EP3594498B1 - System with a recirculation device - Google Patents

System with a recirculation device Download PDF

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Publication number
EP3594498B1
EP3594498B1 EP19207550.5A EP19207550A EP3594498B1 EP 3594498 B1 EP3594498 B1 EP 3594498B1 EP 19207550 A EP19207550 A EP 19207550A EP 3594498 B1 EP3594498 B1 EP 3594498B1
Authority
EP
European Patent Office
Prior art keywords
side channel
accordance
pump
gas
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19207550.5A
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German (de)
French (fr)
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EP3594498A1 (en
Inventor
Sebastian Oberbeck
Jonas Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19207550.5A priority Critical patent/EP3594498B1/en
Publication of EP3594498A1 publication Critical patent/EP3594498A1/en
Priority to JP2020072213A priority patent/JP7261197B2/en
Priority to US16/923,191 priority patent/US11542935B2/en
Application granted granted Critical
Publication of EP3594498B1 publication Critical patent/EP3594498B1/en
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Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06Pumps having fluid drive
    • F04B43/073Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/10Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid
    • F04B9/109Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers
    • F04B9/111Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members
    • F04B9/115Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members reciprocating movement of the pumping members being obtained by two single-acting liquid motors, each acting in one direction
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/022Multi-stage pumps with concentric rows of vanes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/02Selection of particular materials
    • F04D29/023Selection of particular materials especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/04Shafts or bearings, or assemblies thereof
    • F04D29/046Bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/08Sealings
    • F04D29/083Sealings especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a system comprising a process device with a space and / or a line for receiving a gas and a recirculation device for the gas.
  • the DE 10 2017 212 861 A1 discloses an oil separation device with a drive device which is formed by a side channel pump.
  • the DE 691 13 616 T2 discloses a side channel pump.
  • the DE 25 59 667 A1 discloses a liquid ring seal with a pumpable geometry, the geometry being designed as a side channel pump.
  • the EP 3 176 527 A1 and the EP 2 045 358 A2 disclose systems with a process device and a recirculation device.
  • Gas recirculation is required in various technical areas. Usually, gas is withdrawn from a larger volume in which a process takes place, processed in a suitable manner and then fed back into the process. To overcome the pressure losses that occur in the gas ducts and any treatment that may be present, a pump is used that can provide the necessary overpressure and volume flow.
  • the properties of the gases or gas mixtures, the general pressure level, the gas volume and the gas temperature are some, but not all, of the parameters that need to be taken into account.
  • Diaphragm compressors or rotary vane compressors are usually found in such known recirculation devices, sometimes also twin-shaft compressors, such as roots, screw or claw compressors (the terms “compressor” and “pump” are used synonymously herein).
  • Diaphragm and rotary vane compressors are subject to friction and wear and therefore require regular maintenance.
  • Diaphragm compressors have a pulsating delivery due to discrete pump chamber volumes, poor scalability due to limited speed variability and discrete volumes, wear on bearings, diaphragms, crankshafts, connecting rods and valves as well as vibrations due to the oscillating movement of diaphragms and connecting rods.
  • Rotary vane compressors depending on their design, have oil or abrasion in the pump chamber, both of which can be disadvantageous for the processes. The limited scalability due to speed due to discrete volumes and friction in the system can also be disadvantageous.
  • the disadvantages set out above are also intended to be overcome.
  • the recirculation pump is a side channel pump.
  • the side channel pump is particularly effective with a simple and inexpensive design in terms of manufacture and operation.
  • the side channel technology is particularly advantageous due to its flow dynamic properties, the almost mechanically frictionless operation and its adaptability to various processes via speed, side channel and rotor blade geometry, number of stages and a large number of available material combinations.
  • the side channel pump works essentially without contact, thus enabling a long service life and is almost wear-free.
  • the side channel pump allows a needs-based adaptation and precise setting of the provided pressure and flow, e.g. by choosing a single or multi-stage design and / or by means of speed control.
  • a rotor blade shape and a side channel shape can be adapted to the gases to be conveyed. Appropriate resistant materials can be used for corrosive media.
  • the side channel pump has only one shaft.
  • a multi-stage side channel pump can also be produced with a single shaft, for example with a plurality of rotors which are arranged on one and the same shaft.
  • the side channel pump is therefore particularly simple and inexpensive to manufacture.
  • the recirculation device now allows a particularly wide range of applications with a simple structure and low manufacturing and operating costs.
  • the recirculation device can, for example, have a processing device for the gas.
  • the processing device can be designed, for example, to clean the gas, to separate out or enrich certain gas components, to add something to the gas or to make the gas usable for a process in some other way or to improve it.
  • the gas can only be partially fed back into the process device.
  • all of the withdrawn gas can be returned or only a part, in particular a certain component.
  • the gas can contain or be, for example, hydrogen, temperature control medium, in particular coolant, and / or CO 2.
  • the gas can contain or be air, helium and / or neon.
  • the gas is present, in particular, at least during operation in the process device, in particular in a room or a line.
  • the side channel pump can for example comprise at least one rotor with a plurality of rotor blades. It can advantageously be provided that the rotor blades are each at least one of straight, arrow-shaped, curved, divided or connected in the direction of movement, or inclined forwards or backwards in the direction of movement. Combinations of these features per rotor blade, per rotor and / or per pump stage are also advantageous.
  • An intermediate space between two rotor blades that are adjacent in the direction of movement can, for example, be flat or have a pointed roof-shaped structure.
  • a flat structure is particularly easy to manufacture.
  • a pointed roof-shaped structure supports a vortex formation of the gas to be conveyed in the Side channel and thus the pumping effect.
  • a ridge edge or a ridge area can for example run essentially parallel to the direction of movement of the blades and / or connect the blades or run at an angle, in particular sloping from one blade to a base of an adjacent blade.
  • the pointed roof-shaped structure can have flat and / or curved, in particular concave, side surfaces.
  • At least one side channel of the side channel pump has an at least essentially circular, oval, elliptical, rectangular or egg-shaped cross-sectional geometry.
  • Other cross-sectional geometries are also possible, for example rounded and / or trapezoidal cross-sections.
  • the cross-sectional geometry of a side channel can be symmetrical or asymmetrical, for example.
  • a side channel of the side channel pump tapers in its cross section in the direction of flow, in particular from an inlet of the side channel to an outlet of the side channel. In this way, particularly good compression can be achieved in a simple manner.
  • a side channel can, for example, be interrupted by a breaker between the outlet and inlet of the side channel or the outlet and inlet can be separated from one another by a breaker.
  • the side channel pump can preferably have one or more stages, in particular two, three, four or five stages.
  • the steps can be arranged offset axially and / or radially, for example.
  • the performance data of the side channel pump, in particular the discharge pressure and gas flow, can thus be adapted particularly easily to a particular application.
  • the side channel pump can, for example, have an, in particular hermetic, seal, in particular with respect to the environment.
  • the parts of the pump that are movable to generate the pumping action that is to say in particular the shaft, rotor, motor rotor and / or movable bearing parts, can be arranged within the seal, that is to say behind the seal in particular from the perspective of the surroundings.
  • the side channel pump can thus be designed in a simple manner for use with corrosive media.
  • the moving parts can for example be encapsulated for the purpose of sealing.
  • the side channel pump has a motor with a rotor, the rotor being arranged in a space that is, in particular hermetically, sealed off from the environment.
  • the rotor can in particular be arranged in a tube.
  • the motor can be a canned motor.
  • the motor can be a permanent magnet motor, in particular with a permanent magnet rotor.
  • the speed of the side channel pump can advantageously be controlled via a frequency converter.
  • the side channel pump can thus be adapted particularly easily and precisely to a particular application and also to certain operating states during a process.
  • a rotor or a rotor shaft of the side channel pump is supported by at least one grease-lubricated bearing.
  • This enables a low-friction bearing run without an expensive, additional lubrication system.
  • the bearing can be designed to be so low-maintenance and there is essentially no need to exchange operating media, as would be the case with oil lubrication under certain circumstances.
  • the pump can have a seal, in particular a hermetic one.
  • all bearings for the rotor shaft are preferably arranged in the region of the recirculated gas, that is to say behind the seal from the perspective of the surrounding region.
  • grease-lubricated bearings enable the pump to be sealed as seldom as possible, at best not at all over its service life. In this way, the maintenance effort can be considerably reduced, since the restoration of a seal, in particular a hermetic one, is usually very complex and requires special expertise.
  • certain gases should not come into contact with the environment for various reasons. This is made much easier by a low-maintenance pump.
  • the rotor, rotor shaft, motor rotor and / or bearings in the area of the recirculated gas.
  • the system according to the invention comprises a process device with a space and / or a line for receiving a gas and a recirculation device through which the gas can be removed from the process device and returned to the process device.
  • the process device is generally designed to carry out a process, the gas being relevant to the process in some way.
  • the gas does not have to be part of the process.
  • the gas can also only act catalytically or in some other way, e.g. be a temperature control medium.
