EP2933497A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2933497A3
EP2933497A3 EP15159512.1A EP15159512A EP2933497A3 EP 2933497 A3 EP2933497 A3 EP 2933497A3 EP 15159512 A EP15159512 A EP 15159512A EP 2933497 A3 EP2933497 A3 EP 2933497A3
Authority
EP
European Patent Office
Prior art keywords
pumping
vacuum pump
pumping mechanism
gas
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15159512.1A
Other languages
German (de)
French (fr)
Other versions
EP2933497B1 (en
EP2933497A2 (en
Inventor
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2015084159A priority Critical patent/JP6185957B2/en
Publication of EP2933497A2 publication Critical patent/EP2933497A2/en
Publication of EP2933497A3 publication Critical patent/EP2933497A3/en
Application granted granted Critical
Publication of EP2933497B1 publication Critical patent/EP2933497B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Abstract

Eine Vakuumpumpe, insbesondere Turbomolekularpumpe, umfasst wenigstens einen Pumpmechanismus (124) zum Pumpen von Gas längs eines von einem Haupteinlass (70) zu einem Auslass für das Gas verlaufenden Pumpkanals (10) und ist dadurch gekennzeichnet, dass der Pumpmechanismus derart ausgebildet ist, dass ein erster pumpwirksamer Abschnitt (136) des Pumpmechanismus, der stromaufwärts bezüglich eines zweiten pumpwirksamen Abschnitts (138) des Pumpmechanismus vorgesehen ist, ein höheres Kompressionsvermögen als der zweite pumpwirksame Abschnitt aufweist, und/oder dass der Pumpmechanismus derart ausgebildet ist, dass der zweite pumpwirksame Abschnitt ein höheres Saugvermögen als der erste pumpwirksame Abschnitt aufweist.

Figure imgaf001
A vacuum pump, in particular a turbomolecular pump, comprises at least one pumping mechanism (124) for pumping gas along a pumping channel (10) extending from a main inlet (70) to an outlet for the gas, and is characterized in that the pumping mechanism is designed such that a a first pumping portion (136) of the pumping mechanism provided upstream of a second pumping portion (138) of the pumping mechanism has a higher compressing capability than the second pumping portion, and / or the pumping mechanism is configured such that the second pumping portion is one has higher pumping speed than the first pumping effective portion.
Figure imgaf001
EP15159512.1A 2014-04-17 2015-03-17 Vacuum pump Active EP2933497B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015084159A JP6185957B2 (en) 2014-04-17 2015-04-16 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014105582.9A DE102014105582A1 (en) 2014-04-17 2014-04-17 vacuum pump

Publications (3)

Publication Number Publication Date
EP2933497A2 EP2933497A2 (en) 2015-10-21
EP2933497A3 true EP2933497A3 (en) 2015-12-02
EP2933497B1 EP2933497B1 (en) 2020-10-07

Family

ID=52672214

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15159512.1A Active EP2933497B1 (en) 2014-04-17 2015-03-17 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2933497B1 (en)
JP (1) JP6185957B2 (en)
DE (1) DE102014105582A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015007985U1 (en) 2015-11-19 2017-02-21 Leybold Gmbh Device for storing kinetic energy
EP3670924B1 (en) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vacuum pump and method for producing same
EP3845764B1 (en) * 2021-03-31 2023-05-03 Pfeiffer Vacuum Technology AG Vacuum pump and vacuum pump system
EP4273405A1 (en) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Vacuum pump with a holweck pumping stage with a varying holweck geometry

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0603694A1 (en) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vacuum system
DE19901340A1 (en) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type
WO2004055375A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
EP2251547A2 (en) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Vacuum pump
EP2650544A1 (en) * 2010-12-10 2013-10-16 Edwards Japan Limited Vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292B1 (en) * 1990-07-06 1995-01-18 Alcatel Cit Second stage mechanical vacuum pumping unit and leak detection system using such a unit
DE10353034A1 (en) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Multi-stage friction vacuum pump
DE202009003880U1 (en) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
DE102011118661A1 (en) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Friction vacuum pump
DE102012003680A1 (en) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0603694A1 (en) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vacuum system
DE19901340A1 (en) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type
WO2004055375A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
EP2251547A2 (en) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Vacuum pump
EP2650544A1 (en) * 2010-12-10 2013-10-16 Edwards Japan Limited Vacuum pump

Also Published As

Publication number Publication date
JP2015206362A (en) 2015-11-19
JP6185957B2 (en) 2017-08-23
EP2933497B1 (en) 2020-10-07
DE102014105582A1 (en) 2015-10-22
EP2933497A2 (en) 2015-10-21

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