EP2251547A2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2251547A2
EP2251547A2 EP10004024A EP10004024A EP2251547A2 EP 2251547 A2 EP2251547 A2 EP 2251547A2 EP 10004024 A EP10004024 A EP 10004024A EP 10004024 A EP10004024 A EP 10004024A EP 2251547 A2 EP2251547 A2 EP 2251547A2
Authority
EP
European Patent Office
Prior art keywords
blade
impeller
vacuum pump
blades
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10004024A
Other languages
German (de)
French (fr)
Other versions
EP2251547B1 (en
EP2251547A3 (en
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2251547A2 publication Critical patent/EP2251547A2/en
Publication of EP2251547A3 publication Critical patent/EP2251547A3/en
Application granted granted Critical
Publication of EP2251547B1 publication Critical patent/EP2251547B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes.
  • An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpump note and in the gas stream subsequently with a plurality of side channel pumping stages.
  • the impellers used in these bykanalpumpgen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.
  • the vacuum characteristics of the side channel pumping stage in particular the suction capacity and the pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gap between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.
  • the geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between inlet and outlet of the side channel pumping stage in the region of the rough vacuum.
  • the vacuum pump 1 of the embodiment is shown in FIG Fig. 1 , shown in longitudinal section.
  • the housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.
  • the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design.
  • This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408.
  • the thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region.
  • the cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8.
  • the molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.
  • the shaft is rotated by a drive 7 in rotation.
  • This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side.
  • the shaft is mounted in roller bearings 10 and 11.
  • the gas From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5.
  • This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501.
  • the gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.
  • Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '.
  • the housing part 22, which houses the side channel pumping stage, has an annular side channel 601.
  • the ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this.
  • in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction.
  • the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel.
  • This entrainment of the gas in the circumferential direction ends at the Abtreifer 604. At this the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.
  • the design of the blade of the impeller is in Fig. 3 shown in a view of the edge.
  • the blade 602 has a first partial blade 621 and a second partial blade 622.
  • Each of these vanes has a partial bucket back 625 and 626.
  • At least one of these two vanes forms an angle 615 of less than 90 ° with the direction of travel 607 of the bucket. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade.
  • a further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades.
  • a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.
  • the impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.
  • the design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '.
  • the central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio.
  • the geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a sawing process results in a geometry in which the higher part of the central web is arranged in front of the blade 602 in relation to the direction of movement 607.
  • a further development of the shovel shows the top view of the edge of the impeller in Fig. 5 ,
  • the blade 602 has two partial blades 651 and 652.
  • Each of the sub-blades has a partial bucket rear 653 and 654.
  • a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the sub-blade.
  • the sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607.
  • the sub-blades are offset by an offset 661 in the direction of movement against each other.
  • the partial vane backs extend beyond the center 660 of the impeller.
  • FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown.
  • the blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513.
  • a chamfer is provided at the back part of the bucket.
  • FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple.
  • the combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor having, and with a side channel pumping stage, the impeller having the features of the FIGS. 3 to 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.

Abstract

The pump (1) has a gas inlet (2), a gas outlet (3) and a side channel pump stage (6) that includes a rotatable blade wheel (600) with an edge. The wheel has a blade (602) with partial blades, which are arranged at an edge of the wheel. Angle between the partial blades and movement direction of the blade is smaller than 90 degrees. The blade wheel comprises another blade, and a partition wall is arranged between the blades in a direction of circumference of the blade wheel. The former blade comprises a chamfer in a rear side.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a vacuum pump according to the preamble of the first claim.

Vakuumpumpen mit Seitenkanalpumpstufen sind im Stand der Technik bekannt und erlangen zunehmend wirtschaftliche Bedeutung. Beim Einsatz in einer Turbomolekularpumpe ermöglicht eine Seitenkanalpumpstufe, die Turbomolekularpumpe gegen höhere Drucke ausstoßen zu lassen. Vakuumpumpen mit Holweck- und Seitenkanalpumpstufe erreichen bei sehr kompakten Baugrößen Enddrücke im molekularen Strömungsbereich. Ein Beispiel für eine solche Vakuumpumpe gibt die DE 19930952 A1 an, die im Ansaugbereich mit einer parallel arbeitenden Holweckpumpstufe und im Gasstrom nachfolgend mit einer Mehrzahl von Seitenkanalpumpstufen ausgestattet ist. Die in diesen Seitenkanalpumpstufen verwendeten Laufräder sind einfach gestaltet: die Schaufeln des scheibenförmigen Laufrades sind an dessen Rand angeordnet und stehen in radialer Richtung von der Scheibe ab. Zwischen den Schaufeln läuft ein Mittelsteg um, der entlang des ganzen Laufradumfangs die volle Schaufelhöhe besitzt.Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes. An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpumpstufe and in the gas stream subsequently with a plurality of side channel pumping stages. The impellers used in these Seitenkanalpumpstufen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.

