EP0626516A1 - Pompe à déplacement positive à deux étages - Google Patents

Pompe à déplacement positive à deux étages Download PDF

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Publication number
EP0626516A1
EP0626516A1 EP94103685A EP94103685A EP0626516A1 EP 0626516 A1 EP0626516 A1 EP 0626516A1 EP 94103685 A EP94103685 A EP 94103685A EP 94103685 A EP94103685 A EP 94103685A EP 0626516 A1 EP0626516 A1 EP 0626516A1
Authority
EP
European Patent Office
Prior art keywords
pump
piston
hybrid
diaphragm
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP94103685A
Other languages
German (de)
English (en)
Other versions
EP0626516B1 (fr
Inventor
Erich Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
Original Assignee
KNF Neuberger GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE9305554U external-priority patent/DE9305554U1/de
Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Publication of EP0626516A1 publication Critical patent/EP0626516A1/fr
Application granted granted Critical
Publication of EP0626516B1 publication Critical patent/EP0626516B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
    • F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
    • F04B39/048—Sealing between piston and carter being provided by a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • the invention relates to a double positive displacement pump, in particular with a turbo molecular pump which can be connected upstream.
  • Double piston pumps are already known, in which the two pistons are connected to each other via a piston rod and are driven by a linear drive (see brochure "LABOVAC linear diaphragm pumps and piston pumps” from SASKIA, Hochvakuum- und Labortechnik GmbH, O-6300 Ilmenau). It is also mentioned there that hermetic sealing of the pistons can be achieved in special models by installing a separating membrane. Piston pumps of this type with or without a separating membrane still have several disadvantages: In the case of the piston causing the extension, for example in the open, condensate formation can occur if the fluid handled is suitably humid. This leads to increased wear and leaks in the piston seals. This means a drop in the performance of the entire pump unit.
  • a piston pump is already known, in which the piston-cylinder chamber faces the crank chamber with a sealing membrane is closed. This prevents, for example, atmospheric air from getting past the piston rings or a lip seal of the piston and the vacuum generated in the piston pump thereby deteriorating somewhat.
  • the disadvantage is also prevented that the actual delivery medium itself is contaminated by air which may or may not be contaminated, coming from the crank chamber. It should also be noted that you cannot achieve tightness in the long run when the crankshaft passes and that lubrication is necessary in the crankcase due to the mechanical movements. This also contributes to undesirable contamination of the actual delivery medium if the piston-cylinder chamber is not sealed off from the crank chamber.
  • turbomolecular pumps of a type known per se have speeds of, for example, 30,000 rpm, but also much higher speeds.
  • the rotors of such turbo-molecular pumps are therefore usually also stored in magnetic bearings and are accordingly sensitive to shocks.
  • the dual displacement pump should be used as a pre-pump in front of a turbo-molecular pump, whereby on the one hand the turbomolecular pump should not be impaired by impurities coming from the dual-displacement pump on the one hand, but on the other hand should not be impaired in its running properties by vibrations .
  • the dual displacement pump should also have a relatively high pumping speed, which is desirable for economical operation of the turbomolecular pump.
  • the solution according to the invention consists in a double positive displacement pump in accordance with the preamble of claim 1 in particular in that it is designed as a hybrid pump which has a piston pump with a comparatively large displacement on the medium inlet side and its piston-cylinder chamber with respect to the crank chamber of this hybrid pump is closed by means of a sealing diaphragm, and that in the hybrid pump the piston pump is followed by a diaphragm pump whose displacement is noticeably smaller than that of the piston pump.
  • the diaphragm pump directly connected to the turbo-molecular pump must have relatively large dimensions because of the aforementioned different suction volumes of the two pumps connected in series, which leads to large masses to be moved and also certain disadvantages with regard to the diaphragm design in the diaphragm pump adjacent to the turbo-molecular pump pulls itself.
  • optimal conditions are achieved with the hybrid pump according to the innovation, that is to say a combination of a piston pump and a membrane pump connected downstream of this piston pump.
  • backing pumps with two diaphragms - as I said - are no longer optimally efficient.
  • tests have shown that backing pumps that are supposed to work together with turbomolecular pumps are on the order of magnitude where two diaphragm pumps connected in series can no longer be optimally designed.
  • the dual displacement pump according to the invention therefore allows absolute freedom from lubricants and the like.
  • the turbo-molecular pump is added to the entire unit and this entire unit is used, for example, in the field of electronics component production.
  • absolute cleanliness is important, for example when vapor-depositing chips.
  • the production process which is to be kept under vacuum here by an overall unit according to claim 3, usually takes place under the influence of protective gas. Even very minor impurities have considerable disadvantages. These can be largely avoided by the double positive displacement pump according to claim 3 and possibly 4.
  • the measures of claim 6 have the advantage that a minimal dead space is achieved.
  • the measures of claim 7 make mass balancing of the parts moving back and forth possible, which leads to a smooth running of the double displacement pump. This applies in particular in connection with the features of claim 8.
  • the measures of claim 9 contribute significantly to the fact that the space between the pendulum piston or its associated sealing sleeve on the one hand and the one with the sealing membrane on the other hand, especially when the hybrid pump starts up, is evacuated to such an extent that an undesirable overflow from the piston pump's displacement into the Gap is omitted or is largely avoided.
  • the double displacement pump and, if applicable, the connected turbomolecular pump are then ready for operation faster when starting up.
  • the double positive displacement pump 1 shows a double positive displacement pump 1 below a turbo-molecular pump 2 connected to it.
  • the double positive displacement pump 1 is designed as a hybrid pump 3, the piston 4 on the medium inlet side being a relatively large piston pump 5 Has displacement 6, the piston-cylinder chamber 7 is sealed off from the crank chamber 8 of the hybrid pump 3 by means of a sealing membrane 9.
  • the piston pump 5 is followed by a diaphragm pump 10, the Displacement 11 in comparison to that of the piston pump 5 is noticeably smaller.
  • the displacements 6 and 11 of the hybrid pump 3 are at least approximately matched to one another in such a way that the extension volume of the piston pump 5 is equal to the suction volume of the diaphragm pump 10 at a certain operating vacuum. If necessary, intake and extension volumes can also be coordinated for an operating area in the sense of optimization.
  • the double displacement pump 1 cooperates with a turbo-molecular pump 2 in such a way that the double displacement pump 1 is connected at least in the flow path of the turbo-molecular pump 2 in such a way that the intake port 12 of the piston pump 5 communicates with the outlet 15 of the turbomolecular pump 2.
  • the turbomolecular pump 2 and the double displacement pump 1 are connected to one another with respect to their housings 16 and 17, for example by means of a frame 31 only indicated schematically in FIG.
  • the turbo molecular pump 2 and the double displacement pump 1 can of course also be accommodated in a common housing (not shown).
  • both pumps 5 and 10 of the double displacement pump 1 are provided with pendulum pistons 18 and 19, and in the piston pump 5 of the double displacement pump 1, a disk-like sealing sleeve 20 is attached to the piston head 21 thereof.
  • This sealing sleeve 20 seals the piston head 21 against the piston-cylinder space 7 of the piston pump 5. Since the double displacement pump 1 has a piston pump 5 on the one hand and a diaphragm pump 10 on the other hand, one speaks of a “hybrid pump 3”.
  • the diaphragm pump 10 of this hybrid pump 3 has a shaped membrane 22, the upper side 24 of the adjacent pump chamber wall 23 which is adapted to it, so that there is only a practically minimal dead space in the dead center position (lower in FIG. 1).
  • the piston pump 5 and the diaphragm pump 10 of the hybrid pump 3 are driven via a common crankshaft 26.
  • the two pumps 5 and 10 are arranged opposite one another in the direction of the longitudinal axis L of the pump. Because of this and because of the common drive via the crankshaft 26, mass balancing with regard to the pumping movement of the piston pump 5 and the diaphragm pump 10 is readily possible. This results in a particularly smooth running of the hybrid pump if a mass balance of all moving masses is provided with respect to the piston and diaphragm pumps 5 and 10.
  • FIG. 1 one can also see a suction line 33, which extends from the connecting line 32, which leads from the turbomolecular pump 2 of the piston pump suction point 12, and from there to the intermediate space 30 which, on the one hand, extends between the piston head 21 of the piston pump 5 and the associated sealing membrane 9 is located.
  • the intermediate space 30 is also evacuated by this suction line 33, in particular when the hybrid pump 3 starts up. Leakages on the associated sealing collar 20 are not significant and do not have a long-term effect, so that the piston pump 5 brings about a corresponding reduction in pressure soon after the hybrid pump 3 starts up with the desired large suction volume. From the outlet port 34, the pumping medium indicated in FIG.
  • the mode of operation of the combined turbo-molecular and hybrid pump 2, 3 can be explained particularly well during the start-up process. This is done as follows: In the housing 16 of the turbomolecular pump 2 there is an impeller 40, which is connected to a motor M, which is only indicated schematically, and paddle wheels 41 of known construction having. In the housing 16 there are, adjacent to the impeller wheels 41, guide disks 42 or the like.
  • the impeller 40 of the turbomolecular pump runs at, for example, 30,000 revolutions per minute, but possibly also much faster, for example at around 60,000 revolutions per minute. Because of this high rotational speed, it is usually stored in magnetic bearings 43, one of which is drawn on the right side of FIG.
  • turbomolecular pump inlet 45 leads from space 44 into this turbomolecular pump 2.
  • turbomolecular pump 2 known per se, starts up, it initially does little in the start-up stage. Its pressure-side outlet 15 leads via the connecting line 32 into the displacement 6 of the piston pump 5.
  • the piston pump 5, as well as the diaphragm pump 10, on the inlet and outlet sides of the medium is equipped with known vacuum valves 27, which are only indicated schematically in FIG.
  • vacuum is generated by the movement of the pendulum piston 18 in the displacement 6.
  • the medium as described above, which is usually air, but also other gases, is then conducted via the pump line 36 to the inlet port 37 of the diaphragm pump 10. This sucks in gas, air or the like medium in the usual working cycle and pushes it out at its outlet connection 38.
  • the sealing membrane 9 attached to the rear of the pendulum piston 18 of the piston pump 5 prevents impurities from penetrating into the medium area.
  • the suction line 33 leads from the intermediate space 30 to the connecting line 32, which connects the turbomolecular pump to the piston pump 5. Any leaks on the sealing collar 20 of the pendulum piston 5 and thus the medium that has penetrated into the intermediate space 30 can be eliminated with the aid of this suction line again before the suction valve 27 of the piston pump 5 are performed. This speeds up the suction process in order to achieve an operating vacuum.
  • the turbomolecular pump 2 only begins to be practically effective when a certain minimum vacuum has been reached by the hydride pump 3, which practically represents a backing pump for the turbomolecular pump 2. Then it works in combination with the hybrid pump 3 as follows: Due to the high speed of the impeller wheels 41 of the turbomolecular pump 2, molecules in their housing 16 receive correspondingly high impulses and are moved from the turbomolecular pump inlet 45 to their outlet 15 , which leads to the desired increase in the vacuum known per se in turbomolecular pumps. To a certain extent, the molecules are mechanically transported by these impulses in the direction of the outlet 15 of the turbomolecular pump, which results in an increase in the vacuum.
  • the double positive displacement pump 1 serving as the backing pump for the turbo-molecular pump 2 is designed as a hybrid pump 3, the piston pump 5 of which, in the sense of the medium flow, adjacent to the turbo-molecular pump 2 produces a relatively large suction volume and is nevertheless protected against contamination and leaks, but works in combination with the outlet-side diaphragm pump 10, which in turn is insensitive to condensate.
  • Curve 46 shows the suction capacity, plotted against the suction pressure, for a normal, two-stage diaphragm pump.
  • Curve 47 shows the course of the pumping speed of a two-stage hybrid pump 3 with a piston pump on the suction side and a diaphragm pump 5 and 10 on the outlet side.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP94103685A 1993-04-15 1994-03-10 Dispositif de pompe à vide sans lubrifiant Expired - Lifetime EP0626516B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE9305554U 1993-04-15
DE9305554U DE9305554U1 (de) 1993-04-15 1993-04-15 Zweifach-Verdrängerpumpe
DE4320963A DE4320963C2 (de) 1993-04-15 1993-06-24 Schmiermittelfreie Vakuum-Pumpeneinrichtung
DE4320963 1993-06-24

