WO2014016551A1 - Sealing arrangement - Google Patents
Sealing arrangement Download PDFInfo
- Publication number
- WO2014016551A1 WO2014016551A1 PCT/GB2013/051623 GB2013051623W WO2014016551A1 WO 2014016551 A1 WO2014016551 A1 WO 2014016551A1 GB 2013051623 W GB2013051623 W GB 2013051623W WO 2014016551 A1 WO2014016551 A1 WO 2014016551A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sealing arrangement
- housing member
- seal
- pump
- pumping mechanism
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
Definitions
- This invention relates to a sealing arrangement for an ultra high vacuum (UHV) pump, and to a UHV pump incorporating such a sealing arrangement.
- UHV ultra high vacuum
- a UHV pump is essentially a pump that can operate with inlet pressures within the UHV range, that is to say less than lxlO "9 mbar.
- baking is usually required so the pump is typically expensive as a stainless steel envelope is used to house a pumping mechanism, the envelope containing knife-edged seals for copper gaskets.
- an aluminium envelope instead of a stainless steel envelope in an attempt to reduce costs.
- an aluminium envelope can only be used to give UHV performance if expensive and complex seals (such as Helicoflex ® rings coated in a soft metal such as gold or silver) are used.
- the envelope can contain a knife-edged seal which deforms to create a UHV seal. This is a cheap UHV alternative, but requires the entire envelope to be replaced if the seal is broken.
- a UHV pump such as a turbomolecular pump requires its main inlet to be sealed to UHV levels so that an ancillary blanking plate forming part of such a pump needs to have the same requirement.
- conventional copper seals cannot be used, and a fluoroelastomer ring has a leak rate which is too high for a UHV application.
- a conventional metal ring also has too high a leak rate.
- the main aim of the invention is to provide a sea ling arrangement for a UHV pump which permits a cheaper pump envelope to be utilised.
- the invention also aims to provide a UHV pump of the type having a blanking plate that has a reduced leak rate, so that UHV performance can be achieved.
- the present invention provides a sealing arrangement for a UHV pump having first and second housing members, the first housing member housing a pumping mechanism, the sealing arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement comprises inner and outer seals extending around the periphery of the first housing member and a plenum positioned between the inner seal and the outer seal, and wherein pumping means are provided for pumping the plenum to a sub-atmospheric pressure.
- the first and second housing members may be made of aluminium, the inner seal may be a simple O-ring or metal seal such as a C-section, a Wills ring or a fluoroelastomer ring, and the outer seal may be a fluoroelastomer ring.
- This sealing arrangement defines a self-contained differentially-pumped seal that enables a UHV pump to be made that is much cheaper than more conventional UHV pumps. Moreover, this sealing arrangement has a reduced leakage rate.
- the pum pi ng mea ns is constituted by the pum ping mechanism.
- the pumping mechanism may be connected to the plenum by a passage formed in the first housing member.
- the pumping mechanism is connected to the plenum by external pipework and first and second vacuum connections, the first vacuum connection being connected to the plenum, and the second vacuum connection being connected to the pumping mechanism.
- the pumping means is constituted by a secondary pump connected to the plenum by a vacuum connection.
- the first housing member may be an envelope
- the second housing member may be an end cap, an envelope and vacuum chamber or a vacuum vessel.
- the i nvention provides a U HV pum p com prising a first housi ng member housing a pum ping mechanism a nd a second housing member, the sea ling arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement is as defined above..
- the invention provides a UHV pump comprising a first housing member housing a pumping mechanism, a second housing member and a blanking plate, the sealing arrangement being positioned to p rovide a sea l betwee n the fi rst housing member and the bla nking plate, wherein the sealing arrangement is as defined above, and the pum ping mechanism is in pa rt a turbomolecular pumping mechanism.
- the blanking plate is made of aluminium.
