DE59808723D1 - Reibungsvakuumpumpe mit stator und rotor - Google Patents

Reibungsvakuumpumpe mit stator und rotor

Info

Publication number
DE59808723D1
DE59808723D1 DE59808723T DE59808723T DE59808723D1 DE 59808723 D1 DE59808723 D1 DE 59808723D1 DE 59808723 T DE59808723 T DE 59808723T DE 59808723 T DE59808723 T DE 59808723T DE 59808723 D1 DE59808723 D1 DE 59808723D1
Authority
DE
Germany
Prior art keywords
stator
rotor
vacuum pump
friction vacuum
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59808723T
Other languages
English (en)
Inventor
Christian Beyer
Ralf Adamietz
Markus Henry
Guenter Schuetz
Heinrich Englaender
Wilhelm Walter
Hans-Rudolf Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7867761&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE59808723(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE59808723D1 publication Critical patent/DE59808723D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE59808723T 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor Expired - Lifetime DE59808723D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19821634A DE19821634A1 (de) 1998-05-14 1998-05-14 Reibungsvakuumpumpe mit Stator und Rotor
PCT/EP1998/005802 WO1999060275A1 (de) 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor

Publications (1)

Publication Number Publication Date
DE59808723D1 true DE59808723D1 (de) 2003-07-17

Family

ID=7867761

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19821634A Withdrawn DE19821634A1 (de) 1998-05-14 1998-05-14 Reibungsvakuumpumpe mit Stator und Rotor
DE59808723T Expired - Lifetime DE59808723D1 (de) 1998-05-14 1998-09-11 Reibungsvakuumpumpe mit stator und rotor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19821634A Withdrawn DE19821634A1 (de) 1998-05-14 1998-05-14 Reibungsvakuumpumpe mit Stator und Rotor

Country Status (10)

Country Link
US (1) US6435811B1 (de)
EP (1) EP1078166B2 (de)
JP (1) JP4173637B2 (de)
KR (1) KR20010025024A (de)
CN (1) CN1115488C (de)
AU (1) AU754944B2 (de)
CA (1) CA2332777C (de)
DE (2) DE19821634A1 (de)
TW (1) TW370594B (de)
WO (1) WO1999060275A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6090100A (en) * 1992-10-01 2000-07-18 Chiron Technolas Gmbh Ophthalmologische Systeme Excimer laser system for correction of vision with reduced thermal effects
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
GB0414316D0 (en) 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
JP2007231938A (ja) * 2006-02-06 2007-09-13 Boc Edwards Kk 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
EP2757266B1 (de) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotationsvakuumpumpe
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6488898B2 (ja) * 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2601515B (en) * 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer
EP4293232A1 (de) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pumpe
EP4379216A1 (de) * 2024-04-22 2024-06-05 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe mit kompakter bauform

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Also Published As

Publication number Publication date
CN1292851A (zh) 2001-04-25
CA2332777C (en) 2007-11-06
CN1115488C (zh) 2003-07-23
EP1078166B1 (de) 2003-06-11
US6435811B1 (en) 2002-08-20
DE19821634A1 (de) 1999-11-18
AU754944B2 (en) 2002-11-28
JP2002515568A (ja) 2002-05-28
JP4173637B2 (ja) 2008-10-29
AU9348198A (en) 1999-12-06
CA2332777A1 (en) 1999-11-25
KR20010025024A (ko) 2001-03-26
WO1999060275A1 (de) 1999-11-25
EP1078166A1 (de) 2001-02-28
TW370594B (en) 1999-09-21
EP1078166B2 (de) 2007-09-05

Similar Documents

Publication Publication Date Title
DE59808723D1 (de) Reibungsvakuumpumpe mit stator und rotor
DE69810130T2 (de) Rotationspumpe mit tauchrotor
DE69833081D1 (de) Motor mit innerem Permanentmagnetrotor
DE69928363D1 (de) Motor mit im Rotor eingebetteten geteilten Dauermagneten
DE59804362D1 (de) Rotor mit integraler beschaufelung
DE60022715D1 (de) Magnetlager und vakuumpumpe
DK60197A (da) Centrifugalpumpe med akseltætning
EE9800324A (et) Pumbarootor
DE69809689T2 (de) Elektromotor mit Permanentmagnetrotor
DE69920322D1 (de) Zusammengestellte Rotor- und Statoranordnung
DE59710092D1 (de) Zentrifugalpumpe und Zentrifugalpumpenanordnung
DE69715147D1 (de) Umfangsdichtung mit keramischem rotor
DE69818392D1 (de) Pumpenmotor mit Tauchstator und Tauchrotor
DE69931035D1 (de) Rotor mit optimierter drehgeschwindigkeit
DE59812093D1 (de) Schraubenvakuumpumpe mit rotoren
DE69914850D1 (de) Dauermagnetmotor und dessen Rotor
MXPA03007424A (es) Maquina electrica de induccion segmentada con construccion interdigitada de rotor y estator de tipo disco.
DE69920356D1 (de) Vakuumpumpe mit magnetlagersystem
EE9800325A (et) Pumbarootor
DE59905492D1 (de) Reibungsvakuumpumpe mit stator und rotor
DE59912702D1 (de) Strömungsmaschine mit gekühlter Rotorwelle
IT1296155B1 (it) Rotore di pompa turbomolecolare
DE69734030T2 (de) Saugrotor
DE69702776T2 (de) Ölpumpenrotor
DE69920354D1 (de) Vakuumpumpe mit magnetfanglageranordnung und fanglager

Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings