JP2016023805A - Vacuum system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an improved vacuum system capable of accomplishing a pressure in a region of an ultra high vacuum (UHV), in particular, a pressure lower than 10hPa within a receiver for a long period of time.SOLUTION: This invention relates to a vacuum system having a vacuum pump 23 and one receiver 25 in which an outlet opening part 39 provided in an outlet 37 is aligned with an inlet opening part 41 provided in an inlet 33, a part 43 of the outlet is faced against a part 45 of the inlet, a first seal 47 is provided between the inlet part and the outlet part, a second seal part 49 is provided outside in a radial direction of the first seal, the outlet of the receiver is removably connected with the inlet of the vacuum pump and there is provided a suction part 53 for drawing vacuum at least one volume part 51 enclosed between both seals 47 and 49 and the first seal is formed as soft metallic material or elastomer.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vacuum system having at least one vacuum pump and at least one receiver. The outlet of the receiver is then releasably connected to or connectable to the inlet of the vacuum pump. The connection is such that the outlet opening provided in the outlet is aligned with the inlet opening provided in the inlet, and the portion of the outlet that transitions around the outlet opening is connected to the inlet opening. It is done so as to face the part of the inlet that moves around. And between the inlet portion and the outlet portion, the first seal that moves around the inlet portion and the outer periphery in the radial direction of the first seal move around the inlet opening. A second seal is disposed. At this time, at least one suction part for evacuating at least one volume located between the first seal and the second seal is provided.

  In a vacuum system of the type described at the outset, the first seal seals the connecting channel that transitions between the inlet opening and the outlet opening to the volume located between both seals. In addition, a second seal, located radially outward, seals the volume against the surroundings. Since the volume can be evacuated via the suction, the first seal does not seal the connection channel against ambient pressure, but only against the low pressure within the volume. This achieves a particularly low pressure in the connection channel or receiver.

However, in such a vacuum system known from the prior art, it is difficult to achieve pressures in the region of ultra-high vacuum (UHV, German: Ultrahochvacuum) in the receiver for a long time, especially for a long time of 10 ^−9. There arises a problem that it is difficult to realize a pressure lower than hPa.

German Patent Application Publication No. 3830470C2 German Patent Application Publication No. 102005063265A1 German utility model registration application No. 9304435U1 specification German utility model registration application 202008017530U1 specification French Patent Application Publication No. 2409406A1 Specification European Patent Application Publication No. 1795757A2

Accordingly, it is an object of the present invention to provide an improved vacuum system that can achieve pressures in the ultra-high vacuum (UHV) region in the receiver over a long period of time, particularly pressures lower than 10 ⁻⁹ hPa.

  This object is achieved by a vacuum system having the features of claim 1, in particular a vacuum system of the type described at the outset, wherein the first seal is made of a soft metal material or is made of an elastomer. It is solved by being formed as.

In accordance with the invention, the first seal is formed from a soft metal material or as a flat seal made of elastomer, so that only a small amount of gas is released anyway, so in particular in the design of a suitable vacuum pump, the receiver In the long term, pressures in the UHV region, especially lower than 10 ⁻⁹ hPa, can be achieved.

  Preferably, the inlet portion of the vacuum pump is a part of the housing of the vacuum pump, and the outlet portion of the receiver is preferably a part of the housing of the receiver.

  By using a soft metal material for the first seal, the first seal is particularly softer than the housing of the vacuum pump or receiver. The first seal so disposed between the inlet portion of the true lumen pump and the outlet portion of the receiver can thus be deformed. This is possible, for example, by holding both parts together. At that time, deformation in the inlet portion and the outlet portion is basically not caused. The deterioration of the vacuum (degree) caused by such damage or deformation is thus prevented.

  In particular, a first seal formed from a soft metal is advantageously used in combination with a receiver having an aluminum housing and / or a vacuum pump. This makes it possible to achieve that the first seal has a significantly lower elevation than the inlet and / or outlet portions. Thus, the first seal has little or no damage or deformation at the inlet or outlet.