- Figure 1 is a sectiona l view illustrating the principle of the sealing arrangement of the invention
- Figure 2 is a sectional view illustrating a first form of sealing arrangement constructed in accorda nce with the invention
- Figure 3 is a sectional view illustrating a second form of sealing arra ngement constructed in accorda nce with the invention
- Figure 4 is a sectional view illustrating a third form of sealing arra ngement constructed in accorda nce with the invention.
- FIG. 5 is a schematic representation of a UHV pump incorporating the third form of sealing arra ngement.
- a UHV pump includes an aluminium envelope 1 (only part of which can be seen) and a vacuum sealing end cap, chamber or vacuum vessel 2 made of aluminium.
- the envelope 1 houses a conventional pumping mechanism (not shown), and is sealed with respect to the end cap 2 by a sealing arrangement constituted by a pair of seals 3 and 4.
- the inner seal 3 could be a simple metal seal such as a C-section ring, a Wills ring or a fluoroelastomer ring, and the outer seal 4 is a fluoroelastomer ring made of, for example, Viton.
- a plenum 5 is positioned between the inner and outer seals 3 and 4.
- the plenum 5 is pumped to below atmospheric pressure via a vacuum connection 6.
- the resulting reduction in pressure within the plenum 5 reduces the leak rate of the inner seal 3 as that seal no longer needs to seal to atmosphere, thereby enabling lower pressures to be achieved at the main pumping inlet (not shown).
- Pumping of the plenum to a sub-atmospheric pressure can be effected by using the pumping mechanism of the UHV pump and external pipework (see Figure 2), by using a secondary vacuum pump (see Figure 3), or by using the pumping mechanism and internal cross drilling within the pump envelope (see Figure 4).
- FIG 2 shows a first practical form of sealing arrangement and uses the same reference numerals for the same parts.
- the pumping mechanism is designated by the reference numeral 7. As this mechanism is conventional it will not be described in any detail, though the low pressure pump inlet 8 is shown adjacent to the inner seal 3.
- the plenum 5 is pumped to below atmospheric pressure by the pumping mechanism 7 via the vacuum connection 6, external pipework (not shown), a further vacuum connection 9 and an inlet 10 to the pump.
- the arrow A shows the direction of the pumped gases.
- Figure 3 shows a second practica l form of sea li ng a rrangement a nd uses the sa me reference numerals for the same parts.
- the pumping mechanism is again designated by the reference numeral 7.
- the low pressure pump inlet 8 is shown adjacent to the inner seal 3.
- the plenum 5 is pumped to below atmospheric pressure by a secondary pump (not shown) via the vacuum connection 6.
- the arrow B shows the direction of the pumped gases.
- FIG. 4 shows a third practical form of sealing arrangement and uses the same reference numerals for the same parts.
- the pumping mechanism is again designated by the reference numeral 7. As this mechanism is conventional it will not be described in any detail, though the low pressure pump inlet 8 is shown adjacent to the inner seal 3.
- the plenum 5 is pumped to below atmospheric pressure by the pumping mechanism 7 via a cross drilling 5a formed within the envelope 1.
- the arrow C shows the direction of the pumped gases.
- Each of the sealing arrangements described above has its inner seal differentially pumped so that the pressure difference between the inner and outer diameters of the inner seal is less than if that seal was sealing directly from atmosphere.
- This differentially-pumped seal can be adapted to lower the leak rate of a UHV pump utilising a sealed blanking plate.
- a UHV pump is typified by a turbomolecular (TMP) pump, and Figure 5 shows such a pump provided with a differentially-pumped sealing arrangement.
- TMP turbomolecular
- FIG. 5 shows a TMP indicated generally by the reference numeral 20.
- the pump 20 has an aluminium envelope 21 which is sealed with respect to a vacuum sealing end cap 22 by means of a differentially-pumped sealing arrangement acting against a blanking plate 22a. Both the end cap 22 and the blanking plate 22a are made of aluminium.
- the sealing arrangement is constituted by a pair of of seals 23 and 24.
