EP2975268A3 - Vacuum system - Google Patents
Vacuum system Download PDFInfo
- Publication number
- EP2975268A3 EP2975268A3 EP15174432.3A EP15174432A EP2975268A3 EP 2975268 A3 EP2975268 A3 EP 2975268A3 EP 15174432 A EP15174432 A EP 15174432A EP 2975268 A3 EP2975268 A3 EP 2975268A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- inlet
- outlet
- seal
- opening
- around
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920001971 elastomer Polymers 0.000 abstract 1
- 239000000806 elastomer Substances 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Gasket Seals (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
Vakuumsystem mit wenigstens einer Vakuumpumpe (23, 23a, 23b) und wenigstens einem Rezipienten (25), wobei ein Auslass (37) des Rezipienten (25) mit einem Einlass (33) der Vakuumpumpe (23, 23a, 23b) derart lösbar verbunden oder verbindbar ist, dass eine im Auslass (37) vorgesehene Auslassöffnung (39) mit einer im Einlass (33) vorgesehenen Einlassöffnung (41) ausgerichtet ist und ein um die Auslassöffnung (39) herum verlaufender Abschnitt (43) des Auslasses (37) einem um die Einlassöffnung (41) herum verlaufenden Abschnitt (45) des Einlasses (33) gegenüberliegt, und dass zwischen dem Einlassabschnitt (45) und dem Auslassabschnitt (43) eine um die Einlassöffnung (41) herum verlaufende erste Dichtung (47) und radial außerhalb der ersten Dichtung (47) eine um die Einlassöffnung (41) herum verlaufende zweite Dichtung (49) angeordnet sind, und wobei wenigstens eine Absaugung (53) zum Evakuieren wenigstens eines Volumens (51, 51 a, 51 b), das zwischen den beiden Dichtungen (47, 49) eingeschlossen ist, vorgesehen ist, wobei die erste Dichtung (47) aus einem weichen metallischen Material oder als eine Flachdichtung aus einem Elastomer ausgebildet ist.
A vacuum system comprising at least one vacuum pump (23, 23a, 23b) and at least one recipient (25), wherein an outlet (37) of the recipient (25) is detachably connected to an inlet (33) of the vacuum pump (23, 23a, 23b) it is connectable that an outlet opening (39) provided in the outlet (37) is aligned with an inlet opening (41) provided in the inlet (33) and a section (43) of the outlet (37) running around the outlet opening (39) surrounds one opposite to the inlet opening (41) extending portion (45) of the inlet (33), and that between the inlet portion (45) and the outlet portion (43) extending around the inlet opening (41) around first seal (47) and radially outside the first seal (47) extending around the inlet opening (41) extending around the second seal (49), and wherein at least one suction (53) for evacuating at least one volume (51, 51 a, 51 b) between the two seals (47, 49) ei is provided, is provided, wherein the first seal (47) made of a soft metallic material or as a flat gasket is formed of an elastomer.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014110078.6A DE102014110078A1 (en) | 2014-07-17 | 2014-07-17 | vacuum system |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2975268A2 EP2975268A2 (en) | 2016-01-20 |
EP2975268A3 true EP2975268A3 (en) | 2016-05-11 |
EP2975268B1 EP2975268B1 (en) | 2020-03-11 |
Family
ID=53498868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15174432.3A Active EP2975268B1 (en) | 2014-07-17 | 2015-06-30 | Vacuum system |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2975268B1 (en) |
JP (1) | JP6120915B2 (en) |
DE (1) | DE102014110078A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3135917B1 (en) * | 2015-08-24 | 2020-10-07 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3318763B1 (en) * | 2016-11-04 | 2020-07-01 | Pfeiffer Vacuum Gmbh | Vacuum seal, dual seal, vacuum system and vacuum pump |