  Preferably, the metallic material has a Brinell hardness (HB) lower than HB35. This is preferably lower than HB30, more preferably lower than HB25, and even more preferably a maximum HB20 value. This can ensure that the first seal formed from a metallic material has a significantly lower hardness than a vacuum pump or receiver having an aluminum housing.

  The metal material is in particular an aluminum alloy, in particular EN AW 1050a H111. Thereby, a soft and inexpensive first seal with low outgassing (degree) can be realized.

  The first seal made of a metallic material is preferably formed as a flat seal. Thereby, material savings can be achieved with good sealing properties.

Preferably, the elastomer is polytetrafluoroethylene (PTFE) or KFM or Viton (German: Viton). The first seal formed from the above-mentioned material as a flat seal has low permeability and outgassing, so that pressures in the UHV region, especially below 10 ⁻⁹ hPa, can be achieved in the receiver over time. Is possible.

  Since a flat seal made of an elastomer can be formed as a molded seal, the term “flat seal” as used herein should also include a molded seal.

  The first seal, formed from a soft metal material or from an elastomer as a flat seal, preferably has a height of up to 2 mm. More preferably it has a height between 0.03 mm and 1.5 mm, even more preferably it has a height between 0.05 mm and 1 mm, and even more preferably between 0.05 mm and 0.5 mm. Has a height between. With such a seal, a good sealing action can be achieved with low outgassing properties.

  The first seal, preferably made of a soft metal material, is crushed between the inlet part and the outlet part by 0.05 to 0.5 mm, preferably only 0.05 to 0.1 mm, in particular flat. It is possible that By such a slight crushing of the first seal, a high vacuum region of vacuum in the receiver is prolonged, in particular based on the suction part and on the second seal provided radially outside the first seal. Sufficient sealing is already achieved to occur over time. The slight pressing of the first seal has the advantage that damage in the inlet part or outlet part can then be prevented.

  According to a development of the invention, the second seal is formed from an elastomer, in particular from KFM or Viton, and preferably in the form of an O-ring. Therefore, the second seal can be realized at low cost.

  According to one embodiment of the invention, the suction part has at least one suction opening. This is provided at the inlet portion. A vacuum evacuation of the volume between the first and second seals can be performed via the suction opening. Since the suction opening can be connected via a channel to the pump stage of the vacuum pump, the volume can be pumped out by the pump stage. The pump stage can in particular be an intermediate pump stage arranged behind the pump stage. This pumps out the receiver. The channel is in particular an intermediate inlet into the intermediate pump stage. The suction opening can, however, also be connected to an independent vacuum pump.

  Preferably, the suction part has at least one suction opening. This is provided in the outlet part. The suction opening in the outlet part can be connected to the pump stage of the vacuum pump, for example via a channel, so that the volume located between the first and second seals is connected to the pump stage. Can be pumped out (German: auspumpen). The pump stage can then be an intermediate pump stage arranged after the pump stage. The receiver is pumped out via this. The suction opening in the outlet part can, however, also be connected to an independent vacuum pump.

  Preferably, the inlet portion is formed with an accommodating portion that circulates around the inlet portion for the first seal. The first seal can be inserted into the housing. The receptacle is then preferably formed to such a depth that the seal accommodated therein protrudes therefrom, so that the seal can be crushed by the facing outlet part.

  The receiving part can in particular be formed in the form of a sinking part or a groove that circulates around the inlet opening. The housing part can thus be manufactured particularly simply.

  Preferably, a cutting edge that circulates around the inlet opening is formed in the accommodating portion, preferably in the center thereof.

  In a suitable manner, the outlet part can be provided for the first seal with a receiving part, preferably in the form of a groove, which moves around the outlet opening. is there. A cutting edge that circulates around the outlet opening can be formed in the receiving part, preferably in the central part. It is also possible for the receiving part in the inlet part and / or the receiving part in the outlet part to be formed without a cutting edge. This allows flat crushing of the first seal.