Die Vakuumkennwerte der Seitenkanalpumpstufe, insbesondere Saugvermögen und Druckverhältnis zwischen Einlass und Auslass, hängen von der Gestaltung der Schaufeln, des Kanals und der Spalte zwischen rotierenden und stehenden Teile ab. In der Regel führen gute Vakuumkennwerte zu steigenden Herstellkosten.The vacuum characteristics of the side channel pumping stage, in particular the suction capacity and the pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gap between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.

Andererseits besteht die Notwendigkeit, die Kosten für die Herstellung der pumpaktiven Teile der Seitenkanalpumpe gering zu halten.On the other hand, there is a need to keep the cost of producing the pump-active parts of the side channel pump low.

Das oben beschriebene Laufrad stellt bisher einen guten Kompromiss dar, für den jedoch eine Verbesserung gesucht wird.The impeller described above represents a good compromise, but for which an improvement is sought.

Es ist daher Aufgabe, eine Vakuumpumpe zu schaffen, deren Seitenkanalpumpstufe verbesserte Vakuumkennwerte und gleichzeitig eine einfach herzustellende Geometrie der pumpaktiven Bauteile besitzt.It is therefore an object to provide a vacuum pump whose Seitenkanalpumpstufe has improved vacuum characteristics and at the same time easy to manufacture geometry of the pump-active components.

Die Aufgabe wird gelöst durch die Merkmale des unabhängigen Anspruchs 1. Vorteilhafte Ausgestaltungen der Erfindung sind in den Unteransprüchen 2 bis 6 gekennzeichnet.The object is solved by the features of independent claim 1. Advantageous embodiments of the invention are characterized in the subclaims 2 to 6.

Die Geometrie der Schaufel nach Anspruch 1 ist kostengünstig herstellbar. Im Vergleich zum eingangs genannten Stand der Technik ergibt sich durch einen Winkel zwischen wenigstens einer Teilschaufel und der Bewegungsrichtung der Schaufel von weniger als 90° eine Verbesserung des Druckverhältnisses zwischen Einlass und Auslass der Seitenkanalpumpstufe im Bereich des Grobvakuums.The geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between inlet and outlet of the side channel pumping stage in the region of the rough vacuum.

Dieser Vorteil wird vertieft, wenn zusätzlich ein Mittelsteg zwischen benachbarten Schaufeln wenigstens abschnittsweise eine geringere Höhe als die Schaufel aufweist.This advantage is enhanced if, in addition, a central web between adjacent blades at least in sections has a lower height than the blade.

Eine zusätzliche Verbesserung der Vakuumkennwerte, insbesondere des Druckverhältnisses, wird erzielt, wenn wenigstens eine Teilschaufel eine in Bezug zur Drehrichtung nacheilende Rückseite aufweist, die sich über die Mitte des Randes des Laufrades erstreckt.An additional improvement of the vacuum characteristics, in particular the pressure ratio, is achieved if at least one partial vane has a rearward-trailing back which extends over the center of the rim of the impeller.

Eine zusätzliche Ausweitung des Vorteils wird erreicht, wenn an der Rückseite der Schaufel eine Fase angebracht ist.An additional extension of the advantage is achieved if a bevel is attached to the back of the blade.

Vorteilhaft und das Ergebnis weiter verbessernd wirkt ein Versatz der Teilschaufeln in Umfangsrichtung.Advantageous and further improving the result is an offset of the partial blades in the circumferential direction.

