EP2251547A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP2251547A3
EP2251547A3 EP10004024.5A EP10004024A EP2251547A3 EP 2251547 A3 EP2251547 A3 EP 2251547A3 EP 10004024 A EP10004024 A EP 10004024A EP 2251547 A3 EP2251547 A3 EP 2251547A3
Authority
EP
European Patent Office
Prior art keywords
blade
vacuum pump
edge
pump
impeller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10004024.5A
Other languages
English (en)
French (fr)
Other versions
EP2251547A2 (de
EP2251547B1 (de
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2251547A2 publication Critical patent/EP2251547A2/de
Publication of EP2251547A3 publication Critical patent/EP2251547A3/de
Application granted granted Critical
Publication of EP2251547B1 publication Critical patent/EP2251547B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Gaseinlass (2), einem Gasauslass (3) und mit einer Seitenkanalpumpstufe (6), welche ein in Drehung versetztes Laufrad (600) mit einem Rand umfasst, welches eine Schaufel (602) mit einer ersten (621; 651) und einer zweiten (622; 652) Teilschaufel aufweist, die am Rand des Laufrades angeordnet ist. Um verbesserte Vakuumkennwerte und gleichzeitig eine einfach herzustellende Geometrie der pumpaktiven Bauteile zu erreichen, wird vorgeschlagen, dass der Winkel zwischen wenigstens einer Teilschaufel (621; 622; 651; 652) und der Bewegungsrichtung (607) der Schaufel weniger als 90° beträgt.
EP10004024.5A 2009-05-16 2010-04-16 Vakuumpumpe Not-in-force EP2251547B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009021620.0A DE102009021620B4 (de) 2009-05-16 2009-05-16 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2251547A2 EP2251547A2 (de) 2010-11-17
EP2251547A3 true EP2251547A3 (de) 2014-07-09
EP2251547B1 EP2251547B1 (de) 2016-04-06

Family

ID=42154827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10004024.5A Not-in-force EP2251547B1 (de) 2009-05-16 2010-04-16 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP2251547B1 (de)
JP (1) JP5680334B2 (de)
DE (1) DE102009021620B4 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011112689B4 (de) * 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102015113821B4 (de) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3594498B1 (de) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh System mit einer gasrezirkulationseinrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029992A (ja) * 1988-06-28 1990-01-12 Daikin Ind Ltd 渦流形ターボ機械
EP0568069A2 (de) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolekularvakuumpumpen
GB2289918A (en) * 1994-06-03 1995-12-06 Coltec Ind Inc Extended range regenerative pump
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
DE19955955A1 (de) * 1999-11-19 2001-06-13 Siemens Ag Seitenkanalmaschine

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2405890A1 (de) * 1974-02-07 1975-08-14 Siemens Ag Seitenkanal-ringverdichter
JPS61210294A (ja) * 1985-03-13 1986-09-18 Nishimura Denki Kk 送風機
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3800128B2 (ja) 2001-07-31 2006-07-26 株式会社デンソー インペラ及びタービン式燃料ポンプ
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (ja) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 タービン型燃料ポンプ
DE102005025132A1 (de) 2005-06-01 2006-12-07 Robert Bosch Gmbh Förderaggregat

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH029992A (ja) * 1988-06-28 1990-01-12 Daikin Ind Ltd 渦流形ターボ機械
EP0568069A2 (de) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolekularvakuumpumpen
GB2289918A (en) * 1994-06-03 1995-12-06 Coltec Ind Inc Extended range regenerative pump
DE19955955A1 (de) * 1999-11-19 2001-06-13 Siemens Ag Seitenkanalmaschine

Also Published As

Publication number Publication date
JP2010265894A (ja) 2010-11-25
JP5680334B2 (ja) 2015-03-04
EP2251547A2 (de) 2010-11-17
EP2251547B1 (de) 2016-04-06
DE102009021620B4 (de) 2021-07-29
DE102009021620A1 (de) 2010-11-18

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