  • the gas can be an essentially pure gas or a gas mixture, such as air. In principle, the gas can also contain particles and / or droplets, for example.
  • the return of the gas can be carried out, for example, for the purpose of processing, for example cleaning, temperature control, separation and / or enrichment.
  • the recirculation device can have a correspondingly designed processing device.
  • the return can, however, for example can also be returned essentially without influencing or changing the gas.
  • the gas can be withdrawn, for example, at an outlet of the process device, in particular with only part of the gas flow being returned at the outlet, and / or the gas can, for example, be returned to an inlet of the process device, in particular with a further gas flow entering the inlet.
  • the system can be a closed system and / or a closed gas circuit can be provided.
  • the advantages of the invention are particularly evident in a process device that includes a laser.
  • the laser can preferably be a gas laser, in particular an excimer or CO 2 laser.
  • a process device that comprises a temperature control device, in particular an air conditioning and / or cooling device, is also advantageous.
  • a gas circulation can be brought about by means of the recirculation device.
  • the temperature control effect of the device can be improved, the advantages according to the invention being particularly well utilized.
  • the process device can, for example, comprise a fuel cell, which can be used, for example, to generate electricity, for example to drive a vehicle engine.
  • the recirculation device can advantageously be arranged to recirculate excess process gas from the fuel cell, in particular hydrogen.
  • the process device comprises a combustion device, in particular an internal combustion engine, for example a vehicle drive.
  • the recirculation device can for example be arranged to recirculate an exhaust gas from the combustion device, in particular to an inlet of the combustion device.
  • the process device can therefore advantageously be part of a vehicle drive.
  • the process device can comprise, for example, any type of reactor, e.g. fuel cell or combustion device, with at least partially gaseous output.
  • the invention also relates to the use of a side channel pump as a recirculation pump of a recirculation device for a gas of a process device, in particular a recirculation device according to the invention as disclosed herein, and in particular a recirculation device that is part of a system according to the invention, as disclosed herein.
  • Fig. 1 shows a side channel pump 20 for use as a recirculation pump in a recirculation device according to the invention for a gas of a process device.
  • the pump 20 In the upper area, the pump 20 is exposed so that a rotor 22 is visible, which rotates to provide a pumping effect.
  • Fig. 2 it can be seen that the pump 20 has only one rotor 22, that is to say is designed in one stage.
  • the rotor 22 rotates with a plurality of rotor blades 24 distributed over its circumference in a side channel 26.
  • the side channel 26 is an annular channel whose cross section is somewhat larger than a respective rotor blade. In the present embodiment, the side channel 26 is essentially rectangular in cross section, but has rounded corners.
  • the rotor 22 is arranged on a shaft 28 of the side channel pump 20.
  • the shaft 28 and thus the rotor 22 are rotationally driven by an electric motor which comprises a stator 30 and a rotor 32.
  • the stator 30 has energized windings, whereas the rotor 32 in this embodiment has a plurality of permanent magnets.
  • the runner 32 is fixed to the Shaft 28 connected. The shaft 28 and thus the rotor 22 are thus driven directly by the electric motor 30, 32.
  • the rotor 22 is designed with curved rotor blades 24 inclined slightly backwards in the direction of movement and with a flat space between the rotor blades 24.
  • the Figs. 3 and 4 show a two-stage side channel pump 20 which has two rotors 22.1 and 22.2 which are mounted on a common shaft 28.
  • the rotors 22.1 and 22.2 rotate in respective side channels 26.1 and 26.2, which here also have an essentially rectangular cross section.
  • a connection 34 of the side channels 26.1 and 26.2 is visible.
  • the rotors 22.1 and 22.2 each have arrow-shaped blades 24 which are inclined slightly backwards in the direction of movement. In the spaces between the blades 24, the rotor 22 is each flat.
  • the direction of movement here preferably runs in the direction of the tips of the respective arrow-shaped blades 24. In principle, however, reverse operation is also possible, for example.
  • the shaft 28 which carries the rotors 22 is driven by an electric motor.
  • the electric motor has a stator 30 with windings and a permanent magnetic rotor 32 which is seated on the shaft 28.
  • the rotor 32 and the shaft 28 are arranged within a tube 36 which is part of a hermetic seal for the pump 20.
  • a tube 36 is also referred to as a can, since it extends through the gap between the rotor 32 and the stator 30 of the electric motor.
  • the electric motor is referred to as a canned motor.
  • the can 36 can be made of fiberglass composite, for example.
  • the rotor 32 and the shaft 28 are therefore off View of the surroundings behind the hermetic seal and in an area which is essentially penetrated by the gas to be conveyed by the pump and has a corresponding pressure level.
  • bearings 38 behind the seal or in the area of the gas to be conveyed are also two bearings 38 behind the seal or in the area of the gas to be conveyed. These are preferably grease-lubricated and / or permanently lubricated.
  • the functional elements arranged in the gas area or behind the seal are therefore essentially capable of functioning independently. In particular, they do not have to be supplied via a line, for example with electricity or equipment.
  • the rotors 22 also run without contact in the housing gaps 40 provided for them.
  • the functional parts in the gas area are therefore extremely wear-resistant and require little maintenance.
  • the hermetic seal of the pump 20 therefore only has to be broken very rarely during dismantling in order to service the pump.
  • FIG Fig. 5 A third embodiment of a side channel pump 20 is shown in FIG Fig. 5 shown.
  • the side channel pump 20 is designed in five stages, that is to say five rotors 22 are provided which rotate in respective side channels 26.
  • the rotors 22 are in turn arranged on a common shaft 28.
  • An in Fig. 5 The indicated area A of the side channel pump 20 is shown in FIG Fig. 6 shown enlarged and rotated by 90 degrees.
  • the side channels 26.1 and 26.2 of the first two pump stages are essentially rectangular, whereas the side channels 26.3, 26.4 and 26.5 of the other pump stages have an essentially oval or egg-shaped cross section.
  • the rotors 22.1 and 22.2 each have curved rotor blades.
  • the rotors 22.3, 22.4 and 22.5 are arrow-shaped.
  • the rotors 22.3, 22.4 and 22.5 also have a pointed roof-shaped structure 42 in the respective intermediate spaces between adjacent rotor blades 24, which supports the pumping effect by promoting a vortex formation of the gas flow in the side channel 26.
  • FIG. 7 various advantageous embodiments of rotors 22 are shown.
  • the rotor 22 of the Fig. 7 has curved rotor blades 24 with shallow spaces.
  • the rotor 22 of the Fig. 8 has planar rotor blades 24 that extend radially. Roof-like structures 42 are provided between the rotor blades 24, a respective ridge edge 44 extending parallel to the direction of movement of the rotor blades 24. The ridge edge 44 connects radially outer ends of the blades 24. These are thus connected rotor blades 24.
  • the surfaces 46 tapering towards the ridge edge 44 are concave.
  • the rotors 22 of the Figures 9 to 11 are all arrow-shaped and differ essentially in size and number of blades or relative blade spacing. They also have a roof-like structure 42 with a respective ridge edge 44 in the space between the blades.
  • the ridge edges 44 of the rotors 22 are the Figures 9 and 10 itself is curved, whereas the ridge edge 44 in Fig. 11 is essentially straight. All ridge edges 44 of the Figures 9 to 11 extend from a respective blade tip to a bottom of an adjacent blade. The rotor blades 24 are therefore not connected.
  • the blades 24 of the rotor 22 of in Fig. 12 are ultimately curved, and they differ in particular in terms of number and size from the embodiment of FIG Fig. 7 differentiate.
  • a system with a process device 50 and a recirculation device 52 is shown, the recirculation system 52 being a Has side channel pump 20 trained recirculation pump.
  • the process device 50 has an inlet 54 and an outlet 56.
  • the inlet 54 is connected to the recirculation device 52 in such a way that a returned gas is fed back into the inlet 54.
  • a further mass flow is also fed to the inlet 54 via a further line.
  • the outlet 56 is connected both to the recirculation device 52 or the side channel pump 20, as well as to a further line which takes up a partial mass flow of the outlet 56.
  • a part of a mass flow that passes through the process device is therefore recirculated.
  • the process device 50 can be a fuel cell, for example.
  • the mass flow can contain hydrogen, for example.
  • Excess hydrogen, which has not been consumed by the fuel cell, is returned to the inlet 54 via the recirculation device 52 in order to be consumed after all.
  • a separator can be provided downstream of the outlet 56, which separator supplies the side channel pump 20 with as large a portion of the excess hydrogen as possible.
  • the process device 50 of the system of Fig. 13 can for example also be a combustion device such as an internal combustion engine.
  • the recirculation device 52 forms an exhaust gas recirculation in that it takes exhaust gas from the mass flow of the outlet 56 and returns it to the supply air flow at the inlet 54.
  • Fig. 14 shows a closed system with regard to the gas flow with process device 50 and recirculation device 52 with side channel pump 20.
  • the gas in process device 50 can be circulated via recirculation device 52 and its side channel pump 20, for example to avoid phase formation of a gas mixture in the process device.
  • FIG Fig. 15 Another system that is closed with regard to the gas flow is shown in FIG Fig. 15 .
  • This system also comprises a process device 50, a recirculation device 52 and a side channel pump 20.
  • the recirculation device 52 of FIG Fig. 15 also comprises a processing device 58 for processing the returned gas.
  • the processing device 58 can be designed for cleaning and / or temperature control of the gas, for example.
  • a processing device can, for example, be part of the recirculation device of Fig. 13 being.
  • the side channels or the side channel pump stages are arranged axially offset. It goes without saying that the side channel pump of the recirculation device according to the invention can also have, for example, radially offset side channel pump stages. A combination of axially and radially offset steps is also possible. Finally, the side channel pump can also be advantageously connected to pump stages which have different pump principles.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Die Erfindung betrifft ein System umfassend eine Prozesseinrichtung mit einem Raum und/oder einer Leitung zur Aufnahme eines Gases und eine Rezirkulationseinrichtung für das Gas.The invention relates to a system comprising a process device with a space and / or a line for receiving a gas and a recirculation device for the gas.