Eine vorteilhafte Kombination ergibt sich, wenn die Seitenkanalpumpstufe im Gasstrom hinter einer weiteren Seitenkanalpumpstufe angeordnet ist, welche einen Rotor mit einer Rotorschaufel beinhaltet, welche an einer in Bezug zur Drehrichtung zurückliegenden Seite eine Fase aufweist. Diese Wahl der Schaufelgestaltungen erlaubt eine verringerte Zahl an Seitenkanalpumpstufen im Vergleich zum Stand der Technik und reduziert daher die Herstellkosten bei verbesserten Vakuumkennwerten.An advantageous combination results when the side channel pumping stage is arranged in the gas flow behind another side channel pumping stage, which includes a rotor with a rotor blade, which has a chamfer on a side lying in relation to the direction of rotation. This choice of bucket designs allows for a reduced number of side channel pumping stages compared to the prior art and therefore reduces manufacturing costs with improved vacuum ratings.

An Hand eines Ausführungsbeispiels seiner Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.
Es zeigen:

Fig. 1:
Schnitt in Wellenrichtung durch eine Vakuumpumpe mit einer Seitenkanalpumpstufe.
Fig. 2:
Schnitt quer zur Wellenachse durch die Seitenkanalpumpstufe entlang I-I'.
Fig. 3:
Blick auf ein Laufrad mit erster und zweiter Schaufel.
Fig. 4:
Schnitt durch das Laufrad mit erster und zweiter Schaufel entlang der Linie II-II'.
Fig. 5:
Sicht auf einen Abschnitt mit einigen Schaufeln in einer Weiterbildung.
Fig. 6:
Sicht auf einen Abschnitt des Rotors einer weiteren Pumpstufe.
With reference to an embodiment of its developments, the invention will be explained in more detail and the representation of its benefits to be deepened.
Show it:
Fig. 1:
Cut in the shaft direction by a vacuum pump with a side channel pumping stage.
Fig. 2:
Section transverse to the shaft axis through the side channel pumping stage along I-I '.
3:
View of an impeller with first and second blades.
4:
Section through the impeller with first and second blades along the line II-II '.
Fig. 5:
View of a section with some blades in a training.
Fig. 6:
View of a section of the rotor of another pumping stage.

Die Vakuumpumpe 1 des Ausführungsbeispiels ist in Fig. 1. im Längsschnitt gezeigt. Das mit einem Gaseinlass 2 und einem Gasauslass 3 versehene Gehäuse der Vakuumpumpe weist mehrere Gehäuseteile 20, 21, 22 und 23 auf, in denen die nachfolgend beschriebenen Komponenten untergebracht sind.The vacuum pump 1 of the embodiment is shown in FIG Fig. 1 , shown in longitudinal section. The housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.

Durch den Gaseinlass gelangt das Gas zunächst in die molekulare Pumpstufe 4, die hier nach Holweck-Bauart gestaltet ist. Diese umfasst einen Innenstator 405 mit einer inneren Gewindenut 407 und einen Außenstator 406 mit einer äußeren Gewindenut 408. Die Gewindenuten verlaufen schraubengangartig und wirken mit einem zwischen Innenstator und Außenstator befindlichen, rotierenden Zylinder 402 derart zusammen, dass sich im molekularen Strömungsbereich eine Pumpwirkung einstellt. Der Zylinder ist auf einem Träger 400 angebracht, welcher seinerseits mit der Welle 8 verbunden ist. Die molekulare Pumpstufe ist symmetrisch aufgebaut und weist einen zweiten Zylinder 402' auf, der mit ihr zugeordneten Statorbauteilen zusammenwirkt. Durch diese Gestaltung ergibt sich ein paralleler Fördermechanismus.Through the gas inlet, the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design. This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408. The thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region. The cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8. The molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.

Die Welle wird von einem Antrieb 7 in Drehung versetzt. Dieser Antrieb umfasst statorseitig eine elektrische Spule 12 und wellenseitig einen Permanentmagneten 13. Gelagert ist die Welle in Wälzlagern 10 und 11.The shaft is rotated by a drive 7 in rotation. This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side. The shaft is mounted in roller bearings 10 and 11.

