EP2631488A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2631488A3
EP2631488A3 EP12188584.2A EP12188584A EP2631488A3 EP 2631488 A3 EP2631488 A3 EP 2631488A3 EP 12188584 A EP12188584 A EP 12188584A EP 2631488 A3 EP2631488 A3 EP 2631488A3
Authority
EP
European Patent Office
Prior art keywords
pumping stage
stage
molecular
pump
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12188584.2A
Other languages
German (de)
French (fr)
Other versions
EP2631488B1 (en
EP2631488A2 (en
Inventor
Aleksandr Dr. Ing. Shirinov
Tobias Dipl. Ing. Stoll
Michael Dipl. Ing. Schweighöfer
Jan Dipl. Phys. Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2013022216A priority Critical patent/JP6027455B2/en
Priority to US13/766,918 priority patent/US9422937B2/en
Publication of EP2631488A2 publication Critical patent/EP2631488A2/en
Publication of EP2631488A3 publication Critical patent/EP2631488A3/en
Application granted granted Critical
Publication of EP2631488B1 publication Critical patent/EP2631488B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00—Axial-flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer molekularen Pumpstufe (12), insbesondere einer Holweckstufe, welche ein Rotororgan (34) umfasst, das die pumpaktive Fläche (50) der molekularen Pumpstufe (12) bildet, und mit wenigstens einer stromabwärts der molekularen Pumpstufe angeordneten Seitenkanalpumpstufe (18), welche mehrere Rotorelemente (48) umfasst, wobei die Rotorelemente der Seitenkanalpumpstufe von dem Rotororgan (34) der molekularen Pumpstufe getragen sind. Die Seitenkanalpumpstufe (18) kann ferner zwischen einem Pumpeneinlass (24) und der molekularen Pumpstufe (12, 14, 116, 118) angeordnet sein.

Figure imgaf001
The invention relates to a vacuum pump with at least one molecular pump stage (12), in particular a Holweck stage, which comprises a rotor member (34) forming the pump active surface (50) of the molecular pumping stage (12), and arranged with at least one downstream of the molecular pumping stage A side channel pumping stage (18) comprising a plurality of rotor elements (48), wherein the rotor elements of the side channel pumping stage are carried by the rotor member (34) of the molecular pumping stage. The side channel pumping stage (18) may further be disposed between a pump inlet (24) and the molecular pumping stage (12, 14, 116, 118).
Figure imgaf001
EP12188584.2A 2012-02-23 2012-10-15 Vacuum pump Active EP2631488B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013022216A JP6027455B2 (en) 2012-02-23 2013-02-07 Vacuum pump
US13/766,918 US9422937B2 (en) 2012-02-23 2013-02-14 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012003680A DE102012003680A1 (en) 2012-02-23 2012-02-23 vacuum pump

Publications (3)

Publication Number Publication Date
EP2631488A2 EP2631488A2 (en) 2013-08-28
EP2631488A3 true EP2631488A3 (en) 2016-08-17
EP2631488B1 EP2631488B1 (en) 2019-12-11

Family

ID=47049045

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12188584.2A Active EP2631488B1 (en) 2012-02-23 2012-10-15 Vacuum pump

Country Status (4)

Country Link
US (1) US9422937B2 (en)
EP (1) EP2631488B1 (en)
JP (1) JP6027455B2 (en)
DE (1) DE102012003680A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013005458U1 (en) * 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE202013006436U1 (en) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotor element for a vacuum pump
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump
DE102014118881A1 (en) * 2014-12-17 2016-06-23 Pfeiffer Vacuum Gmbh vacuum pump
SG11201708740XA (en) * 2015-06-08 2017-11-29 Leybold Gmbh Vacuum-pump rotor
EP3267040B1 (en) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolecular pump
JP7108377B2 (en) * 2017-02-08 2022-07-28 エドワーズ株式会社 Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods
CN107143506B (en) * 2017-07-12 2019-05-24 东北大学 A kind of Multi-stage high-vacuum dry pump
EP3623634B1 (en) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vacuum pump comprising a holweck pump stage and two side channel pump stages

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264196A (en) * 1989-04-04 1990-10-26 Hitachi Ltd Turbine vacuum pump
JP2002332990A (en) * 2001-05-09 2002-11-22 Shimadzu Corp Turbo-type rotating machine
JP2006090263A (en) * 2004-09-27 2006-04-06 Boc Edwards Kk Vacuum pump
WO2006048602A2 (en) * 2004-11-01 2006-05-11 The Boc Group Plc Pumping arrangement
JP2006342791A (en) * 2005-05-13 2006-12-21 Boc Edwards Kk Vacuum pump
DE60319585T2 (en) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley VACUUM PUMP

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020969A (en) 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
GB9609281D0 (en) 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (en) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gas friction pump
JPH11131198A (en) 1997-10-30 1999-05-18 Daido Steel Co Ltd Low-friction sintered member and its production
JP3252792B2 (en) * 1998-04-27 2002-02-04 株式会社島津製作所 Turbo vacuum pump
JP4579356B2 (en) * 1999-03-24 2010-11-10 株式会社島津製作所 Vacuum exhaust device
JP3961273B2 (en) 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 Vacuum pump
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
DE102009021620B4 (en) * 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump
FR2980776B1 (en) 2011-10-03 2014-08-22 Airbus Operations Sas AIRCRAFT NACELLE COMPRISING A PANEL FOR ACOUSTIC TREATMENT INTEGRATING HOT AIR CHANNELS AND AT LEAST ONE ANNULAR CHANNEL
DE202013005458U1 (en) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264196A (en) * 1989-04-04 1990-10-26 Hitachi Ltd Turbine vacuum pump
JP2002332990A (en) * 2001-05-09 2002-11-22 Shimadzu Corp Turbo-type rotating machine
DE60319585T2 (en) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley VACUUM PUMP
JP2006090263A (en) * 2004-09-27 2006-04-06 Boc Edwards Kk Vacuum pump
WO2006048602A2 (en) * 2004-11-01 2006-05-11 The Boc Group Plc Pumping arrangement
JP2006342791A (en) * 2005-05-13 2006-12-21 Boc Edwards Kk Vacuum pump

Also Published As

Publication number Publication date
JP2013174238A (en) 2013-09-05
EP2631488B1 (en) 2019-12-11
EP2631488A2 (en) 2013-08-28
US20130224001A1 (en) 2013-08-29
JP6027455B2 (en) 2016-11-16
DE102012003680A1 (en) 2013-08-29
US9422937B2 (en) 2016-08-23

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