Publications (2)

Publication Number Publication Date
EP0626516A1 true EP0626516A1 (fr) 1994-11-30
EP0626516B1 EP0626516B1 (fr) 1997-06-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP94103685A Expired - Lifetime EP0626516B1 (fr) 1993-04-15 1994-03-10 Dispositif de pompe à vide sans lubrifiant

Country Status (3)

Country Link
US (2) US5387090A (fr)
EP (1) EP0626516B1 (fr)
JP (1) JP2882748B2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2281358B (en) * 1993-08-25 1997-09-03 Knf Neuberger Gmbh A pump having an auxiliary diaphragm
CN106678013A (zh) * 2017-03-13 2017-05-17 中石化石油工程机械有限公司第四机械厂 大功率模块化液力驱动往复泵系统

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US5979440A (en) 1997-06-16 1999-11-09 Sequal Technologies, Inc. Methods and apparatus to generate liquid ambulatory oxygen from an oxygen concentrator
US5988165A (en) * 1997-10-01 1999-11-23 Invacare Corporation Apparatus and method for forming oxygen-enriched gas and compression thereof for high-pressure mobile storage utilization
US7204249B1 (en) 1997-10-01 2007-04-17 Invcare Corporation Oxygen conserving device utilizing a radial multi-stage compressor for high-pressure mobile storage
US6099269A (en) * 1997-10-06 2000-08-08 Fin Robur Absorption refrigeration system having a diaphragm pump and a hydraulic piston pump
DE19940498A1 (de) 1999-08-26 2001-03-22 Knf Neuberger Gmbh Membranpumpe
FR2822200B1 (fr) 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
US6589023B2 (en) 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
US6904913B2 (en) * 2002-10-24 2005-06-14 Acoba, Llc Method and system for delivery of therapeutic gas to a patient and for filling a cylinder
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
CN100567732C (zh) * 2004-03-22 2009-12-09 信浓绢糸株式会社 电磁泵
JP2005344569A (ja) * 2004-06-01 2005-12-15 Toyota Industries Corp ポンプ
US7900627B2 (en) * 2005-01-18 2011-03-08 Respironics, Inc. Trans-fill method and system
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US8197231B2 (en) * 2005-07-13 2012-06-12 Purity Solutions Llc Diaphragm pump and related methods
US8062003B2 (en) 2005-09-21 2011-11-22 Invacare Corporation System and method for providing oxygen
JP4709016B2 (ja) * 2006-01-12 2011-06-22 アネスト岩田株式会社 複合圧縮機
US7459008B2 (en) * 2006-03-16 2008-12-02 Aylsworth Alonzo C Method and system of operating a trans-fill device
US7556670B2 (en) * 2006-03-16 2009-07-07 Aylsworth Alonzo C Method and system of coordinating an intensifier and sieve beds
WO2013116820A1 (fr) 2012-02-03 2013-08-08 Invacare Corporation Dispositif de pompage
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
EP3299187A1 (fr) * 2016-09-23 2018-03-28 The Goodyear Tire & Rubber Company Ensemble de jante et système de maintenance d'air
CN106523333A (zh) * 2016-12-30 2017-03-22 张家港科康智能科技有限公司 一种四缸隔膜式气体压缩机
CN211009180U (zh) * 2019-07-02 2020-07-14 明达实业(厦门)有限公司 一种高低压一体充气泵和充气产品
US11873802B2 (en) * 2020-05-18 2024-01-16 Graco Minnesota Inc. Pump having multi-stage gas compression

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FR2175507A5 (fr) * 1972-03-08 1973-10-19 Becker Erich
DE3233853A1 (de) * 1982-09-11 1984-03-15 Erich 7812 Bad Krozingen Becker Pumpe mit kolben und gleitdichtung
GB2126665A (en) * 1982-09-11 1984-03-28 Erich Becker Pump
DE3710782A1 (de) 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
FR2637654A1 (fr) * 1988-10-08 1990-04-13 Toyo Engineering Corp Appareil de mise sous vide

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2281358B (en) * 1993-08-25 1997-09-03 Knf Neuberger Gmbh A pump having an auxiliary diaphragm
CN106678013A (zh) * 2017-03-13 2017-05-17 中石化石油工程机械有限公司第四机械厂 大功率模块化液力驱动往复泵系统
CN106678013B (zh) * 2017-03-13 2019-07-19 中石化四机石油机械有限公司 大功率模块化液力驱动往复泵系统

Also Published As

Publication number Publication date
JP2882748B2 (ja) 1999-04-12
US5387090A (en) 1995-02-07
JPH06299962A (ja) 1994-10-25
US5584669A (en) 1996-12-17
EP0626516B1 (fr) 1997-06-04

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