- the inner seal 23 could be a simple metal seal such as a C-section ring, a Wills ring or a fluoroelastomer ring
- the outer seal 24 is a fluoroelastomer ring made of, for example Viton.
- a plenum 25 is positioned between the inner and outer seals 23 and 24.
- the plenum 25 is pumped to below atmospheric pressure by the TMP 20 via a cross drilling 27.
- This sealing arrangement is, therefore similar to that of Figure 4.
- the TMP includes a UHV region 31 in the region of the end cap 22 and a sub- atmospheric region 32 positioned between two turbomolecular pump stages 33 and 34 and adjacent to a port 35 contiguous with the cross drilling 27.
- the TMP has a port 36 for exhausting pumped gases.
- UHV pressures can be achieved.
- the differential pumping is totally integrated into the envelope 21, it does not rely on any additional mechanisms or interfaces to enable it to function.
- This pump has similar advantages to pumps incorporating the sealing arrangements of Figures 2 to 4, namely the use of cheap aluminium for the main parts of the pump, and the avoidance of having to use copper gaskets/expensive metal seals.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Gasket Seals (AREA)
Abstract
A sealing arrangement (2, 3, 5) is provided for a UHV pump having a first housing member(1) and a second housing member(2). The first housing member (1) houses a pumping mechanism (7),the sealing arrangement (2, 3, 5) is positioned to provide a seal between the first and second housing members (1, 2). The sealing arrangement comprises inner and outer seals (2 and 3) extending around the periphery of the envelope (1) and a plenum (5) positioned between the inner seal and the outer seal. Pumping means are provided for pumping the plenum (5) to a sub-atmospheric pressure.
Description
SEALING ARRANGEMENT
TECHNICAL FIELD
This invention relates to a sealing arrangement for an ultra high vacuum (UHV) pump, and to a UHV pump incorporating such a sealing arrangement.
BACKGROUND OF THE INVENTION
A UHV pump is essentially a pump that can operate with inlet pressures within the UHV range, that is to say less than lxlO"9 mbar. To achieve UHV pressures, baking is usually required so the pump is typically expensive as a stainless steel envelope is used to house a pumping mechanism, the envelope containing knife-edged seals for copper gaskets.
It is known to use an aluminium envelope instead of a stainless steel envelope in an attempt to reduce costs. Unfortunately, an aluminium envelope can only be used to give UHV performance if expensive and complex seals (such as Helicoflex® rings coated in a soft metal such as gold or silver) are used. Alternatively, the envelope can contain a knife-edged seal which deforms to create a UHV seal. This is a cheap UHV alternative, but requires the entire envelope to be replaced if the seal is broken.
A UHV pump such as a turbomolecular pump requires its main inlet to be sealed to UHV levels so that an ancillary blanking plate forming part of such a pump needs to have the same requirement. Unfortunately, due to the chosen envelope material, conventional copper seals cannot be used, and a fluoroelastomer ring has a leak rate which is too high for a UHV application. A conventional metal ring also has too high a leak rate.
The main aim of the invention is to provide a sea ling arrangement for a UHV pump which permits a cheaper pump envelope to be utilised. The invention also aims to provide a UHV pump of the type having a blanking plate that has a reduced leak rate, so that UHV performance can be achieved.
SUMMARY OF THE INVENTION
In a first aspect, the present invention provides a sealing arrangement for a UHV pump having first and second housing members, the first housing member housing a pumping mechanism, the sealing arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement comprises inner and outer seals extending around the periphery of the first housing member and a plenum positioned between the inner seal and the outer seal, and wherein pumping means are provided for pumping the plenum to a sub-atmospheric pressure.
The first and second housing members may be made of aluminium, the inner seal may be a simple O-ring or metal seal such as a C-section, a Wills ring or a fluoroelastomer ring, and the outer seal may be a fluoroelastomer ring.