Aus der molekularen Pumpstufe tritt das Gas stromabwärts durch den ersten Übergabekanal 24 in eine hochvakuumseitige Seitenkanalstufe 5 ein. Diese weist einen Rotor 500 auf, welcher mit wenigstens einer Rotorschaufel versehen ist. Diese läuft in dem Seitenkanal 501 um. Das in dieser Pumpstufe weiter verdichtete Gas wird über den zweiten Übergabekanal 25 an die Seitenkanalpumpstufe 6 übergeben, dort weiterverdichtet und schließlich über den Gasauslass aus der Vakuumpumpe ausgestoßen.From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5. This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501. The gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.

In Fig. 2 ist die Seitenkanalpumpstufe 6 in einem Schnitt entlang der Linie I-I' gezeigt. Das Gehäuseteil 22, welches die Seitenkanalpumpstufe beherbergt, weist einen ringförmigen Seitenkanal 601 auf. Der Ring dieses Seitenkanals wird von einem Unterbrecher 604 unterbrochen. Dieser trennt Ansaug- und Ausstoßseite von einander und löst den am Laufrad geführten Gasstrom von diesem ab. Im Seitenkanal läuft die wenigstens eine Schaufel 602 um, die am Rand 603 der Laufrades 600 angeordnet ist. Sie erstreckt sich an diesem Rand in radialer Richtung. Wenn das Laufrad durch die Welle 8 in Drehung versetzt ist und Gas durch den Übergabekanal 25 in den Seitenkanal hineingelangt, wird dieses mit der Schaufel entlang des Kanals bewegt. Dieses Mitführen des Gases in Umfangsrichtung endet am Abtreifer 604. An diesem wird das Gas an den nachfolgenden Kanal übergeben. Dieser führt dann in eine weitere Pumpstufe oder zum Gasauslass 3.In Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '. The housing part 22, which houses the side channel pumping stage, has an annular side channel 601. The ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this. in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction. When the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel. This entrainment of the gas in the circumferential direction ends at the Abtreifer 604. At this the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.

Die Gestaltung der Schaufel des Laufrades ist in Fig. 3 in einem Blick auf den Rand gezeigt. Die Schaufel 602 weist eine erste Teilschaufel 621 und eine zweite Teilschaufel 622 auf. Jeder dieser Teilschaufeln besitzt eine Teilschaufelrückseite 625 und 626. Wenigstens eine dieser beiden Teilschaufeln bildet einen Winkel 615 von weniger als 90° mit der Bewegungsrichtung 607 der Schaufel. Günstig ist es, wenn beide Teilschaufeln in einem solchen Winkel geneigt sind und zusammen ein in Bewegungsrichtung geöffnetes V bilden. Diese Maßnahme erhöht das Druckverhältnis, welches mit der Schaufel erreicht werden. Eine weitere Erhöhung gelingt durch die Fase 616, die an den Teilschaufelrückseiten 625 und 626 vorgesehen sind und an der in der Ebene des Laufrades liegenden Außenkante der Teilschaufeln liegen. Vorteilhaft ist es, die Oberfläche der Schaufel aus ebenen Flächen zusammenzusetzen, da die Schaufel dann durch Sägen sehr einfach und damit kostengünstig hergestellt werden kann. Bei diesem Verfahren sägt ein Sägeblatt den Rand des Laufrades ein und ist dabei gegen die Rotationsachse des Laufrades geneigt, d.h die Rotationsachse liegt nicht in der Ebene des Sägeblattes.The design of the blade of the impeller is in Fig. 3 shown in a view of the edge. The blade 602 has a first partial blade 621 and a second partial blade 622. Each of these vanes has a partial bucket back 625 and 626. At least one of these two vanes forms an angle 615 of less than 90 ° with the direction of travel 607 of the bucket. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade. A further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades. It is advantageous to assemble the surface of the blade from flat surfaces, since the blade can then be produced very easily and thus inexpensively by sawing. In this method, a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.

Das Laufrad weist neben der Schaufel 602 noch eine weitere Schaufel 612 auf, die vorteilhaft gleichartig gestaltet ist. Zwischen den Schaufeln 602 und 612 ist ein Mittelsteg 630 angeordnet.The impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.

