EP2933497A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP2933497A3
EP2933497A3 EP15159512.1A EP15159512A EP2933497A3 EP 2933497 A3 EP2933497 A3 EP 2933497A3 EP 15159512 A EP15159512 A EP 15159512A EP 2933497 A3 EP2933497 A3 EP 2933497A3
Authority
EP
European Patent Office
Prior art keywords
pumping
vacuum pump
pumping mechanism
gas
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15159512.1A
Other languages
English (en)
French (fr)
Other versions
EP2933497B1 (de
EP2933497A2 (de
Inventor
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2015084159A priority Critical patent/JP6185957B2/ja
Publication of EP2933497A2 publication Critical patent/EP2933497A2/de
Publication of EP2933497A3 publication Critical patent/EP2933497A3/de
Application granted granted Critical
Publication of EP2933497B1 publication Critical patent/EP2933497B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Eine Vakuumpumpe, insbesondere Turbomolekularpumpe, umfasst wenigstens einen Pumpmechanismus (124) zum Pumpen von Gas längs eines von einem Haupteinlass (70) zu einem Auslass für das Gas verlaufenden Pumpkanals (10) und ist dadurch gekennzeichnet, dass der Pumpmechanismus derart ausgebildet ist, dass ein erster pumpwirksamer Abschnitt (136) des Pumpmechanismus, der stromaufwärts bezüglich eines zweiten pumpwirksamen Abschnitts (138) des Pumpmechanismus vorgesehen ist, ein höheres Kompressionsvermögen als der zweite pumpwirksame Abschnitt aufweist, und/oder dass der Pumpmechanismus derart ausgebildet ist, dass der zweite pumpwirksame Abschnitt ein höheres Saugvermögen als der erste pumpwirksame Abschnitt aufweist.
EP15159512.1A 2014-04-17 2015-03-17 Vakuumpumpe Active EP2933497B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015084159A JP6185957B2 (ja) 2014-04-17 2015-04-16 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014105582.9A DE102014105582A1 (de) 2014-04-17 2014-04-17 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2933497A2 EP2933497A2 (de) 2015-10-21
EP2933497A3 true EP2933497A3 (de) 2015-12-02
EP2933497B1 EP2933497B1 (de) 2020-10-07

Family

ID=52672214

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15159512.1A Active EP2933497B1 (de) 2014-04-17 2015-03-17 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP2933497B1 (de)
JP (1) JP6185957B2 (de)
DE (1) DE102014105582A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015007985U1 (de) * 2015-11-19 2017-02-21 Leybold Gmbh Vorrichtung zum Speichern kinetischer Energie
EP3670924B1 (de) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zur herstellung einer solchen
EP3845764B1 (de) * 2021-03-31 2023-05-03 Pfeiffer Vacuum Technology AG Vakuumpumpe und vakuumpumpensystem
EP4273405A1 (de) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
DE19901340A1 (de) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
WO2004055375A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
EP2251547A2 (de) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2650544A1 (de) * 2010-12-10 2013-10-16 Edwards Japan Limited Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
DE19901340A1 (de) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
WO2004055375A1 (en) * 2002-12-17 2004-07-01 The Boc Group Plc Vacuum pumping arrangement
EP2251547A2 (de) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2650544A1 (de) * 2010-12-10 2013-10-16 Edwards Japan Limited Vakuumpumpe

Also Published As

Publication number Publication date
JP6185957B2 (ja) 2017-08-23
JP2015206362A (ja) 2015-11-19
EP2933497B1 (de) 2020-10-07
EP2933497A2 (de) 2015-10-21
DE102014105582A1 (de) 2015-10-22

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