Die DE 10 2017 212 861 A1 offenbart eine Ölabscheidevorrichtung mit einer Antriebseinrichtung, die durch eine Seitenkanalpumpe gebildet ist. Die DE 691 13 616 T2 offenbart eine Seitenkanalpumpe. Die DE 25 59 667 A1 offenbart eine Flüssigkeitsringdichtung mit einer pumpfähigen Geometrie, wobei die Geometrie als Seitenkanalpumpe ausgebildet ist. Die EP 3 176 527 A1 und die EP 2 045 358 A2 offenbaren Systeme mit einer Prozesseinrichtung und einer Rezirkulationseinrichtung.the DE 10 2017 212 861 A1 discloses an oil separation device with a drive device which is formed by a side channel pump. the DE 691 13 616 T2 discloses a side channel pump. the DE 25 59 667 A1 discloses a liquid ring seal with a pumpable geometry, the geometry being designed as a side channel pump. the EP 3 176 527 A1 and the EP 2 045 358 A2 disclose systems with a process device and a recirculation device.

Gasrezirkulationen werden in verschiedenen technischen Bereichen benötigt. Üblicherweise wird aus einem größeren Volumen, in dem ein Prozess stattfindet, Gas entnommen, in geeigneter Weise aufbereitet und dann dem Prozess wieder zugeführt. Zur Überwindung der in den Gasführungen und einer gegebenenfalls vorhandenen Aufbereitung entstehenden Druckverluste wird eine Pumpe eingesetzt, die den nötigen Überdruck und Volumenstrom bereitstellen kann. Dabei sind die Eigenschaften der Gase oder Gasgemische, das generelle Druckniveau, das Gasvolumen und die Gastemperatur einige, aber nicht alle Parameter, die es zu berücksichtigen gilt.Gas recirculation is required in various technical areas. Usually, gas is withdrawn from a larger volume in which a process takes place, processed in a suitable manner and then fed back into the process. To overcome the pressure losses that occur in the gas ducts and any treatment that may be present, a pump is used that can provide the necessary overpressure and volume flow. The properties of the gases or gas mixtures, the general pressure level, the gas volume and the gas temperature are some, but not all, of the parameters that need to be taken into account.

Üblicherweise finden sich in solchen bekannten Rezirkulationseinrichtungen Membrankompressoren oder Drehschieberkompressoren, manchmal auch zweiwellige Kompressoren, wie Roots-, Schrauben- oder Klauenkompressoren (die Begriffe "Kompressor" und "Pumpe" werden hierin synonym verwendet).Diaphragm compressors or rotary vane compressors are usually found in such known recirculation devices, sometimes also twin-shaft compressors, such as roots, screw or claw compressors (the terms "compressor" and "pump" are used synonymously herein).

Membran- und Drehschieberkompressoren sind reibungs- und verschleißbehaftet und bedürfen deshalb regelmäßiger Wartung. Membrankompressoren weisen eine pulsierende Förderung aufgrund diskreter Schöpfraumvolumina, schlechte Skalierbarkeit durch begrenzte Drehzahlvariabilität und diskrete Volumina, Verschleiß an Lagern, Membranen, Kurbelwellen, Pleueln und Ventilen sowie Vibrationen durch oszillierende Bewegung von Membranen und Pleueln auf. Drehschieberkompressoren weisen je nach Bauart Öl oder Abrieb im Schöpfraum auf, wobei beides nachteilig für die Prozesse sein kann. Die eingeschränkte Skalierbarkeit durch Drehzahl wegen diskreter Volumina und Reibung im System kann ebenfalls nachteilig sein.Diaphragm and rotary vane compressors are subject to friction and wear and therefore require regular maintenance. Diaphragm compressors have a pulsating delivery due to discrete pump chamber volumes, poor scalability due to limited speed variability and discrete volumes, wear on bearings, diaphragms, crankshafts, connecting rods and valves as well as vibrations due to the oscillating movement of diaphragms and connecting rods. Rotary vane compressors, depending on their design, have oil or abrasion in the pump chamber, both of which can be disadvantageous for the processes. The limited scalability due to speed due to discrete volumes and friction in the system can also be disadvantageous.

Roots-, Schrauben-, bzw. Klauenkompressoren sind als berührungslose Pumpen weniger verschleißbehaftet, allerdings sind die Herstellkosten dieser zweiwelligen Systeme mit Synchrongetrieben erheblich höher. Rootskompressoren weisen allgemein eine relativ große Baugröße und hohe Kosten aufgrund des zweiwelligen Aufbaus mit erforderlicher Synchronisation der Wellen auf. Das Kompressionsverhältnis ist bei relativ großem Schöpfraum relativ gering. Dadurch sind Rootskompressoren über Drehzahlvariation nur beschränkt skalierbar. Der Wirkungsgrad ist außerdem wegen erheblicher Spaltverluste relativ gering. Außerdem müssten die Wellendurchführungen aufwendig abgedichtet werden.Roots, screw and claw compressors, as non-contact pumps, are less subject to wear, but the manufacturing costs of these twin-shaft systems with synchronous gears are considerably higher. Roots compressors generally have a relatively large size and high costs due to the twin-shaft construction with the required synchronization of the shafts. The compression ratio is relatively low with a relatively large pump space. This means that roots compressors can only be scaled to a limited extent via speed variation. The efficiency is also relatively low because of considerable gap losses. In addition, the shaft bushings would have to be sealed in a complex manner.

Im Stand der Technik sind also eine Vielzahl von Pumpen zur Gasrezirkulation bekannt, die jeweils spezifische Vorteile, aber auch, wie dargelegt, zahlreiche Nachteile aufweisen.In the prior art, a large number of pumps for gas recirculation are known, each of which has specific advantages, but also, as explained, numerous disadvantages.

Es ist eine Aufgabe der Erfindung, in einem System der eingangs genannten Art eine Gasrezirkulationseinrichtung bereitzustellen, die bei guter Wirksamkeit einfach und kostengünstig ausgeführt ist. Insbesondere sollen außerdem die vorstehend dargelegten Nachteile überwunden werden.It is an object of the invention to provide a gas recirculation device in a system of the type mentioned at the outset, which with good effectiveness is carried out simply and inexpensively. In particular, the disadvantages set out above are also intended to be overcome.

Diese Aufgabe wird durch ein System nach Anspruch 1 gelöst, und insbesondere dadurch, dass die Rezirkulationspumpe eine Seitenkanalpumpe ist. Die Seitenkanalpumpe weist eine besonders gute Wirksamkeit bei einfacher und kostengünstiger Ausführung in Herstellung und Betrieb auf.This object is achieved by a system according to claim 1, and in particular in that the recirculation pump is a side channel pump. The side channel pump is particularly effective with a simple and inexpensive design in terms of manufacture and operation.

Die Seitenkanaltechnik ist insbesondere aufgrund ihrer strömungsdynamischen Eigenschaften, des nahezu mechanisch reibungsfreien Betriebs und ihrer Anpassbarkeit an verschiedene Prozesse über Drehzahl, Seitenkanal- und Rotorschaufelgeometrie, Anzahl der Stufen und einer Vielzahl zur Verfügung stehender Materialkombinationen vorteilhaft. Die Seitenkanalpumpe arbeitet im Wesentlichen berührungslos, ermöglicht somit lange Lebensdauern und ist nahezu verschleißfrei. Die Seitenkanalpumpe erlaubt eine bedarfsgerechte Anpassung und präzise Einstellung des bereitgestellten Drucks und des Durchflusses, z.B. durch Wahl einer ein- oder mehrstufigen Ausführung und/oder durch eine Drehzahlregelung. Des Weiteren können eine Rotorschaufel- und eine Seitenkanalform an die zu fördernden Gase angepasst werden. Für korrosive Medien können entsprechend beständige Materialien eingesetzt werden.The side channel technology is particularly advantageous due to its flow dynamic properties, the almost mechanically frictionless operation and its adaptability to various processes via speed, side channel and rotor blade geometry, number of stages and a large number of available material combinations. The side channel pump works essentially without contact, thus enabling a long service life and is almost wear-free. The side channel pump allows a needs-based adaptation and precise setting of the provided pressure and flow, e.g. by choosing a single or multi-stage design and / or by means of speed control. Furthermore, a rotor blade shape and a side channel shape can be adapted to the gases to be conveyed. Appropriate resistant materials can be used for corrosive media.