Die Gestaltung des Mittelsteges wird anhand Fig. 4 verdeutlicht. Diese zeigt einen Schnitt entlang der Linie II-II'. Der Mittelsteg 630 ist zwischen den Schaufeln 602 und 612 angeordnet. Seine Höhe 631 ist wenigstens abschnittsweise geringer als die Schaufelhöhe 632, so dass ein durchgängiger Raum zwischen den Schaufeln entsteht. Dies führt zu einem verbesserten Druckverhältnis. Die Geometrie ist dabei wiederum leicht durch Sägen herstellbar. Während des Sägens taucht das Sägeblatt über die Mitte des Randes des Laufrades ein und nimmt das Material des Mittelsteges weg. Ist das Sägeblatt wie oben beschrieben geneigt, entsteht in einem Sägevorgang eine Geometrie, bei der der höhere Teil des Mittelsteges in Bezug zur Bewegungsrichtung 607 vor der Schaufel 602 angeordnet ist.The design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '. The central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio. The geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a sawing process results in a geometry in which the higher part of the central web is arranged in front of the blade 602 in relation to the direction of movement 607.

Eine Weiterbildung der Schaufel zeigt der Draufblick auf den Rand des Laufrades in Fig. 5. Die Schaufel 602' weist zwei Teilschaufeln 651 und 652 auf. Jede der Teilschaufeln besitzt eine Teilschaufelrückseite 653 und 654. An jeder dieser Teilschaufelrückseiten ist eine Fase 656 angeordnet, welche an der in der Ebene des Laufrades liegenden Außenkante der Teilschaufel liegt. Die Teilschaufeln bilden einen Winkel 615' von weniger als 90° mit der Bewegungsrichtung 607. Die Teilschaufeln sind um einen Versatz 661 in Bewegungsrichtung gegeneinander versetzt. Die Teilschaufelrückseiten erstrecken sich bis über die Mitte 660 des Laufrades. Diese Weiterbildung lässt sich wiederum einfach durch Sägen herstellen und erhöht das erreichbare Druckverhältnis.A further development of the shovel shows the top view of the edge of the impeller in Fig. 5 , The blade 602 'has two partial blades 651 and 652. Each of the sub-blades has a partial bucket rear 653 and 654. At each of these bucket backs a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the sub-blade. The sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607. The sub-blades are offset by an offset 661 in the direction of movement against each other. The partial vane backs extend beyond the center 660 of the impeller. This development can in turn be easily produced by sawing and increases the achievable pressure ratio.

In Figur 6 ist ein Draufblick auf den Rand des Rotors der hochvakuumseitigen Seitenkanalpumpstufe 5 gezeigt. Die am Rand des Rotors angeordnete Schaufel 502 weist Teilschaufeln 551 und 552 mit einer Teilschaufrückseite 513 auf. An der Teilschaufelrückseite ist eine Fase vorgesehen.In FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown. The blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513. At the back part of the bucket a chamfer is provided.

Die in den Figuren 3 bis 6 gezeigten Strukturen wiederholen sich mehrfach und treten entlang des Umfangs des Laufrades in einem ganzzahligen Vielfachen auf. Die Kombination einer molekularen Pumpstufe 4 mit einer hochvakuumseitigen Seitenkanalpumpstufe, welche ein nach Fig. 6 gestalteten Rotor besitzt, und mit einer Seitenkanalpumpstufe, die ein Laufrad mit den Merkmalen nach den Figuren 3 bis 5 aufweist, ergibt eine kostengünstig herstellbare, kompakte Vakuumpumpe mit verbesserten Vakuumkennwerten.The in the FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple. The combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor having, and with a side channel pumping stage, the impeller having the features of the FIGS. 3 to 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.

Claims (6)

