DE69920354D1 - Vakuumpumpe mit magnetfanglageranordnung und fanglager - Google Patents
Vakuumpumpe mit magnetfanglageranordnung und fanglagerInfo
- Publication number
- DE69920354D1 DE69920354D1 DE69920354T DE69920354T DE69920354D1 DE 69920354 D1 DE69920354 D1 DE 69920354D1 DE 69920354 T DE69920354 T DE 69920354T DE 69920354 T DE69920354 T DE 69920354T DE 69920354 D1 DE69920354 D1 DE 69920354D1
- Authority
- DE
- Germany
- Prior art keywords
- collar bearing
- vacuum pump
- magnetic
- bearing arrangement
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/02—Relieving load on bearings using mechanical means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/037,762 US6074165A (en) | 1998-03-10 | 1998-03-10 | Vacuum pump with magnetic bearing system and back-up bearings |
US37762 | 1998-03-10 | ||
PCT/US1999/005054 WO1999046510A1 (en) | 1998-03-10 | 1999-03-09 | Vacuum pump with magnetic bearing system and back-up bearings |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69920354D1 true DE69920354D1 (de) | 2004-10-28 |
DE69920354T2 DE69920354T2 (de) | 2006-02-16 |
Family
ID=21896186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69920354T Expired - Lifetime DE69920354T2 (de) | 1998-03-10 | 1999-03-09 | Vakuumpumpe mit magnetfanglageranordnung und fanglager |
Country Status (5)
Country | Link |
---|---|
US (1) | US6074165A (de) |
EP (1) | EP0981690B1 (de) |
JP (1) | JP3814651B2 (de) |
DE (1) | DE69920354T2 (de) |
WO (1) | WO1999046510A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6524005B2 (en) * | 2001-06-04 | 2003-02-25 | Honeywell International, Inc. | Touchdown bearing assembly with actuator ring assembly |
US20060188381A1 (en) * | 2005-02-24 | 2006-08-24 | Honeywell International, Inc. | Seal assembly for hydraulic pump output shaft |
FR2893684B1 (fr) * | 2005-11-24 | 2009-07-03 | Mecanique Magnetique Sa Soc D | Agencement de paliers de secours pour machine tournante a paliers magnetiques actifs |
US7736062B2 (en) * | 2007-09-14 | 2010-06-15 | Hamilton Sundstrand Corporation | Auxiliary rotary bearing system |
DE102011075710A1 (de) * | 2011-05-12 | 2012-11-15 | Schaeffler Technologies AG & Co. KG | Lageranordnung mit einem Fanglager, insbesondere für eine Lagerung einer schnelldrehenden Welle |
GB2507501B (en) | 2012-10-30 | 2015-07-15 | Edwards Ltd | Vacuum pump |
GB2507500B (en) * | 2012-10-30 | 2015-06-17 | Edwards Ltd | Vacuum pump |
EP2808551B1 (de) * | 2013-05-30 | 2020-01-08 | Nuovo Pignone S.r.l. | Rotationsmaschine mit mindestens einem aktiven Magnetlager und Hilfswälzlagern |
US20160076588A1 (en) * | 2014-09-17 | 2016-03-17 | Schaeffler Technologies AG & Co. KG | Impact resistant high speed bearing |
US10311150B2 (en) | 2015-04-10 | 2019-06-04 | Commvault Systems, Inc. | Using a Unix-based file system to manage and serve clones to windows-based computing clients |
JP7220692B2 (ja) | 2019-10-07 | 2023-02-10 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ、スクロールポンプ及びその製造方法 |
DE102021211080A1 (de) * | 2021-10-01 | 2023-04-06 | Robert Bosch Gesellschaft mit beschränkter Haftung | Elektrische Antriebseinrichtung |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
CH583856A5 (de) * | 1974-09-27 | 1977-01-14 | Balzers Patent Beteilig Ag | |
US4312628A (en) * | 1979-05-21 | 1982-01-26 | Cambridge Thermionic Corporation | Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control |
EP0408791B1 (de) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Reibungspumpe mit glockenförmigem Rotor |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
IT1241431B (it) * | 1990-03-09 | 1994-01-17 | Varian Spa | Pompa turbomolecolare perfezionata. |
US5747907A (en) * | 1995-12-29 | 1998-05-05 | United Technologies Automotive, Inc. | Backup bearings for positive re-centering of magnetic bearings |
IT1285864B1 (it) * | 1996-05-09 | 1998-06-24 | Varian Spa | Gruppo girevole di supporto per rotatore di pompa da vuoto. |
-
1998
- 1998-03-10 US US09/037,762 patent/US6074165A/en not_active Expired - Lifetime
-
1999
- 1999-03-09 DE DE69920354T patent/DE69920354T2/de not_active Expired - Lifetime
- 1999-03-09 EP EP99909922A patent/EP0981690B1/de not_active Expired - Lifetime
- 1999-03-09 WO PCT/US1999/005054 patent/WO1999046510A1/en active IP Right Grant
- 1999-03-09 JP JP54595999A patent/JP3814651B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69920354T2 (de) | 2006-02-16 |
JP2001525036A (ja) | 2001-12-04 |
EP0981690B1 (de) | 2004-09-22 |
JP3814651B2 (ja) | 2006-08-30 |
WO1999046510A1 (en) | 1999-09-16 |
US6074165A (en) | 2000-06-13 |
EP0981690A1 (de) | 2000-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 981690 Country of ref document: EP Representative=s name: KAHLER, KAECK & MOLLEKOPF, 86899 LANDSBERG, DE |