Die Seitenkanalpumpe weist insbesondere lediglich eine Welle auf. Auch eine mehrstufige Seitenkanalpumpe lässt sich mit einer einzigen Welle herstellen, beispielsweise mit einer Mehrzahl an Rotoren, die auf ein und derselben Welle angeordnet sind. Die Seitenkanalpumpe ist somit besonders einfach und kostengünstig herzustellen.In particular, the side channel pump has only one shaft. A multi-stage side channel pump can also be produced with a single shaft, for example with a plurality of rotors which are arranged on one and the same shaft. The side channel pump is therefore particularly simple and inexpensive to manufacture.

Bisher wurde anwendungsabhängig aus einer Vielzahl von Pumpen ausgewählt, sodass die spezifischen Vorteile ausgenutzt wurden. Die erfindungsgemäße Rezirkulationseinrichtung erlaubt nun eine besonders gute Anwendungsbreite bei einfachem Aufbau und geringen Herstellungs- und Betriebskosten.So far, depending on the application, a large number of pumps have been selected so that the specific advantages have been exploited. The inventive The recirculation device now allows a particularly wide range of applications with a simple structure and low manufacturing and operating costs.

Die Rezirkulationseinrichtung kann beispielsweise eine Aufbereitungseinrichtung für das Gas aufweisen. Die Aufbereitungseinrichtung kann beispielsweise dazu ausgebildet sein, das Gas zu reinigen, bestimmte Gasanteile abzuscheiden oder anzureichern, dem Gas etwas hinzuzufügen oder das Gas in sonstiger Weise für einen Prozess nutzbar zu machen oder zu verbessern.The recirculation device can, for example, have a processing device for the gas. The processing device can be designed, for example, to clean the gas, to separate out or enrich certain gas components, to add something to the gas or to make the gas usable for a process in some other way or to improve it.

Generell kann das Gas auch nur teilweise zurück in die Prozesseinrichtung geführt werden. Es kann beispielsweise das gesamte entnommene Gas zurückgeführt werden oder nur ein Teil, insbesondere ein bestimmter Bestandteil.In general, the gas can only be partially fed back into the process device. For example, all of the withdrawn gas can be returned or only a part, in particular a certain component.

Das Gas kann beispielsweise Wasserstoff, Temperierungsmittel, insbesondere Kühlmittel, und/oder CO2 enthalten oder sein. Weiter beispielsweise kann das Gas Luft, Helium und/oder Neon enthalten oder sein. Generell ist das Gas insbesondere wenigstens im Betrieb in der Prozesseinrichtung, insbesondere einem Raum oder einer Leitung, vorhanden.The gas can contain or be, for example, hydrogen, temperature control medium, in particular coolant, and / or CO 2. Furthermore, for example, the gas can contain or be air, helium and / or neon. In general, the gas is present, in particular, at least during operation in the process device, in particular in a room or a line.

Die Seitenkanalpumpe kann beispielsweise wenigstens einen Rotor mit einer Mehrzahl an Rotorschaufeln umfassen. Vorteilhafterweise kann es vorgesehen sein, dass die Rotorschaufeln jeweils wenigstens eines von gerade, pfeilförmig, gekrümmt, in Bewegungsrichtung geteilt oder verbunden, oder in Bewegungsrichtung nach vorne oder nach hinten geneigt sind. Auch Kombinationen dieser Merkmale je Rotorschaufel, je Rotor und/oder je Pumpstufe sind vorteilhaft.The side channel pump can for example comprise at least one rotor with a plurality of rotor blades. It can advantageously be provided that the rotor blades are each at least one of straight, arrow-shaped, curved, divided or connected in the direction of movement, or inclined forwards or backwards in the direction of movement. Combinations of these features per rotor blade, per rotor and / or per pump stage are also advantageous.

Ein Zwischenraum zwischen zwei in Bewegungsrichtung benachbarten Rotorschaufeln kann beispielsweise flach sein oder eine spitzdachförmige Struktur aufweisen. Eine flache Struktur ist besonders einfach herzustellen. Eine spitzdachförmige Struktur unterstützt eine Vortexbildung des zu fördernden Gases im Seitenkanal und damit die Pumpwirkung. Dabei kann eine Firstkante oder ein Firstbereich beispielsweise im Wesentlichen parallel zur Bewegungsrichtung der Schaufeln verlaufen und/oder die Schaufeln verbinden oder schräg verlaufen, insbesondere von einer Schaufel zu einem Grund einer benachbarten Schaufel abfallen. Die spitzdachförmige Struktur kann ebene und/oder gekrümmte, insbesondere konkave, Seitenflächen aufweisen.An intermediate space between two rotor blades that are adjacent in the direction of movement can, for example, be flat or have a pointed roof-shaped structure. A flat structure is particularly easy to manufacture. A pointed roof-shaped structure supports a vortex formation of the gas to be conveyed in the Side channel and thus the pumping effect. In this case, a ridge edge or a ridge area can for example run essentially parallel to the direction of movement of the blades and / or connect the blades or run at an angle, in particular sloping from one blade to a base of an adjacent blade. The pointed roof-shaped structure can have flat and / or curved, in particular concave, side surfaces.

Es kann zum Beispiel vorgesehen sein, dass wenigstens ein Seitenkanal der Seitenkanalpumpe eine jeweils zumindest im Wesentlichen kreisförmige, ovale, elliptische, rechteckige oder eiförmige Querschnittsgeometrie aufweist. Es sind auch weitere Querschnittsgeometrien möglich, etwa abgerundete und/oder trapezförmige Querschnitte. Generell kann die Querschnittsgeometrie eines Seitenkanals z.B. symmetrisch oder aber auch unsymmetrisch sein.It can be provided, for example, that at least one side channel of the side channel pump has an at least essentially circular, oval, elliptical, rectangular or egg-shaped cross-sectional geometry. Other cross-sectional geometries are also possible, for example rounded and / or trapezoidal cross-sections. In general, the cross-sectional geometry of a side channel can be symmetrical or asymmetrical, for example.

Gemäß einer Ausführungsform verjüngt sich ein Seitenkanal der Seitenkanalpumpe in Strömungsrichtung in seinem Querschnitt, insbesondere von einem Einlass des Seitenkanals bis zu einem Auslass des Seitenkanals. Hierdurch kann auf einfache Weise eine besonders gute Kompression erreicht werden.According to one embodiment, a side channel of the side channel pump tapers in its cross section in the direction of flow, in particular from an inlet of the side channel to an outlet of the side channel. In this way, particularly good compression can be achieved in a simple manner.

Generell kann ein Seitenkanal beispielsweise zwischen Auslass und Einlass des Seitenkanals durch einen Unterbrecher unterbrochen sein bzw. Auslass und Einlass können durch einen Unterbrecher voneinander getrennt sein.In general, a side channel can, for example, be interrupted by a breaker between the outlet and inlet of the side channel or the outlet and inlet can be separated from one another by a breaker.

Die Seitenkanalpumpe kann bevorzugt ein- oder mehrstufig ausgebildet sein, insbesondere zwei-, drei-, vier- oder fünfstufig. Die Stufen können beispielsweise axial und/oder radial versetz angeordnet sein. Die Leistungsdaten der Seitenkanalpumpe, insbesondere Ausstoßdruck und Gasdurchfluss, können so besonders einfach an eine jeweilige Anwendung angepasst werden.The side channel pump can preferably have one or more stages, in particular two, three, four or five stages. The steps can be arranged offset axially and / or radially, for example. The performance data of the side channel pump, in particular the discharge pressure and gas flow, can thus be adapted particularly easily to a particular application.

Die Seitenkanalpumpe kann beispielsweise eine, insbesondere hermetische, Abdichtung, insbesondere gegenüber der Umgebung, aufweisen. Dabei können insbesondere die zur Erzeugung der Pumpwirkung beweglichen Teile der Pumpe, also insbesondere Welle, Rotor, Motorläufer und/oder bewegliche Lagerteile, innerhalb der Abdichtung angeordnet sein, also insbesondere aus Umgebungssicht hinter der Abdichtung. Die Seitenkanalpumpe kann somit auf einfache Weise für den Einsatz mit korrosiven Medien ausgebildet werden. Die beweglichen Teile können zwecks Abdichtung beispielsweise eingekapselt sein.The side channel pump can, for example, have an, in particular hermetic, seal, in particular with respect to the environment. In particular, the parts of the pump that are movable to generate the pumping action, that is to say in particular the shaft, rotor, motor rotor and / or movable bearing parts, can be arranged within the seal, that is to say behind the seal in particular from the perspective of the surroundings. The side channel pump can thus be designed in a simple manner for use with corrosive media. The moving parts can for example be encapsulated for the purpose of sealing.

