-10 Scheibe für eine Turbomolekular-Vakuumpumpe

Country Status (5)

Country Link
CH (1) CH499019A (de)
DE (1) DE2050555C3 (de)
FR (1) FR2074450A5 (de)
GB (1) GB1275386A (de)
NL (1) NL141612B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP3034880B1 (de) * 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotoranordnung für eine vakuumpumpe und verfahren zur herstellung derselben

Also Published As

Publication number Publication date
DE2050555C3 (de) 1974-03-14
GB1275386A (en) 1972-05-24
NL141612B (nl) 1974-03-15
DE2050555A1 (de) 1971-10-28
DE2050555B2 (de) 1973-08-09
FR2074450A5 (de) 1971-10-01
NL7010096A (de) 1971-10-12

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Legal Events

Date Code Title Description
PL Patent ceased