  Each accommodating part provided in the outlet part and / or in the inlet part may be formed so as to be tapered as they become deeper. Each accommodating part can thus be provided for accommodating a molded seal whose basic shape is formed in a rhombus shape, in which case it is too large due to the tapered shape of the accommodating part. It is achieved that the assembly force does not act on the first seal. This in particular can prevent damage or deformation of the vacuum pump or receiver, which can occur in some cases due to assembly forces.

  The inlet portion and / or outlet portion may be configured such that when the inlet portion and outlet portion are assembled, at least one edge of the first seal disposed therebetween is crushed. This allows a sufficient sealing action to be achieved when the first seal is squeezed less. The crushing of the first seal can be achieved, in particular, by forming each crushing edge, or a rounding that crushes, in the inlet part and / or the outlet part.

  It is particularly advantageous if both seals are formed integrally with one another. The use of both integrally formed seals may save assembly time, particularly for connecting the vacuum pump inlet to the receiver outlet.

  In particular, both seals can be formed in the form of a metal flat seal or in the form of an elastomeric flat seal. This makes it possible to achieve a good sealing action with a low outgassing. Moreover, material can be saved by flat formation.

  According to a preferred development of the invention, the housing of the vacuum pump is made of aluminum, in particular including the inlet part. Costs can be saved compared to the production of stainless steel (German: Edelstahl) housings.

  Preferably, the receiver housing is made of aluminum, particularly including the outlet portion. Compared to the use of stainless steel, costs can be reduced as well.

  In accordance with a development of the invention, the inlet has at least two inlet openings. The inlet part then surrounds the inlet opening. Correspondingly, the receiver outlet can likewise have two outlet openings. This is surrounded by the outlet. In this case, each outlet opening can be combined with one inlet opening under a receiver connected to a vacuum pump.

  Particularly preferably, a first seal is provided around each of the at least two inlet openings. This seals between the vacuum pump and the receiver the connecting channel that transitions between the inlet opening and the fitted outlet opening.

  Preferably, a second seal is provided on the radially outer side of the at least two first seals that transitions around the at least two first seals. Moreover, the second seal preferably surrounds a suction portion located radially outward of the first seal. The volume enclosed between the at least two first seals and the second seal can thus be evacuated by the suction part.

  According to one development of the invention, the at least two first seals are integrally formed with one another. This can simplify the assembly of the vacuum system.

  The invention further relates to a double seal for sealing the connection between the outlet of the receiver and the inlet of the vacuum pump. When connected, the outlet opening provided in the outlet is aligned with the inlet opening provided in the inlet, and the portion of the outlet that moves around the outlet opening is around the inlet opening. It faces the part of the inlet that changes to go around. The double seal has a first seal and a second seal, the second seal transitions around the inlet opening radially outward of the first seal, and both seals are at least The first seal and the second seal are or are arranged so as to surround one volume and this volume can be evacuated via at least one suction part. , And in this case, both seals are integrally formed with each other.

  In particular, the double seal (and both seals integrally formed with each other) has at least one of the features disclosed herein in connection with the first seal and / or the second seal. .

  Preferably, the double seal (and both seals integrally formed with each other) can be formed in the form of a metal flat seal or in the form of an elastomeric flat seal. This makes it possible to achieve a gas release with a low double seal.

  The metal flat seal is preferably a seal made of an aluminum alloy, in particular EN AW 1050a H111.

  The elastomeric flat seal is preferably made of PTFE, FKM or Viton.

  The flat seal is preferably at a maximum height of 2 mm, preferably between 0.03 mm and 1.5 mm, more preferably between 0.05 mm and 1 mm, more preferably between 0.05 mm and 0.00 mm. Having a height of between 5 mm.

  The invention further relates to a sealing device for sealing the connection between the outlet of a receiver having at least two outlet openings and the inlet of a vacuum pump having at least two inlet openings. When connecting, each outlet opening is aligned with the inlet opening, and the part of the outlet that transitions around the outlet opening transitions around the inlet opening Facing the inlet part. The sealing device has at least two seals, and the two seals are provided at the inlet portion and the outlet portion so that each one of the seals moves around each one of the inlet openings. Arranged or can be arranged between. In this case, at least two seals are formed integrally with each other.