Gemäß einer Weiterbildung weist die Seitenkanalpumpe einen Motor mit einem Läufer auf, wobei der Läufer in einem, insbesondere hermetisch, gegenüber der Umgebung abgedichteten Raum angeordnet ist. Der Läufer kann dazu insbesondere in einem Rohr angeordnet sein. Beispielsweise kann der Motor ein Spaltrohrmotor sein.According to a further development, the side channel pump has a motor with a rotor, the rotor being arranged in a space that is, in particular hermetically, sealed off from the environment. For this purpose, the rotor can in particular be arranged in a tube. For example, the motor can be a canned motor.

Generell vorteilhaft kann es sich bei dem Motor um einen Permanentmagnetmotor handeln, insbesondere mit einem Permanentmagnetläufer.Generally advantageously, the motor can be a permanent magnet motor, in particular with a permanent magnet rotor.

Die Drehzahl der Seitenkanalpumpe kann vorteilhafterweise über einen Frequenzumrichter steuerbar sein. Die Seitenkanalpumpe kann so besonders einfach und präzise an eine jeweilige Anwendung und auch während eines Prozesses an bestimmte Betriebszustände angepasst werden.The speed of the side channel pump can advantageously be controlled via a frequency converter. The side channel pump can thus be adapted particularly easily and precisely to a particular application and also to certain operating states during a process.

Gemäß einer Ausführungsform ist vorgesehen, dass ein Rotor oder eine Rotorwelle der Seitenkanalpumpe durch wenigstens ein fettgeschmiertes Lager gelagert ist. Dies ermöglicht einen reibungsarmen Lagerlauf ohne ein aufwendiges, zusätzliches Schmierungssystem. Außerdem lässt sich die Lagerung so wartungsarm ausführen und es ist im Wesentlichen kein Betriebsmittelaustausch nötig, wie es bei einer Ölschmierung unter Umständen der Fall wäre.According to one embodiment it is provided that a rotor or a rotor shaft of the side channel pump is supported by at least one grease-lubricated bearing. This enables a low-friction bearing run without an expensive, additional lubrication system. In addition, the bearing can be designed to be so low-maintenance and there is essentially no need to exchange operating media, as would be the case with oil lubrication under certain circumstances.

Generell kann die Pumpe eine, insbesondere hermetische, Abdichtung aufweisen. Bevorzugt sind dabei alle Lager für die Rotorwelle im Bereich des rezirkulierten Gases angeordnet, also aus Sicht des Umgebungsbereichs hinter der Abdichtung. Insbesondere fettgeschmierte Lager ermöglichen hierbei, dass die Abdichtung der Pumpe möglichst selten, bestenfalls über die Lebensdauer gar nicht aufgehoben werden muss. Hierdurch kann der Wartungsaufwand erheblich verringert werden, da die Wiederherstellung einer, insbesondere hermetischen, Abdichtung meist sehr aufwendig ist und besondere Sachkenntnis erfordert. Zudem sollten bestimmte Gase aus verschiedenen Gründen nicht mit der Umgebung in Kontakt kommen. Dies wird durch eine wartungsarme Pumpe deutlich erleichtert. Generell bevorzugt sind Rotor, Rotorwelle, Motorläufer und/oder Lager im Bereich des rezirkulierten Gases angeordnet.In general, the pump can have a seal, in particular a hermetic one. In this case, all bearings for the rotor shaft are preferably arranged in the region of the recirculated gas, that is to say behind the seal from the perspective of the surrounding region. In particular, grease-lubricated bearings enable the pump to be sealed as seldom as possible, at best not at all over its service life. In this way, the maintenance effort can be considerably reduced, since the restoration of a seal, in particular a hermetic one, is usually very complex and requires special expertise. In addition, certain gases should not come into contact with the environment for various reasons. This is made much easier by a low-maintenance pump. Generally preferred are the rotor, rotor shaft, motor rotor and / or bearings in the area of the recirculated gas.

Das erfindungsgemäße System umfasst eine Prozesseinrichtung mit einem Raum und/oder einer Leitung zur Aufnahme eines Gases und eine Rezirkulationseinrichtung, durch die das Gas aus der Prozesseinrichtung entnehmbar und in die Prozesseinrichtung rückführbar ist.The system according to the invention comprises a process device with a space and / or a line for receiving a gas and a recirculation device through which the gas can be removed from the process device and returned to the process device.

Die Prozesseinrichtung ist generell zur Durchführung eines Prozesses ausgebildet, wobei das Gas in irgendeiner Weise für den Prozess relevant ist. Generell muss das Gas nicht Gegenstand des Prozesses sein. Das Gas kann auch lediglich katalytisch oder anderweitig wirken, z.B. ein Temperierungsmedium sein. Bei dem Gas kann es sich um ein im Wesentlichen reines Gas handeln oder auch um ein Gasgemisch, wie etwa Luft. Grundsätzlich kann das Gas beispielsweise auch Partikel und/oder Tröpfchen enthalten.The process device is generally designed to carry out a process, the gas being relevant to the process in some way. In general, the gas does not have to be part of the process. The gas can also only act catalytically or in some other way, e.g. be a temperature control medium. The gas can be an essentially pure gas or a gas mixture, such as air. In principle, the gas can also contain particles and / or droplets, for example.

Die Rückführung des Gases kann beispielsweise zwecks Aufbereitung, z.B. Reinigung, Temperierung, Abscheidung und/oder Anreicherung durchgeführt werden. Insbesondere kann die Rezirkulationseinrichtung eine entsprechend ausgebildete Aufbereitungseinrichtung aufweisen. Die Rückführung kann aber beispielsweise auch im Wesentlichen ohne Beeinflussung oder Veränderung des Gases zurückgeführt werden. Generell kann das Gas beispielsweise an einem Auslass der Prozesseinrichtung entnommen werden, insbesondere wobei nur ein Teil des Gasstromes am Auslass zurückgeführt wird, und/oder das Gas kann beispielsweise zu einem Einlass der Prozesseinrichtung zurückgeführt werden, insbesondere wobei ein weiterer Gasstrom in den Einlass eintritt.The return of the gas can be carried out, for example, for the purpose of processing, for example cleaning, temperature control, separation and / or enrichment. In particular, the recirculation device can have a correspondingly designed processing device. The return can, however, for example can also be returned essentially without influencing or changing the gas. In general, the gas can be withdrawn, for example, at an outlet of the process device, in particular with only part of the gas flow being returned at the outlet, and / or the gas can, for example, be returned to an inlet of the process device, in particular with a further gas flow entering the inlet.

Insbesondere kann es sich bei dem System um ein geschlossenes System handeln und/oder es kann ein geschlossener Gaskreislauf vorgesehen sein.In particular, the system can be a closed system and / or a closed gas circuit can be provided.

Die Vorteile der Erfindung entfalten sich im besonderen Maße bei einer Prozesseinrichtung, die einen Laser umfasst. Bei dem Laser kann es sich bevorzugt um einen Gaslaser, insbesondere einen Excimer- oder CO2-Laser, handeln.The advantages of the invention are particularly evident in a process device that includes a laser. The laser can preferably be a gas laser, in particular an excimer or CO 2 laser.

Ebenfalls vorteilhaft ist eine Prozesseinrichtung, die eine Temperierungsvorrichtung, insbesondere Klima- und/oder Kühlvorrichtung, umfasst. Dabei kann beispielsweise mittels der Rezirkulationseinrichtung eine Gasumwälzung bewirkt werden. Hierdurch kann die Temperierungswirkung der Vorrichtung verbessert werden, wobei die erfindungsgemäßen Vorteile besonders gut ausgenutzt werden.A process device that comprises a temperature control device, in particular an air conditioning and / or cooling device, is also advantageous. In this case, for example, a gas circulation can be brought about by means of the recirculation device. In this way, the temperature control effect of the device can be improved, the advantages according to the invention being particularly well utilized.

Die Prozesseinrichtung kann beispielsweise eine Brennstoffzelle umfassen, welche z.B. zur Stromerzeugung eingesetzt werden kann, beispielsweise zum Antrieb eines Fahrzeugmotors. Die Rezirkulationseinrichtung kann vorteilhaft zur Rückführung von überschüssigem Prozessgas der Brennstoffzelle, insbesondere Wasserstoff, angeordnet sein.The process device can, for example, comprise a fuel cell, which can be used, for example, to generate electricity, for example to drive a vehicle engine. The recirculation device can advantageously be arranged to recirculate excess process gas from the fuel cell, in particular hydrogen.

Gemäß einem weiteren vorteilhaften Beispiel umfasst die Prozesseinrichtung eine Verbrennungseinrichtung, insbesondere eine Brennkraftmaschine, beispielsweise eines Fahrzeugantriebs. Die Rezirkulationseinrichtung kann dabei beispielsweise zur Rückführung eines Abgases der Verbrennungseinrichtung, insbesondere zu einem Einlass der Verbrennungseinrichtung, angeordnet sein.According to a further advantageous example, the process device comprises a combustion device, in particular an internal combustion engine, for example a vehicle drive. The recirculation device can for example be arranged to recirculate an exhaust gas from the combustion device, in particular to an inlet of the combustion device.

