GB201213296D0 - Sealing arrangement - Google Patents

Sealing arrangement

Info

Publication number
GB201213296D0
GB201213296D0 GB201213296A GB201213296A GB201213296D0 GB 201213296 D0 GB201213296 D0 GB 201213296D0 GB 201213296 A GB201213296 A GB 201213296A GB 201213296 A GB201213296 A GB 201213296A GB 201213296 D0 GB201213296 D0 GB 201213296D0
Authority
GB
United Kingdom
Prior art keywords
plenum
ring
sealing arrangement
pump
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB201213296A
Other versions
GB2504329A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB201213296A priority Critical patent/GB2504329A/en
Publication of GB201213296D0 publication Critical patent/GB201213296D0/en
Priority to PCT/GB2013/051623 priority patent/WO2014016551A1/en
Publication of GB2504329A publication Critical patent/GB2504329A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Abstract

A sealing arrangement is provided for an ultra high vacuum (UHV) pump having first and second housing members 21, 22. The sealing arrangement includes inner and outer seals 23, 24 with and an evacuated plenum 25 positioned between. Preferably the first and second housing members are made of aluminium, the inner seal is a simple metal seal; a C-section; a Wills ring or a fluoro elastomer O-ring and the outer seal is a fluoroelastomer ring. In one arrangement the plenum is connected to the vacuum pump by a passage formed in the first housing member 27, in an alternate arrangement (figures 1-3) the plenum is connected by external pipe work. Instead of the plenum being connected to the ultra high vacuum pump a secondary pump may be used.
GB201213296A 2012-07-26 2012-07-26 Ultra high vacuum pump seal arrangement Pending GB2504329A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB201213296A GB2504329A (en) 2012-07-26 2012-07-26 Ultra high vacuum pump seal arrangement
PCT/GB2013/051623 WO2014016551A1 (en) 2012-07-26 2013-06-20 Sealing arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB201213296A GB2504329A (en) 2012-07-26 2012-07-26 Ultra high vacuum pump seal arrangement

Publications (2)

Publication Number Publication Date
GB201213296D0 true GB201213296D0 (en) 2012-09-05
GB2504329A GB2504329A (en) 2014-01-29

Family

ID=46882001

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201213296A Pending GB2504329A (en) 2012-07-26 2012-07-26 Ultra high vacuum pump seal arrangement

Country Status (2)

Country Link
GB (1) GB2504329A (en)
WO (1) WO2014016551A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013103650A1 (en) * 2013-04-11 2014-10-16 Pfeiffer Vacuum Gmbh vacuum system
DE102014110078A1 (en) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh vacuum system
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3144035A (en) * 1963-02-01 1964-08-11 Nat Res Corp High vacuum system
DE9304435U1 (en) * 1993-03-24 1993-06-09 Leybold Ag, 6450 Hanau, De
DE102006020710A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump with housing
DE102007010068A1 (en) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum device for evacuation of multiple volumes, has two suction inlets with multiple pressure stages and outer suction inlet for one pressure stage spatially encompasses inner suction inlet for another pressure stage

Also Published As

Publication number Publication date
WO2014016551A1 (en) 2014-01-30
GB2504329A (en) 2014-01-29

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