EP2821650A3 - Membranvakuumpumpe - Google Patents

Membranvakuumpumpe Download PDF

Info

Publication number
EP2821650A3
EP2821650A3 EP20140171516 EP14171516A EP2821650A3 EP 2821650 A3 EP2821650 A3 EP 2821650A3 EP 20140171516 EP20140171516 EP 20140171516 EP 14171516 A EP14171516 A EP 14171516A EP 2821650 A3 EP2821650 A3 EP 2821650A3
Authority
EP
European Patent Office
Prior art keywords
gas
vacuum pump
ballast
membrane vacuum
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20140171516
Other languages
English (en)
French (fr)
Other versions
EP2821650B1 (de
EP2821650A2 (de
Inventor
Thorsten Burggraf
Jürgen Wissner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2821650A2 publication Critical patent/EP2821650A2/de
Publication of EP2821650A3 publication Critical patent/EP2821650A3/de
Application granted granted Critical
Publication of EP2821650B1 publication Critical patent/EP2821650B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/027—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • F04B49/03—Stopping, starting, unloading or idling control by means of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/04—Draining
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Abstract

Die Erfindung betrifft eine Membranvakuumpumpe mit wenigstens einer Membranpumpstufe, wenigstens einem der Membranpumpstufe zugeordneten Einlassventil für ein zu förderndes Prozessgas und wenigstens einem Gasballastventil zur Zuführung eines Ballastgases, wobei der durch das Gasballastventil führende Strömungsweg für das Ballastgas in Strömungsrichtung des Prozessgases hinter dem Einlassventil in den Strömungsweg für das Prozessgas mündet.
EP14171516.9A 2013-07-05 2014-06-06 Membranvakuumpumpe Active EP2821650B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310213257 DE102013213257A1 (de) 2013-07-05 2013-07-05 Membranvakuumpumpe

Publications (3)

Publication Number Publication Date
EP2821650A2 EP2821650A2 (de) 2015-01-07
EP2821650A3 true EP2821650A3 (de) 2015-02-25
EP2821650B1 EP2821650B1 (de) 2020-06-03

Family

ID=50942065

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14171516.9A Active EP2821650B1 (de) 2013-07-05 2014-06-06 Membranvakuumpumpe

Country Status (5)

Country Link
US (1) US20150010409A1 (de)
EP (1) EP2821650B1 (de)
JP (1) JP2015014285A (de)
CN (1) CN104279147A (de)
DE (1) DE102013213257A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10808702B2 (en) * 2015-01-15 2020-10-20 Atlas Copco Airpower, Naamloze Vennootschap Method for controlling a gas supply to a vacuum pump
CN105134567A (zh) * 2015-07-21 2015-12-09 石家庄佳信汽车制动系统有限公司 一种水平对置隔膜式电动真空泵
CN105526128B (zh) * 2016-02-05 2018-11-23 宁波泰尔斯电子实业有限公司 微型真空泵及组合式微型真空泵
CN106286205A (zh) * 2016-10-09 2017-01-04 周纪昌 电子摇摆泵
CN106438305A (zh) * 2016-10-31 2017-02-22 徐林 一种真空泵的解决方案
WO2019107299A1 (ja) * 2017-11-29 2019-06-06 アルバック機工株式会社 真空発生装置
US11873802B2 (en) * 2020-05-18 2024-01-16 Graco Minnesota Inc. Pump having multi-stage gas compression
EP3916225B1 (de) * 2021-09-29 2023-12-13 Pfeiffer Vacuum Technology AG Vakuumpumpe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29618911U1 (de) * 1996-10-30 1996-12-19 Dekema Dental Keramikoefen Gmb Pumpenanordnung
EP0931939A2 (de) * 1997-12-24 1999-07-28 VARIAN S.p.A. Vakuumpumpe
WO2001083990A1 (de) * 2000-05-03 2001-11-08 Knf Neuberger Gmbh Vorrichtung zum fördern feuchter gase
US6595758B1 (en) * 1998-11-10 2003-07-22 Knf Neuberger Gmbh Method for conveying damp gases by means of a conveyor device and a conveyor device for carrying out said method
DE10255792A1 (de) * 2002-11-28 2004-06-17 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4936758A (en) * 1987-08-10 1990-06-26 Aci Medical, Inc. Diaphragm pump
JP2767127B2 (ja) * 1989-03-23 1998-06-18 株式会社大阪真空機器製作所 真空ポンプシステム
DE9305554U1 (de) * 1993-04-15 1993-06-17 Knf-Neuberger Gmbh, 7800 Freiburg, De
JPH08109905A (ja) * 1994-10-13 1996-04-30 Nippondenso Co Ltd 多段ストロークシリンダ制御装置とそれを用いた自動変速機用油圧制御装置
JP3358394B2 (ja) * 1995-06-26 2002-12-16 株式会社島津製作所 ヘリウムリークディテクタ
JP2002115676A (ja) * 2000-10-12 2002-04-19 Hitachi Koki Co Ltd オイルフリースクロール形真空ポンプ
JP2007107798A (ja) * 2005-10-13 2007-04-26 Chugoku Electric Power Co Inc:The 電気給湯システム
JP2013108670A (ja) * 2011-11-21 2013-06-06 Daikin Industries Ltd 空気調和装置の室外機
JP5512835B2 (ja) * 2013-01-23 2014-06-04 株式会社吉田製作所 歯科用医療機器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29618911U1 (de) * 1996-10-30 1996-12-19 Dekema Dental Keramikoefen Gmb Pumpenanordnung
EP0931939A2 (de) * 1997-12-24 1999-07-28 VARIAN S.p.A. Vakuumpumpe
US6595758B1 (en) * 1998-11-10 2003-07-22 Knf Neuberger Gmbh Method for conveying damp gases by means of a conveyor device and a conveyor device for carrying out said method
WO2001083990A1 (de) * 2000-05-03 2001-11-08 Knf Neuberger Gmbh Vorrichtung zum fördern feuchter gase
DE10255792A1 (de) * 2002-11-28 2004-06-17 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem

Also Published As

Publication number Publication date
JP2015014285A (ja) 2015-01-22
DE102013213257A1 (de) 2015-01-08
US20150010409A1 (en) 2015-01-08
CN104279147A (zh) 2015-01-14
EP2821650B1 (de) 2020-06-03
EP2821650A2 (de) 2015-01-07

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