JPS62184190U - - Google Patents
Info
- Publication number
- JPS62184190U JPS62184190U JP7256486U JP7256486U JPS62184190U JP S62184190 U JPS62184190 U JP S62184190U JP 7256486 U JP7256486 U JP 7256486U JP 7256486 U JP7256486 U JP 7256486U JP S62184190 U JPS62184190 U JP S62184190U
- Authority
- JP
- Japan
- Prior art keywords
- disks
- turbo
- rotating body
- molecular pump
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7256486U JPS62184190U (fr) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7256486U JPS62184190U (fr) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184190U true JPS62184190U (fr) | 1987-11-21 |
Family
ID=30916122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7256486U Pending JPS62184190U (fr) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184190U (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508340A (ja) * | 2008-11-07 | 2012-04-05 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプロータ |
| JP5541464B2 (ja) * | 2009-02-18 | 2014-07-09 | 株式会社島津製作所 | ターボ分子ポンプ |
| CN105697395A (zh) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | 用于真空泵的转子设施及其制造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6172896A (ja) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | 高速回転ポンプ |
-
1986
- 1986-05-16 JP JP7256486U patent/JPS62184190U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6172896A (ja) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | 高速回転ポンプ |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508340A (ja) * | 2008-11-07 | 2012-04-05 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプロータ |
| JP5541464B2 (ja) * | 2009-02-18 | 2014-07-09 | 株式会社島津製作所 | ターボ分子ポンプ |
| CN105697395A (zh) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | 用于真空泵的转子设施及其制造方法 |
| JP2016114059A (ja) * | 2014-12-15 | 2016-06-23 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプの為のローター装置及びその製造方法 |