  Preferably, each of the at least two seals is formed of the same material and / or shape as the first seal described above.

  The vacuum pump is in particular a turbomolecular pump, in particular a turbomolecular pump having more than one vacuum port. Such a vacuum pump is also referred to as a split flow vacuum pump.

  The present invention will now be described by way of example with reference to the accompanying drawings. The diagram shows the following in a simplified manner.

Cross section of the vacuum system according to the invention Side view of vacuum pump Longitudinal section according to line AA in FIG. Longitudinal sectional view of the region of the UHV port of the vacuum pump of FIG. Enlarged side view of the region labeled B in FIGS. 3 and 4 Enlarged cross-sectional view of the region labeled B in FIGS. 3 and 4 Another enlarged cross-sectional view of the region labeled B in FIGS. 3 and 4 Another enlarged cross-sectional view of the region labeled B in FIGS. 3 and 4 Sectional sectional view of another variation of the sectional view according to the invention Side view of another vacuum pump Side view of yet another vacuum pump

  The vacuum system 21 shown in FIG. 1 has a vacuum pump 23 and a receiver (or a vacuum chamber, German: Rezipienten) 25. The vacuum pump 23 is a turbo molecular pump having a first pump stage 27, a second pump stage 29, and a third pump stage 31. Pump stages 27, 29 and 31 are arranged in series and are provided for pumping from a receiver 25 of a fluid, for example air, and from the inlet of the vacuum pump 23 to the outlet 35 of the vacuum pump 23. Yes. This (to this outlet) can be connected to another vacuum pump.

  The first pump stage 27 can be a turbomolecular pump stage. This has a rotor disk fixed to the rotor shaft and a stator disk arranged between the rotor disks in the axial direction. The second pump stage 29 and the third pump stage 31 can be Holbeck stages connected to enter. However, other configurations are of course possible. For example, the second pump stage 28 can be another turbomolecular pump stage. On the other hand, the third pump stage 31 is a Holbeck pump stage.

  As shown in FIG. 1, the outlet 37 of the receiver 25 is connected to the inlet 33 of the vacuum pump 23. At that time, an outlet opening 39 provided in the outlet 37 is provided with an inlet opening 41 provided in the inlet 33 by a known method. Moreover, in the example shown, an outlet portion 43 formed as a flange is provided so as to surround the outlet opening 39. The outlet portion faces the inlet portion 45 that changes so as to surround the inlet opening 41.

  Between the inlet portion 45 and the outlet portion 43, a first inner seal 47 is provided that moves so as to surround the inlet opening 41. A second outer seal 49 is provided on the outer side in the radial direction of the first seal 47. The second outer seal 49 also moves so as to surround the inlet opening 41. By means of both seals 47, 49, the connection channel extending between the outlet opening 39 and the inlet opening 41 is sealed between the vacuum pump 23 and the receiver 25.

  Both seals 47, 49 surround one volume 51. This is bounded by the outer wall of the inlet portion 45 and outlet portion 43 in the embodiment shown. A suction part 53 is provided for evacuating the volume 51. This suction part has at least one suction opening 55. The volume 51 is connected to the second pump stage 29 via this suction opening. The volume 51 is thus evacuated by the second pump stage 29 and the third pump stage 31 arranged afterwards.

  Other variations are possible for evacuating the volume 51. For example, the volume 51 can be evacuated via only the third pump stage 51 or by a separate vacuum pump.

  An outer second seal 49 seals the volume 51 against the surroundings. Therefore, since the inside of the volume 51 is negative pressure, the inner first seal 47 does not seal the connection channel between the openings 39 and 41 to the surroundings, but only against negative pressure in the volume 51. Seal. This makes it possible to achieve a lower pressure in the receiver 25, in particular compared to using only one seal instead of both seals 47, 49 by the intermediate suction part 55.