Vakuumpumpe (1) mit einem Gaseinlass (2), einem Gasauslass (3) und mit einer Seitenkanalpumpstufe (6), welche ein in Drehung versetztes Laufrad (600) mit einem Rand umfasst, welches eine Schaufel (602; 602') mit einer ersten (621; 651) und einer zweiten (622; 652) Teilschaufel aufweist, die am Rand des Laufrades angeordnet ist, dadurch gekennzeichnet, dass der Winkel (615; 615') zwischen wenigstens einer Teilschaufel (621; 622; 651; 652) und der Bewegungsrichtung (607) der Schaufel weniger als 90° beträgt.A vacuum pump (1) having a gas inlet (2), a gas outlet (3) and a side channel pumping stage (6) comprising a rotating impeller (600) having a rim which defines a blade (602; 602 ') with a first (621; 651) and a second (622; 652) partial vane arranged at the edge of the impeller, characterized in that the angle (615; 615 ') between at least one partial vane (621; 622; 651; 652) and the direction of movement (607) of the blade is less than 90 °. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass das Laufrad eine zweite Schaufel (612) aufweist und zwischen den Schaufeln (602; 602'; 612) ein Mittelsteg (630) in Richtung des Umfangs des Laufrades (600) angeordnet ist, dessen Höhe (631) wenigstens abschnittsweise geringer als die Höhe (632) der Schaufeln ist.Vacuum pump according to claim 1, characterized in that the impeller has a second blade (612) and between the blades (602; 602 '; 612) a central web (630) is arranged in the direction of the circumference of the impeller (600) whose height ( 631) is at least partially smaller than the height (632) of the blades. Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass wenigstens eine Teilschaufel (621, 622; 651, 652) eine in Bezug zur Drehrichtung nacheilende Rückseite (653; 654) aufweist, die sich über die Mitte (660) des Randes des Laufrades erstreckt.Vacuum pump according to claim 1 or 2, characterized in that at least one partial blade (621, 622; 651, 652) has a trailing rearward direction (653; 654) extending beyond the center (660) of the edge of the impeller , Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass wenigstens eine Schaufel (602; 602'; 612) an ihrer Rückseite (625, 626; 653, 654) eine Fase (616; 656) aufweist.Vacuum pump according to one of the preceding claims, characterized in that at least one blade (602; 602 '; 612) has a bevel (616; 656) on its rear side (625,626; 653,654). Vakuumpumpe nach einem der vorhergehenden Asprüche, dadurch gekennzeichnet, dass erste und zweite Teilschaufel (651, 652) in Umfangsrichtung versetzt zueinander angeordnet sind.Vacuum pump according to one of the preceding claims, characterized in that first and second partial blades (651, 652) are arranged offset from one another in the circumferential direction. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie zwischen der Seitenkanalpumpstufe (6) und dem Gaseinlass (2) und eine weitere Pumpstufe (5) umfasst, welche einen Rotor (500) mit einer Rotorschaufel (502) beinhaltet, welche an einer in Bezug zur Drehrichtung zurückliegenden Seite eine Fase (516) aufweist.Vacuum pump according to one of the preceding claims, characterized in that it comprises between the side-channel pumping stage (6) and the gas inlet (2) and a further pumping stage (5) which includes a rotor (500) with a rotor blade (502) mounted on one has a chamfer (516) with respect to the direction of rotation.
EP10004024.5A 2009-05-16 2010-04-16 Vacuum pump Not-in-force EP2251547B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009021620.0A DE102009021620B4 (en) 2009-05-16 2009-05-16 Vacuum pump

Publications (3)

Publication Number Publication Date
EP2251547A2 true EP2251547A2 (en) 2010-11-17
EP2251547A3 EP2251547A3 (en) 2014-07-09
EP2251547B1 EP2251547B1 (en) 2016-04-06

Family

ID=42154827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10004024.5A Not-in-force EP2251547B1 (en) 2009-05-16 2010-04-16 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2251547B1 (en)
JP (1) JP5680334B2 (en)
DE (1) DE102009021620B4 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2933497A3 (en) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Vacuum pump
EP2565464B1 (en) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Vacuum pump
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118661A1 (en) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Friction vacuum pump
DE102012003680A1 (en) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE102015113821B4 (en) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vacuum pump
EP3594498B1 (en) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh System with a recirculation device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (en) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2405890A1 (en) * 1974-02-07 1975-08-14 Siemens Ag SIDE CHANNEL RING COMPRESSOR
JPS61210294A (en) * 1985-03-13 1986-09-18 Nishimura Denki Kk Blower
JP2536571B2 (en) * 1987-12-25 1996-09-18 ダイキン工業株式会社 Eddy current type turbo machine
JPH0689758B2 (en) * 1988-06-28 1994-11-14 ダイキン工業株式会社 Vortex type turbomachine
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5527149A (en) * 1994-06-03 1996-06-18 Coltec Industries Inc. Extended range regenerative pump with modified impeller and/or housing
JPH10196586A (en) * 1997-01-06 1998-07-31 Hitachi Ltd Turbo vacuum pump
DE19955955A1 (en) * 1999-11-19 2001-06-13 Siemens Ag Side channel machine e.g. high power fan
JP3800128B2 (en) 2001-07-31 2006-07-26 株式会社デンソー Impeller and turbine fuel pump
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (en) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 Turbine type fuel pump
DE102005025132A1 (en) 2005-06-01 2006-12-07 Robert Bosch Gmbh delivery unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (en) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2565464B1 (en) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Vacuum pump
DE102011112689B4 (en) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh vacuum pump
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump
EP2933497A3 (en) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Vacuum pump