EP3327293B1 (en) * | 2016-11-23 | 2019-11-06 | Pfeiffer Vacuum Gmbh | Vacuum pump having multiple inlets |
EP3296571B1 (en) * | 2017-07-21 | 2021-11-03 | Pfeiffer Vacuum Gmbh | Vacuum pump |
GB2590664A (en) * | 2019-12-23 | 2021-07-07 | Edwards S R O | Sealing between a cover plate and the pumping chamber or a multiple stage pump |
GB2592375A (en) * | 2020-02-25 | 2021-09-01 | Edwards Vacuum Llc | Flange for a vacuum apparatus |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3144035A (en) * | 1963-02-01 | 1964-08-11 | Nat Res Corp | High vacuum system |
DE2416808A1 (en) * | 1974-04-06 | 1975-10-16 | Leybold Heraeus Gmbh & Co Kg | Sealing ring for high vacuum equipment - has soft metal sealing ring with split outer centering ring |
JPS5517705A (en) * | 1978-07-20 | 1980-02-07 | Tokyo Inst Of Technol | Gasket for super high-vacuum |
DE2851566A1 (en) * | 1978-11-29 | 1980-06-04 | Pfeiffer Vakuumtechnik | Sealing ring for vacuum line - has lugs which mate with flange attachment bolts |
US20030011143A1 (en) * | 2001-07-11 | 2003-01-16 | Satsuo Shinoda | Metallic gasket for vacuum device and method of producing thereof |
EP1852613A2 (en) * | 2006-05-04 | 2007-11-07 | Pfeiffer Vacuum Gmbh | Vacuum pump with casing |
GB2504329A (en) * | 2012-07-26 | 2014-01-29 | Edwards Ltd | Ultra high vacuum pump seal arrangement |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946677B1 (en) * | 1970-12-25 | 1974-12-11 | ||
FR2409406A1 (en) * | 1977-11-22 | 1979-06-15 | Air Liquide | PROCESS FOR REALIZING THE INTERNAL SEALS AND SHAFT OUTLET OF A PUMP AND PUMP IMPLEMENTING THIS PROCESS |
DE3830470A1 (en) * | 1988-09-08 | 1990-03-15 | Mtu Friedrichshafen Gmbh | SEALING DEVICE BETWEEN SHAFT AND HOUSING OF A FLUID MACHINE WITH AT LEAST ONE IMPELLER |
DE9304435U1 (en) * | 1993-03-24 | 1993-06-09 | Leybold AG, 6450 Hanau | High vacuum pump with inlet flange |
DE102005059208A1 (en) * | 2005-12-12 | 2007-06-28 | Pfeiffer Vacuum Gmbh | vacuum housing |
DE102005063265A1 (en) * | 2005-12-30 | 2007-07-12 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | High-pressure and vacuum sealing system for use in area of mechanical engineering, has recess with sealing unit, that is deformed diagonal to cross-section of unit after closing opening by cover, where unit completely fills space of recess |
DE102007010068B4 (en) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
-
2014
- 2014-07-17 DE DE102014110078.6A patent/DE102014110078A1/en active Pending
-
2015
- 2015-06-30 EP EP15174432.3A patent/EP2975268B1/en active Active
- 2015-07-16 JP JP2015142350A patent/JP6120915B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3144035A (en) * | 1963-02-01 | 1964-08-11 | Nat Res Corp | High vacuum system |
DE2416808A1 (en) * | 1974-04-06 | 1975-10-16 | Leybold Heraeus Gmbh & Co Kg | Sealing ring for high vacuum equipment - has soft metal sealing ring with split outer centering ring |
JPS5517705A (en) * | 1978-07-20 | 1980-02-07 | Tokyo Inst Of Technol | Gasket for super high-vacuum |
DE2851566A1 (en) * | 1978-11-29 | 1980-06-04 | Pfeiffer Vakuumtechnik | Sealing ring for vacuum line - has lugs which mate with flange attachment bolts |
US20030011143A1 (en) * | 2001-07-11 | 2003-01-16 | Satsuo Shinoda | Metallic gasket for vacuum device and method of producing thereof |
EP1852613A2 (en) * | 2006-05-04 | 2007-11-07 | Pfeiffer Vacuum Gmbh | Vacuum pump with casing |
GB2504329A (en) * | 2012-07-26 | 2014-01-29 | Edwards Ltd | Ultra high vacuum pump seal arrangement |
Also Published As
Publication number | Publication date |
---|---|
DE102014110078A1 (en) | 2016-01-21 |
JP2016023805A (en) | 2016-02-08 |
JP6120915B2 (en) | 2017-04-26 |
EP2975268B1 (en) | 2020-03-11 |
EP2975268A2 (en) | 2016-01-20 |
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