Further, in the vacuum system 21, the first seal 47 is formed as a flat seal made of a soft metal material or made of an elastomer. Thereby, since the first seal 47 is only slightly outgassed, a particularly low pressure in the UHV region, in particular a pressure lower than 10 ⁻⁹ mbar, can be achieved in the receiver and can be maintained for a long time.

  In the formation of the first seal 47 as a flat seal made of a soft metal material or made of elastomer, a sufficient sealing action already occurs when the outlet part 43 and the inlet part 45 are pressed against each other with a low pressing force. This is particularly advantageous. This is because, based on the softness of the sealing material, the deformation of the sealing material and the associated sealing action already occur under a low pressing force. Moreover, deformation or damage of the outlet part 43 or the inlet part 45 is prevented based on the soft sealing material.

  Particularly preferably, the soft material for the first seal 47 is an aluminum alloy, such as EN AW 1050a H111. This is particularly advantageous when the housing of the vacuum pump 23 and / or the receiver 25 is made of aluminum. This is because it is guaranteed that the first seal 47 is clearly softer than the outlet part 43 and / or the inlet part 45.

  In addition, the first seal 47 formed of a soft metal can be formed as a flat seal. Since the first seal 47 does not need to be sealed to the surroundings, only a very low degree of deformation of the seal is necessary to achieve a sufficient sealing action. The first seal 47 can, for example, be flattened between the inlet part 45 and the outlet part 43, in which case it is already from 0.1 mm to 0.5 mm or from 0.05 mm to 0.1 mm. It is possible that the deformation of the one already leads to a sufficient sealing action. In particular, in a very narrow seal location, the degree of deformation can be larger, for example up to 0.5 mm. This is because the pressing force can be kept small here as well.

  When the first seal 47 is formed from an elastomer as a flat seal, in particular they can consist of PTFE, KFM or Viton seals.

  The first seal 47 made of a soft metal material or elastomer preferably has a height of at most 2 mm. Preferably, the height is between 0.03 mm and 1.5 mm, more preferably between 0.05 mm and 1 mm, and even more preferably between 0.05 mm and 0.5 mm. In the first seal 47 formed so flat, the outlet is small. This allows a lower final pressure in the UHV region to be achieved and held in the receiver 25.

  The second seal 49 can be formed as an O-ring made of an elastomer such as PTFE, KFM or Viton.

  The vacuum pump 23a of FIGS. 2 and 3 is a turbo molecular pump formed as a split flow pump. Split flow pumps are known per se.

  The vacuum pump 23a can be formed particularly in the same manner as the vacuum pump of FIG. However, the vacuum pump 23 a can also have an intermediate inlet 57 called a tap (German: Anzungfung) in addition to the inlet 33. To this, a chamber of another receiver or a receiver (not shown) connected to the inlet 33 can be connected.

  In the vacuum pump 23a, the inlet 33 forms a so-called UHV port. This is because the receiver connected to the inlet 33 can be evacuated to a vacuum in the UHV region.

  The vacuum pump 23a can form a vacuum system in combination with the receiver 25 connected to the inlet 33, as described above with reference to FIG. At that time, as can be seen in the enlarged view of the UHV port formed by the inlet 33 of FIG. 4, the outlet opening 39 (see FIG. 1) of the outlet 37 of the receiver 25 and the inlet opening of the inlet 33 of the vacuum pump 23a. Again, a first inner seal 47 and a second outer seal 49 are used with a suction part 53 (having a suction opening 55) located between them, for the sealing of the connection channel between 41. .

  The above formation for the first seal 47 and the second seal 49 is also effective for the vacuum pump 23a. In particular, as in the vacuum pump of FIG. 1, the first seal 47 is formed from a soft metal material or as an elastomeric flat seal.

  For accommodating the seals 47, 49, one accommodating part 58, 59 that circulates around the inlet opening 41 can be provided in the inlet part 45. In addition, an aggregation channel 61 connected to the suction opening 55 is formed in the inlet part 45 and between the seals 47, 49, which is particularly milled (in German: einfraesen). Through the aggregation channel 61, the volume 51 (see FIG. 1) enclosed between the seals 47 and 49 in the connected receiver 25 can be evacuated via the suction part 53 in an improved manner. is there.