Generell kann die Prozesseinrichtung also vorteilhaft Teil eines Fahrzeugantriebs sein. Weiter generell kann die Prozesseinrichtung beispielsweise eine beliebige Art von Reaktor, z.B. Brennstoffzelle oder Verbrennungseinrichtung, mit zumindest teilweise gasförmigem Ausstoß umfassen.In general, the process device can therefore advantageously be part of a vehicle drive. Furthermore, in general, the process device can comprise, for example, any type of reactor, e.g. fuel cell or combustion device, with at least partially gaseous output.

Schließlich können alle zur Rezirkulationseinrichtung beschriebenen Ausführungsformen und Einzelmerkmale zur vorteilhaften Weiterbildung des Systems herangezogen werden und umgekehrt.Finally, all of the embodiments and individual features described for the recirculation device can be used for an advantageous further development of the system, and vice versa.

Gegenstand der Erfindung ist außerdem die Verwendung einer Seitenkanalpumpe als Rezirkulationspumpe einer Rezirkulationseinrichtung für ein Gas einer Prozesseinrichtung, insbesondere einer erfindungsgemäßen Rezirkulationseinrichtung wie hierin offenbart, und insbesondere einer Rezirkulationseinrichtung, die ein Bestandteil eines erfindungsgemäßen Systems ist, wie es hierin offenbart ist.The invention also relates to the use of a side channel pump as a recirculation pump of a recirculation device for a gas of a process device, in particular a recirculation device according to the invention as disclosed herein, and in particular a recirculation device that is part of a system according to the invention, as disclosed herein.

Die Erfindung wird nachfolgend lediglich beispielhaft anhand der schematischen Zeichnung erläutert.

Fig. 1
zeigt eine Seitenkanalpumpe in perspektivischer Ansicht.
Fig. 2
zeigt die Seitenkanalpumpe der Fig. 1 in einer Schnittansicht.
Fig. 3
zeigt eine weitere Seitenkanalpumpe in perspektivischer Ansicht.
Fig. 4
zeigt die Seitenkanalpumpe der Fig. 3 in einer Schnittansicht.
Fig. 5
zeigt eine dritte Ausführungsform einer Seitenkanalpumpe in einer perspektivischen Schnittansicht.
Fig. 6
zeigt einen gegenüber Fig. 5 vergrößerten Teilbereich der Seitenkanalpumpe in Schnittansicht.
Fig. 7 bis 12
zeigen verschiedene Ausführungsformen von Rotoren für eine Seitenkanalpumpe.
Fig. 13 bis 15
zeigen verschiedene Systeme mit Prozesseinrichtung und Rezirkulationseinrichtung.
The invention is explained below by way of example only with reference to the schematic drawing.
Fig. 1
shows a side channel pump in a perspective view.
Fig. 2
shows the side channel pump of the Fig. 1 in a sectional view.
Fig. 3
shows another side channel pump in a perspective view.
Fig. 4
shows the side channel pump of the Fig. 3 in a sectional view.
Fig. 5
shows a third embodiment of a side channel pump in a perspective sectional view.
Fig. 6
shows one opposite Fig. 5 enlarged partial area of the side channel pump in sectional view.
Figures 7 to 12
show different embodiments of rotors for a side channel pump.
Figures 13 to 15
show various systems with process equipment and recirculation equipment.

Fig. 1 zeigt eine Seitenkanalpumpe 20 zum Einsatz als Rezirkulationspumpe in einer erfindungsgemäßen Rezirkulationseinrichtung für ein Gas einer Prozesseinrichtung. Im oberen Bereich ist die Pumpe 20 freigestellt, sodass ein Rotor 22 sichtbar ist, der zum Bereitstellen einer Pumpwirkung rotiert. Aus Fig. 2 ist ersichtlich, dass die Pumpe 20 lediglich einen Rotor 22 aufweist, also einstufig ausgebildet ist. Der Rotor 22 rotiert mit einer Mehrzahl von über seinen Umfang verteilten Rotorschaufeln 24 in einem Seitenkanal 26. Der Seitenkanal 26 ist ein ringförmiger Kanal, der in seinem Querschnitt etwas größer als eine jeweilige Rotorschaufel ausgebildet ist. In der vorliegenden Ausführungsform ist der Seitenkanal 26 im Querschnitt im Wesentlichen rechteckig, jedoch mit abgerundeten Ecken ausgeführt. Fig. 1 shows a side channel pump 20 for use as a recirculation pump in a recirculation device according to the invention for a gas of a process device. In the upper area, the pump 20 is exposed so that a rotor 22 is visible, which rotates to provide a pumping effect. Out Fig. 2 it can be seen that the pump 20 has only one rotor 22, that is to say is designed in one stage. The rotor 22 rotates with a plurality of rotor blades 24 distributed over its circumference in a side channel 26. The side channel 26 is an annular channel whose cross section is somewhat larger than a respective rotor blade. In the present embodiment, the side channel 26 is essentially rectangular in cross section, but has rounded corners.

Der Rotor 22 ist auf einer Welle 28 der Seitenkanalpumpe 20 angeordnet. Die Welle 28 und somit der Rotor 22 sind über einen Elektromotor rotatorisch angetrieben, welcher einen Ständer 30 und einen Läufer 32 umfasst. Der Ständer 30 weist bestromte Wicklungen auf, wohingegen der Läufer 32 in dieser Ausführungsform eine Mehrzahl an Permanentmagneten aufweist. Der Läufer 32 ist fest mit der Welle 28 verbunden. Die Welle 28 und somit der Rotor 22 werden also direkt vom Elektromotor 30, 32 angetrieben.The rotor 22 is arranged on a shaft 28 of the side channel pump 20. The shaft 28 and thus the rotor 22 are rotationally driven by an electric motor which comprises a stator 30 and a rotor 32. The stator 30 has energized windings, whereas the rotor 32 in this embodiment has a plurality of permanent magnets. The runner 32 is fixed to the Shaft 28 connected. The shaft 28 and thus the rotor 22 are thus driven directly by the electric motor 30, 32.

Der Rotor 22 ist in dieser Ausführungsform mit gekrümmten, in Bewegungsrichtung leicht schräg nach hinten geneigten Rotorschaufeln 24 und mit einem flachen Zwischenraum zwischen den Rotorschaufeln 24 ausgebildet.In this embodiment, the rotor 22 is designed with curved rotor blades 24 inclined slightly backwards in the direction of movement and with a flat space between the rotor blades 24.

Die Fig. 3 und 4 zeigen eine zweistufig ausgebildete Seitenkanalpumpe 20, welche zwei Rotoren 22.1 und 22.2 aufweist, die auf einer gemeinsamen Welle 28 gelagert sind. Die Rotoren 22.1 und 22.2 rotieren in jeweiligen Seitenkanälen 26.1 und 26.2, welche hier ebenfalls einen im Wesentlichen rechteckigen Querschnitt aufweisen. Im oberen Bereich der Fig. 4 ist eine Verbindung 34 der Seitenkanäle 26.1 und 26.2 sichtbar.the Figs. 3 and 4 show a two-stage side channel pump 20 which has two rotors 22.1 and 22.2 which are mounted on a common shaft 28. The rotors 22.1 and 22.2 rotate in respective side channels 26.1 and 26.2, which here also have an essentially rectangular cross section. In the upper area of the Fig. 4 a connection 34 of the side channels 26.1 and 26.2 is visible.

Die Rotoren 22.1 und 22.2 weisen jeweils pfeilförmige Schaufeln 24 auf, die in Bewegungsrichtung leicht schräg nach hinten geneigt sind. In den Zwischenräumen der Schaufeln 24 ist der Rotor 22 jeweils flach ausgebildet. Die Bewegungsrichtung verläuft hier vorzugsweise in Richtung der Spitzen der jeweiligen pfeilförmigen Schaufeln 24. Grundsätzlich ist jedoch beispielsweise auch ein umgekehrter Betrieb möglich.The rotors 22.1 and 22.2 each have arrow-shaped blades 24 which are inclined slightly backwards in the direction of movement. In the spaces between the blades 24, the rotor 22 is each flat. The direction of movement here preferably runs in the direction of the tips of the respective arrow-shaped blades 24. In principle, however, reverse operation is also possible, for example.

Die Welle 28, welche die Rotoren 22 trägt, ist durch einen Elektromotor angetrieben. Der Elektromotor weist einen Ständer 30 mit Wicklungen und einen permanentmagnetischen Läufer 32 auf, welcher auf der Welle 28 sitzt. Der Läufer 32 bzw. die Welle 28 sind innerhalb eines Rohres 36 angeordnet, welches Teil einer hermetischen Abdichtung der Pumpe 20 ist. Ein derartiges Rohr 36 wird auch als Spaltrohr bezeichnet, da es sich durch den Spalt zwischen Läufer 32 und Ständer 30 des Elektromotors erstreckt. Entsprechend wird der Elektromotor als Spaltrohrmotor bezeichnet. Das Spaltrohr 36 kann zum Beispiel aus Glasfaserkomposit hergestellt sein. Der Läufer 32 bzw. die Welle 28 befinden sich also aus Umgebungssicht hinter der hermetischen Abdichtung und in einem Bereich, der im Wesentlichen mit dem von der Pumpe zu förderndem Gas durchsetzt ist und ein entsprechendes Druckniveau aufweist.The shaft 28 which carries the rotors 22 is driven by an electric motor. The electric motor has a stator 30 with windings and a permanent magnetic rotor 32 which is seated on the shaft 28. The rotor 32 and the shaft 28 are arranged within a tube 36 which is part of a hermetic seal for the pump 20. Such a tube 36 is also referred to as a can, since it extends through the gap between the rotor 32 and the stator 30 of the electric motor. Correspondingly, the electric motor is referred to as a canned motor. The can 36 can be made of fiberglass composite, for example. The rotor 32 and the shaft 28 are therefore off View of the surroundings behind the hermetic seal and in an area which is essentially penetrated by the gas to be conveyed by the pump and has a corresponding pressure level.