This sealing arrangement defines a self-contained differentially-pumped seal that enables a UHV pump to be made that is much cheaper than more conventional UHV pumps. Moreover, this sealing arrangement has a reduced leakage rate. I n one preferred em bodi ment, the pum pi ng mea ns is constituted by the pum ping mechanism. In this case, the pumping mechanism may be connected to the plenum by a passage formed in the first housing member. Alternatively, the pumping mechanism is connected to the plenum by external pipework and first and second vacuum connections, the first vacuum connection being connected to the plenum, and the second vacuum connection being connected to the pumping mechanism.
In another embodiment, the pumping means is constituted by a secondary pump connected to the plenum by a vacuum connection.
The first housing member may be an envelope, and the second housing member may be an end cap, an envelope and vacuum chamber or a vacuum vessel. I n a further aspect, the i nvention provides a U HV pum p com prising a first housi ng member housing a pum ping mechanism a nd a second housing member, the sea ling
arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement is as defined above..
I n yet a further aspect, the invention provides a UHV pump comprising a first housing member housing a pumping mechanism, a second housing member and a blanking plate, the sealing arrangement being positioned to p rovide a sea l betwee n the fi rst housing member and the bla nking plate, wherein the sealing arrangement is as defined above, and the pum ping mechanism is in pa rt a turbomolecular pumping mechanism.
The provision of this differentially-pumped sealing arrangement ensures a reduced leak rate and good UHV performance without the use of expensive seals or an expensive steel envelope.
Advantageously, the blanking plate is made of aluminium. BRIEF DESCRIPTION OF THE DRAWINGS
The invention will now be described i n greate r deta i l, by way of exa m ple on ly, with reference to the drawings, in which:-
Figure 1 is a sectiona l view illustrating the principle of the sealing arrangement of the invention;
Figure 2 is a sectional view illustrating a first form of sealing arrangement constructed in accorda nce with the invention;
Figure 3 is a sectional view illustrating a second form of sealing arra ngement constructed in accorda nce with the invention;
Figure 4 is a sectional view illustrating a third form of sealing arra ngement constructed in accorda nce with the invention; and
Figure 5 is a schematic representation of a UHV pump incorporating the third form of sealing arra ngement.
DETAILED DESCRIPTION OF AN EMBODIMENT
Referring to the drawings, Figure 1 illustrates the principle underlying the invention. A UHV pump includes an aluminium envelope 1 (only part of which can be seen) and a vacuum sealing end cap, chamber or vacuum vessel 2 made of aluminium. The envelope 1 houses a conventional pumping mechanism (not shown), and is sealed with respect to the end cap 2 by a sealing arrangement constituted by a pair of seals 3 and 4. The inner seal 3 could be a simple metal seal such as a C-section ring, a Wills ring or a fluoroelastomer ring, and the outer seal 4 is a fluoroelastomer ring made of, for example, Viton. A plenum 5 is positioned between the inner and outer seals 3 and 4. The plenum 5 is pumped to below atmospheric pressure via a vacuum connection 6. The resulting reduction in pressure within the plenum 5 reduces the leak rate of the inner seal 3 as that seal no longer needs to seal to atmosphere, thereby enabling lower pressures to be achieved at the main pumping inlet (not shown).
Pumping of the plenum to a sub-atmospheric pressure can be effected by using the pumping mechanism of the UHV pump and external pipework (see Figure 2), by using a secondary vacuum pump (see Figure 3), or by using the pumping mechanism and internal cross drilling within the pump envelope (see Figure 4).
Figure 2 shows a first practical form of sealing arrangement and uses the same reference numerals for the same parts. The pumping mechanism is designated by the reference numeral 7. As this mechanism is conventional it will not be described in any detail, though the low pressure pump inlet 8 is shown adjacent to the inner seal 3. The plenum 5 is pumped to below atmospheric pressure by the pumping mechanism 7 via the vacuum connection 6, external pipework (not shown), a further vacuum connection 9 and an inlet 10 to the pump. The arrow A shows the direction of the pumped gases. Figure 3 shows a second practica l form of sea li ng a rrangement a nd uses the sa me reference numerals for the same parts. The pumping mechanism is again designated by the reference numeral 7. As this pumping mechanism is conventional it will not be described in any detail, though the low pressure pump inlet 8 is shown adjacent to the
inner seal 3. The plenum 5 is pumped to below atmospheric pressure by a secondary pump (not shown) via the vacuum connection 6. The arrow B shows the direction of the pumped gases.
