EP2253851A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2253851A3
EP2253851A3 EP10004025.2A EP10004025A EP2253851A3 EP 2253851 A3 EP2253851 A3 EP 2253851A3 EP 10004025 A EP10004025 A EP 10004025A EP 2253851 A3 EP2253851 A3 EP 2253851A3
Authority
EP
European Patent Office
Prior art keywords
blade
vacuum pump
outer edge
rear side
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10004025.2A
Other languages
German (de)
English (en)
Other versions
EP2253851B1 (fr
EP2253851A2 (fr
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2253851A2 publication Critical patent/EP2253851A2/fr
Publication of EP2253851A3 publication Critical patent/EP2253851A3/fr
Application granted granted Critical
Publication of EP2253851B1 publication Critical patent/EP2253851B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP10004025.2A 2009-05-16 2010-04-16 Pompe à vide Not-in-force EP2253851B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009021642.1A DE102009021642B4 (de) 2009-05-16 2009-05-16 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2253851A2 EP2253851A2 (fr) 2010-11-24
EP2253851A3 true EP2253851A3 (fr) 2014-07-09
EP2253851B1 EP2253851B1 (fr) 2016-12-14

Family

ID=42272003

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10004025.2A Not-in-force EP2253851B1 (fr) 2009-05-16 2010-04-16 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2253851B1 (fr)
JP (1) JP5670095B2 (fr)
DE (1) DE102009021642B4 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013108482A1 (de) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102015113821B4 (de) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102017215731A1 (de) * 2017-09-07 2019-03-07 Robert Bosch Gmbh Seitenkanalverdichter für ein Brennstoffzellensystem zur Förderung und/oder Verdichtung von einem gasförmigen Medium
EP3623634B1 (fr) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2298457A (en) * 1994-09-19 1996-09-04 Hitachi Ltd Vacuum pump
EP0845600A2 (fr) * 1996-11-29 1998-06-03 Dürr Dental GmbH & Co. KG Machine à canal latéral
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE10334950A1 (de) * 2003-07-31 2004-12-09 Nash_Elmo Industries Gmbh Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
US20050207883A1 (en) * 2004-03-19 2005-09-22 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210294A (ja) * 1985-03-13 1986-09-18 Nishimura Denki Kk 送風機
JPH0689758B2 (ja) * 1988-06-28 1994-11-14 ダイキン工業株式会社 渦流形ターボ機械
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3800128B2 (ja) 2001-07-31 2006-07-26 株式会社デンソー インペラ及びタービン式燃料ポンプ
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (ja) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 タービン型燃料ポンプ
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
DE102005025132A1 (de) 2005-06-01 2006-12-07 Robert Bosch Gmbh Förderaggregat

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2298457A (en) * 1994-09-19 1996-09-04 Hitachi Ltd Vacuum pump
EP0845600A2 (fr) * 1996-11-29 1998-06-03 Dürr Dental GmbH & Co. KG Machine à canal latéral
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE10334950A1 (de) * 2003-07-31 2004-12-09 Nash_Elmo Industries Gmbh Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
US20050207883A1 (en) * 2004-03-19 2005-09-22 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly

Also Published As

Publication number Publication date
DE102009021642A1 (de) 2010-11-18
EP2253851B1 (fr) 2016-12-14
EP2253851A2 (fr) 2010-11-24
JP2010265895A (ja) 2010-11-25
DE102009021642B4 (de) 2021-07-22
JP5670095B2 (ja) 2015-02-18

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