Hinter der Abdichtung bzw. im Bereich des zu fördernden Gases befinden sich außerdem zwei Lager 38. Diese sind bevorzugt fett- und/oder dauergeschmiert.There are also two bearings 38 behind the seal or in the area of the gas to be conveyed. These are preferably grease-lubricated and / or permanently lubricated.

Die im Gasbereich bzw. hinter der Abdichtung angeordneten Funktionselemente sind also im Wesentlichen unabhängig funktionsfähig. Insbesondere müssen sie nicht leitungsgebunden versorgt werden, etwa mit Strom oder einem Betriebsmittel. Die Rotoren 22 laufen zudem berührungslos in den für sie vorgesehenen Gehäusespalten 40. Die Funktionsteile im Gasbereich sind somit äußerst verschleiß- und wartungsarm. Die hermetische Abdichtung der Pumpe 20 muss also nur äußerst selten bei einer Demontage aufgelöst werden, um die Pumpe zu warten.The functional elements arranged in the gas area or behind the seal are therefore essentially capable of functioning independently. In particular, they do not have to be supplied via a line, for example with electricity or equipment. The rotors 22 also run without contact in the housing gaps 40 provided for them. The functional parts in the gas area are therefore extremely wear-resistant and require little maintenance. The hermetic seal of the pump 20 therefore only has to be broken very rarely during dismantling in order to service the pump.

Eine dritte Ausführungsform einer Seitenkanalpumpe 20 ist in Fig. 5 gezeigt. Die Seitenkanalpumpe 20 ist fünfstufig ausgebildet, es sind also fünf Rotoren 22 vorgesehen, die in jeweiligen Seitenkanälen 26 rotieren. Die Rotoren 22 sind wiederum auf einer gemeinsamen Welle 28 angeordnet. Ein in Fig. 5 angedeuteter Bereich A der Seitenkanalpumpe 20 ist in Fig. 6 vergrößert und um 90 Grad gedreht dargestellt.A third embodiment of a side channel pump 20 is shown in FIG Fig. 5 shown. The side channel pump 20 is designed in five stages, that is to say five rotors 22 are provided which rotate in respective side channels 26. The rotors 22 are in turn arranged on a common shaft 28. An in Fig. 5 The indicated area A of the side channel pump 20 is shown in FIG Fig. 6 shown enlarged and rotated by 90 degrees.

Aus Fig. 6 ist ersichtlich, dass die Seitenkanäle 26.1 und 26.2 der ersten beiden Pumpstufen im Wesentlichen rechteckig ausgebildet sind, wohingegen die Seitenkanäle 26.3, 26.4 und 26.5 der übrigen Pumpstufen einen im Wesentlichen ovalen oder eiförmigen Querschnitt aufweisen. Wie es insbesondere aus Fig. 5 ersichtlich ist, weisen die Rotoren 22.1 und 22.2 jeweils gekrümmte Rotorschaufeln auf. Die Rotoren 22.3, 22.4 und 22.5 sind hingegen pfeilförmig ausgebildet. Die Rotoren 22.3, 22.4 und 22.5 weisen außerdem in den jeweiligen Zwischenräumen zwischen benachbarten Rotorschaufeln 24 eine spitzdachförmige Struktur 42 auf, welche die Pumpwirkung dadurch unterstützt, dass sie eine Vortexbildung des Gasstromes im Seitenkanal 26 begünstig.Out Fig. 6 it can be seen that the side channels 26.1 and 26.2 of the first two pump stages are essentially rectangular, whereas the side channels 26.3, 26.4 and 26.5 of the other pump stages have an essentially oval or egg-shaped cross section. How it looks in particular Fig. 5 As can be seen, the rotors 22.1 and 22.2 each have curved rotor blades. The rotors 22.3, 22.4 and 22.5, however, are arrow-shaped. The rotors 22.3, 22.4 and 22.5 also have a pointed roof-shaped structure 42 in the respective intermediate spaces between adjacent rotor blades 24, which supports the pumping effect by promoting a vortex formation of the gas flow in the side channel 26.

In den Fig. 7 bis 12 sind verschiedene vorteilhafte Ausführungsformen von Rotoren 22 gezeigt. Der Rotor 22 der Fig. 7 weist gekrümmte Rotorschaufeln 24 mit flachen Zwischenräumen auf.In the Figures 7 to 12 various advantageous embodiments of rotors 22 are shown. The rotor 22 of the Fig. 7 has curved rotor blades 24 with shallow spaces.

Der Rotor 22 der Fig. 8 weist ebene Rotorschaufeln 24 auf, die sich radial erstrecken. Zwischen den Rotorschaufeln 24 sind jeweils dachartige Strukturen 42 vorgesehen, wobei eine jeweilige Firstkante 44 sich parallel zur Bewegungsrichtung der Rotorschaufeln 24 erstreckt. Die Firstkante 44 verbindet dabei radial äußere Enden der Schaufeln 24. Es handelt sich somit um verbundene Rotorschaufeln 24. Die zur Firstkante 44 hin zulaufenden Flächen 46 sind konkav ausgebildet.The rotor 22 of the Fig. 8 has planar rotor blades 24 that extend radially. Roof-like structures 42 are provided between the rotor blades 24, a respective ridge edge 44 extending parallel to the direction of movement of the rotor blades 24. The ridge edge 44 connects radially outer ends of the blades 24. These are thus connected rotor blades 24. The surfaces 46 tapering towards the ridge edge 44 are concave.

Die Rotoren 22 der Fig. 9 bis 11 sind allesamt pfeilförmig ausgebildet und unterscheiden sich im Wesentlichen in Größe und Schaufelanzahl bzw. relativem Schaufelabstand. Sie besitzen außerdem in den Schaufelzwischenräumen eine dachartige Struktur 42 mit einer jeweiligen Firstkante 44. Dabei sind die Firstkanten 44 der Rotoren 22 der Fig. 9 und 10 selbst gekrümmt ausgebildet, wohingegen die Firstkante 44 in Fig. 11 im Wesentlichen gerade ausgebildet ist. Alle Firstkanten 44 der Fig. 9 bis 11 erstrecken sich von einer jeweiligen Schaufelspitze zu einem Grund einer benachbarten Schaufel. Die Rotorschaufeln 24 sind somit unverbunden.The rotors 22 of the Figures 9 to 11 are all arrow-shaped and differ essentially in size and number of blades or relative blade spacing. They also have a roof-like structure 42 with a respective ridge edge 44 in the space between the blades. The ridge edges 44 of the rotors 22 are the Figures 9 and 10 itself is curved, whereas the ridge edge 44 in Fig. 11 is essentially straight. All ridge edges 44 of the Figures 9 to 11 extend from a respective blade tip to a bottom of an adjacent blade. The rotor blades 24 are therefore not connected.

Die Schaufeln 24 des Rotors 22 der in Fig. 12 gezeigten Ausführungsform sind schließlich gekrümmt ausgebildet, wobei sie sich insbesondere hinsichtlich Zahl und Größe von der Ausführungsform der Fig. 7 unterscheiden.The blades 24 of the rotor 22 of in Fig. 12 The embodiment shown are ultimately curved, and they differ in particular in terms of number and size from the embodiment of FIG Fig. 7 differentiate.