  FIGS. 5 to 8 show the area of the inlet 33 labeled B in FIGS. 3 and 4 and each enlarged partial view of the UHV port.

  As shown in FIG. 5, a cutting edge 63 can be formed in the inlet portion 45 and particularly in the substantially central portion of the accommodating portion 57. The cutting edge 63 interacts with the first seal 47 so that a sufficient sealing action is achieved even when the first seal 47 is weakly pressed.

  A cutting edge 63 that interacts with the first seal 47 as such can also be provided at the outlet portion 43 of the outlet 37 of the receiver 25. In that case, the cutting edge 63 can be formed also in the approximate center of the accommodating part for the 1st seal | sticker 47 provided in the outlet part 43 (not shown).

  In the variation shown in FIG. 6, the cutting edge is not formed in the accommodating portion 57. Therefore, the first seal 47 can be crushed flat as viewed over the entire width of the accommodating portion 57, and thus a sufficient sealing action can be achieved. While the variation shown in FIG. 6 is preferably used in conjunction with a first seal 47 formed from an elastomer as a flat seal, the embodiment of FIG. 5 is preferably a first made of a soft metal material. One seal 47 is used.

  In the variation shown in FIG. 7, the accommodating part 57 in the inlet part 45 is formed in the form of a step. The step extends away from the inlet opening 41 radially outward. A raised portion 65 is formed on the outlet portion 43 of the receiver 25 next to the opening 39. A receiving portion 59 for the first seal 57 continues on the radially outer side of the raised portion, and a region 67 located at a deeper position continues further on the radially outer side. An R 69 is formed in a transition region between the raised portion 65 and the accommodating portion 59. As shown in FIG. 7, the first seal 47 is located between the accommodating portion 57 of the inlet portion 45 and the accommodating portion 59 of the outlet portion 43. The edge of the first seal 47 (the edge on the side of the round 69 and the edge that goes around the inlet opening 41) is pressed or crushed by the round 69. As a result, a sufficient sealing action can be achieved even at low pressing forces.

  In the variation of FIG. 8, the inlet portions 45 and the outlet portion 43 are provided with receiving portions 57 and 59 formed in the form of grooves that move around the inlet opening 41 or the outlet opening 39. , Formed for the first seal 47. The accommodating portion 57 in the inlet portion 45 and the accommodating portion 59 in the outlet portion 43 are both thinner and deeper. As a result, both of the receiving portions 57 and 59 are preferably provided for receiving the first seal 46 whose basic shape is a diamond-shaped cross section.

  Based on the taper, the end region 71 of the first seal 47 (the end region on the inlet portion 45 side) has a smaller cross section. When the first seal 47 is pressed to achieve the sealing action, this end region is deformed plastically or elastically. Based on the small cross section of the end region 71, a sufficient sealing action can already be achieved with a small assembly force. The same applies to the end region 73 of the first seal 47 (the end region on the outlet portion 43 side).

  In the variation illustrated in FIG. 9 of the vacuum system 21a according to the invention, the first seal 47 and the second seal 49 are integrally formed with each other. Both seals 47, 49 thereby form a single double seal.

  As FIG. 9 shows, both seals 47, 49 surround the first volume 51a. This volume is bounded by the inlet portion 45 as well. Both seals 47, 49 further surround the second volume 51b. This volume is further bounded by the outlet portion 43. A suction portion 53 is provided in both the inlet portion 45 and the outlet portion 43. This suction part can be formed like the suction part described above. In particular, the suction part 53 in the receiver is preferably connected to an independent vacuum pump at that time, and evacuates the volume 51b.

  The double seal formed by both the seals 47 and 49 is accommodated in the accommodating portion 57 provided in the inlet portion 45 and in the accommodating portion 59 provided in the outlet portion 43. In each of the main portions 57 and 59, there is provided a cutting edge 63 that is located inside the suction portion 53 when viewed in the radial direction and that circulates around the openings 39 and 41. The cutting edge 63 cooperates with the first seal 47 to seal the connecting channel transitioning between the openings 39, 41 against the volumes 51a and 51b.