Figure 4 shows a third practical form of sealing arrangement and uses the same reference numerals for the same parts. The pumping mechanism is again designated by the reference numeral 7. As this mechanism is conventional it will not be described in any detail, though the low pressure pump inlet 8 is shown adjacent to the inner seal 3. The plenum 5 is pumped to below atmospheric pressure by the pumping mechanism 7 via a cross drilling 5a formed within the envelope 1. The arrow C shows the direction of the pumped gases.
Each of the sealing arrangements described above has its inner seal differentially pumped so that the pressure difference between the inner and outer diameters of the inner seal is less than if that seal was sealing directly from atmosphere. This differentially-pumped seal can be adapted to lower the leak rate of a UHV pump utilising a sealed blanking plate. Such a UHV pump is typified by a turbomolecular (TMP) pump, and Figure 5 shows such a pump provided with a differentially-pumped sealing arrangement.
Figure 5 shows a TMP indicated generally by the reference numeral 20. The pump 20 has an aluminium envelope 21 which is sealed with respect to a vacuum sealing end cap 22 by means of a differentially-pumped sealing arrangement acting against a blanking plate 22a. Both the end cap 22 and the blanking plate 22a are made of aluminium. As with the embodiments of Figures 2 to 4, the sealing arrangement is constituted by a pair of of seals 23 and 24. The inner seal 23 could be a simple metal seal such as a C-section ring, a Wills ring or a fluoroelastomer ring, and the outer seal 24 is a fluoroelastomer ring made of, for example Viton. A plenum 25 is positioned between the inner and outer seals 23 and 24. The plenum 25 is pumped to below atmospheric pressure by the TMP 20 via a cross drilling 27. This sealing arrangement is, therefore similar to that of Figure 4.
The TMP includes a UHV region 31 in the region of the end cap 22 and a sub- atmospheric region 32 positioned between two turbomolecular pump stages 33 and 34 and adjacent to a port 35 contiguous with the cross drilling 27. The TMP has a port 36 for exhausting pumped gases. As a result of the differentially-pumped sealing a rrangement, UHV pressures can be achieved. Moreover, as the differential pumping is totally integrated into the envelope 21, it does not rely on any additional mechanisms or interfaces to enable it to function. This pump has similar advantages to pumps incorporating the sealing arrangements of Figures 2 to 4, namely the use of cheap aluminium for the main parts of the pump, and the avoidance of having to use copper gaskets/expensive metal seals.
It will be appreciated that various modifications can be made to the sealing arrangement described herein without departing from the scope of the present invention.
Claims
A sealing arrangement for a UHV pump having first and second housing members, the first housing member housing a pumping mechanism, the sealing arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement comprises inner and outer seals extending around the periphery of the first housing member and a plenum positioned between the inner seal and the outer seal, and wherein pumping means are provided for pumping the plenum to a sub-atmospheric pressure.
A sealing arrangement as claimed in claim 1, wherein the first and second housing members are made of aluminium.
A sealing arrangement as claimed in claim 1 or claim 2, wherein the inner seal is a simple metal seal; a C-section; a Wills ring; or a fluoroelastomer O-ring.
A sealing arrangement as claimed in any one of claims 1, 2 or 3, wherein the outer seal is a fluoroelastomer ring.
A sealing arrangement as claimed in any one of claims 1 to 4, wherein the pumping means is constituted by the pumping mechanism.
A sealing arrangement as claimed in claim 5, wherein the pumping mechanism is connected to the plenum by a passage formed in the first housing member.