In Fig. 13 ist ein System mit einer Prozesseinrichtung 50 und einer Rezirkulationseinrichtung 52 gezeigt, wobei das Rezirkulationssystem 52 eine als Seitenkanalpumpe 20 ausgebildete Rezirkulationspumpe aufweist. Die Prozesseinrichtung 50 weist einen Einlass 54 und einen Auslass 56 auf. Der Einlass 54 ist mit der Rezirkulationseinrichtung 52 derart verbunden, dass ein zurückgeführtes Gas in den Einlass 54 zurückgeführt wird. Dem Einlass 54 wird außerdem über eine weitere Leitung ein weiterer Massenstrom zugeführt. In ähnlicher Weise ist der Auslass 56 sowohl mit der Rezirkulationseinrichtung 52 bzw. der Seitenkanalpumpe 20 verbunden, als auch mit einer weiteren Leitung, die einen Teilmassenstrom des Auslasses 56 aufnimmt. Im System der Fig. 13 wird also ein Teil eines Massenstromes, welcher die Prozesseinrichtung passiert, rezirkuliert. Bei der Prozesseinrichtung 50 kann es sich beispielsweise um eine Brennstoffzelle handeln. In diesem Fall kann der Massenstrom beispielsweise Wasserstoff enthalten. Überschüssiger Wasserstoff, der von der Brennstoffzelle nicht verbraucht wurde, wird über die Rezirkulationseinrichtung 52 zum Einlass 54 zurückgeführt, um schließlich doch verbraucht zu werden. Somit kann die Effizienz der Brennstoffzelle verbessert werden. Insbesondere kann dem Auslass 56 nachgeschaltet ein Separator vorgesehen sein, der der Seitenkanalpumpe 20 einen möglichst großen Teil des überschüssigen Wasserstoffs zuführt.In Fig. 13 a system with a process device 50 and a recirculation device 52 is shown, the recirculation system 52 being a Has side channel pump 20 trained recirculation pump. The process device 50 has an inlet 54 and an outlet 56. The inlet 54 is connected to the recirculation device 52 in such a way that a returned gas is fed back into the inlet 54. A further mass flow is also fed to the inlet 54 via a further line. In a similar way, the outlet 56 is connected both to the recirculation device 52 or the side channel pump 20, as well as to a further line which takes up a partial mass flow of the outlet 56. In the system of Fig. 13 a part of a mass flow that passes through the process device is therefore recirculated. The process device 50 can be a fuel cell, for example. In this case, the mass flow can contain hydrogen, for example. Excess hydrogen, which has not been consumed by the fuel cell, is returned to the inlet 54 via the recirculation device 52 in order to be consumed after all. Thus, the efficiency of the fuel cell can be improved. In particular, a separator can be provided downstream of the outlet 56, which separator supplies the side channel pump 20 with as large a portion of the excess hydrogen as possible.

Die Prozesseinrichtung 50 des Systems der Fig. 13 kann beispielsweise auch eine Verbrennungseinrichtung, wie etwa eine Brennkraftmaschine sein. Die Rezirkulationseinrichtung 52 bildet dabei eine Abgasrückführung, indem sie Abgas aus dem Massenstrom des Auslasses 56 entnimmt und in den Zuluftstrom am Einlass 54 zurückführt.The process device 50 of the system of Fig. 13 can for example also be a combustion device such as an internal combustion engine. The recirculation device 52 forms an exhaust gas recirculation in that it takes exhaust gas from the mass flow of the outlet 56 and returns it to the supply air flow at the inlet 54.

Fig. 14 zeigt ein im Hinblick auf den Gasstrom geschlossenes System mit Prozesseinrichtung 50 und Rezirkulationseinrichtung 52 mit Seitenkanalpumpe 20. Das in der Prozesseinrichtung 50 befindliche Gas kann über die Rezirkulationseinrichtung 52 und deren Seitenkanalpumpe 20 umgewälzt werden, beispielsweise um Phasenbildung eines Gasgemisches in der Prozesseinrichtung zu vermeiden. Fig. 14 shows a closed system with regard to the gas flow with process device 50 and recirculation device 52 with side channel pump 20. The gas in process device 50 can be circulated via recirculation device 52 and its side channel pump 20, for example to avoid phase formation of a gas mixture in the process device.

Ein weiteres im Hinblick auf den Gasstrom geschlossenes System zeigt die Fig. 15. Dieses System umfasst ebenfalls eine Prozesseinrichtung 50, eine Rezirkulationseinrichtung 52 und eine Seitenkanalpumpe 20. Die Rezirkulationseinrichtung 52 der Fig. 15 umfasst außerdem eine Aufbereitungseinrichtung 58 zur Aufbereitung des zurückgeführten Gases. Die Aufbereitungseinrichtung 58 kann beispielsweise zur Reinigung und/oder Temperierung des Gases ausgebildet sein. Eine Aufbereitungseinrichtung kann beispielsweise Teil der Rezirkulationseinrichtung der Fig. 13 sein. Insoweit im Zusammenhang mit den Systemen der Fig. 14 und 15 von geschlossenen Systemen die Rede ist, versteht es sich, dass die rein schematischen Zeichnungen weitere Gas- und Leitungssysteme nicht ausschließen.Another system that is closed with regard to the gas flow is shown in FIG Fig. 15 . This system also comprises a process device 50, a recirculation device 52 and a side channel pump 20. The recirculation device 52 of FIG Fig. 15 also comprises a processing device 58 for processing the returned gas. The processing device 58 can be designed for cleaning and / or temperature control of the gas, for example. A processing device can, for example, be part of the recirculation device of Fig. 13 being. To that extent in connection with the systems of Figures 14 and 15 When talking about closed systems, it goes without saying that the purely schematic drawings do not exclude other gas and pipe systems.

In den Figuren sind lediglich Ausführungsformen gezeigt, bei denen die Seitenkanäle bzw. die Seitenkanal-Pumpstufen axial versetzt angeordnet sind. Es versteht sich, dass die Seitenkanalpumpe der erfindungsgemäßen Rezirkulationseinrichtung auch beispielsweise radial versetzte Seitenkanal-Pumpstufen aufweisen kann. Auch eine Kombination von axial und radial versetzten Stufen ist möglich. Schließlich kann die Seitenkanalpumpe auch vorteilhaft mit Pumpstufen verbunden werden, welche andere Pumpprinzipien aufweisen.In the figures, only embodiments are shown in which the side channels or the side channel pump stages are arranged axially offset. It goes without saying that the side channel pump of the recirculation device according to the invention can also have, for example, radially offset side channel pump stages. A combination of axially and radially offset steps is also possible. Finally, the side channel pump can also be advantageously connected to pump stages which have different pump principles.

BezugszeichenlisteList of reference symbols

2020th
SeitenkanalpumpeSide channel pump
2222nd
Rotorrotor
2424
RotorschaufelRotor blade
2626th
SeitenkanalSide channel
2828
Wellewave
3030th
StänderStand
3232
Läuferrunner
3434
Verbindungconnection
3636
SpaltrohrCan
3838
Lagerwarehouse
4040
Spaltgap
4242
spitzdachförmige StrukturPointed roof-shaped structure
4444
FirstkanteRidge edge
4646
Flächesurface
5050
ProzesseinrichtungProcess setup
5252
RezirkulationseinrichtungRecirculation device
5454
Einlassinlet
5656
AuslassOutlet
5858
AufbereitungseinrichtungProcessing facility

Claims (15)

  1. A system comprising
    a processing device (50) having a space and/or a line for receiving a gas; and
    a recirculation device (52) through which the gas can be removed from the processing device (50) and can be returned into the processing device (52), wherein the recirculation device (52) comprises a recirculation pump, characterized in that
    the recirculation pump is a side channel pump (20).
  2. A system in accordance with claim 1,
    wherein the gas includes hydrogen, a temperature control medium and/or CO2.
  3. A system in accordance with one of the preceding claims,
    wherein the side channel pump (20) comprises at least one rotor (22) having a plurality of rotor blades (24); and wherein the rotor blades (24) are each at least one of straight, oblique, arrow-shaped, curved, divided, undivided, or inclined to the front or to the rear in a direction of movement.
  4. A system in accordance with any one of the preceding claims,
    wherein the side channel pump (20) comprises at least one rotor (22) having a plurality of rotor blades (24); and wherein an intermediate space between two rotor blades (24) adjacent in the direction of movement is flat or has a pointed roof-shaped structure (42).
  5. A system in accordance with any one of the preceding claims,
    wherein at least one side channel (26) of the side channel pump (20) has a circular, oval, elliptical, rectangular or egg-shaped cross-sectional geometry.
  6. A system in accordance with any one of the preceding claims,
    wherein at least one side channel (26) of the side channel pump (20) tapers in its cross-section in a flow direction.
  7. A system in accordance with any one of the preceding claims,
    wherein the side channel pump (20) has a single-stage or multi-stage design.
  8. A system in accordance with any one of the preceding claims,
    wherein the side channel pump (20) has a seal; and wherein the parts of the pump (20) which are movable to produce the pumping effect are arranged within the seal.
  9. A system in accordance with any one of the preceding claims,
    wherein the rotational speed of the side channel pump (20) is controllable via a frequency converter.
  10. A system in accordance with any one of the preceding claims,
    wherein a rotor (24) of the side channel pump (20) is supported by at least one grease-lubricated bearing (38).
  11. A system in accordance with any one of the preceding claims,
    wherein a closed gas circuit is provided.
  12. A system in accordance with any one of the preceding claims,
    wherein the processing device (50) comprises a laser.
  13. A system in accordance with any one of the preceding claims, wherein the processing device (50) comprises a temperature control apparatus.
  14. A system in accordance with any one of the preceding claims, wherein the processing device (50) comprises a fuel cell.
  15. A system in accordance with any one of the preceding claims, wherein the processing device (50) comprises a combustion device.
EP19207550.5A 2019-11-06 2019-11-06 System with a recirculation device Active EP3594498B1 (en)

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EP19207550.5A EP3594498B1 (en) 2019-11-06 2019-11-06 System with a recirculation device
JP2020072213A JP7261197B2 (en) 2019-11-06 2020-04-14 Gas recirculation device and system with same
US16/923,191 US11542935B2 (en) 2019-11-06 2020-07-08 Gas recirculation device and system having such a device

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