  In addition, the housing portions 57 and 59 have cutting edges 63 that are located outside the suction portion 53 in the radial direction and circulate around the openings 39 and 41. This cutting edge cooperates with the second seal 49 to seal the volume 51a or volume 51b from the surroundings.

  The double seal formed by both seals 47 and 49 can be formed as a metal flat seal or as an elastomeric flat seal.

  The vacuum pump 23b shown in FIG. 10 is configured like the vacuum pump of FIG. However, in the vacuum pump 23 b of FIG. 10, the inlet 33 has two inlet openings 41. These are surrounded by an inlet portion 45. As shown in FIG. 10, each inlet opening 41 is surrounded by a first seal 47. The first seal transitions around each inlet opening 41. A second seal 49 is provided outside both the first seal 47 and the suction portion 53 having the suction opening 55 in the radial direction. This thus surrounds both first seals 47. An aggregation channel 61 is provided in the inlet portion 45 in the region between the seals 47 and 49.

  For the formation of a vacuum system, the inlet 33 can be connected to a receiver having an outlet. This receiver has two outlet openings. These outlet openings are provided with both inlet openings 41 (not shown) under a receiver connected to the vacuum pump 23b.

  The above description is also valid for the first and second seals 47 and 49. In addition, it is possible to provide corresponding housings 57, 59 for the seals 47, 49.

  In the vacuum pump 23b of the variation shown in FIG. 11, the inlet openings 41 (to each other) are located closer together than the vacuum pump of FIG. Thus, both first seals 47 can be formed together as one. The integral formation of both first seals 47 is also possible in the embodiment of FIG.

  As described above with reference to FIG. 9, the first and second seals 47, 49 can be formed integrally with each other in the variations of FIGS. 10 and 11 as well.

21, 21a Vacuum system 23, 23a, 23b Vacuum pump 25 Receiver 27 First pump stage 29 Second pump stage 31 Third pump stage 33 Inlet 35 Outlet 37 Outlet 39 Outlet opening 41 Inlet opening 43 Outlet part 45 Inlet portion 47 First seal 49 Second seal 51 Volume 51a, 52b Volume 53 Suction part 55 Suction opening 57 Accommodation part 59 Accommodation part 61 Aggregation channel 63 Cutting edge 65 Raised part 67 Area 69 Earl 71 End area 73 End Department

Claims (19)

