EP2975268A3 - Vakuumsystem - Google Patents

Vakuumsystem Download PDF

Info

Publication number
EP2975268A3
EP2975268A3 EP15174432.3A EP15174432A EP2975268A3 EP 2975268 A3 EP2975268 A3 EP 2975268A3 EP 15174432 A EP15174432 A EP 15174432A EP 2975268 A3 EP2975268 A3 EP 2975268A3
Authority
EP
European Patent Office
Prior art keywords
inlet
outlet
seal
opening
around
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15174432.3A
Other languages
English (en)
French (fr)
Other versions
EP2975268A2 (de
EP2975268B1 (de
Inventor
Tobias Stoll
Robert Watz
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2975268A2 publication Critical patent/EP2975268A2/de
Publication of EP2975268A3 publication Critical patent/EP2975268A3/de
Application granted granted Critical
Publication of EP2975268B1 publication Critical patent/EP2975268B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Gasket Seals (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

Vakuumsystem mit wenigstens einer Vakuumpumpe (23, 23a, 23b) und wenigstens einem Rezipienten (25), wobei ein Auslass (37) des Rezipienten (25) mit einem Einlass (33) der Vakuumpumpe (23, 23a, 23b) derart lösbar verbunden oder verbindbar ist, dass eine im Auslass (37) vorgesehene Auslassöffnung (39) mit einer im Einlass (33) vorgesehenen Einlassöffnung (41) ausgerichtet ist und ein um die Auslassöffnung (39) herum verlaufender Abschnitt (43) des Auslasses (37) einem um die Einlassöffnung (41) herum verlaufenden Abschnitt (45) des Einlasses (33) gegenüberliegt, und dass zwischen dem Einlassabschnitt (45) und dem Auslassabschnitt (43) eine um die Einlassöffnung (41) herum verlaufende erste Dichtung (47) und radial außerhalb der ersten Dichtung (47) eine um die Einlassöffnung (41) herum verlaufende zweite Dichtung (49) angeordnet sind, und wobei wenigstens eine Absaugung (53) zum Evakuieren wenigstens eines Volumens (51, 51 a, 51 b), das zwischen den beiden Dichtungen (47, 49) eingeschlossen ist, vorgesehen ist, wobei die erste Dichtung (47) aus einem weichen metallischen Material oder als eine Flachdichtung aus einem Elastomer ausgebildet ist.
EP15174432.3A 2014-07-17 2015-06-30 Vakuumsystem Active EP2975268B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014110078.6A DE102014110078A1 (de) 2014-07-17 2014-07-17 Vakuumsystem

Publications (3)

Publication Number Publication Date
EP2975268A2 EP2975268A2 (de) 2016-01-20
EP2975268A3 true EP2975268A3 (de) 2016-05-11
EP2975268B1 EP2975268B1 (de) 2020-03-11

Family

ID=53498868

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15174432.3A Active EP2975268B1 (de) 2014-07-17 2015-06-30 Vakuumsystem

Country Status (3)

Country Link
EP (1) EP2975268B1 (de)
JP (1) JP6120915B2 (de)
DE (1) DE102014110078A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3135917B1 (de) * 2015-08-24 2020-10-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3318763B1 (de) * 2016-11-04 2020-07-01 Pfeiffer Vacuum Gmbh Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
EP3296571B1 (de) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2590664A (en) * 2019-12-23 2021-07-07 Edwards S R O Sealing between a cover plate and the pumping chamber or a multiple stage pump
GB2592375A (en) * 2020-02-25 2021-09-01 Edwards Vacuum Llc Flange for a vacuum apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3144035A (en) * 1963-02-01 1964-08-11 Nat Res Corp High vacuum system
DE2416808A1 (de) * 1974-04-06 1975-10-16 Leybold Heraeus Gmbh & Co Kg Dichtungselement fuer vakuumzwecke
JPS5517705A (en) * 1978-07-20 1980-02-07 Tokyo Inst Of Technol Gasket for super high-vacuum
DE2851566A1 (de) * 1978-11-29 1980-06-04 Pfeiffer Vakuumtechnik Dichtelement fuer flanschverbindungen
US20030011143A1 (en) * 2001-07-11 2003-01-16 Satsuo Shinoda Metallic gasket for vacuum device and method of producing thereof
EP1852613A2 (de) * 2006-05-04 2007-11-07 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4946677B1 (de) * 1970-12-25 1974-12-11
FR2409406A1 (fr) * 1977-11-22 1979-06-15 Air Liquide Procede de realisation des etancheites interne et de sortie d'arbre d'une pompe et pompe mettant en oeuvre ce procede
DE3830470A1 (de) * 1988-09-08 1990-03-15 Mtu Friedrichshafen Gmbh Dichtungseinrichtung zwischen welle und gehaeuse einer stroemungsmaschine mit mindestens einem laufrad
DE9304435U1 (de) * 1993-03-24 1993-06-09 Leybold Ag, 6450 Hanau, De
DE102005059208A1 (de) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh Vakuumgehäuse
DE102005063265A1 (de) * 2005-12-30 2007-07-12 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Hochdruck- und Vakuumdichtungssystem
DE102007010068A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3144035A (en) * 1963-02-01 1964-08-11 Nat Res Corp High vacuum system
DE2416808A1 (de) * 1974-04-06 1975-10-16 Leybold Heraeus Gmbh & Co Kg Dichtungselement fuer vakuumzwecke
JPS5517705A (en) * 1978-07-20 1980-02-07 Tokyo Inst Of Technol Gasket for super high-vacuum
DE2851566A1 (de) * 1978-11-29 1980-06-04 Pfeiffer Vakuumtechnik Dichtelement fuer flanschverbindungen
US20030011143A1 (en) * 2001-07-11 2003-01-16 Satsuo Shinoda Metallic gasket for vacuum device and method of producing thereof
EP1852613A2 (de) * 2006-05-04 2007-11-07 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement

Also Published As

Publication number Publication date
JP6120915B2 (ja) 2017-04-26
JP2016023805A (ja) 2016-02-08
DE102014110078A1 (de) 2016-01-21
EP2975268A2 (de) 2016-01-20
EP2975268B1 (de) 2020-03-11

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