A sealing arrangement as claimed in claim 6, wherein the pumping mechanism is connected to the plenum by external pipework and first and second vacuum connections, the first vacuum connection being connected to the plenum, and the second vacuum connection being connected to the pumping mechanism.
8. A sealing arrangement as claimed in any one of claims 1 to 4, wherein the pumping means is constituted by a secondary pump connected to the ple n u m by a vacuum connection.
9. A sealing arrangement as claimed in any one of claims 1 to 8, wherein the first housing member is an envelope.
10. A sealing arrangement as claimed in any one of claims 1 to 9, wherein the second housing member is an end cap.
11. A sealing arrangement as claimed in any one of claims 1 to 9, wherein the second housing member is an envelope and vacuum chamber. 12. A sealing arrangement as claimed in any one of claims 1 to 9, wherein the second housing member is a vacuum vessel.
13. A UHV pump comprising a first housing member housing a pumping mechanism and a second housing member, the sealing arrangement being positioned to provide a seal between the first and second housing members, wherein the sealing arrangement is as claimed in any one of claims 1 to 12.
A UHV pump comprising a first housing member housing a pumping mechanism, a second housing member and a blanking plate, the sealing arrangement being positioned to provide a seal between the first housing member and the blanking plate, wherein the sealing arrangement is as claimed in any one of claims 1 to 12, and the pumping mechanism is in part a turbomolecular pumping mechanism.
15. A pump as claimed in claim 14, wherein the blanking plate is made of aluminium.
A sealing arrangement for a UHV pump, the sealing arrangement being substantially as hereinbefore described with reference to, and as illustrated by, the drawings.
A UHV pump substantially as hereinbefore described with reference to, and illustrated by, the drawings.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB201213296A GB2504329A (en) | 2012-07-26 | 2012-07-26 | Ultra high vacuum pump seal arrangement |
GB1213296.5 | 2012-07-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014016551A1 true WO2014016551A1 (en) | 2014-01-30 |
Family
ID=46882001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2013/051623 WO2014016551A1 (en) | 2012-07-26 | 2013-06-20 | Sealing arrangement |
Country Status (2)
Country | Link |
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GB (1) | GB2504329A (en) |
WO (1) | WO2014016551A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016023805A (en) * | 2014-07-17 | 2016-02-08 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum system |
US9995309B2 (en) | 2013-04-11 | 2018-06-12 | Pfeiffer Vacuum Gmbh | Vacuum system |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2533153B (en) * | 2014-12-12 | 2017-09-20 | Thermo Fisher Scient (Bremen) Gmbh | Vacuum system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9304435U1 (en) * | 1993-03-24 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | |
EP1852613A2 (en) * | 2006-05-04 | 2007-11-07 | Pfeiffer Vacuum Gmbh | Vacuum pump with casing |
US20100098558A1 (en) * | 2007-02-28 | 2010-04-22 | Makarov Alexander A | Vacuum Pump or Vacuum Apparatus with Vacuum Pump |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3144035A (en) * | 1963-02-01 | 1964-08-11 | Nat Res Corp | High vacuum system |
-
2012
- 2012-07-26 GB GB201213296A patent/GB2504329A/en active Pending
-
2013
- 2013-06-20 WO PCT/GB2013/051623 patent/WO2014016551A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9304435U1 (en) * | 1993-03-24 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | |
EP1852613A2 (en) * | 2006-05-04 | 2007-11-07 | Pfeiffer Vacuum Gmbh | Vacuum pump with casing |
US20100098558A1 (en) * | 2007-02-28 | 2010-04-22 | Makarov Alexander A | Vacuum Pump or Vacuum Apparatus with Vacuum Pump |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9995309B2 (en) | 2013-04-11 | 2018-06-12 | Pfeiffer Vacuum Gmbh | Vacuum system |
JP2016023805A (en) * | 2014-07-17 | 2016-02-08 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum system |
Also Published As
Publication number | Publication date |
---|---|
GB2504329A (en) | 2014-01-29 |
GB201213296D0 (en) | 2012-09-05 |
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