EP2933497A3 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP2933497A3 EP2933497A3 EP15159512.1A EP15159512A EP2933497A3 EP 2933497 A3 EP2933497 A3 EP 2933497A3 EP 15159512 A EP15159512 A EP 15159512A EP 2933497 A3 EP2933497 A3 EP 2933497A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- pumping
- vacuum pump
- pumping mechanism
- gas
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 abstract 13
- 238000011144 upstream manufacturing Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Eine Vakuumpumpe, insbesondere Turbomolekularpumpe, umfasst wenigstens einen Pumpmechanismus (124) zum Pumpen von Gas längs eines von einem Haupteinlass (70) zu einem Auslass für das Gas verlaufenden Pumpkanals (10) und ist dadurch gekennzeichnet, dass der Pumpmechanismus derart ausgebildet ist, dass ein erster pumpwirksamer Abschnitt (136) des Pumpmechanismus, der stromaufwärts bezüglich eines zweiten pumpwirksamen Abschnitts (138) des Pumpmechanismus vorgesehen ist, ein höheres Kompressionsvermögen als der zweite pumpwirksame Abschnitt aufweist, und/oder dass der Pumpmechanismus derart ausgebildet ist, dass der zweite pumpwirksame Abschnitt ein höheres Saugvermögen als der erste pumpwirksame Abschnitt aufweist. A vacuum pump, in particular a turbomolecular pump, comprises at least one pumping mechanism (124) for pumping gas along a pumping channel (10) extending from a main inlet (70) to an outlet for the gas, and is characterized in that the pumping mechanism is designed such that a a first pumping portion (136) of the pumping mechanism provided upstream of a second pumping portion (138) of the pumping mechanism has a higher compressing capability than the second pumping portion, and / or the pumping mechanism is configured such that the second pumping portion is one has higher pumping speed than the first pumping effective portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015084159A JP6185957B2 (en) | 2014-04-17 | 2015-04-16 | Vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014105582.9A DE102014105582A1 (en) | 2014-04-17 | 2014-04-17 | vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2933497A2 EP2933497A2 (en) | 2015-10-21 |
EP2933497A3 true EP2933497A3 (en) | 2015-12-02 |
EP2933497B1 EP2933497B1 (en) | 2020-10-07 |
Family
ID=52672214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15159512.1A Active EP2933497B1 (en) | 2014-04-17 | 2015-03-17 | Vacuum pump |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2933497B1 (en) |
JP (1) | JP6185957B2 (en) |
DE (1) | DE102014105582A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202015007985U1 (en) | 2015-11-19 | 2017-02-21 | Leybold Gmbh | Device for storing kinetic energy |
EP3670924B1 (en) * | 2019-11-19 | 2021-11-17 | Pfeiffer Vacuum Gmbh | Vacuum pump and method for producing same |
EP3845764B1 (en) * | 2021-03-31 | 2023-05-03 | Pfeiffer Vacuum Technology AG | Vacuum pump and vacuum pump system |
EP4273405A1 (en) * | 2023-09-20 | 2023-11-08 | Pfeiffer Vacuum Technology AG | Vacuum pump with a holweck pumping stage with a varying holweck geometry |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0603694A1 (en) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
DE19901340A1 (en) * | 1998-05-26 | 1999-12-09 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type |
WO2004055375A1 (en) * | 2002-12-17 | 2004-07-01 | The Boc Group Plc | Vacuum pumping arrangement |
EP2251547A2 (en) * | 2009-05-16 | 2010-11-17 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP2650544A1 (en) * | 2010-12-10 | 2013-10-16 | Edwards Japan Limited | Vacuum pump |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE117410T1 (en) * | 1990-07-06 | 1995-02-15 | Cit Alcatel | SECOND STAGE FOR MECHANICAL VACUUM PUMP UNIT AND LEAK MONITORING SYSTEM USING THIS UNIT. |
DE10353034A1 (en) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Multi-stage friction vacuum pump |
DE202009003880U1 (en) * | 2009-03-19 | 2010-08-05 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
DE102011118661A1 (en) * | 2011-11-16 | 2013-05-16 | Pfeiffer Vacuum Gmbh | Friction vacuum pump |
DE102012003680A1 (en) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
-
2014
- 2014-04-17 DE DE102014105582.9A patent/DE102014105582A1/en active Pending
-
2015
- 2015-03-17 EP EP15159512.1A patent/EP2933497B1/en active Active
- 2015-04-16 JP JP2015084159A patent/JP6185957B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0603694A1 (en) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vacuum system |
DE19901340A1 (en) * | 1998-05-26 | 1999-12-09 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type |
WO2004055375A1 (en) * | 2002-12-17 | 2004-07-01 | The Boc Group Plc | Vacuum pumping arrangement |
EP2251547A2 (en) * | 2009-05-16 | 2010-11-17 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP2650544A1 (en) * | 2010-12-10 | 2013-10-16 | Edwards Japan Limited | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
EP2933497A2 (en) | 2015-10-21 |
EP2933497B1 (en) | 2020-10-07 |
JP2015206362A (en) | 2015-11-19 |
DE102014105582A1 (en) | 2015-10-22 |
JP6185957B2 (en) | 2017-08-23 |
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