EP2821650A3 - Pompe sous vide à membrane - Google Patents
Pompe sous vide à membrane Download PDFInfo
- Publication number
- EP2821650A3 EP2821650A3 EP20140171516 EP14171516A EP2821650A3 EP 2821650 A3 EP2821650 A3 EP 2821650A3 EP 20140171516 EP20140171516 EP 20140171516 EP 14171516 A EP14171516 A EP 14171516A EP 2821650 A3 EP2821650 A3 EP 2821650A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas
- vacuum pump
- ballast
- membrane vacuum
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 abstract 3
- 238000005086 pumping Methods 0.000 abstract 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
- F04B45/027—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
- F04B49/03—Stopping, starting, unloading or idling control by means of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/04—Draining
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013213257.3A DE102013213257B4 (de) | 2013-07-05 | 2013-07-05 | Membranvakuumpumpe mit Gasballastventil und Pumpenanordnung |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2821650A2 EP2821650A2 (fr) | 2015-01-07 |
EP2821650A3 true EP2821650A3 (fr) | 2015-02-25 |
EP2821650B1 EP2821650B1 (fr) | 2020-06-03 |
Family
ID=50942065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14171516.9A Active EP2821650B1 (fr) | 2013-07-05 | 2014-06-06 | Pompe sous vide à membrane |
Country Status (5)
Country | Link |
---|---|
US (1) | US20150010409A1 (fr) |
EP (1) | EP2821650B1 (fr) |
JP (1) | JP2015014285A (fr) |
CN (1) | CN104279147A (fr) |
DE (1) | DE102013213257B4 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2972639C (fr) * | 2015-01-15 | 2020-01-28 | Atlas Copco Airpower, Naamloze Vennootschap | Methode de controle d'un approvisionnement en gaz a une pompe a vide |
CN105134567A (zh) * | 2015-07-21 | 2015-12-09 | 石家庄佳信汽车制动系统有限公司 | 一种水平对置隔膜式电动真空泵 |
CN105526128B (zh) * | 2016-02-05 | 2018-11-23 | 宁波泰尔斯电子实业有限公司 | 微型真空泵及组合式微型真空泵 |
CN106286205A (zh) * | 2016-10-09 | 2017-01-04 | 周纪昌 | 电子摇摆泵 |
CN106438305A (zh) * | 2016-10-31 | 2017-02-22 | 徐林 | 一种真空泵的解决方案 |
KR102318140B1 (ko) * | 2017-11-29 | 2021-10-26 | 울박 키코 인코포레이션 | 진공 발생장치 |
US11873802B2 (en) * | 2020-05-18 | 2024-01-16 | Graco Minnesota Inc. | Pump having multi-stage gas compression |
EP3916225B1 (fr) * | 2021-09-29 | 2023-12-13 | Pfeiffer Vacuum Technology AG | Pompe à vide |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29618911U1 (de) * | 1996-10-30 | 1996-12-19 | Dekema Dental-Keramiköfen GmbH, 83395 Freilassing | Pumpenanordnung |
EP0931939A2 (fr) * | 1997-12-24 | 1999-07-28 | VARIAN S.p.A. | Pompe à vide |
WO2001083990A1 (fr) * | 2000-05-03 | 2001-11-08 | Knf Neuberger Gmbh | Dispositif pour convoyer des gaz humides |
US6595758B1 (en) * | 1998-11-10 | 2003-07-22 | Knf Neuberger Gmbh | Method for conveying damp gases by means of a conveyor device and a conveyor device for carrying out said method |
DE10255792A1 (de) * | 2002-11-28 | 2004-06-17 | Vacuubrand Gmbh + Co Kg | Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4936758A (en) * | 1987-08-10 | 1990-06-26 | Aci Medical, Inc. | Diaphragm pump |
JP2767127B2 (ja) * | 1989-03-23 | 1998-06-18 | 株式会社大阪真空機器製作所 | 真空ポンプシステム |
DE4037524A1 (de) | 1990-11-26 | 1992-05-27 | Leybold Ag | Lecksuchgeraet |
DE9305554U1 (de) | 1993-04-15 | 1993-06-17 | KNF-Neuberger GmbH, 7800 Freiburg | Zweifach-Verdrängerpumpe |
JPH08109905A (ja) * | 1994-10-13 | 1996-04-30 | Nippondenso Co Ltd | 多段ストロークシリンダ制御装置とそれを用いた自動変速機用油圧制御装置 |
JP3358394B2 (ja) * | 1995-06-26 | 2002-12-16 | 株式会社島津製作所 | ヘリウムリークディテクタ |
JP2002115676A (ja) * | 2000-10-12 | 2002-04-19 | Hitachi Koki Co Ltd | オイルフリースクロール形真空ポンプ |
JP2007107798A (ja) * | 2005-10-13 | 2007-04-26 | Chugoku Electric Power Co Inc:The | 電気給湯システム |
JP2013108670A (ja) * | 2011-11-21 | 2013-06-06 | Daikin Industries Ltd | 空気調和装置の室外機 |
JP5512835B2 (ja) * | 2013-01-23 | 2014-06-04 | 株式会社吉田製作所 | 歯科用医療機器 |
-
2013
- 2013-07-05 DE DE102013213257.3A patent/DE102013213257B4/de active Active
-
2014
- 2014-06-06 EP EP14171516.9A patent/EP2821650B1/fr active Active
- 2014-06-23 JP JP2014127871A patent/JP2015014285A/ja active Pending
- 2014-07-01 US US14/320,750 patent/US20150010409A1/en not_active Abandoned
- 2014-07-07 CN CN201410321520.2A patent/CN104279147A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29618911U1 (de) * | 1996-10-30 | 1996-12-19 | Dekema Dental-Keramiköfen GmbH, 83395 Freilassing | Pumpenanordnung |
EP0931939A2 (fr) * | 1997-12-24 | 1999-07-28 | VARIAN S.p.A. | Pompe à vide |
US6595758B1 (en) * | 1998-11-10 | 2003-07-22 | Knf Neuberger Gmbh | Method for conveying damp gases by means of a conveyor device and a conveyor device for carrying out said method |
WO2001083990A1 (fr) * | 2000-05-03 | 2001-11-08 | Knf Neuberger Gmbh | Dispositif pour convoyer des gaz humides |
DE10255792A1 (de) * | 2002-11-28 | 2004-06-17 | Vacuubrand Gmbh + Co Kg | Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem |
Also Published As
Publication number | Publication date |
---|---|
DE102013213257B4 (de) | 2024-09-19 |
CN104279147A (zh) | 2015-01-14 |
EP2821650B1 (fr) | 2020-06-03 |
DE102013213257A1 (de) | 2015-01-08 |
US20150010409A1 (en) | 2015-01-08 |
JP2015014285A (ja) | 2015-01-22 |
EP2821650A2 (fr) | 2015-01-07 |
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