Also Published As

Publication number Publication date
EP2251547B1 (en) 2016-04-06
EP2251547A3 (en) 2014-07-09
DE102009021620B4 (en) 2021-07-29
JP5680334B2 (en) 2015-03-04
DE102009021620A1 (en) 2010-11-18
JP2010265894A (en) 2010-11-25

Similar Documents

Publication Publication Date Title
EP2251547B1 (en) Vacuum pump
DE3932228C2 (en)
DE3014425C2 (en) Side channel pump
DE69734028T2 (en) vacuum pump
DE3919529C2 (en) Vacuum pump
EP1948939B1 (en) Radial compressor rotor
DE10327574B4 (en) Impeller for a fuel pump
EP2295812B1 (en) Vacuum pump
DE2534528A1 (en) VACUUM PUMP
DE1428191A1 (en) Centrifugal blower
DE2531323A1 (en) ELECTRIC FAN
DE60035842T2 (en) vacuum pumps
EP1811184A1 (en) Impeller of a pump unit and corresponding pump unit
EP2253851B1 (en) Vacuum pump
EP0363503B1 (en) Pump stage for a high vacuum pump
DE102005049938B3 (en) Rotor for fluid flow machine e.g. pump, has wing profile unit including convex elevation on outer mantel surface, axial hollow space enclosed in interior, and opening between space and mantel surface in region of profile units
EP0752066A1 (en) Device for reducing noise in centrifugal pumps
EP3088743B1 (en) Side-channel vacuum pump stage with a stripper that is slanted on the suction side
DE3128372A1 (en) "PERIPHERAL CHANNEL PUMP"
EP2933497A2 (en) Vacuum pump
DE10008691B4 (en) Gas friction pump
DE3303460A1 (en) SELF-PRIMING SIDE CHANNEL PUMP
DE10048695A1 (en) Side channel pump for conveying fluid gas mixtures has pump channel running in a spiral coil round rotor
DE1728419A1 (en) Liquid ring compressor
DE102005040305B4 (en) Side channel machine

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/52 20060101ALI20140528BHEP

Ipc: F04D 19/04 20060101AFI20140528BHEP

Ipc: F04D 29/28 20060101ALI20140528BHEP

Ipc: F04D 23/00 20060101ALI20140528BHEP

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

17P Request for examination filed

Effective date: 20141216

RBV Designated contracting states (corrected)

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

17Q First examination report despatched

Effective date: 20150617

REG Reference to a national code

Ref country code: DE

Ref legal event code: R079

Ref document number: 502010011379

Country of ref document: DE

Free format text: PREVIOUS MAIN CLASS: F04D0019040000

Ipc: F04D0017160000

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/52 20060101ALI20151021BHEP

Ipc: F04D 29/28 20060101ALI20151021BHEP

Ipc: F04D 17/16 20060101AFI20151021BHEP

Ipc: F04D 23/00 20060101ALI20151021BHEP

Ipc: F04D 19/04 20060101ALI20151021BHEP

INTG Intention to grant announced

Effective date: 20151103

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 788146

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160415

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502010011379

Country of ref document: DE

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

Ref country code: NL

Ref legal event code: MP

Effective date: 20160406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160706

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160806

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160707

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160808

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502010011379

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160430

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

26N No opposition filed

Effective date: 20170110

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20170213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160606

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160416

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 788146

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20100416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160416

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160406

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20220321

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20220330

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20220210

Year of fee payment: 13

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502010011379

Country of ref document: DE

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20230416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230416

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20231103

Ref country code: CZ

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230416