EP2706237A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2706237A3
EP2706237A3 EP13175496.2A EP13175496A EP2706237A3 EP 2706237 A3 EP2706237 A3 EP 2706237A3 EP 13175496 A EP13175496 A EP 13175496A EP 2706237 A3 EP2706237 A3 EP 2706237A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
rotor
rotor shaft
pump
active components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13175496.2A
Other languages
German (de)
French (fr)
Other versions
EP2706237A2 (en
EP2706237B1 (en
Inventor
Robert Watz
Bernhard Tatzber
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2706237A2 publication Critical patent/EP2706237A2/en
Publication of EP2706237A3 publication Critical patent/EP2706237A3/en
Application granted granted Critical
Publication of EP2706237B1 publication Critical patent/EP2706237B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/36—Retaining components in desired mutual position by a form fit connection, e.g. by interlocking

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer Gaseintrittsöffnung und wenigstens einer Gasaustrittsöffnung, wobei die Vakuumpumpe wenigstens eine Rotorwelle aufweist, an der wenigstens ein Rotor mit rotierenden pumpaktiven Bauteilen, welche stehenden pumpaktiven Bauteilen gegenüber stehen, mit wenigstens einem in axialer Richtung zentral in oder an der Rotorwelle angeordneten Befestigungselement befestigt ist, wobei der wenigstens eine Rotor und die Rotorwelle zusätzlich zu dem wenigstens einen Befestigungselement eine Verdrehsicherung aufweisen.

Figure imgaf001
The invention relates to a vacuum pump having at least one gas inlet opening and at least one gas outlet opening, wherein the vacuum pump has at least one rotor shaft on which at least one rotor with rotating pump-active components, which standing pump-active components facing with at least one in the axial direction centrally in or on the Rotor shaft arranged fastener is attached, wherein the at least one rotor and the rotor shaft in addition to the at least one fastening element have a rotation.
Figure imgaf001
EP13175496.2A 2012-09-10 2013-07-08 Vacuum pump Active EP2706237B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012108394.0A DE102012108394A1 (en) 2012-09-10 2012-09-10 vacuum pump

Publications (3)

Publication Number Publication Date
EP2706237A2 EP2706237A2 (en) 2014-03-12
EP2706237A3 true EP2706237A3 (en) 2015-07-29
EP2706237B1 EP2706237B1 (en) 2019-07-10

Family

ID=48747427

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13175496.2A Active EP2706237B1 (en) 2012-09-10 2013-07-08 Vacuum pump

Country Status (4)

Country Link
US (1) US9453514B2 (en)
EP (1) EP2706237B1 (en)
JP (1) JP5706483B2 (en)
DE (1) DE102012108394A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6252336B2 (en) * 2014-04-23 2017-12-27 株式会社島津製作所 Vacuum pump
CN104019057B (en) * 2014-05-26 2016-08-24 河南众力空分设备有限公司 A kind of cantilever type impeller and the transmission joint of power transmission shaft
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
US10808712B2 (en) 2018-03-22 2020-10-20 Raytheon Technologies Corporation Interference fit with high friction material
IT201800007964A1 (en) * 2018-08-08 2018-11-08 Agilent Technologies Inc A Delaware Corp Rotary vacuum pump and method for its balancing
GB202018692D0 (en) * 2020-11-27 2021-01-13 Lm Wp Patent Holding As A mechanism for restraining movement of a locking pin

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000205183A (en) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd Turbo-molecular pump
US20090311113A1 (en) * 2006-03-02 2009-12-17 Nathan Lee Kettlewell Rotor Assembly
DE102010040288A1 (en) * 2010-09-06 2012-03-08 Siemens Aktiengesellschaft Rotor for radial flow machine, has intermediate element that is arranged between symmetric surface of shaft and impeller
JP2012127326A (en) * 2010-12-17 2012-07-05 Shimadzu Corp Vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194083A (en) * 2003-09-16 2006-07-27 Boc Edwards Kk Fixing structure of rotor shaft and rotor and turbo-molecular pump having the fixing structure
DE202005019644U1 (en) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings
JP2008286179A (en) * 2007-05-21 2008-11-27 Ebara Corp Turbo type vacuum pump, and semiconductor manufacturing device equipped therewith
JP5704157B2 (en) * 2010-02-16 2015-04-22 株式会社島津製作所 Vacuum pump
WO2012077411A1 (en) 2010-12-10 2012-06-14 エドワーズ株式会社 Vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000205183A (en) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd Turbo-molecular pump
US20090311113A1 (en) * 2006-03-02 2009-12-17 Nathan Lee Kettlewell Rotor Assembly
DE102010040288A1 (en) * 2010-09-06 2012-03-08 Siemens Aktiengesellschaft Rotor for radial flow machine, has intermediate element that is arranged between symmetric surface of shaft and impeller
JP2012127326A (en) * 2010-12-17 2012-07-05 Shimadzu Corp Vacuum pump

Also Published As

Publication number Publication date
US9453514B2 (en) 2016-09-27
US20140072408A1 (en) 2014-03-13
JP2014051969A (en) 2014-03-20
DE102012108394A1 (en) 2014-03-13
JP5706483B2 (en) 2015-04-22
EP2706237A2 (en) 2014-03-12
EP2706237B1 (en) 2019-07-10

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