A vacuum system having at least one vacuum pump (23, 23a, 23b) and at least one receiver (25), wherein an outlet opening (39) provided in the outlet (37) is connected to the inlet (33 ) And a portion (43) of the outlet (34) that moves around the outlet opening (39) and is aligned with the inlet opening (41) provided in the inlet opening (41). Circulates around the inlet opening (41) between the inlet part (45) and the outlet part (43). The first seal (47) that moves in the direction of the inlet opening (41) radially outward of the first seal (47) The outlet (37) of the receiver (25) is releasable with the inlet (33) of the vacuum pump (23, 23a, 23b) so that a second seal (49) that moves around the ring is provided. At least one suction for evacuation of at least one volume (51, 51a, 51b) that is connected to or connectable to both seals (47, 49) In the vacuum system in which the part (53) is provided,
Vacuum system, characterized in that the first seal (47) is formed as a flat seal made of a soft metal material or made of an elastomer. The metal material has a Brinell hardness lower than HB35, preferably a Brinell hardness lower than HB30, more preferably a Brinell hardness lower than HB25, and even more preferably up to HB20. The vacuum system according to claim 1, wherein the value is a value. 3. Vacuum system according to claim 1 or 2, characterized in that the metal material is an aluminum alloy, in particular EN AW 1050a H111. 4. A vacuum system according to any one of the preceding claims, characterized in that the first seal (47) is made of a metallic material and is formed as a flat seal. The vacuum system according to claim 1, wherein the elastomer is PTFE, FKM or Viton. The first seal (47) has a height of up to 2 mm, preferably has a height between 0.03 and 1.5 mm, and even more preferably has a height between 0.05 and 1 mm. 6. A vacuum system according to any one of claims 1 to 5, characterized in that it has a height and even more preferably has a height between 0.05 and 0.5 mm. The first seal (47) is crushed flat between 0.05 mm to 0.5 mm, preferably 0.05 mm to 0.1 mm, in particular between the inlet part (45) and the outlet part (43). The vacuum system according to any one of claims 1 to 6, wherein: 8. The second seal (49) according to any one of claims 1 to 7, characterized in that it consists of an elastomer, in particular PTFE, FKM or Viton and is preferably formed in the form of an O-ring. Vacuum system. The suction part (53) has at least one suction opening (55) provided in the inlet part (45) and / or the suction part (53) is provided in the outlet opening (43). 9. A vacuum system according to any one of the preceding claims, characterized in that it has at least one suction opening (55). A first seal (47) formed in the inlet part (45) and / or the outlet part, in particular in the form of a groove, transitioning around the inlet opening (41) or outlet opening (43) 10. A vacuum system according to any one of claims 1 to 9, characterized in that an accommodating part (57) is provided. A cutting edge (63) is formed in the receiving part (57), preferably in the center thereof, which transitions around the inlet opening (41) or outlet opening (43), and / or 11. A vacuum system according to any one of the preceding claims, characterized in that the receiving part (57) tapers with increasing depth. When the inlet part (45) and the outlet part (43) gather, the edge of the first seal (47) arranged between them, in particular at least one edge that moves around the inlet opening 12. A vacuum system according to any one of the preceding claims, characterized in that the inlet part (45) and / or the outlet part (43) are formed such that they are crushed. 13. Both seals (47, 49) are formed integrally with one another, in particular in the form of a metal flat seal or in the form of an elastomeric flat seal. The vacuum system as described in any one. The housing of the vacuum pump (23, 23a, 23b) is made of aluminum, in particular including the inlet part (45), and / or
14. A vacuum system according to any one of the preceding claims, characterized in that the housing of the receiver (25) is made of aluminum, in particular including the outlet part (43). The inlet (33) has at least two inlet openings (41) surrounded by the inlet portion (45), and each one first seal (around each of the at least two inlet openings (41)). 47), and
The second seal (49) transitions around the at least two first seals (47) radially outward of the at least two first seals (47). The vacuum system according to any one of 1 to 14. 16. A vacuum system according to claim 15, characterized in that at least two first seals (47) are integrally formed with each other. A double seal for sealing the connection between the outlet (37) of the receiver (25) and the inlet (33) of the vacuum pump (23, 23a, 23b). 37) the outlet opening (39) provided in the inlet is aligned with the inlet opening (41) provided in the inlet (33) and circulates around the outlet opening (39) The part (43) of the changing outlet (37) faces the part (45) of the inlet (33) changing so as to circulate around the inlet opening (41). Seal (47) and second seal (49), wherein the second seal (49) has an inlet radially outward of the first seal (47). At least one volume (51a, 51b) that moves around the mouth (41) and in which both seals (47, 49) can be evacuated via at least one suction part (53) In a double seal which is or is arranged between the inlet part (45) and the outlet part (43) so as to surround
Double seal, characterized in that both seals (47, 49) are integrally formed with each other. 18. Double seal according to claim 17, characterized in that both integrally formed seals (47, 49) are formed as metal flat seals or as elastomer flat seals. Sealing of the connection between the outlet (37) of the receiver (25) with at least two outlet openings (39) and the inlet (33) of the vacuum pump (23b) with at least two inlet openings (41) Sealing device, wherein each outlet opening (39) is aligned with each inlet opening (41) when connected and of the outlet opening (39) The portion (43) of the outlet (37) that moves around the circumference faces the portion (45) of the inlet (33) that moves around the inlet opening (41). The device has at least two seals (47), each between an inlet part (45) and an outlet part (43). In which the seals (47) are arranged or can be arranged to move around each one of the inlet openings (41), wherein at least two seals (47) are integral with each other. A sealing device characterized by being formed.

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